CN102866134B - Optical system for laser-induced detection - Google Patents
Optical system for laser-induced detection Download PDFInfo
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- CN102866134B CN102866134B CN201210308764.8A CN201210308764A CN102866134B CN 102866134 B CN102866134 B CN 102866134B CN 201210308764 A CN201210308764 A CN 201210308764A CN 102866134 B CN102866134 B CN 102866134B
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Abstract
The invention belongs to the field of laser-induced detection, and relates to a laser lead-in optical system of a novel laser-induced detecting device, in particular to a laser lead-in optical system by which laser is gathered on the surface of a substance to be detected, ingredients of the substance to be detected are obtained through plasma spectroscopy triggered by the laser, or defects in the material are obtained by analysis through ultrasound stimulated in the substance and on the surface of the substance through the laser. The laser lead-in optical system comprises an outer sleeve, a beam splitter prism, a beam splitter baffle plate, a light beam selecting baffle plate and a light gathering sleeve, the light gathering sleeve can be replaced by a reflector group, or an electric controller or a focusing lens can be added. Induced adjustment and control are realized by a method of splitting laser beams, controlling the energy of a single laser beam to be lower than an induced stimulant threshold value, and controlling the energy of the laser beams to be higher than the stimulant threshold value when the laser beams are combined, and the problem that the laser is focused on the substance to be detected or gas breakdown is caused can be solved.
Description
Technical field
The present invention relates to the laser import optical system of a kind of new pattern laser induction pick-up unit, particularly relate to a kind of surface laser being converged in tested substance, detected material composition is obtained by laser institute activated plasma spectrum, or to be encouraged at material internal and surface by laser ultrasonicly carry out analyzing the laser import optical system obtaining material internal defect, belong to induced with laser detection field.
Background technology
Laser induced plasma spectroscopy (Laser Induced Plasma Spectroscopy, LIPS) detection technique, be that one utilizes pulse laser ablation material to produce plasma, carry out analytical technology that is qualitative or quantitative examination Matter Composition by plasma emission spectroscopy.It has applied widely, analysis speed fast, measure destructive little, can long-range non-cpntact measurement and the advantages such as detection in real time can be realized.Laser-induced plasma spectroscopy is a kind of quantitative analysis tech of the emission spectrum produced of interacting based on laser and material, the method only needs a few microgram in measuring process, can Nondestructive measurement be realized, and the ultimate analysis to any physical state material can be realized without the need to sample pretreatment.Laser-induced plasma spectroscopy carries out quantitative test by calibration to the element in material, and detectability and precision meet application demand completely, are now widely used in various fields.
On the other hand, induced with laser ultrasonic detecting technology utilizes laser to excite and detects ultrasonic Dynamic Non-Destruction Measurement, and Laser Focusing is behind measured material surface, and illuminated material can expand, and forms thermoelastic effect or melt erosion effect.Thermoelastic effect or to melt that erosion effect can inspire with illuminated laser spot be the ultrasound wave in source.Compared with traditional piezoelectric supersonic detection technique, induced with laser ultrasonic detecting technology has the advantages such as noncontact, broadband and some launch and accept.Therefore induced with laser ultrasonic detecting technology material sign, defects detection, process monitoring, and under the particular surroundings such as the workpiece of complex topography or high temperature, high pressure, burn into radiation equipment detection or monitoring in applied.
The protection of this respect that at present had some patents to carry out both at home and abroad, such as application number is laser-ultrasound the cannot-harm-detection device of 200780101871.0, is converged to after above material by laser scioptics, is realized large-area Scanning Detction by folding advancing.Application number is the patent of US2003/0172736A1, describes a kind of induced with laser ultrasonic testing system adopting optical fiber structure, and induced with laser ultrasonic action source and induced with laser ultrasound detection signal lens are coaxially integrated and realized detecting by this system.US Patent No. 7671349B2 protects a kind of device of laser induced plasma, adopts a kind of collection structure comprising concave mirror to realize laser to converge on detected material, compact conformation, comparatively practical.
For Laser-induced plasma spectroscopy and induced with laser ultrasonic detecting technology, all need optical system laser to be converged in the surface of detected material, implement induced with laser.The laser of induction adopts lens focus usually, and the greatest problem that this mode faces is that focal spot size is smaller, once detected material fluctuates to the spacing of condenser lens, will affect the enforcement of detection.For Laser-induced plasma spectroscopy, when focus is on material surface, will gas breakdown be there is, make to monitor the spectrum that the spectrum obtained is air spectrum instead of detected material; For induced with laser ultrasonic detecting technology, when induced laser converges on material surface just, will damage, destroy detected member.
Summary of the invention
The object of the invention is to provide the optics import system in a kind of new induced with laser detection technique, with solving Laser-induced plasma spectroscopy and the importing laser adjustment problem of induced with laser ultrasonic detecting technology in implementation process.The present invention passes through laser beam splitter, and control single beam laser energy under the threshold value of induction excitation, and the method be on excitation threshold realizes the regulable control of inducing during multi beam merging, and upper at detected material of Laser Focusing can be avoided, or cause the problem of gas breakdown simultaneously.
The object of the present invention is achieved like this:
The optical system detected for induced with laser that the present invention relates to, as depicted in figs. 1 and 2, comprise: outer sleeve 1, Amici prism 2, light splitting shutter 3, light beam select baffle plate 4, optically focused sleeve 5, optically focused sleeve 5 can also be replaced to catoptron group 6, or increase electric controller 7, or increase focus lens group 8.
In described technical scheme, described outer sleeve 1 is used for the laser beam converge of induction excitation on detected material surface;
In described technical scheme, described Amici prism 2 is used for the incident laser of induction to be dispersed into multi beam;
In described technical scheme, described light splitting shutter 3 is used for the laser after through beam splitting, and blocks the laser being selected baffle plate 4 to reflect by light beam, avoids scattering to disturb;
In described technical scheme, described light beam selects baffle plate 4 to be used for selecting the multiple laser of incidence, control wherein part or all of through;
In described technical scheme, described optically focused sleeve 5 inwall can be terrace with edge face, round table surface or composite surface, be made up of medal polish or other materials plated film, be used for reflecting and change the direction of multi beam induced laser, multi beam induced laser is converged on one face jointly.
In described technical scheme, described catoptron group 6 can be made up of the material film plating such as medal polish or glass, can be plane also can be concave surface or convex surface, and function is identical with optically focused sleeve 5.
In described technical scheme, described electric controller 7 inside comprises drive motor and gear train, is used for realizing light splitting shutter 3, Electronic control that light beam selects baffle plate 4, optically focused sleeve 5.
In described technical scheme, before described focus lens group 8 can be added to Amici prism 2, between Amici prism 2 and light splitting shutter 3, light splitting shutter 3 and light beam is selected between baffle plate 4, light beam is selected between baffle plate 4 and optically focused sleeve 5, be used for realizing the convergence of single beam.
Compared with the prior art the present invention has following advantage:
No matter be Laser induced plasma spectroscopy detection technique or induced with laser ultrasonic detecting technology, all need surface laser being converged in detected member to encourage.Existing exciting technique is that laser is converged to material surface to realize the excitation of high-energy-density by scioptics, but there is air breakdown, focus needs pinpoint problem.Present invention, avoiding the existence of lens focus focus, realize induced laser induction by the overlap of multiple laser, the not clear sense in such focusing position, effectively can avoid the damage of the gas breakdown of induced laser and detected material.
Accompanying drawing explanation
Fig. 1 is the cut-open view of the optical system for induced with laser detection.
Fig. 2 is the outside drawing of the optical system for induced with laser detection.
Fig. 3 is the inner structure of the optical system for induced with laser detection.
Fig. 4 is the another kind of inner structure scheme case of the optical system for induced with laser detection.
Fig. 5 is one 90 degree 4 pieces one deck Amici prism structural drawing of the optical system for induced with laser detection.
Fig. 6 restraints light splitting type shielding plate structure figure for the one 4 of the optical system of induced with laser detection.
Fig. 7 selects baffle arrangement figure for a kind of light beam of the optical system of induced with laser detection.
Fig. 8 is one 45 degree 8 pieces one deck Amici prism structural drawing of the optical system for induced with laser detection.
Fig. 9 is the two-layer light splitting prism structure figure of one 45 degree 8 pieces of the optical system for induced with laser detection.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is described in more detail.
Embodiment 1
With reference to figure 1, Fig. 2 and Fig. 3, make an optical system detected for induced with laser.Outer sleeve 1 is made up of stainless steel welded, and inside is helicitic texture, steps up fixing optical element by comprising externally threaded becket.Along logical fairing sequence, first optical element is focus lens group 8, and second optical element is Amici prism 2, is used for the incident laser of induction to be dispersed into 4 bundles, and structure is as Fig. 5.3rd optical element is light splitting shutter 3, is made up, comprises the light hole of 4 diameter 3mm above of the aluminium flake of thickness 1mm, angle circumference array in 90 °, and structure is as Fig. 6, and the light separated by Amici prism 2 is through these 4 light hole injections.4th optical element is that light beam selects baffle plate 4, and to arrange 12 holes along a circumference above, structure, as Fig. 7, selects baffle plate 4 by rotary light beam, can realize 1,2,3,4 bundle laser and select baffle plate 4 by light beam.Scattering between baffle plate 4 and light splitting shutter 3 is selected at light beam by the laser that light beam selects baffle plate 4 to block.5th optical element is optically focused sleeve 5, and inwall is round platform curved surface, plates highly reflecting films form by metallic aluminium polishing, selects the laser beam of baffle plate 4 transmission to change direction by optically focused sleeve 5, jointly converge on detected face through light beam.Outside outer sleeve 1, attachment is provided with electric controller 7, is used for realizing, to the adjustment of light splitting shutter 3, light beam selection baffle plate 4, realizing the Electronic control to laser light splitting by external control signal.
Embodiment 2
With reference to figure 4, make an optical system detected for induced with laser.Outer sleeve 1 is processed into by aluminium sheet, and inside is shift sleeve structure, and each element-external has sleeve.Optical element location is realized by trip bolt.Along logical fairing sequence, first optical element is Amici prism 2, is used for the incident laser of induction to be dispersed into 8 bundles, as Fig. 8.Second optical element is light splitting shutter 3, is made up of the steel disc of thickness 0.5mm, comprises the light hole of 8 diameter 5mm above, and the light separated by Amici prism 2 is through these 8 light hole injections.3rd optical element is that light beam selects baffle plate 4, above along a diameter 50mm circumference angularly pitch arrays to arrange 20 holes, select baffle plate 4 can realize 2,4,6,8 bundle laser by rotary light beam and select baffle plate 4 by light beam.Scattering between baffle plate 4 and light splitting shutter 3 is selected at light beam by the laser that light beam selects baffle plate 4 to block.4th optical element is optically focused sleeve 5, and inwall is provided with catoptron group 6, and catoptron is circular, diameter 10mm.Select the laser beam of baffle plate 4 transmission to change direction by catoptron group 6 through light beam, jointly converge on detected face.In use, manually control the angle that light beam selects baffle plate 4, realize multiple laser and be radiated at material surface, realize induced with laser excitation.
Embodiment 3
With reference to figure 4, make an optical system detected for induced with laser.Outer sleeve 1 is processed into by aluminium sheet, and inside is shift sleeve structure, and each element-external has sleeve.Optical element location is realized by trip bolt.Along logical fairing sequence, first optical element is Amici prism 2, is used for the incident laser of induction to be dispersed into two-layer, and every layer 8 bundle, as Fig. 9.Second optical element is light splitting shutter 3, is made up of the steel disc of thickness 1mm, comprises the light hole of two-layer every layer of 8 diameter 3mm above, and the light separated by Amici prism 2 is through these 8 light hole injections.3rd optical element is that light beam selects baffle plate 4, above along a diameter 50mm circumference angularly spacing divide two-layer, every layer of array arrangement 20 holes, select baffle plate 4 can realize 4,8,12,16 bundle laser by rotary light beam and select baffle plate 4 by light beam.Scattering between baffle plate 4 and light splitting shutter 3 is selected at light beam by the laser that light beam selects baffle plate 4 to block.4th optical element is optically focused sleeve 5, and inwall is provided with catoptron group 6, and catoptron is circular, diameter 10mm.Select the laser beam of baffle plate 4 transmission to change direction by catoptron group 6 through light beam, jointly converge on detected face.In use, manually control the angle that light beam selects baffle plate 4, realize multiple laser and be radiated at material surface, realize induced with laser excitation.
Claims (7)
1. the optical system detected for induced with laser, comprise: outer sleeve (1), Amici prism (2), light splitting shutter (3), light beam select baffle plate (4), optically focused sleeve (5), optically focused sleeve (5) can also be replaced to catoptron group (6), or increase electric controller (7), or increase focus lens group (8);
Described outer sleeve (1) is used for the laser beam converge of induction excitation on detected material surface; Described Amici prism (2) is used for the incident laser of induction to be dispersed into multi beam; Described light splitting shutter (3) is used for the laser after through beam splitting, and blocks the laser being selected baffle plate (4) to reflect by light beam, avoids scattering to disturb; Described light beam selects baffle plate (4) to be used for selecting the multiple laser of incidence, control wherein part or all of through; Described optically focused sleeve (5) is used for reflecting and changes the direction of multi beam induced laser, and multi beam induced laser is converged on one face jointly; Described catoptron group (6) can be made up of the material film plating such as medal polish or glass, can be plane also can be concave surface or convex surface, and function is identical with optically focused sleeve (5); Described electric controller (7) inside comprises drive motor and gear train, is used for realizing light splitting shutter (3), Electronic control that light beam selects baffle plate (4), optically focused sleeve (5); It is front or between Amici prism (2) and light splitting shutter (3) or light splitting shutter (3) and light beam is selected between baffle plate (4) or light beam is selected between baffle plate (4) and optically focused sleeve (5) that described condenser lens (8) can be added to Amici prism (2), is used for realizing the convergence of single beam.
2. by the optical system detected for induced with laser according to claim 1, it is characterized in that, Amici prism (2) is used for realizing the light splitting of laser, and can be only 1 to 50 decile axially, every part in fan-shaped; Also can be that 1 to 50 decile radially combines with 1 to 50 decile axially, light beam is divided into 1 to 50 endless belt along the same center of circle, each endless belt carries out 1 to 50 decile.
3. by the optical system detected for induced with laser according to claim 1, it is characterized in that, the light splitting shutter (3) comprised and light beam select baffle plate (4) be used for realizing light beam through selection, select to arrange light splitting light hole along the circumference of or as many as 10 above baffle plate (4) at light splitting shutter (3) and light beam, circumferentially 1 to 100 hole can be comprised each, the spacing of this some holes is not etc., fundamental purpose is that light splitting shutter (3) and light beam select the hole on baffle plate (4) to coordinate, realize the laser light of different group number, and the shape in each hole can be circular, rectangle, trapezoidal or fan-shaped, be generally the circular hole of diameter at 1 to 20mm or the rectangle of monolateral length 1 to 20mm.
4. by the optical system detected for induced with laser according to claim 1, it is characterized in that, the optically focused sleeve (5) comprised is used for realizing the convergence separating light beam, inwall can be terrace with edge face, round table surface or composite surface, is made up of medal polish or plastics, glass, pottery plating highly reflecting films; Optically focused sleeve (5) can be crowded around stickup by the trapezoidal eyeglass of 3 to 30 and be formed, the hole of interior sky can be made up of aluminium, iron, copper by the mode of machining, shape can be cylindrical hole, the shape in hole that terrace with edge hole or sphere and cylinder and terrace with edge combine.
5. by the optical system detected for induced with laser according to claim 1, it is characterized in that, optically focused sleeve (5) can also replace to catoptron group (6), be made up of according to suitable angular displacement the catoptron of 1 to 50, these catoptrons can be metallic mirrors, also can be pottery, glass reflector, catoptron can be circular, rectangle or trapezoidal; Mirror reflection surface can be plane, concave surface or convex surface, can be sphere also can be aspheric surface.
6. by the optical system detected for induced with laser according to claim 1, it is characterized in that, before optically focused sleeve (5) or focus lens group (8) can be added below, realize the further convergence of multi-beam, and by realizing the accurate location of beams converge position to the adjustment of focus lens group (8); Focus lens group (8) can increase electric control system, realizes automatically regulating, or manually adjustment realizes.
7. by the optical system detected for induced with laser according to claim 1, it is characterized in that, after Amici prism (2), light splitting shutter (3) is front, focus lens group can be added, realize the further convergence of multi-beam, and by realizing the accurate location of beams converge position to the adjustment of focus lens group (8); Focus lens group (8) can increase electric control system, realizes automatically regulating, or manually adjustment realizes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210308764.8A CN102866134B (en) | 2012-08-28 | 2012-08-28 | Optical system for laser-induced detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210308764.8A CN102866134B (en) | 2012-08-28 | 2012-08-28 | Optical system for laser-induced detection |
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| Publication Number | Publication Date |
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| CN102866134A CN102866134A (en) | 2013-01-09 |
| CN102866134B true CN102866134B (en) | 2015-04-15 |
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| CN201210308764.8A Expired - Fee Related CN102866134B (en) | 2012-08-28 | 2012-08-28 | Optical system for laser-induced detection |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113720817B (en) * | 2021-08-27 | 2024-04-09 | 苏州国科均豪生物科技有限公司 | Disk-type microfluidic detection analysis system |
| CN114486853B (en) * | 2022-02-09 | 2022-11-18 | 西南大学 | Food Raman spectrum detection amplifying instrument capable of resisting interference |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1295262A (en) * | 1999-11-02 | 2001-05-16 | 奥托玛-泰克公司 | Device for generating several laser beams |
| CN2432001Y (en) * | 2000-06-21 | 2001-05-30 | 中国科学院光电技术研究所 | Laser interference photoetching system |
| US6532068B2 (en) * | 2001-07-17 | 2003-03-11 | National Research Council Of Canada | Method and apparatus for depth profile analysis by laser induced plasma spectros copy |
| CN102096130A (en) * | 2010-11-23 | 2011-06-15 | 上海诺司纬光电仪器有限公司 | Prism and multi-laser generating instrument with same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1223423A3 (en) * | 2001-01-16 | 2004-01-28 | National Research Council of Canada | Method and apparatus for enhanced laser-induced plasma spectroscopy using mixed-wavelength laser pulses |
| US7671349B2 (en) * | 2003-04-08 | 2010-03-02 | Cymer, Inc. | Laser produced plasma EUV light source |
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2012
- 2012-08-28 CN CN201210308764.8A patent/CN102866134B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1295262A (en) * | 1999-11-02 | 2001-05-16 | 奥托玛-泰克公司 | Device for generating several laser beams |
| CN2432001Y (en) * | 2000-06-21 | 2001-05-30 | 中国科学院光电技术研究所 | Laser interference photoetching system |
| US6532068B2 (en) * | 2001-07-17 | 2003-03-11 | National Research Council Of Canada | Method and apparatus for depth profile analysis by laser induced plasma spectros copy |
| CN102096130A (en) * | 2010-11-23 | 2011-06-15 | 上海诺司纬光电仪器有限公司 | Prism and multi-laser generating instrument with same |
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