CN102890039A - Method and device for detecting density and distribution of diamond wire abrasive particles - Google Patents
Method and device for detecting density and distribution of diamond wire abrasive particles Download PDFInfo
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- CN102890039A CN102890039A CN2011102080083A CN201110208008A CN102890039A CN 102890039 A CN102890039 A CN 102890039A CN 2011102080083 A CN2011102080083 A CN 2011102080083A CN 201110208008 A CN201110208008 A CN 201110208008A CN 102890039 A CN102890039 A CN 102890039A
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Abstract
The embodiment of the invention discloses a method for detecting density and distribution of diamond wire abrasive particles. The method comprises the steps as follows: acquiring information of images corresponding to a plurality of angles of a diamond wire with depth within the specified length range; establishing a three-dimensional image of the diamond wire with depth within the specified length range based on the image information; and gaining the amount of the abrasive particles and the distance of adjacent abrasive particles based on the three-dimensional image, and obtaining the density and the distribution value. According to the method disclosed by the invention, the information of the images at a plurality of angles of the diamond wire with the specified length is acquired, then the three-dimensional image is established based on the information of a plurality of images, and finally the density and distribution conditions of the abrasive particles on the diamond wire are obtained. Compared with conventional method, the method disclosed by the invention is higher in reliability by utilizing the analysis on the information of the images to finally obtain the density and distribution conditions of the abrasive particles. The invention also discloses a device for detecting density and distribution of the diamond wire abrasive particles.
Description
Technical field
The present invention relates to the crystalline silicon manufacture field, more particularly, relate to detection method and the device of a kind of diamond wire abrasive grain density and distribution.
Background technology
For the production of line cutting technology, mainly be to use the free abrasive scroll saw, the free abrasive wire saw cutting is brought high viscosity SiC abrasive particulate slurry into cutting zone in cutting process, the abrasive particle of free state carries out the cutting of silicon ingot under the drive of the pressure of steel wire and speed, the method exists that cutting efficiency is low, cut precision is low and the shortcoming such as operating environment is poor.Can also use fixed-abrasive wire saw in addition, fixed-abrasive wire saw is that diamond abrasive grain is consolidated in a kind of cutting tools that Steel Wire Surface is made by certain technique, fixed-abrasive wire saw is because after diamond abrasive grain is cemented in Steel Wire Surface, steel wire does not directly contact with workpiece, easy damaged not, life-span can improve greatly, and cutting efficiency and precision are also higher.
The consolidation technique of fixed-abrasive wire saw mainly contains electroplates two kinds of diamond wire and resin diamond wires.No matter be to electroplate diamond wire or resin diamond wire, all can relate to the problem of Abrasive Grain density and distribution thereof, if abrasive particle is very few, then cutting power is not enough, and abrasive particle is crossed the at most hold reduction of abrasive particle, causes equally cutting efficiency low; If Abrasive Grain is piled up, not only can reduce cutting ability, and can make the surfaceness of cut workpiece become large.Therefore, detect diamond wire Abrasive Grain density and distribution thereof and become particularly important.
Existing detection method is by simple microscope or one section diamond wire surface of electron microscope observation, and the number wherein number of abrasive particle is roughly calculated.Although this method can be observed the distribution situation of Abrasive Grain intuitively,, it does not possess Continuous Observation, by the mode of people's number, poor reliability.
In addition, be subjected to simple microscope or electron microscope structural limitations, when detecting the diamond wire abrasive grain density and distributing, can only under static condition, observe, and can't realize on-line monitoring.
Summary of the invention
In view of this, the invention provides detection method and the device of a kind of diamond wire abrasive grain density and distribution, to realize improving the reliability that detects.
For achieving the above object, the invention provides following technical scheme:
The detection method of a kind of diamond wire abrasive grain density and distribution comprises step:
Gather the corresponding image information of a plurality of angles of diamond wire in the length-specific;
Set up the 3-D view of diamond wire in this length-specific according to described image information;
According to the distance value of described capable of acquiring three-dimensional images abrasive particle quantitative value and adjacent abrasive particle, and obtain density value and Distribution Value.
Preferably, in above-mentioned detection method, described obtaining also comprises after density value and the Distribution Value:
Respectively more pre-stored default density value and described density value, pre-stored default Distribution Value and described Distribution Value, when satisfy simultaneously described density value greater than described default density value and described Distribution Value greater than described default Distribution Value alarm.
Preferably, in above-mentioned detection method, described number of angles is four, and adjacent angle angle is 90 °.
The pick-up unit of a kind of diamond wire abrasive grain density and distribution comprises:
Be the special angle hoop and be distributed in diamond wire a plurality of image acquisition units on every side, described image acquisition units gathers the corresponding image information of diamond wire in the length-specific;
Receive the graphics processing unit of the described image information of described image acquisition units transmission, and set up the 3-D view of diamond wire in this length-specific according to described image information;
Receive the data processing unit of the described 3-D view that described graphics processing unit sends, according to the distance value of described capable of acquiring three-dimensional images abrasive particle quantitative value and adjacent abrasive particle, and obtain density value and Distribution Value.
Preferably, in above-mentioned detection device, also comprise judging unit and alarm unit, wherein,
Described judging unit receives described density value and the Distribution Value of the transmission of described data processing unit, respectively more pre-stored default density value and described density value, pre-stored default Distribution Value and described Distribution Value send warning message during greater than described default Distribution Value when satisfying simultaneously described density value greater than described default density value and described Distribution Value;
Described alarm unit sends alerting signal according to described warning message.
Preferably, in above-mentioned detection device, described image acquisition units is the CCD camera, and the enlargement factor of this CCD camera is 300-1000.
Preferably, in above-mentioned detection device, the quantity of described CCD camera is four, and the angle of adjacent described CCD camera is 90 °.
Preferably, in above-mentioned detection device, also be provided with pointolite between the adjacent described CCD camera.
Preferably, in above-mentioned detection device, the distance of the described diamond wire of described CCD camera distance is 30mm-50mm.
Preferably, in above-mentioned detection device, the distance of the described diamond wire of described pointolite distance is 25mm-30mm.
Because detection method among the present invention, at first gather the image information of a plurality of angles of the diamond wire of length-specific, and set up 3-D view according to a plurality of image informations, finally obtain abrasive grain density and distribution situation on the diamond wire.Because compare than classic method with distribution situation by finally obtaining abrasive grain density by analysis image information in the said method, reliability is higher.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
A kind of diamond wire abrasive grain density that Fig. 1 provides for the embodiment of the invention and the detection method schematic flow sheet of distribution;
The another kind of diamond wire abrasive grain density that Fig. 2 provides for the embodiment of the invention and the detection method schematic flow sheet of distribution;
The sectional structure synoptic diagram of a kind of diamond wire abrasive grain density that Fig. 3 provides for the embodiment of the invention and the pick-up unit of distribution;
A kind of diamond wire abrasive grain density that Fig. 4 to Fig. 6 provides for the embodiment of the invention and the pick-up unit of distribution use structural representation;
Wherein, among Fig. 1 to Fig. 6,1 is diamond wire; 2 is abrasive particle; 3a is the CCD camera; 3b is the CCD camera; 3c is the CCD camera; 3d is the CCD camera; 4a is pointolite; 4b is pointolite; 4c is pointolite; 4d is pointolite; 5 is graphics processing unit; 6 data processing units; 7 is judging unit; 8 is alarm unit.
Embodiment
Related terms is explained
Concretion abrasive: abrasive material and heart yearn integrally combine;
Free abrasive: abrasive material is dispersed in the cutting liquid, and physisorption is on the steel wire surface during cutting;
Resin diamond wire: take resin as bonding agent abrasive particle is dispersed in the heart yearn surface, for cutting;
Electroplate diamond wire: take metallic nickel as bond, by the mode of electroplating abrasive particle is bonded in the steel wire surface;
Hold: diamond wire resin matrix or Ni substrate are to the cohesive force of abrasive particle;
The CCD camera: CCD camera, with the remote sensing camera of charge-coupled image sensor (CCD) as light sensor and photoelectric commutator;
CCD:Charge-coupled Device, charge coupled cell;
The depth of field: when absorbing the scenery of limited distance, can consist of in image planes the object distance scope of sharp image;
Operating distance: the distance of the object lens leading edge when referring to the sample sharp focusing and specimen surface (or object lens are when using cover glass, with the cover glass end face).
Related content by the background technology record passes through to adopt common microscope or abrasive grain density and the distribution situation of electron microscope observation diamond wire in the existing technical scheme as can be known, because by macroscopic detection abrasive grain density and distribution, it is unreliable to detect.The present invention discloses a kind of new detection method and pick-up unit in order to address the above problem for this reason.
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
The invention provides the detection method of a kind of diamond wire abrasive grain density and distribution, to realize improving the reliability that detects.
As shown in Figure 1, the detection method of diamond wire abrasive grain density disclosed by the invention and distribution comprises step:
Step S11: the corresponding image information of a plurality of angles that gathers diamond wire in the length-specific.
In the actual acquisition process, since during a plurality of angle acquisition apart from the difference of the distance difference of diamond wire, pixel difference, enlargement factor, resulting image information may there are differences, usually convenient for subsequent treatment, the pictorial information that collects can be converted to the identical picture of enlargement factor.Preferably, in order to simplify treatment step, in actual mechanical process, when gathering image information, identical apart from the distance of diamond wire, and enlargement factor is identical in the gatherer process, and a plurality of even angle distribute, and for example: if minute four angles gather, so adjacent acquisition angles is 90 °; If minute five angles gather, acquisition angles is 72 ° so, and this is analogized.Owing in the actual acquisition process, gather adjacent image information and have the very possible part that overlaps that exists, in subsequent processes, prune accordingly by judging whether to overlap again.
Step S12: the 3-D view of setting up diamond wire in this length-specific according to described image information.
Be integrated into 3-D view by the pictorial information in conjunction with a plurality of angles, wherein because there is intersection in the image information that obtains in a plurality of angles, for this reason, in integration process, need to rejudge the part whether image information exists coincidence, if there is the part that overlaps between the adjacent angle, then direct shear is fallen the part of coincidence, then continues to set up the diamond wire 3-D view in this length-specific.
Above-mentioned said length-specific be because, the restriction of acquisition angles in gatherer process can not gather the image information of diamond wire in all length, but according to the performance of equipment by adjusting the angle in a certain length of angle acquisition.
Step S13: according to the distance value of described capable of acquiring three-dimensional images abrasive particle quantitative value and adjacent abrasive particle, and obtain density value and Distribution Value.
Obtain after the 3-D view changing the number of diamond wire Abrasive Grain in the length-specific by statistics, spacing between every adjacent two abrasive particles is come and with diamond wire length information coupling, can know density and the distribution situation of abrasive particle on concrete every section diamond wire.Through just obtaining density and the distribution situation of the abrasive particle of multistage diamond wire after the repeated detection.
Above-mentioned detection method can also specifically be applied in the existing equipment, as shown in Figure 2, above-mentioned detection method is applied in the equipment in the course of work, the density value that detects and Distribution Value and pre-stored density value and Distribution Value are compared, when the density value that detects and Distribution Value exceed the preset value scope, send warning message, with alert.
Concrete steps comprise:
Step S21: the corresponding image information of a plurality of angles that gathers diamond wire in the length-specific.
In the actual acquisition process, since during a plurality of angle acquisition apart from the difference of the distance difference of diamond wire, pixel difference, enlargement factor, resulting image information may there are differences, usually convenient for subsequent treatment, the pictorial information that collects can be converted to the identical picture of enlargement factor.Preferably, in order to simplify treatment step, in actual mechanical process, when gathering image information, identical apart from the distance of diamond wire, and enlargement factor is identical in the gatherer process, and a plurality of even angle distribute, and for example: if minute four angles gather, so adjacent acquisition angles is 90 °; If minute five angles gather, acquisition angles is 72 ° so, and this is analogized.Owing in the actual acquisition process, gather adjacent image information and have the very possible part that overlaps that exists, in subsequent processes, prune accordingly by judging whether to overlap again.
Step S22: the 3-D view of setting up diamond wire in this length-specific according to described image information.
Be integrated into 3-D view by the pictorial information in conjunction with a plurality of angles, wherein because there is intersection in the image information that obtains in a plurality of angles, for this reason, in integration process, need to rejudge the part whether image information exists coincidence, if there is the part that overlaps between the adjacent angle, then direct shear is fallen the part of coincidence, then continues to set up the diamond wire 3-D view in this length-specific.
Above-mentioned said length-specific be because, the restriction of acquisition angles in gatherer process can not gather the image information of diamond wire in all length, but according to the performance of equipment by adjusting the angle in a certain length of angle acquisition.
Step S23: according to the distance value of described capable of acquiring three-dimensional images abrasive particle quantitative value and adjacent abrasive particle, and obtain density value and Distribution Value.
Obtain after the 3-D view changing the number of diamond wire Abrasive Grain in the length-specific by statistics, spacing between every adjacent two abrasive particles is come and with diamond wire length information coupling, can know density and the distribution situation of abrasive particle on concrete every section diamond wire.Through just obtaining density and the distribution situation of the abrasive particle of multistage diamond wire after the repeated detection.
Step S24: respectively more pre-stored default density value and described density value, pre-stored default Distribution Value and described Distribution Value, when satisfy simultaneously described density value greater than described default density value and described Distribution Value greater than described default Distribution Value alarm.
The invention also discloses the pick-up unit of a kind of diamond wire 1 abrasive particle, 2 density and distribution, to shown in Figure 6, this pick-up unit comprises a plurality of image acquisition units, graphics processing unit 5 and data processing unit 6 such as Fig. 3, wherein,
Image acquisition units is the special angle hoop and is distributed in around the diamond wire 1, and image acquisition units gathers diamond wire 1 corresponding image information in the length-specific;
Above-mentioned image acquisition units is the CCD camera in embodiments of the present invention, preferably, preferably be provided with four CCD cameras in the embodiment of the invention, respectively CCD camera 3a, CCD camera 3b, CCD camera 3c and CCD camera 3d, four CCD cameras be 90 ° be distributed in diamond wire 1 around, each CCD camera catches the high-resolution photo of 1/4th diamond wires, 1 outside surface, then process through graphics processing unit 5, and obtain out density and the Distribution Value of Abrasive Grain 2 by data processing unit 6.
In order to obtain more clearly image information, place a pointolite between every two adjacent CCD cameras, be provided with pointolite 4a between CCD camera 3a and the CCD camera 3b, be provided with between CCD camera 3b and the CCD camera 3c to be provided with between pointolite 4b, CCD camera 3c and the CCD camera 3d between pointolite 4c and CCD camera 3d and the CCD camera 3a and be provided with pointolite 4d.
In addition, in order better to remind operating personnel, pick-up unit of the present invention also is provided with judging unit 7 and alarm unit 8, density value and the Distribution Value of the transmission of these judging unit 7 receive data processing units 6, more pre-stored default density value and density value respectively, pre-stored default Distribution Value and Distribution Value send warning message during greater than default Distribution Value when satisfying simultaneously density value greater than default density value and Distribution Value;
Above-mentioned alarm unit 8 is for starting acoustic-optic alarm, and the enlargement factor of above-mentioned CCD camera is 300-1000.And the distance of control CCD camera distance diamond wire 1 is 30mm-50mm, and pointolite is 25mm-30mm apart from the distance of diamond wire 1.Can automatic capturing to diamond wire 1 surface topography of rapid movement, automatically synthetic stereo image and add up abrasive particle 2 numbers and per two adjacent abrasive particles 2 between spacing, thereby can obtain Abrasive Grain 2 density and distribution situation, have abnormal alarm system, can real time on-line monitoring.Whole process need not manual intervention, possesses continuity, accuracy advantages of higher.Observation to static state provides abrasive particle 2 density and Distribution Value too easily.
Because detection method among the present invention, at first gather the image information of a plurality of angles of the diamond wire 1 of length-specific, and set up 3-D view according to a plurality of image informations, finally obtain abrasive particle 2 density and distribution situation on the diamond wire 1.Because compare than classic method with distribution situation by finally obtain abrasive particle 2 density by analysis image information in the said method, reliability is higher.
In addition, owing to adopt the CCD camera, to shown in Figure 6, this pick-up unit can capture the diamond wire 1 of length-specific fast in diamond wire 1 operational process such as Fig. 4, realizes continuous monitoring diamond wire 1 abrasive particle 2 and distribution situation.Overcome and pass abrasive particle 2 and the distribution that traditional method can only detect static diamond wire 1.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the present invention.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can in the situation that does not break away from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. the detection method of a diamond wire abrasive grain density and distribution is characterized in that, comprises step:
Gather the corresponding image information of a plurality of angles of diamond wire in the length-specific;
Set up the 3-D view of diamond wire in this length-specific according to described image information;
According to the distance value of described capable of acquiring three-dimensional images abrasive particle quantitative value and adjacent abrasive particle, and obtain density value and Distribution Value.
2. detection method as claimed in claim 1 is characterized in that, described obtaining also comprises after density value and the Distribution Value:
Respectively more pre-stored default density value and described density value, pre-stored default Distribution Value and described Distribution Value, when satisfy simultaneously described density value greater than described default density value and described Distribution Value greater than described default Distribution Value alarm.
3. detection method as claimed in claim 1 is characterized in that, described number of angles is four, and adjacent angle angle is 90 °.
4. the pick-up unit of a diamond wire abrasive grain density and distribution is characterized in that, comprising:
Be the special angle hoop and be distributed in diamond wire a plurality of image acquisition units on every side, described image acquisition units gathers the corresponding image information of diamond wire in the length-specific;
Receive the graphics processing unit of the described image information of described image acquisition units transmission, and set up the 3-D view of diamond wire in this length-specific according to described image information;
Receive the data processing unit of the described 3-D view that described graphics processing unit sends, according to the distance value of described capable of acquiring three-dimensional images abrasive particle quantitative value and adjacent abrasive particle, and obtain density value and Distribution Value.
5. pick-up unit as claimed in claim 4 is characterized in that, also comprises judging unit and alarm unit, wherein,
Described judging unit receives described density value and the Distribution Value of the transmission of described data processing unit, respectively more pre-stored default density value and described density value, pre-stored default Distribution Value and described Distribution Value send warning message during greater than described default Distribution Value when satisfying simultaneously described density value greater than described default density value and described Distribution Value;
Described alarm unit sends alerting signal according to described warning message.
6. pick-up unit as claimed in claim 5 is characterized in that, described image acquisition units is the CCD camera, and the enlargement factor of this CCD camera is 300-1000.
7. pick-up unit as claimed in claim 6 is characterized in that, the quantity of described CCD camera is four, and the angle of adjacent described CCD camera is 90 °.
8. pick-up unit as claimed in claim 7 is characterized in that, also is provided with pointolite between the adjacent described CCD camera.
9. pick-up unit as claimed in claim 8 is characterized in that, the distance of the described diamond wire of described CCD camera distance is 30mm-50mm.
10. pick-up unit as claimed in claim 8 is characterized in that, the distance of the described diamond wire of described pointolite distance is 25mm-30mm.
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| CN103528874A (en) * | 2013-09-26 | 2014-01-22 | 镇江耐丝新型材料有限公司 | Separating method of carborundum particles on surface of diamond wire |
| CN104034637A (en) * | 2014-06-26 | 2014-09-10 | 芜湖哈特机器人产业技术研究院有限公司 | Diamond wire particle online quality inspection device based on machine vision |
| CN104849211A (en) * | 2015-05-27 | 2015-08-19 | 深圳市常兴技术股份有限公司 | Detecting method for diamond thickening degree on electroplating abrasive tool surface |
| CN106926375A (en) * | 2017-04-25 | 2017-07-07 | 镇江仁德新能源科技有限公司 | A kind of diamond fretsaw on-line measuring device |
| CN108204988A (en) * | 2018-01-29 | 2018-06-26 | 江苏泓麒智能科技有限公司 | Diamond wire mass parameter detection device and its machined parameters adjustment method |
| CN108332795A (en) * | 2018-02-11 | 2018-07-27 | 江苏亿荣新材料科技有限公司 | A kind of high-precision diamond wire on-line monitoring device and its monitoring method |
| CN108413892A (en) * | 2018-01-30 | 2018-08-17 | 华侨大学 | A kind of diamond fretsaw complete cycle 3 d surface topography detection method and its detection device |
| CN108645340A (en) * | 2018-05-15 | 2018-10-12 | 江苏亿荣新材料科技有限公司 | It is a kind of that there is the diamond wire production technology for quantitatively adding sand and on-line monitoring function |
| CN109801291A (en) * | 2019-03-12 | 2019-05-24 | 西安交通大学 | A kind of acquisition methods moving abrasive grain multi-surface three-dimensional appearance |
| FR3088838A1 (en) * | 2018-11-28 | 2020-05-29 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for measuring at least one wear parameter of a cutting wire, its application to a cutting or wire manufacturing process and associated device |
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| CN103528874A (en) * | 2013-09-26 | 2014-01-22 | 镇江耐丝新型材料有限公司 | Separating method of carborundum particles on surface of diamond wire |
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| CN108413892A (en) * | 2018-01-30 | 2018-08-17 | 华侨大学 | A kind of diamond fretsaw complete cycle 3 d surface topography detection method and its detection device |
| CN108332795A (en) * | 2018-02-11 | 2018-07-27 | 江苏亿荣新材料科技有限公司 | A kind of high-precision diamond wire on-line monitoring device and its monitoring method |
| CN108645340A (en) * | 2018-05-15 | 2018-10-12 | 江苏亿荣新材料科技有限公司 | It is a kind of that there is the diamond wire production technology for quantitatively adding sand and on-line monitoring function |
| FR3088838A1 (en) * | 2018-11-28 | 2020-05-29 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for measuring at least one wear parameter of a cutting wire, its application to a cutting or wire manufacturing process and associated device |
| EP3659734A1 (en) * | 2018-11-28 | 2020-06-03 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Method for measuring at least one wear parameter of a cutting wire, application to a method for cutting or manufacturing wires and associated device |
| CN109801291A (en) * | 2019-03-12 | 2019-05-24 | 西安交通大学 | A kind of acquisition methods moving abrasive grain multi-surface three-dimensional appearance |
| CN109801291B (en) * | 2019-03-12 | 2021-05-04 | 西安交通大学 | Method for acquiring multi-surface three-dimensional morphology of moving abrasive particles |
| CN111696307A (en) * | 2020-06-10 | 2020-09-22 | 深圳泽保智能科技有限公司 | Optical detection device for detecting fire |
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