CN1904621A - Piezoelectric three dimension acceleration sensor - Google Patents
Piezoelectric three dimension acceleration sensor Download PDFInfo
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- CN1904621A CN1904621A CN 200610095012 CN200610095012A CN1904621A CN 1904621 A CN1904621 A CN 1904621A CN 200610095012 CN200610095012 CN 200610095012 CN 200610095012 A CN200610095012 A CN 200610095012A CN 1904621 A CN1904621 A CN 1904621A
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- pedestal
- wafer
- mounting disc
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- quartz wafer
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Abstract
The invention relates to a piezoelectric type 3D acceleration transducer that includes an isolating base, case, subpanel upper piezoelectric component, insulation spacer and inertia mass block, and signal leading yarn. The piezoelectric component includes four XO degree cut quartz wafer and four YO degree cut quartz wafer. They are installed in four angles and four borders of the wafer locating frame between the isolation spacers. The invention has the advantages of light weight, simple structure, and is easy to manufacture. It has high sensitivity and could conquer the error brought by the alteration of environment.
Description
Technical field
The present invention relates to acceleration transducer, specifically, relate to carry out the piezoelectric acceleration transducer that three-dimensional acceleration is measured.
Background technology
Piezoelectric three dimension acceleration sensor is the vibration or the impact acceleration of three directions of measurement space simultaneously.At present, known piezoelectric three dimension acceleration sensor is mainly taked two kinds of schemes, a kind of is the unidirectional acceleration transducer that has independent output in metal shell by packing into three, and they are vertically mounted on together mutually forms, and the volume of this class sensor and deadweight are all bigger than normal; Another kind is the three-dimensional piezoelectric acceleration sensor of shearing, compression combined type, as shown in Figure 1, it is to be installed on the pedestal after three groups of piezoelectric elements are made up by the mutual mode at an angle of 90 of peak response axle, then after loading onto the inertial mass pretension on the piezoelectric element, housing and pedestal are welded together, but this piezoelectric three dimension acceleration sensor is vibration force hour weak output signals externally, and sensitivity is not high, can't overcome the measuring error that the variation because of environment causes simultaneously.
Summary of the invention
The technology that the present invention will solve is, overcome the deficiency of existing piezoelectric three dimension acceleration sensor, propose a kind of not only simple in structure, in light weight, be easy to processing and manufacturing, its output signal is strong, highly sensitive when external force is less, can also overcome simultaneously a kind of piezoelectric three dimension acceleration sensor of the error of bringing to measurement because of the variation of environment.
Solving the technical scheme that technical matters of the present invention adopts is a kind of like this piezoelectric three dimension acceleration sensor.The aspect identical with existing sensors be, this sensor comprises that pedestal, cover are contained in the housing of the band socket on this pedestal, are fixedly mounted in piezoelectric element, insulation spacer and the inertial mass in the pedestal mounting disc in this housing and are connected piezoelectric element and the signal lead of socket by pretension bolt.Its improvements are, pedestal---the vertical section by this pedestal axis is an I shape to pedestal wherein in order to isolate, last one horizontal stroke of part of I shape is the pedestal mounting disc, this pedestal mounting disc is that its cross section perpendicular to the pedestal axis is a foursquare rectangular parallelepiped, and the pedestal axis is by foursquare center.By being screwed on this pedestal with the pretension bolt of its axis coaxle, on the upper surface of pedestal mounting disc, being fixed with insulation spacer, wafer orientation frame, insulation spacer and an inertial mass from top to bottom successively.Wafer orientation frame wherein also is that its cross section perpendicular to the pedestal axis is a foursquare rectangular parallelepiped, and the pedestal axis is by this foursquare center, and the square sectional of wafer orientation frame equates with the square sectional of pedestal mounting disc.The foursquare installation piezoelectric element wafer orientation hole within it that has equally distributed eight sizes to equate in this wafer orientation frame, the line of centres in each wafer orientation hole are that four limits in square, each wafer orientation hole are all parallel with four limits of wafer orientation frame accordingly.Piezoelectric element of the present invention is a quartz wafer, the installing and locating quartz wafer in four jiaos of pilot holes of heart line therein is X0 ° of cut type quartz wafer, and the peak response axle of these four wafers is all perpendicular to the axial opposed of the peak response axle of the upper surface of pedestal mounting disc and adjacent angular wafer; The quartz wafer of installing and locating in the line of centres four limit midpoint pilot holes is Y0 ° of cut type quartz wafer, and the peak response axle of wherein relative two wafers is coaxial and its direction is opposite.The thickness of each quartz wafer equates and is not less than the thickness of wafer orientation frame; Each quartz wafer is connected with the differential type charge amplifier by signal lead, socket.
When sensor sensing of the present invention when being parallel to the acceleration of pretension bolt direction (be made as Z to), inertial mass in the sensor will produce an inertial force opposite with this acceleration direction, at this moment, reason owing to pretightning force, a pair of wafer is equivalent to tension, another is equivalent to pressurized to wafer, and the result produces the electric charge of positive and negative variation on the surface of two pairs of X0 ° of cut type quartz wafers; When sensor sensing to of the present invention not only perpendicular to the pretension bolt direction, but also perpendicular to a side of wafer orientation frame (be made as X to) or one not only perpendicular to the pretension bolt direction, but also during perpendicular to the acceleration of another side of wafer orientation frame (be made as Y to), this inertial mass will produce one with the opposite inertial force of above-mentioned acceleration direction, so, be positioned on the upper surface of two groups of two Y0 ° of cut type quartz crystal slices in the opposite side mid point pilot hole and also will produce the charge variation of positive charge and negative charge respectively; In like manner, when sensor of the present invention is sensed the acceleration of three directions simultaneously, quartz wafer in eight pilot holes will produce the electric charge of corresponding positive and negative variation, the charge signal of the positive and negative variation that these are different is by each electrode, signal lead, socket, finally be delivered to the differential type charge amplifier, like this, just realized differential measurement to tested three-dimensional acceleration.
The invention has the beneficial effects as follows:
Compare with the piezoelectric three dimension acceleration sensor that existing three the orthogonal unidirectional groups of acceleration sensors with independent output of packing in metal shell become, sensor of the present invention is owing to have only an inertial mass, so in light weight, simple in structure, be easy to processing and manufacturing; Three groups of piezoelectric elements are mutually the sensor that is installed on the pedestal after 90 ° mode makes up by the peak response axle compare with existing, owing to the reason that has adopted the variate mode, its output signal is strong when external force is less, it is highly sensitive, can overcome the error that the variation because of environment brings to measurement.
The present invention is further illustrated below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 is the inner structure sketch in existing a kind of piezoelectric three dimension acceleration sensor;
Fig. 2 is a structure diagram of the present invention;
Fig. 3 is the vertical view of Fig. 2;
Fig. 4 is the wafer orientation frame among Fig. 2 and the installation diagram of quartz wafer thereof;
Fig. 5 is the vertical view of Fig. 4;
Fig. 6 is the structure diagram of a slice quartz wafer among Fig. 4.
Embodiment
A kind of piezoelectric three dimension acceleration sensor (with reference to figure 2,3,4,5).This sensor comprises that pedestal, cover are contained in the housing of the band socket 2 on this pedestal, are fixedly mounted in piezoelectric element, insulation spacer and the inertial mass in the pedestal mounting disc in this housing and are connected piezoelectric element and the signal lead of socket 2 by pretension bolt.Wherein: pedestal---the vertical section by this pedestal axis is an I shape to pedestal 1 in order to isolate, last one horizontal stroke of part of I shape is pedestal mounting disc 11, this pedestal mounting disc 11 is that its cross section perpendicular to the pedestal axis is a foursquare rectangular parallelepiped, and the pedestal axis is by foursquare center.By being screwed on this pedestal 1 with the pretension bolt of its axis coaxle, on the upper surface of pedestal mounting disc 11, being fixed with insulation spacer 4, wafer orientation frame 3, insulation spacer 4 and an inertial mass 6 from top to bottom successively.Wafer orientation frame 3 wherein also is that its cross section perpendicular to the pedestal axis is a foursquare rectangular parallelepiped, and the pedestal axis is by this foursquare center, and the square sectional of wafer orientation frame 3 equates with the square sectional of pedestal mounting disc 11.The foursquare installation piezoelectric element wafer orientation hole within it that has equally distributed eight sizes to equate in this wafer orientation frame 3, the line of centres in each wafer orientation hole are that four limits in square, each wafer orientation hole are all parallel with four limits of wafer orientation frame 3 accordingly.All piezoelectric elements are quartz wafer (81,82,83,84,85,86,87,88), the installing and locating quartz wafer (81,83,85,87) in four jiaos of pilot holes of heart line therein is X0 ° of cut type quartz wafer, and the peak response axle of these four wafers (81,83,85,87) is all perpendicular to the axial opposed of the peak response axle of the upper surface of pedestal mounting disc 11 and adjacent angular wafer; The quartz wafer (82,84,86,88) of installing and locating in the line of centres four limit midpoint pilot holes is Y0 ° of cut type quartz wafer, and the peak response axle of wherein relative two wafers (82 and 86,84 and 88) is coaxial and its direction is opposite (referring to the arrow aspect among Fig. 5); The thickness of all quartz wafers (81,82,83,84,85,86,87,88) equates and is not less than the thickness of wafer orientation frame 3; Each quartz wafer (81,82,83,84,85,86,87,88) is connected with the differential type charge amplifier by signal lead, socket 2.
By the disclosure of above-mentioned embodiment, again in the association schemes to the introduction of the principle of the invention and the explanation of superiority, those skilled in the art can reproduce the present invention fully.So above-mentioned embodiment also is following each routine summation, in following each example, the content identical with this summation do not given unnecessary details.
Embodiment 1 (with reference to figure 4,5,6):
This example is on the basis of summation part, further refinement aspect raising processing technology of the present invention, in this example, all respectively there is an electrode (801,802) that connects with corresponding signal lead on the two sides of each quartz wafer (81,82,83,84,85,86,87,88), and all electrodes (801,802) all are positioned at the edge of wafer orientation frame 3.
Embodiment 2 (with reference to figure 2):
This example is on the basis of summation part or embodiment 1, gives an example at the concrete of isolation pedestal wherein.In this example, the xsect of isolating the entity part of annular groove between pedestal 1 waist is square (this viewgraph of cross-section is not drawn), its four limit is parallel with four limits of pedestal mounting disc 11, its girth equals 1/2 (obviously, the axis of the entity part of this annular groove and pedestal mounting disc 11 is all coaxial with pretension bolt) of pedestal mounting disc 11 girths.
Embodiment 3 (with reference to figure 2):
This example is on the basis of summation part or embodiment 1, gives an example at the concrete of isolation pedestal wherein.In this example, the xsect of isolating the entity part of annular groove between pedestal 1 waist is circular (this viewgraph of cross-section is not drawn), and its diameter is 1/2 of mounting disc 11 arbitrary length of sides.
Embodiment 4 (with reference to figure 2,3):
This example is on the basis of summation part, embodiment 1 or embodiment 2, at pretension bolt wherein for example.In this example, pretension bolt is made of a double threaded screw 51 and a pre-load nut 52, and the upper surface of described inertial mass 6 has the screw head that holds following this pre-load nut 52 and this pre-load nut 52 and correspondence thereof not exceed the counterbore of this upper surface.
Claims (5)
1, a kind of piezoelectric three dimension acceleration sensor, this sensor comprises pedestal, cover is contained in the housing of the band socket (2) on this pedestal, be fixedly mounted in piezoelectric element in the pedestal mounting disc in this housing by pretension bolt, insulation spacer and inertial mass, and the signal lead that connects piezoelectric element and socket (2), it is characterized in that, described pedestal (1) is for isolating pedestal, vertical section by this pedestal axis is an I shape, last one horizontal stroke of part of I shape is pedestal mounting disc (11), this pedestal mounting disc (11) is that its cross section perpendicular to the pedestal axis is a foursquare rectangular parallelepiped, and the pedestal axis is by foursquare center; By being screwed in that this pedestal (1) is gone up and the pretension bolt of its axis coaxle, on the upper surface of pedestal mounting disc (11), being fixed with insulation spacer (4), a wafer orientation frame (3), insulation spacer (4) and inertial mass (6) from top to bottom successively; Wafer orientation frame (3) wherein also is that its cross section perpendicular to the pedestal axis is a foursquare rectangular parallelepiped, and the pedestal axis is by this foursquare center, and the square sectional of wafer orientation frame (3) equates with the square sectional of pedestal mounting disc (11); The foursquare installation piezoelectric element wafer orientation hole within it that has equally distributed eight sizes to equate in this wafer orientation frame (3), the line of centres in each wafer orientation hole are that four limits in square, each wafer orientation hole are all parallel with four limits of wafer orientation frame (3) accordingly; Described piezoelectric element is quartz wafer (81,82,83,84,85,86,87,88), the installing and locating quartz wafer (81,83,85,87) in four jiaos of pilot holes of heart line therein is X0 ° of cut type quartz wafer, and the peak response axle of these four wafers (81,83,85,87) is all perpendicular to the axial opposed of the peak response axle of the upper surface of pedestal mounting disc (11) and adjacent angular wafer; The quartz wafer (82,84,86,88) of installing and locating in the line of centres four limit midpoint pilot holes is Y0 ° of cut type quartz wafer, and the peak response axle of wherein relative two wafers (82 and 86,84 and 88) is coaxial and its direction is opposite; The thickness of described each quartz wafer (81,82,83,84,85,86,87,88) equates and is not less than the thickness of wafer orientation frame (3); Each quartz wafer (81,82,83,84,85,86,87,88) is connected with the differential type charge amplifier by signal lead, socket (2).
2, piezoelectric three dimension acceleration sensor according to claim 1, it is characterized in that, all respectively there is an electrode (801,802) that connects with corresponding signal lead on the two sides of described each quartz wafer (81,82,83,84,85,86,87,88), and all electrodes (801,802) all are positioned at the edge of wafer orientation frame (3).
3, piezoelectric three dimension acceleration sensor according to claim 1 and 2, it is characterized in that, the xsect of the entity part of annular groove is a square between described isolation pedestal (1) waist, its four limit is parallel with four limits of pedestal mounting disc (11), and its girth equals 1/2 of pedestal mounting disc (11) girth; Or the xsect of the entity part of annular groove is circular between described isolation pedestal (1) waist, and its diameter is 1/2 of the arbitrary length of side of mounting disc (11).
4, piezoelectric three dimension acceleration sensor according to claim 1 and 2, it is characterized in that, described pretension bolt is made of a double threaded screw (51) and a pre-load nut (52), and the upper surface of described inertial mass (6) has the screw head that holds following this pre-load nut (52) and this pre-load nut (52) and correspondence thereof not exceed the counterbore of this upper surface.
5, piezoelectric three dimension acceleration sensor according to claim 3, it is characterized in that, described pretension bolt is made of a double threaded screw (51) and a pre-load nut (52), and the upper surface of described inertial mass (6) has the screw head that holds following this pre-load nut (52) and this pre-load nut (52) and correspondence thereof not exceed the counterbore of this upper surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100950122A CN100429520C (en) | 2006-08-04 | 2006-08-04 | Piezoelectric three dimension acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100950122A CN100429520C (en) | 2006-08-04 | 2006-08-04 | Piezoelectric three dimension acceleration sensor |
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| Publication Number | Publication Date |
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| CN1904621A true CN1904621A (en) | 2007-01-31 |
| CN100429520C CN100429520C (en) | 2008-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100950122A Expired - Fee Related CN100429520C (en) | 2006-08-04 | 2006-08-04 | Piezoelectric three dimension acceleration sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100397086C (en) * | 2007-07-09 | 2008-06-25 | 北京信息工程学院 | Novel piezoelectric quartz accelerameter |
| CN102520210A (en) * | 2011-12-28 | 2012-06-27 | 重庆大学 | Piezoelectric six-dimensional acceleration sensor |
| CN102890164A (en) * | 2012-10-18 | 2013-01-23 | 扬州英迈克测控技术有限公司 | Three-dimensional six-parameter piezoelectric accelerometer with self-check function |
| CN104931730A (en) * | 2015-07-10 | 2015-09-23 | 四川奇胜科技有限公司 | Three-dimensional acceleration sensor |
| CN104950136A (en) * | 2015-07-10 | 2015-09-30 | 四川奇胜科技有限公司 | Piezoelectric acceleration sensor with improved structure |
| CN111958320A (en) * | 2020-08-06 | 2020-11-20 | 北京理工大学 | Integrated real-time monitoring system and method for tool handle |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5512794A (en) * | 1991-12-05 | 1996-04-30 | Kistler Instrumente Ag | Shear accelerometer |
| JPH05172840A (en) * | 1991-12-24 | 1993-07-13 | Fujikura Ltd | Piezoelectric vibration sensor |
| JP2000002714A (en) * | 1998-04-13 | 2000-01-07 | Matsushita Electric Ind Co Ltd | Piezoelectric acceleration sensor, acceleration detection means and manufacture of piezoelectric acceleration sensor |
| CN2488068Y (en) * | 2001-03-27 | 2002-04-24 | 南京师范大学 | Differential piezoelectric acceleration sensor |
| CN1763547A (en) * | 2005-10-27 | 2006-04-26 | 中国科学院上海硅酸盐研究所 | High temperature three-way piezoelectric accelerometer in a kind of |
-
2006
- 2006-08-04 CN CNB2006100950122A patent/CN100429520C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100397086C (en) * | 2007-07-09 | 2008-06-25 | 北京信息工程学院 | Novel piezoelectric quartz accelerameter |
| CN102520210A (en) * | 2011-12-28 | 2012-06-27 | 重庆大学 | Piezoelectric six-dimensional acceleration sensor |
| CN102520210B (en) * | 2011-12-28 | 2013-11-06 | 重庆大学 | Piezoelectric six-dimensional acceleration sensor |
| CN102890164A (en) * | 2012-10-18 | 2013-01-23 | 扬州英迈克测控技术有限公司 | Three-dimensional six-parameter piezoelectric accelerometer with self-check function |
| CN102890164B (en) * | 2012-10-18 | 2015-01-07 | 扬州英迈克测控技术有限公司 | Three-dimensional six-parameter piezoelectric accelerometer with self-check function |
| CN104931730A (en) * | 2015-07-10 | 2015-09-23 | 四川奇胜科技有限公司 | Three-dimensional acceleration sensor |
| CN104950136A (en) * | 2015-07-10 | 2015-09-30 | 四川奇胜科技有限公司 | Piezoelectric acceleration sensor with improved structure |
| CN111958320A (en) * | 2020-08-06 | 2020-11-20 | 北京理工大学 | Integrated real-time monitoring system and method for tool handle |
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| Publication number | Publication date |
|---|---|
| CN100429520C (en) | 2008-10-29 |
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Granted publication date: 20081029 Termination date: 20100804 |