CN100566931C - Topping machanism - Google Patents
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- CN100566931C CN100566931C CNB2006101640941A CN200610164094A CN100566931C CN 100566931 C CN100566931 C CN 100566931C CN B2006101640941 A CNB2006101640941 A CN B2006101640941A CN 200610164094 A CN200610164094 A CN 200610164094A CN 100566931 C CN100566931 C CN 100566931C
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- 238000005520 cutting process Methods 0.000 claims abstract description 216
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 31
- 238000004020 luminiscence type Methods 0.000 claims abstract description 29
- 230000002093 peripheral effect Effects 0.000 claims abstract description 18
- 230000003760 hair shine Effects 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 abstract description 9
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 238000009826 distribution Methods 0.000 abstract description 5
- 235000012431 wafers Nutrition 0.000 description 28
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000005323 electroforming Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000008093 supporting effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
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Abstract
Make the luminescence unit (109) and the image unit (114) of the cutting tip detecting unit (132) that formation detects the cutting blade state of cutting tip be in the opposite, it is installed on blade cover (104).Because luminescence unit (109) and image unit (114) are in the opposite, so, even there is the spittle of the cutting water that splashes, also can obtain to discern clearly the image of peripheral shape of the cutting blade (102a) of cutting tip (102).In addition, by luminescence unit (109) and image unit (114) are installed at blade cover (104), thereby do not need to use optical fiber, do not need distribution.Like this, have the cutting blade of cutting tip made a video recording, detects it is damaged, in the topping machanism of the function of wearing and tearing, the constraint of the distribution of the optical fiber that the light of the usefulness of not made a video recording passes through can positively be held the state ground of cutting tip and be made a video recording.
Description
Technical field
The present invention relates to a kind of topping machanism, particularly relate to a kind of topping machanism with function of the states such as damaged and wearing and tearing that detect cutting tip with cutting tip.
Background technology
The wafer that has formed devices such as a plurality of LC, LSI cuts in length and breadth by the cutting tip that uses high speed rotary, thereby is divided into chip one by one, is used for various electronic equipments.
But above-mentioned cutting tip is installed on the main shaft of high speed rotary and uses, and forms cutting edge portion in its periphery.The fixing abrasive particle that is made of diamond etc. of modes such as this cutting blade is bonding by electroforming, metal, resin bonding constitutes, so, cutting make the cutting blade through the time ground deterioration, produces damaged, wearing and tearing, have the problem of the quality decline of each device that forms by cutting.
Address this problem for this reason, the applicant has developed such device (with reference to No. 2627913 communique of Japan Patent), and this device is made a video recording to the outer peripheral edges portion of the cutting blade of formation cutting tip, confirms its shape, when damaged grade of taking place not allow, change cutting tip immediately.In this device, the light that will be produced in light-emitting component by optical transmission means such as optical fiber guides near the output the cutting tip, cutting tip is carried out illumination penetrate, its reverberation is guided to photo detector, reverberation is made a video recording by optical transmission means such as optical fiber.
Yet, when cutting, cutting water need be supplied to the contact site of cutting tip and machined object by cutting tip.Therefore, in the formation that light shines cutting tip, reverberation is made a video recording, the high speed rotary of cutting tip splashes cutting water, the spittle of this cutting water makes reverberation produce scattering, sometimes can not be from the image recognition cutting tip that obtains, so, can not detect damaged, wearing and tearing of cutting tip etc. sometimes.
In addition, the light that sends from light-emitting component by fiber guides near cutting tip, reverberation also by fiber guides to photo detector because the optical fiber flexibility is poor, so, also have the problem of distribution difficulty.In addition, when cutting, move owing to comprise the cutting unit of cutting tip, so, become the formation that optical fiber also moves, like this, also exist the optical fiber that lacks flexibility to hinder the problem that moves.
Summary of the invention
Therefore, the problem to be solved in the present invention is not to be subjected to the constraint of the distribution of optical fiber, make a video recording in the state ground that can positively hold cutting tip.
Topping machanism of the present invention comprises the grain-clamping table that keeps machined object at least, has the cutting unit of the cutting tip that the machined object that remains in this grain-clamping table is cut, and the cutting tip detecting unit of the state of the cutting blade of this cutting tip of detection; It is characterized in that: this cutting unit has the blade cover, and the blade cover has the cutting (operating) water nozzle that cutting water is supplied to this cutting tip; This cutting tip detecting unit comprises luminescence unit and image unit at least; This luminescence unit comprises light source, and this light source shines the cutting blade of this cutting tip; This image unit comprise with this luminescence unit in the face of, imaging apparatus that the cutting blade of this cutting tip is made a video recording; This luminescence unit and this image unit are installed on the blade cover; Make the flash of light control part of above-mentioned light source flash of light be connected to above-mentioned light source, as the diameter of establishing the cutting blade of above-mentioned cutting tip is D[mm], the rotating speed of this cutting tip is M[rpm], the outer peripheral edges portion width of the cutting blade of this cutting tip in 1 image that is obtained by above-mentioned image unit is W[mm], then this flash of light control part is obtained full Zhou Jinhang to the outer peripheral edges portion of the cutting blade of this cutting tip needed picture number K that makes a video recording according to K 〉=π D/W, in addition, if N is the rotating number of times * positive integer of cutting tip, if n is the integer from 0 to above-mentioned picture number K variation, can be according to T[second]=60[second]/M}N+{60[second]/(MK) } n obtains the moment T that makes above-mentioned luminescence unit luminous.
Preferably image unit has microscope and speculum; This speculum is positioned on the advance route of the light of luminescence unit irradiation, and the picture that comprises cutting tip is reflected, and is delivered to microscope; Connect imaging apparatus at microscope.
In addition, preferably luminescence unit has speculum, and this speculum reflects the cutting blade ground that the illumination of sending is mapped to cutting tip to light.
Be preferably in image unit and connect damaged judging part, whether the damaged size of the cutting blade of this damaged judgement section judges cutting tip surpasses feasible value.
In addition, be preferably in image unit and connect the wearing and tearing judging part, whether the wear extent of this wearing and tearing judgement section judges cutting tip surpasses feasible value.
In the present invention, owing to form the structure that luminescence unit and image unit are faced mutually, so, the time make luminescence unit luminous and in the image that obtains when shooting, the contrast of part that is covered by cutting tip and the part that is not covered is clear and definite, even there is the spittle of the cutting water splash, also can obtain to discern clearly the image of peripheral shape of the cutting blade of cutting tip.In addition, be installed on the blade cover, thereby do not need to use optical fiber, do not need distribution by luminescence unit and image unit.
As the diameter of establishing the cutting blade of cutting tip is D[mm], the rotating speed of cutting tip is M[rpm], the outer peripheral edges portion width of the cutting blade of this cutting tip in 1 image that is obtained by image unit is W[mm], flash of light control part basis
K≥πD/W
Obtain full Zhou Jinhang to the outer peripheral edges portion of the cutting blade of the cutting tip needed picture number K that makes a video recording, establish N and n and be increased to positive integer arbitrarily from 0, can basis
T[second]=60[second]/M}N+{60[second]/(MK) } n
Obtain the moment that makes light from light source, then can obtain to discern clearly the image in the whole zone of periphery of the cutting blade of cutting tip.In addition, by with N and n as variable, thereby can set them neatly, thereby can suitably adjust the moment of shooting.
When the judging part that whether surpasses feasible value when the damaged size of the cutting blade that will judge cutting tip is connected in image unit, can be in the damaged occasion that surpasses feasible value immediately with this intelligence aids operator, the operator can change cutting tip immediately.
As the wearing and tearing the judging part whether wear extent of judging cutting tip surpasses feasible value is connected to image unit, and then the occasion that can surpass feasible value in wear extent is immediately with this intelligence aids operator, and the operator can change cutting tip immediately.
Description of drawings
Fig. 1 is the perspective view that an example of topping machanism of the present invention is shown.
Fig. 2 is the decomposition diagram that an example of the cutting unit that constitutes this topping machanism is shown.
Fig. 3 is the perspective view that cutting unit is shown.
Fig. 4 is the sectional view of an example of formation that the cutting tip detecting unit is shown briefly.
The specific embodiment
Topping machanism shown in Figure 11 is divided into the device of chip one by one for the cutting machined object, is provided with in its front face side to be used for the operating unit 2 that the operator imports various information such as machining condition.In addition, has the display unit 3 that can show the various information that comprise image on device top.
As an example of the machined object that is cut, can list the wafer W shown in Figure 1 that forms a plurality of devices on the surface.When this wafer W of cutting, wafer W is pasted on band T, also pastes the framework F of ring-type on band T, becomes the state that wafer W becomes one by band T and framework F.Like this, in wafer case 4, accommodate a plurality of by the wafer W of being with T to be supported on framework F.
Wafer case 4-Y direction side configuration sends and sends into unit 5, this send send into unit 5 have from wafer case 4 send the wafer W before the cutting and wafer storage that cutting is finished in the function of wafer case 4.In wafer case 4 and send and send into 5 of unit the interim mounting zone 6 of temporary transient mounting by framework F wafer supported W is set, the wafer W mounting of sending from wafer case 6 is to interim mounting zone 6.
From wafer case 4 send, mounting in the wafer W in interim mounting zone 6 with the state of thick stick frame F one under keep by supply unit 7, be transported to grain-clamping table 8 by its rotation.
Grain-clamping table 8 can move and can turn round towards X-direction, and T keeps wafer W by band.Configuration alignment unit 9 above the mobile route of the directions X of grain-clamping table 8, this alignment unit 9 is made a video recording the zone that detection should be cut by 90 pairs of wafers of image pickup part.The wafer W that remains in grain-clamping table 8 by grain-clamping table 8+moving of directions X and move to image pickup part 90 under, by image pickup part 90 made a video recording in its surface, detect the zone that should cut by alignment unit 9.After this, grain-clamping table 8 further court+directions X moves, and wafer W is subjected to the effect of cutting unit 10.
In the lower end of moving part 106, has a pair of cutting (operating) water nozzle 107 that relative cutting tip 102 is supplied with cutting water.2 of cutting (operating) water nozzle 107 configurations, clamp cutting tip 102 from front side (+Y direction side) and rear side (Y direction side), from being located at 2 cutting water that cutting water inflow portion 108 flows on top, this cuts water 102 injections from cutting (operating) water nozzle 107 towards cutting tip to each cutting (operating) water nozzle 107 supplies.In addition, the luminescence unit 109 that has the cutting blade 102a that light shines cutting tip 102 at the front side of moving part 106.
As shown in Figure 2, piston 110 is outstanding from the end of moving part 106 sides of standing part 105, at the fixing moving part 106 of the leading section of piston 110.Standing part 105-the directions X side end is provided with air inflow aperture 111a, 111b, by supplying air to air inflow aperture 111a, thereby piston 110 court+directions Xs are slided, accompany therewith, moving part 106 court+directions Xs move, and become open state as shown in Figure 2.On the other hand, when supplying air to air inflow aperture 111b, as shown in Figure 3, moving part 106 becomes the position of the most past-directions X, moving part 106 is integrated in intimate contact with standing part 105, and 2 cutting (operating) water nozzles 107 become the state that is positioned at cutting tip 102 front and back.
A pair of rinse water nozzle 112 at the bottom of standing part 105 configuration jet cleaning water.Rinse water nozzle 112 lays respectively on the extended line of 2 cutting (operating) water nozzles 107-directions X.Supply with the rinse water that flows into from the rinse water inflow portion 113 that is located at standing part 105 tops to rinse water nozzle 112, this rinse water is sprayed from rinse water nozzle 112.
Accommodate image unit 114 on the top of standing part 105.Image unit 114 is by carriage 115 supportings, by carriage 115 and adjustment part, position 116 clamping base stations 117, can slide in the pore 117a of the lengthwise that is formed at base station 117 in adjustment part, position 116, by make adjustment part, position 116 towards upper and lower to slip, thereby can adjust the position of the above-below direction of image unit 114.Constitute the cutting tip detecting unit 132 of the state of the cutting blade 102a that detects cutting tip 102 by luminescence unit 109 and image unit 114.
As shown in Figure 4, luminescence unit 109 is connected in flash of light control part 118, by the moment flash of light of determining in flash of light control part 118.Flash of light control part 118 is connected with the rotating speed test section 119 of the rotating speed that can obtain main shaft 101, can be controlled the flash of light moment of luminescence unit 109 corresponding to the rotating speed of main shaft 101 by flash of light control part 118.
In image unit 114, speculum 123 is configured on the circuit that advances of the light that advances from luminescence unit 109, configuration has the microscope 126 of convex lens 124,125 on the advance route of the light that is risen by speculum 123 reflections.Configuration comprises the video camera 127 of the imaging apparatus of ccd video camera etc. above microscope 126, and the picture that has amplified in microscope 126 is transformed into the signal of telecommunication at imaging apparatus.
Turning back to Fig. 1 below describes.Detect by alignment unit 9 wafer W answer cutting zone after, wafer W moves towards X-direction with grain-clamping table 8, simultaneously, high speed rotary along with cutting tip 102, cutting unit 10 descends, and the cutting blade 102a of cutting tip 102 is cut into by alignment unit 9 detected zones and cuts.In the working angles, will cut water from cutting (operating) water nozzle 107 and supply to wafer W.In addition,,, grain-clamping table is turn 90 degrees for 8 times, carry out same cutting again, thereby can cut wafer W in length and breadth, be divided into device one by one Yi Bian wafer W is moved towards X-direction Yi Bian make cutting unit 10 carry out index feed towards Y direction.
As shown in Figure 4, the light that sends from light source 120 is after by collector lens 121 optically focused, in speculum 122 reflections, towards the cutting blade 102a irradiation of cutting tip 102.In addition, on the advance route of the light that reflects by the speculum 122 that constitutes luminescence unit 109, the cutting blade 102a that has cutting tip 102, so, the cutting blade 102a that in picture, comprises cutting tip 102 by speculum 123 reflections that constitute image unit 114, this picture enlarges the back by video camera 127 shootings at microscope 126, and 102a shines in the image of acquisition with the cutting blade.The 120 luminous moment of light source can be by 118 controls of flash of light control part, and the flash lamp when luminescence unit 109 is made a video recording as image unit 114 works.In the working angles of wafer, light source 120 is luminous termly, simultaneously, is made a video recording by the zone that 114 pairs of image units comprise the 102b of outer peripheral edges portion of cutting blade 102a by the 120 luminous moment of light source.The time make light source 120 luminous and in the image that obtains in shooting, the part that is covered by cutting tip 102 is clear and definite with the contrast of the part that is not covered, so, even the spittle of the cutting water that splashes is also made a video recording together, also can discern the image of the 102b of outer peripheral edges portion of cutting tip 102 clearly by video camera 127 acquisitions.
As required after image processing part 128 carries out binary conversion treatment etc., its image is shown in display unit 3 to the image that obtained by video camera 127, and the operator can hold the damaged state of cutting blade 102a by watching this image.
At flash of light control part 118,, calculate the luminous moment of light source 120 according to the information that transmits from rotating speed test section 119 about the rotating speed of main shaft 101.Specifically, for example carry out following such processing.
As shown in Figure 4, if the diameter of cutting blade 102a that is stored in the cutting tip 102 of memory etc. from operating unit 2 (with reference to Fig. 1) input, in advance by the operator is D[mm], be M[rpm by the rotating speed of rotating speed test section 119 detected cutting tips 102].In addition, if the width of the 102b of outer peripheral edges portion of the cutting tip 102 that shines in the image that once shooting obtains by image unit 114 is W[mm], in flash of light control part 118, these values are updated to following formula (1), obtain the whole zone that the is used for external circumference 102b necessary picture number K that makes a video recording.
K≥πD/W...(1)
In addition, flash of light control part 118 is obtained the moment T that makes light source 120 luminous according to following formula (2).
T[second]=60[second]/M}N+{60[second]/(MK) } n... (2)
When setting the rotating initial point of cutting tip 102, in the above-mentioned formula (2) the 1st 60[second]/M}N is the moment that cutting tip 102 is in its initial point.Here, N when each cutting tip 102 circles, for example increases by 1 for from 0 variable that is increased to any positive integer.
On the other hand, the 2nd of above-mentioned formula (2) the { 60[second]/(MK) }, n was that cutting tip 102 was in from the moment of the index position of above-mentioned initial point.N for example increases by 1 from 0 to the K that obtains according to formula (1) (positive integer) at every turn.
For example, when making n when 0 is increased to K during the N=0, in 1 of the cutting tip 102 of N=0 changes, carry out K time shooting, like this, can make a video recording the whole zone of the 102b of outer peripheral edges portion of cutting tip 102.In addition, when N=1, N=2, N=3 ..., when N=K ground increases, the interval of shooting increases.By n=1, n=2 ..., n is increased n=K, thereby when cutting tip 102 revolutions N time, made a video recording in the zone of adjacency successively, carry out K time shooting, can be often made a video recording in the whole zone of the 102b of outer peripheral edges portion of cutting tip 102.Because N and n are variable, so, by setting them neatly, can suitably adjust the moment of shooting.For example, only be made as even number, the then whole zone shooting to cutting tip 102 every 1 week as value with N.In addition, in the occasion that n is fixed as specific value, the only externally specific region of circumference 102b shooting serially.
Obtain the moment that makes illuminating part 107a luminous according to above-mentioned formula (1) and formula (2), for example under the control of flash of light control part 118, side by side make a video recording by image unit 114 with the luminous moment of light source 120, then can obtain to discern clearly the image in whole zone of the 102b of outer peripheral edges portion of cutting tip 102, so, can be not do not judge the having or not of damaged, wearing and tearing of cutting tip 102 with omitting.
By image processing part carry out binaryzation image be sent to have CPU, the damaged judging part 130 of memory and wearing and tearing judging part 129.At wearing and tearing judging part 129, judge damaged size, the degree of the cutting blade 102a that results from cutting tip 102, judge the damaged feasible value that whether surpasses.Wearing and tearing judging part 129 is judged size, the degree of the wearing and tearing of the cutting blade 102a that results from cutting tip 102, judges whether wearing and tearing have surpassed feasible value.Specifically carry out following such processing.
In damaged judging part 130, calculate the shared area of cutting blade 102a of the cutting tip 102 in the binary image according to pixel count, be stored in memory.This processing can be carried out all images of shooting, and the image that also can only select a part carries out.
Detecting the damaged occasion of cutting tip 102, all area values of relatively obtaining from wherein obtaining maximum and minimum of a value, are obtained the poor of maximum and minimum of a value.This difference illustrates the damaged size of the 102b of outer peripheral edges portion that results from cutting tip 102.That is, do not having damaged occasion fully, the difference of maximum and minimum of a value is 0.
Then, judge that this difference of obtaining is whether below predetermined feasible value.Predetermined feasible value can store memory in advance from operating unit 2 inputs shown in Figure 1.Below feasible value, no matter then have or do not have damagedly, damaged judging part 130 all can be regarded it as to not influencing the degree of cutting, continues cutting like this as the difference of maximum and minimum of a value.On the other hand, surpass the occasion of feasible value in the difference of maximum and minimum of a value, as still continuing cutting, the danger that then exists the quality of device to descend is so damaged judging part 130 is with this intelligence aids operator.As the method for circular, send tweeting sound, be shown to method such as display unit 3.The operator who receives circular is interrupted cutting, cutting tip is replaced by new cutting tip, thereby can avoids forming low-quality device in advance.
Judge at wearing and tearing judging part 129 whether the wear extent of the cutting blade 102a of cutting tip 102 surpasses the occasion of predetermined feasible value, in advance the cutting blade outer peripheral edges portion of unworn untapped cutting tip is made a video recording and with image binaryzation, the area in the zone that the cutting tip in this binary image is occupied is stored in the memory.Then, regularly or always to the cutting blade 102a shooting of the cutting tip 102 in the cutting, behind the image binaryzation that obtains, obtain cutting tip 102 area occupied in the binary image, obtain the poor of untapped cutting tip area occupied in this area obtained and the image one by one, less than the feasible value of importing, be stored in memory in advance, judge then that wearing and tearing are in permissible range as this difference.On the other hand, be the occasion more than the feasible value that is stored in memory, judge that wearing and tearing have surpassed permissible range, the circular operator in its difference.The operator who receives circular is interrupted cutting, cutting tip is replaced by new cutting tip, thereby can avoids forming low-quality device in advance.
Claims (5)
1. a topping machanism comprises the grain-clamping table that keeps machined object at least, has the cutting unit of the cutting tip that the machined object that remains in this grain-clamping table is cut, and the cutting tip detecting unit of the state of the cutting blade of this cutting tip of detection; It is characterized in that:
This cutting unit has the blade cover, and the blade cover has the cutting (operating) water nozzle that cutting water is supplied to this cutting tip;
This cutting tip detecting unit comprises luminescence unit and image unit at least; This luminescence unit comprises light source, and this light source shines the cutting blade of this cutting tip; This image unit comprise with this luminescence unit in the face of, imaging apparatus that the cutting blade of this cutting tip is made a video recording;
This luminescence unit and this image unit are installed on the blade cover;
Make the flash of light control part of above-mentioned light source flash of light be connected to above-mentioned light source, as the diameter of establishing the cutting blade of above-mentioned cutting tip is D, unit is mm, the rotating speed of this cutting tip is M, unit is rpm, the outer peripheral edges portion width of the cutting blade of this cutting tip in 1 image that is obtained by above-mentioned image unit is W, and unit is mm, then should flash of light control part basis
K≥πD/W
Obtain full Zhou Jinhang to the outer peripheral edges portion of the cutting blade of this cutting tip needed picture number K that makes a video recording,
In addition, establishing N is the rotating number of times * positive integer of cutting tip, and establishing n is the integer that changes from 0 to above-mentioned picture number K, can basis
T＝{60/M}N+{60/(MK)}n
Obtain the moment T that makes above-mentioned luminescence unit luminous, unit is second.
2. topping machanism according to claim 1 is characterized in that: above-mentioned image unit has microscope and speculum; This speculum is positioned on the advance route of the light of above-mentioned luminescence unit irradiation, and the picture that comprises above-mentioned cutting tip is reflected, and is delivered to this microscope;
On this microscope, connect above-mentioned imaging apparatus.
3. topping machanism according to claim 1 is characterized in that: above-mentioned luminescence unit has speculum, and this speculum reflects this light in the mode that the illumination of will send is mapped to the cutting blade of above-mentioned cutting tip.
4. according to claim 1,2 or 3 described topping machanisms, it is characterized in that: connect damaged judging part at above-mentioned image unit, whether the damaged size of the cutting blade of the above-mentioned cutting tip of this damaged judgement section judges surpasses feasible value.
5. according to claim 1,2 or 3 described topping machanisms, it is characterized in that: connect the wearing and tearing judging part at above-mentioned image unit, whether the wear extent of the above-mentioned cutting tip of this wearing and tearing judgement section judges surpasses feasible value.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005354751 | 2005-12-08 | ||
| JP2005354751A JP4791813B2 (en) | 2005-12-08 | 2005-12-08 | Cutting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1978131A CN1978131A (en) | 2007-06-13 |
| CN100566931C true CN100566931C (en) | 2009-12-09 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101640941A Active CN100566931C (en) | 2005-12-08 | 2006-12-07 | Topping machanism |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4791813B2 (en) |
| CN (1) | CN100566931C (en) |
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| US6216682B1 (en) * | 1998-07-06 | 2001-04-17 | Disco Corporation | Cutting apparatus |
| CN2584388Y (en) * | 2002-12-17 | 2003-11-05 | 中国科学院物理研究所 | Chip cutting machine |
| CN1550287A (en) * | 2003-02-21 | 2004-12-01 | ��ǿ�ʽ | Numerical control unit |
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| JP2627913B2 (en) * | 1988-02-17 | 1997-07-09 | 株式会社デイスコ | Processing equipment |
| JPH05253928A (en) * | 1992-03-11 | 1993-10-05 | Komatsu Denshi Kinzoku Kk | Method for imaging tip of inner circumferential blade |
| JP3162580B2 (en) * | 1994-08-09 | 2001-05-08 | セイコー精機株式会社 | Dicing equipment |
| JP2955936B2 (en) * | 1998-03-06 | 1999-10-04 | 株式会社東京精密 | Dicing equipment |
| JP3282145B2 (en) * | 1998-12-21 | 2002-05-13 | 株式会社東京精密 | Dicing equipment |
| JP4462717B2 (en) * | 2000-05-22 | 2010-05-12 | 株式会社ディスコ | Rotating blade position detection device |
| JP2002370140A (en) * | 2001-06-12 | 2002-12-24 | Disco Abrasive Syst Ltd | Blade monitoring device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6216682B1 (en) * | 1998-07-06 | 2001-04-17 | Disco Corporation | Cutting apparatus |
| CN2584388Y (en) * | 2002-12-17 | 2003-11-05 | 中国科学院物理研究所 | Chip cutting machine |
| CN1550287A (en) * | 2003-02-21 | 2004-12-01 | ��ǿ�ʽ | Numerical control unit |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104616972A (en) * | 2013-11-05 | 2015-05-13 | 株式会社迪思科 | Cutting device and cutting method |
| CN104616972B (en) * | 2013-11-05 | 2019-11-29 | 株式会社迪思科 | Cutting apparatus and cutting process |
| TWI684576B (en) * | 2015-06-29 | 2020-02-11 | 日商三星鑽石工業股份有限公司 | Breaking device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007152531A (en) | 2007-06-21 |
| JP4791813B2 (en) | 2011-10-12 |
| CN1978131A (en) | 2007-06-13 |
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