CN102890164A - Three-dimensional six-parameter piezoelectric accelerometer with self-check function - Google Patents
Three-dimensional six-parameter piezoelectric accelerometer with self-check function Download PDFInfo
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- CN102890164A CN102890164A CN2012103980765A CN201210398076A CN102890164A CN 102890164 A CN102890164 A CN 102890164A CN 2012103980765 A CN2012103980765 A CN 2012103980765A CN 201210398076 A CN201210398076 A CN 201210398076A CN 102890164 A CN102890164 A CN 102890164A
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Abstract
The invention discloses a three-dimensional six-parameter piezoelectric accelerometer with a self-check function. The accelerometer comprises a substrate, wherein an X-direction module, a Y-direction module and a Z-direction module for vibration in the X direction, the Y direction and the Z direction of a detection line are arranged in the substrate, respectively; each module is provided with a high-frequency detection module and a low-frequency detection module; each of the high-frequency detection module and the low-frequency detection module is provided with a self-checking crystal plate and the self-checking crystal plate is connected with a self-checking conducting piece; all high-frequency output terminals and low-frequency output terminals are connected with six independent signal conditioning modules, respectively; and the six independent signal conditioning modules and the self-checking conducting pieces are led out to a socket on the substrate through a shielding cable. The piezoelectric accelerometer employing the technical scheme is capable of providing the vibration source and achieves the function of simulating the actual working state as the self-checking crystal plates are embedded; therefore, the condition f whether the high-frequency detection module and the low-frequency detection module are capable of working normally or not can be detected; and signals are output at high and low frequencies so that the provided signals are quire accurate.
Description
Technical field
The present invention relates to piezoelectric accelerometer, relate in particular to a kind of three-dimensional six parameter piezoelectric accelerometers with self-checking function that the low-and high-frequency signal of three-dimensional can be provided simultaneously.
Background technology
Mainly there is following problem in traditional piezoelectric accelerometer:
The conventional three-dimensional piezoelectric accelerometer can only be tested the vibration parameters of three directions, does not possess simultaneously to begin to test respectively three-dimensional high frequency, low frequency signal from the sensitivity end;
Whether traditional piezoelectric accelerometer does not possess from the sensitivity end and begins self check to allomeric function, cause to be installed in on-the-spot accelerometer and to break down and can't detect;
Traditional piezoelectric accelerometer inside does not possess the low-pass filter up to the 45dB decay of adjustable cutoff frequency.
Raising along with the requirement of vibration-testing field, high and low frequency signal to vibration adopts respectively the sensing unit of different sensitivity and frequency range to carry out multiparameter output, whether the duty of sense acceleration meter and whole test macro is normal at any time simultaneously, just becoming day by day urgent.
Summary of the invention
The objective of the invention is the deficiency for the prior art existence, a kind of microstructure is provided, have self-checking function, the three-dimensional six parameter piezoelectric accelerometers with self-checking function of three-dimensional high frequency, low frequency signal are provided simultaneously.
For achieving the above object, the present invention adopts following technical scheme:
A kind of three-dimensional six parameter piezoelectric accelerometers with self-checking function, comprise matrix, in matrix, be respectively arranged with for detection of the line X-direction, the X-direction module of Y-direction and Z-direction vibration, Y-direction module and Z-direction module, each module is provided with high-frequency detection module and low frequency detection module, described high-frequency detection module comprises the screw rod that is socketed with insulation sleeve, end at screw rod is provided with nut, mass, the self check crystal wafer, high-frequency crystal sheet and high frequency output terminal, described low frequency detection module comprises the screw rod that is socketed with insulation sleeve, screw rod one end is provided with nut, mass, the self check crystal wafer, low frequency crystal wafer and low frequency lead-out terminal, the self check crystal wafer is connected with the self check conducting strip; All high frequency output terminals are connected with the low frequency lead-out terminal with six road independent signal conditioning module and are connected, six road independent signal conditioning module and self check conducting strip are drawn out to socket on the matrix by shielded cable, the shielding box body that described X-direction module, Y-direction module and Z-direction module arranged outside have inner cap and base to consist of, being installed on the base of the screw rod other end.In matrix, be respectively arranged with X-direction module, Y-direction module and Z-direction module for detection of line X-direction, Y-direction and Z-direction vibration, the vibration signal of three-dimensional can be provided like this; Each module is provided with high-frequency detection module and low frequency detection module, and high-frequency vibration signal and the low-frequency vibration signal of three directions can be provided so simultaneously; X-direction module, Y-direction module and Z-direction module are respectively arranged with the self check crystal wafer, the self check crystal wafer is connected with the self check conducting strip, utilize the inverse piezoelectric effect of self check crystal wafer, when loading self-test signal, realize its deformation, to produce corresponding vibration signal, the oneself can provide vibration source, reaches the function of simulation actual working state, thereby whether detection high-frequency detection module and low frequency detection module can work; X-direction module, Y-direction module and Z-direction module are fixed on by screw rod on the base of shielding box body, isolation design, and X-direction module, Y-direction module and Z-direction module are independent of respectively the shielding box body, are independent of matrix; Make the shielding box body form an effective shield, improve interference free performance.
Two screw coaxial settings of described X-direction module, two screw coaxial settings of Y-direction module, X-direction module and Y-direction module are arranged in the same shielding box body, the vertical setting of screw rod of X-direction module and Y-direction module.
Two screw rods of described Z-direction module are set to one.High-frequency crystal sheet and low frequency crystal wafer utilize the direct piezo electric effect of piezoelectric crystal plate, its sensitive axes and its polaxis are consistent, when the vibration of experiencing this direction, isolate between high-frequency detection module and the low frequency detection module, and determine its quantity and sensitivity according to test volume, experiencing the vibration signal of different directions, different frequency, and convert this signal to electric signal.
Described shielding box body is fixed in the matrix by volution, is provided with spacer between the bottom that shields box body and matrix.Spacer has guaranteed that further X-direction module, Y-direction module and Z-direction module are better shielded, and improves interference free performance.
Described six road independent signal conditioning module comprise X-direction high-frequency signal processing module, Y-direction high-frequency signal processing module, Z-direction high-frequency signal processing module, X-direction low-frequency signal processing module, Y-direction low-frequency signal processing module and Z-direction low-frequency signal processing module.
Described X-direction high-frequency signal processing module, Y-direction high-frequency signal processing module, Z-direction high-frequency signal processing module, X-direction low-frequency signal processing module, Y-direction low-frequency signal processing module and Z-direction low-frequency signal processing module include impedance inverter circuit, high pass circuit, amplifying circuit, adjustable high-order low-pass filter circuit, bias adjustment circuit.By independently impedance inverter circuit, high pass circuit, amplifying circuit, adjustable high-order low-pass filter circuit, bias adjustment circuit, the charge signal that transformation circuit is exported high frequency output terminal and the low frequency lead-out terminal of high resistant converts the voltage signal of low-resistance to, high pass circuit is set with the garbage signal of filtering low frequency, and signal condition is arrived corresponding amplitude; Adjustable adjustable high-order low-pass filter circuit can be with useless high frequency signal attenuation to minimum degree, to guarantee the quality of signal; Bias adjustment circuit can be adjusted to output signal in the follow-up test macro.
Compare with background technology, the three-dimensional six parameter piezoelectric accelerometers of band self-checking function of the present invention embed the self check crystal wafer, and the oneself can provide vibration source, reach the function of simulation actual working state, thereby whether detection high-frequency detection module and low frequency detection module can work; Low-and high-frequency is output signal respectively, can be according to the frequency content of actual signal, and the difference processing signals, the signal to noise ratio (S/N ratio) that signal is exported is accomplished very high, makes the signal that provides more accurate; X-direction module, Y-direction module and Z-direction module are fixed on by screw rod on the base of shielding box, and isolation design makes X-direction module, Y-direction module and Z-direction module be independent of respectively the shielding box body, is independent of matrix; Make the shielding box body form an effective shield, improve interference free performance; Integrated three-dimensional oppositely, low-and high-frequency six parameter measurements and be with self check, signal to process, make the function of whole product obtain Highgrade integration, microminiaturization; Not only powerful, cost also be effectively controlled, extremely easy to use, and detect and judge the foundation that provides strong for online.
Description of drawings
Fig. 1 is external structure synoptic diagram of the present invention.
Fig. 2 is inner structure synoptic diagram of the present invention.
Fig. 3 is the side view of Fig. 2.
Fig. 4 theory diagram of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the present invention, should understand these embodiments only is used for explanation the present invention and is not used in and limits the scope of the invention, after having read the present invention, those skilled in the art all fall within the application's claims limited range to the modification of the various equivalent form of values of the present invention.
The invention discloses a kind of three-dimensional six parameter piezoelectric accelerometers with self-checking function.
Such as Fig. 1, Fig. 2 and shown in Figure 3, a kind of three-dimensional six parameter piezoelectric accelerometers with self-checking function, comprise matrix 100, in matrix 100, be provided with two shielding box bodys 1, comprise inner cap 11 and base 12 for the shielding box body, cooperate by clamping between inner cap and the base, base 12 is installed in the matrix by bolt 5, spacer 6 is installed between base and matrix, one shields X-direction module 101 and the Y-direction module 102 that is equipped with in the box body for detection of line X-direction and Y-direction vibration therein, and the Z-direction module 103 for detection of the line Z-direction is installed in another shielding box body;
X-direction module, Y-direction module and Z-direction module are provided with high-frequency detection module 2 and low frequency detection module 3, utilize base 12 intervals to arrange between high-frequency detection module 2 and the low frequency detection module 3;
Described high-frequency detection module 2 comprises the screw rod 21 that is socketed with insulation sleeve 27, end at screw rod is provided with nut 22, mass 23, self check crystal wafer 24, high-frequency crystal sheet 25 and high frequency output terminal 26, the other end of screw rod is installed in the base 12, under the effect of nut successively with mass 23, self check crystal wafer 24, high-frequency crystal sheet 25 and high frequency output terminal 26 are installed on the base, described low frequency detection module 3 comprises the screw rod 31 that is socketed with insulation sleeve 37, screw rod one end is provided with nut 32, mass 33, self check crystal wafer 34, low frequency crystal wafer 35 and low frequency lead-out terminal 36, the other end of screw rod is installed in the base 12, under the effect of nut successively with mass 33, self check crystal wafer 34, low frequency crystal wafer 35 and low frequency lead-out terminal 36 are installed on the base, self check crystal wafer 24,34 are connected with self check conducting strip 4;
All high frequency output terminals 26 and low frequency lead-out terminal 36 are connected on six road independent signal conditioning module, and six road independent signal conditioning module and self check conducting strip are drawn out to socket 104 on the matrix by shielded cable; Two screw coaxials of the high-frequency detection module 2 of X-direction module and low frequency detection module 3 are installed on the base 12,3 two screw coaxial settings of the high-frequency detection module 2 of Y-direction module and low frequency detection module, the vertical setting of screw rod of X-direction module and Y-direction module, two screw rods of described Z-direction module are set to one;
Described six road independent signal conditioning module comprise the X-direction high-frequency signal processing module, the Y-direction high-frequency signal processing module, the Z-direction high-frequency signal processing module, X-direction low-frequency signal processing module, Y-direction low-frequency signal processing module and Z-direction low-frequency signal processing module, described X-direction high-frequency signal processing module, the Y-direction high-frequency signal processing module, the Z-direction high-frequency signal processing module, X-direction low-frequency signal processing module, Y-direction low-frequency signal processing module and Z-direction low-frequency signal processing module include impedance inverter circuit, high pass circuit, amplifying circuit, adjustable high-order low-pass filter circuit, bias adjustment circuit.
X-direction module, Y-direction module and Z-direction module provide respectively the vibration signal of three-dimensional; Each module is provided with high-frequency detection module and low frequency detection module, and high-frequency vibration signal and the low-frequency vibration signal of three directions can be provided so simultaneously; X-direction module, Y-direction module and Z-direction module are respectively arranged with the self check crystal wafer, the self check crystal wafer is connected with the self check conducting strip, utilize the inverse piezoelectric effect of self check crystal wafer, when loading self-test signal, realize its deformation, to produce corresponding vibration signal, the oneself can provide vibration source, reaches the function of simulation actual working state, thereby whether detection high-frequency detection module and low frequency detection module can work; X-direction module, Y-direction module and Z-direction module are fixed on by screw rod on the base of shielding box body, isolation design, and X-direction module, Y-direction module and Z-direction module are independent of respectively the shielding box body, are independent of matrix; Make the shielding box body form an effective shield, improve interference free performance; High-frequency crystal sheet and low frequency crystal wafer utilize the direct piezo electric effect of piezoelectric crystal plate, its sensitive axes and its polaxis are consistent, when the vibration of experiencing this direction, isolate between high-frequency detection module and the low frequency detection module, and determine its quantity and sensitivity according to test volume, experiencing the vibration signal of different directions, different frequency, and convert this signal to electric signal.
As shown in Figure 4, to detect the X-direction signal as example, the testing process of the three-dimensional six parameter piezoelectric accelerometers with self-checking function of the present invention is described, X-direction self check input, whether detect the X-direction module can work, in the situation that can work, the high-frequency detection module of X-direction module and low frequency detection module detect vibration, high-frequency crystal sheet and low frequency crystal wafer are converted into charge signal with vibration signal, impedance inverter circuit converts the charge signal of high resistant to the voltage signal of low-resistance, high pass circuit carries out the high-pass filtering gain and adjusts, signal condition is arrived corresponding amplitude, adjustable high-order low-pass filter circuit carries out high-order lowpass filtering, and bias adjustment circuit carries out bias adjustment signal output, thereby with the high frequency of X-direction, low-frequency vibration signal output.
Claims (6)
1. three-dimensional six parameter piezoelectric accelerometers with self-checking function, comprise matrix, it is characterized in that: in matrix, be respectively arranged with for detection of the line X-direction, the X-direction module of Y-direction and Z-direction vibration, Y-direction module and Z-direction module, each module is provided with high-frequency detection module and low frequency detection module, described high-frequency detection module comprises the screw rod that is socketed with insulation sleeve, end at screw rod is provided with nut, mass, the self check crystal wafer, high-frequency crystal sheet and high frequency output terminal, described low frequency detection module comprises the screw rod that is socketed with insulation sleeve, screw rod one end is provided with nut, mass, the self check crystal wafer, low frequency crystal wafer and low frequency lead-out terminal, the self check crystal wafer is connected with the self check conducting strip; All high frequency output terminals are connected with the low frequency lead-out terminal with six road independent signal conditioning module and are connected, six road independent signal conditioning module and self check conducting strip are drawn out to socket on the matrix by shielded cable, the shielding box body that described X-direction module, Y-direction module and Z-direction module arranged outside have inner cap and base to consist of, being installed on the base of the screw rod other end.
2. three-dimensional six component piezoelectric accelerometers with self-checking function according to claim 1, it is characterized in that: two screw coaxial settings of described X-direction module, two screw coaxial settings of Y-direction module, X-direction module and Y-direction module are arranged in the same shielding box body, the vertical setting of screw rod of X-direction module and Y-direction module.
3. three-dimensional six parameter piezoelectric accelerometers with self-checking function according to claim 1, it is characterized in that: two screw rods of described Z-direction module are set to one.
4. according to claim 1,2 or 3 described three-dimensional six parameter piezoelectric accelerometers with self-checking function, it is characterized in that: described shielding box body is fixed in the matrix by volution, is provided with spacer between the shielding bottom of box body and matrix.
5. three-dimensional six parameter piezoelectric accelerometers with self-checking function according to claim 1, it is characterized in that: described six road independent signal conditioning module comprise X-direction high-frequency signal processing module, Y-direction high-frequency signal processing module, Z-direction high-frequency signal processing module, X-direction low-frequency signal processing module, Y-direction low-frequency signal processing module and Z-direction low-frequency signal processing module.
6. three-dimensional six parameter piezoelectric accelerometers with self-checking function according to claim 5, it is characterized in that: described X-direction high-frequency signal processing module, Y-direction high-frequency signal processing module, Z-direction high-frequency signal processing module, X-direction low-frequency signal processing module, Y-direction low-frequency signal processing module and Z-direction low-frequency signal processing module include impedance inverter circuit, high pass circuit, amplifying circuit, adjustable high-order low-pass filter circuit, bias adjustment circuit.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109990888A (en) * | 2019-03-25 | 2019-07-09 | 中国科学院长春光学精密机械与物理研究所 | A kind of wide range power measuring mechanism |
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| JPH11118822A (en) * | 1997-10-08 | 1999-04-30 | Hokuriku Electric Ind Co Ltd | Triaxial acceleration sensor |
| CN1904621A (en) * | 2006-08-04 | 2007-01-31 | 重庆大学 | Piezoelectric three dimension acceleration sensor |
| CN1952665A (en) * | 2006-11-08 | 2007-04-25 | 浙江大学 | High distinguishability subnanosecond magnitude optical three-dimensional accelerometer |
| CN202870116U (en) * | 2012-10-18 | 2013-04-10 | 扬州英迈克测控技术有限公司 | Three-dimension six-parameter piezoelectric type acceleration meter with self-check function |
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2012
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH05172840A (en) * | 1991-12-24 | 1993-07-13 | Fujikura Ltd | Piezoelectric vibration sensor |
| JPH0627133A (en) * | 1992-07-10 | 1994-02-04 | Toray Ind Inc | Three dimensional acceleration sensor |
| JPH11118822A (en) * | 1997-10-08 | 1999-04-30 | Hokuriku Electric Ind Co Ltd | Triaxial acceleration sensor |
| CN1904621A (en) * | 2006-08-04 | 2007-01-31 | 重庆大学 | Piezoelectric three dimension acceleration sensor |
| CN1952665A (en) * | 2006-11-08 | 2007-04-25 | 浙江大学 | High distinguishability subnanosecond magnitude optical three-dimensional accelerometer |
| CN202870116U (en) * | 2012-10-18 | 2013-04-10 | 扬州英迈克测控技术有限公司 | Three-dimension six-parameter piezoelectric type acceleration meter with self-check function |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109990888A (en) * | 2019-03-25 | 2019-07-09 | 中国科学院长春光学精密机械与物理研究所 | A kind of wide range power measuring mechanism |
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