CN111323480A - Handheld automatic focusing laser ultrasonic nondestructive testing system - Google Patents

Handheld automatic focusing laser ultrasonic nondestructive testing system Download PDF

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Publication number
CN111323480A
CN111323480A CN202010107939.3A CN202010107939A CN111323480A CN 111323480 A CN111323480 A CN 111323480A CN 202010107939 A CN202010107939 A CN 202010107939A CN 111323480 A CN111323480 A CN 111323480A
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China
Prior art keywords
lens
light
convex lens
beam splitter
fiber
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CN202010107939.3A
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Chinese (zh)
Inventor
丁雷
颜学俊
卢明辉
鲁强兵
钱斯文
钱利强
耿开胜
徐晓东
陈延峰
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Nanjing Guangsheng Superstructure Materials Research Institute Co ltd
Nanjing University
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Nanjing Guangsheng Superstructure Materials Research Institute Co ltd
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Priority to CN202010107939.3A priority Critical patent/CN111323480A/en
Publication of CN111323480A publication Critical patent/CN111323480A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids

Abstract

The invention provides a hand-held automatic focusing laser ultrasonic nondestructive testing system, in particular to the field of laser ultrasonic nondestructive testing, wherein excitation light is introduced into an optical fiber collimator, the optical fiber collimator corrects a beam divergence angle to obtain a beam of parallel light, and the beam of parallel light is divided into two beams by a beam splitter; parallel light can expand the light spot through a beam expander consisting of a concave lens and a first convex lens, then is focused on a workpiece to be detected through a light outlet window through a second convex lens controlled by an electric control motor to form a point light spot, the point light spot is scattered, then sequentially passes through the second convex lens, the first convex lens and the concave lens, is reflected by the beam expander to pass through a sleeve lens, and is captured and imaged by a high-speed CCD camera arranged on the sleeve lens; the coordinate tracking camera can transmit the updated focusing light spot position to the control and signal processing module; and finally, reconstructing the captured data through a high-performance computer to obtain a test result. The invention can improve the detection efficiency and has more humanized detection.

Description

Handheld automatic focusing laser ultrasonic nondestructive testing system
Technical Field
The invention belongs to the field of laser ultrasonic nondestructive testing, and particularly relates to a handheld automatic focusing laser ultrasonic nondestructive testing system.
Background
The non-destructive testing technique (NDT) is a method for testing and measuring the surface and internal structure, properties, state and other performance parameters of a test piece by means of advanced technology and equipment by taking a physical or chemical method as a means without damaging the test piece. The conventional detection method mainly comprises the following steps: 1. visual inspection. 2. And (3) fracture fatigue tensile test. 3. X-ray detection and 4, ultrasound detection.
The visual inspection method is a method in which defects and cracks on the surface of a workpiece are observed manually, and although some large cracks (relative to laser ultrasound) are visible on the surface, defects inside the workpiece cannot be obtained. Moreover, the obtained information is relatively single, and the physical characteristics of the workpiece such as stress strain cannot be predicted. The fracture fatigue tensile test is a destructive test as the name suggests, and can not meet the requirement of no damage for some 'expensive' workpieces. The X-ray detection can see some cracks inside the workpiece, but the detection precision of the X-ray detection cannot be achieved, and the X-ray detection is not sensitive to some tiny crack holes. Meanwhile, the X-ray has certain radioactivity, and the online integration is difficult to realize. The ultrasonic method is the mainstream method of the current nondestructive detection, and the basic idea is to transmit ultrasonic wave and receive ultrasonic wave through ultrasonic wave. When the ultrasonic wave propagates between the heterogeneous media, phenomena such as reflection, transmission, scattering and the like are generated, and people analyze and process signals after the ultrasonic wave interacts with substances, and finally extract relevant characteristics of defects. The ultrasonic detection has the characteristics of being capable of detecting the defects of different types of materials, high in depth tolerance of the defects, capable of accurately positioning the positions of the defects, high in detection sensitivity, convenient to use, high in detection speed, harmless to human bodies, convenient to implement in fault sites and the like. However, the technology is a contact detection technology, and cannot be applied to some extreme conditions (such as severe environments of high temperature, high pressure, toxicity and the like).
Laser ultrasound has attracted more and more attention as a non-contact nondestructive testing technology, and the basic idea is that ultrasonic signals are generated by pulse laser excitation and then received by a vibration meter or a transducer, the method can realize large-area and rapid scanning detection on a tested workpiece without contacting the surface of the test piece, and the detected signals have high resolution in time and space. However, this method requires an additional scanning galvanometer system, and the scanning path is relatively single, and for some complex workpieces, if one side is scanned and then another side is scanned, the workpiece has to be turned over, translated, etc., so that the scanning efficiency is greatly reduced, and the whole experimental environment (positioning, stability of the equipment, etc.) has slight changes.
Disclosure of Invention
In view of the above disadvantages, the present invention provides a hand-held automatic focusing laser ultrasonic nondestructive inspection system, which can perform real-time online monitoring on a workpiece in high temperature, high pressure and other environments, and can greatly improve the inspection efficiency and be more humanized due to the convenience of the hand-held laser probe.
The invention provides the following technical scheme:
a hand-held automatic focusing laser ultrasonic nondestructive testing system comprises a laser ultrasonic nondestructive testing probe, a nanosecond pulse laser, a high-speed signal acquisition card, a photoelectric detector, an optical fiber coupler, upper computer software, a multimode optical fiber, a coordinate tracking camera and a vibration meter;
the laser ultrasonic nondestructive testing probe comprises a shell, a variable-focus long-focus combined lens, a photoelectric detector, a beam splitter, an electric control motor, a high-speed CCD (charge coupled device) camera, an optical fiber collimator, a double-convex lens, a sleeve lens and a lead screw, wherein the variable-focus long-focus combined lens, the photoelectric detector, the beam splitter, the electric control motor, the high-speed CCD camera, the optical; the variable-focus long-focus combined lens comprises a concave lens, a first convex lens and a second convex lens;
the photoelectric detector and the high-speed CCD camera are positioned on two sides of the beam splitter, a biconvex lens is arranged between the photoelectric detector and the beam splitter, and a sleeve lens is arranged between the high-speed CCD camera and the beam splitter; two ends of the beam splitter are respectively provided with an optical fiber collimator and a concave lens, a first convex lens and a second convex lens which are sequentially arranged; a light outlet window is arranged on the shell at the outer side of the second convex lens;
the laser ultrasonic nondestructive testing probe is connected with the nanosecond pulse laser through a multimode fiber, and two ends of the fiber are respectively connected with a fiber collimator and a fiber coupler; the excitation light of the pulse laser is coupled to the fused quartz fiber through the fiber coupler, the excitation light is guided into the fiber collimator, the fiber collimator corrects the divergence angle of a light beam to obtain a beam of parallel light, and the beam of parallel light is divided into two beams through the beam splitter;
the part of parallel light passing through the beam splitter is focused by the biconvex lens, then is received by the photoelectric detector, and is used for triggering signals and calibrating single pulse laser energy;
the other part of parallel light passing through the beam splitter can pass through a beam splitter consisting of a concave lens and a first convex lens to perform beam expansion on the spot, then passes through a second convex lens controlled by an electric control motor, the second convex lens can translate back and forth in a transmission guide rail to further realize the control of the focusing point position, and then is focused on a workpiece to be detected through a light outlet window to form a point spot, and the point spot is scattered, then sequentially passes through the second convex lens, the first convex lens and the concave lens, is reflected by the beam splitter, passes through a sleeve lens, and is captured and imaged by a high-speed CCD camera arranged on the sleeve lens;
the CCD camera can feed back the size of the captured focusing light spot to the control and signal processing module, and the control and signal processing module sends a command to the electric control motor; the coordinate tracking camera can transmit the updated focusing light spot position to the control and signal processing module; and finally, reconstructing the captured data through a high-performance computer to obtain a test result.
Preferably, a transmission guide rail is arranged on the periphery of the second convex lens, a transmission wheel is connected to the side part of the transmission guide rail, a screw rod penetrates through the center of the transmission wheel, and the end part of the screw rod is connected with a driving shaft of the electric control motor; the bonding mode between the driving wheel and the driving guide rail is precise gear meshing, and the driving error is less than 300 microns.
Preferably, the bandwidth of the high-speed signal acquisition card reaches hundreds of MHz, the sampling rate reaches GSa/S, and the original signal can be restored with high fidelity.
Preferably, the upper computer software is MATLAB, and the image visualization algorithm principle is based on the characteristic of reciprocity between the excitation and the reception of ultrasonic waves. The vibration meter is a double-glass mixed interferometer, and the sensitivity is superior to 10 nanometers.
Preferably, the multimode fiber is a fused silica fiber, the fiber diameter of the fused silica fiber is 200 microns, and the two ends of the fused silica fiber are connected through SMA interfaces.
Preferably, the maximum distance of the front and back movement of the transmission guide rail is +/-20 mm according to the actual up-and-down shaking amplitude of the hand in the scanning process.
Preferably, the coordinate tracking camera is mounted on a firm and stable tripod to prevent the unstable factors such as shaking from causing errors to the coordinates of the laser focusing spot.
Preferably, the light-emitting window is internally provided with a plane mirror with high transmissivity for protecting the optical element inside the shell when the point light source is excited, and the lens is only required to be replaced by a circular plano-convex cylindrical lens when the line light source is excited, so that the operation is very convenient.
The invention has the beneficial effects that:
(1) the invention relates to a 'light-sound-light' technology which can carry out nondestructive detection on a workpiece under high temperature and high pressure by generating ultrasonic waves through light excitation and then detecting the ultrasonic waves through 'light'.
(2) The invention can carry out all-dimensional multi-angle scanning on the workpiece by only holding the laser excitation probe without a galvanometer scanning system, and has convenient operation.
(3) In the scanning process, focal spot deviation caused by hand shake is compensated in real time through a feedback correction circuit consisting of a CCD camera and a control motor, so that the experimental result is more accurate.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of an overall system of the present invention;
FIG. 2 is a schematic structural diagram of a laser ultrasonic nondestructive testing probe of the present invention;
FIG. 3 is a block diagram of the present invention;
reference numerals: 1. a nanosecond laser; 2. a fiber coupler; 3. melting the quartz multimode fiber; 4. a laser ultrasonic nondestructive testing probe; 5. a workpiece; 6. an optical filter; 7. a vibration meter; 8. collecting the card at a high speed; 9. a coordinate tracking camera; 10. A triangular bracket; 11. a high performance computer; 12. a laser module; 13. a coordinate tracking module; 14. a hand-held probe module; 15. a detection module; 16. a control signal processing module; 17. a housing; 18. a fiber collimator; 19. a lenticular lens; 20. a photodetector; 21. a beam splitter; 22. a sleeve lens; 23. a high-speed CCD camera; 24. an electrically controlled motor; 25. a lead screw; 26. a concave lens; 27. a first convex lens; 28. a driving wheel; 29. a drive rail; 30. a second convex lens; 31. a light exit window; 32. a circular plano-convex cylindrical lens.
Detailed Description
Example 1:
referring to the attached drawings 1 and 2 of the application, the device system comprises a nanosecond laser 1, an optical fiber coupler 2, a fused quartz multimode optical fiber 3, a laser ultrasonic nondestructive testing probe 4, a workpiece 5, an optical filter 6, a vibration meter 7, a high-speed acquisition card 8, a coordinate tracking camera 9, a triangular bracket 10 and a high-performance computer 11; the pulse width of the nanosecond pulse laser 1 is 8ns, the single pulse energy is less than 5mJ, and the repetition frequency is less than 50 Hz. Two ends of the fused quartz multimode fiber 3 are SMA joints which are respectively connected with the fiber coupler 2 and the fiber collimator 18. The back end of the laser ultrasonic nondestructive testing probe 4 is provided with three leads, wherein two leads connected with a high-speed CCD camera 23 and an electric control motor 24 are connected with a high-performance computer 11. The other wire is connected with the photoelectric detector 20 and the high-speed acquisition card 8 for triggering signals. The coordinate tracking camera 9 is fixed on the tripod. A 532nm optical filter 6 is arranged right in front of the vibration meter 7 to prevent excitation light in the nanosecond pulse laser pulse 1 from leaking into the vibration meter 7, so that interference on a measurement signal and damage to the vibration meter 7 are caused;
when the system works, excitation light emitted by a nanosecond pulse laser 1 is coupled into a fused quartz multimode fiber 3 through a fiber coupler 2 and then transmitted to a laser ultrasonic nondestructive testing probe 4 to focus a light spot on a workpiece 5 to be tested, and due to the fact that the action time of the nanosecond pulse and substances on the surface of the workpiece 5 is very short, the local part of the surface of the workpiece 5 can be heated and expanded, the local temperature cannot be diffused to the periphery, a temperature gradient can be generated, and ultrasonic waves can be further generated according to the stress balance principle. The ultrasonic wave mainly comprises three waves of different modes, namely surface acoustic wave, longitudinal wave and transverse wave. The ultrasonic wave will cause tiny vibration on the surface of the workpiece 5 when propagating on the surface and inside the workpiece, the vibration can be sensed by the vibration meter 7, and the vibration signal is converted into an electric signal and is synchronously transmitted to the high-speed signal acquisition card 8 and the high-performance computer 11. Meanwhile, the coordinate tracking camera 9 records the position of the excitation light spot in real time, and an automatic focusing system built in the laser ultrasonic nondestructive testing probe 4 can automatically focus according to the size of the light spot in real time so as to ensure that the focused light spot is on the workpiece 5. And transmitting the data to a high-performance computer 11, and finally, processing the data in time by the high-performance computer 11 according to a visualization algorithm to obtain a three-dimensional dynamic image, judging the positions and the sizes of the defects inside and on the surface of the workpiece 5 and giving a detailed analysis report.
Example 2:
referring to fig. 3 of the present application, a hand-held auto-focusing laser ultrasonic nondestructive testing system comprises: a laser module 12, a coordinate tracking module 13, a hand-held probe module 14, a control and signal processing module 16 and a detection module 15. The laser module 12 has a function of providing a stable nanometer pulse light source, the coordinate tracking module 13 has a function of finally exciting the position of a light spot in real time, the handheld probe module 14 has a function of associating the coordinate tracking module 13 and the control and signal processing module 16, the light spot is automatically focused and is subjected to signal triggering, the control and signal processing module 16 has a function of controlling the electric control motor 24 and carrying out high-speed acquisition on signals fed back by the vibration meter 7 and the photoelectric detector, and the detection module 15 has a function of capturing micro-vibration on the surface of the workpiece 5 and converting mechanical signals into electric signals.
Example 3:
referring to fig. 1 and 2 of the present application, the laser ultrasonic nondestructive testing probe includes a housing 17, and a variable-focus long-focus combined lens, a photodetector 20, a beam splitter 21, an electric control motor 24, a high-speed CCD camera 23, a fiber collimator 18, a double-convex lens 19, a sleeve lens 22, a lead screw 25, a transmission wheel 28, and a transmission guide rail 29 integrated in the housing.
The variable focal length combined lens includes a concave lens 26, a first convex lens 27, and a second convex lens 30.
Excitation light emitted by a pulse laser 1 is coupled to a fused quartz multimode fiber 3 through a fiber coupler 2, the excitation light is guided into a fiber collimator 18, the fiber collimator 18 corrects the divergence angle of a light beam to obtain a beam of parallel light, the beam of parallel light is divided into two beams through a beam splitter 21, and a part of reflected light is focused by a biconvex lens 19 and then received by a photoelectric detector 20 to trigger signals and calibrate the energy of single pulse laser.
The other part of the transmission light firstly passes through a beam expander composed of a concave lens 26 and a first convex lens 27 to expand the light spots, then passes through a second convex lens 30 controlled by an electric control motor 24, the second convex lens 30 can translate back and forth in a transmission guide rail 29 to further realize the control of the focusing point position, and then is focused on a workpiece to be detected through a light-emitting window 31 to form point light spots, and the point light spots are scattered, then sequentially pass through the second convex lens 30, the first convex lens 27 and the concave lens 26, are reflected by a beam splitter 21, pass through a sleeve lens 22, and are captured and imaged by a high-speed CCD camera 23 arranged on the sleeve lens.
The high-speed CCD camera 23 feeds the captured focusing light spot size back to the control and signal processing module 16 in real time, the control and signal processing module 16 immediately sends a command to the electric control motor 24 to control the electric control motor to rotate left or right, and then the electric control motor 24 drives the screw 25 to rotate, so that the transmission guide rail is driven to move forwards or backwards. Meanwhile, the coordinate tracking camera 9 continuously follows the position of the new focused light spot and records the new focused light spot in real time to feed back to the control and signal processing module 16, and finally, the captured data is quickly reconstructed through a specific algorithm to obtain dynamic change images of ultrasonic waves propagated on the surface and in the body of the workpiece and the position and size conditions of defects on the surface and in the body of the workpiece.
The bandwidth of the high-speed signal acquisition card reaches hundreds of MHz, the sampling rate reaches GSa/S, and the original signal can be restored with high fidelity.
The upper computer software is MATLAB, and the used image visualization algorithm principle is based on the characteristic of reciprocity between the excitation and the receiving of ultrasonic waves. The vibration meter is a double-glass mixed interferometer, and the sensitivity is superior to 10 nanometers.
The multimode fiber is a fused silica fiber with a fiber diameter of 200 microns, and the two ends of the fiber are connected by SMA interfaces.
According to the actual up-and-down shaking amplitude of the hand in the scanning process, the maximum distance of the forward and backward movement of the transmission guide rail is +/-20 mm.
The bonding mode between the driving wheel and the driving guide rail is precise gear meshing, and the driving error is less than 300 microns.
The coordinate tracking camera is installed on a firm and stable tripod to prevent the error of unstable factors such as shaking and the like on the coordinates of a laser focusing spot.
When the light-emitting window is excited by the point light source, a plane mirror with high transmittance is arranged in the window and used for protecting an optical element inside the shell, and when the light-emitting window is excited by the line light source, only the lens needs to be replaced by a circular plane-convex cylindrical lens, so that the operation is very convenient.
The implementation steps are as follows:
s1, assembling each device according to the figure 1, opening each device, and adjusting the signal of the vibration meter 7 to be the strongest;
s2, selecting a required lens (point source excitation or line source excitation), and scanning according to a scanning path required by an experiment;
s3, carrying out three-dimensional dynamic visual reconstruction on the data after the scanning is finished and acquiring a detailed detection report;
and S4, closing the experimental equipment in sequence after the experiment is finished.
Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that various changes, modifications and substitutions can be made without departing from the spirit and scope of the invention as defined by the appended claims. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. The utility model provides a hand-held type auto focus laser supersound nondestructive test system which characterized in that: the system comprises a laser ultrasonic nondestructive testing probe, a nanosecond pulse laser, a high-speed signal acquisition card, a photoelectric detector, an optical fiber coupler, upper computer software, a multimode optical fiber, a coordinate tracking camera and a vibration meter;
the laser ultrasonic nondestructive testing probe comprises a shell, a variable-focus long-focus combined lens, a photoelectric detector, a beam splitter, an electric control motor, a high-speed CCD (charge coupled device) camera, an optical fiber collimator, a double-convex lens, a sleeve lens and a lead screw, wherein the variable-focus long-focus combined lens, the photoelectric detector, the beam splitter, the electric control motor, the high-speed CCD camera, the optical; the variable-focus long-focus combined lens comprises a concave lens, a first convex lens and a second convex lens;
the photoelectric detector and the high-speed CCD camera are positioned on two sides of the beam splitter, a biconvex lens is arranged between the photoelectric detector and the beam splitter, and a sleeve lens is arranged between the high-speed CCD camera and the beam splitter; two ends of the beam splitter are respectively provided with an optical fiber collimator and a concave lens, a first convex lens and a second convex lens which are sequentially arranged; a light outlet window is arranged on the shell at the outer side of the second convex lens;
the laser ultrasonic nondestructive testing probe is connected with the nanosecond pulse laser through a multimode fiber, and two ends of the fiber are respectively connected with a fiber collimator and a fiber coupler; the excitation light of the pulse laser is coupled to the fused quartz fiber through the fiber coupler, the excitation light is guided into the fiber collimator, the fiber collimator corrects the divergence angle of a light beam to obtain a beam of parallel light, and the beam of parallel light is divided into two beams through the beam splitter;
part of parallel light passing through the beam splitter is focused by the biconvex lens, then is received by the photoelectric detector, and is used for triggering signals and calibrating single pulse laser energy; the other part of parallel light passing through the beam splitter can pass through a beam splitter consisting of a concave lens and a first convex lens to perform beam expansion on the spot, then passes through a second convex lens controlled by an electric control motor, the second convex lens can translate back and forth in a transmission guide rail to further realize the control of the focusing point position, and then is focused on a workpiece to be detected through a light outlet window to form a point spot, and the point spot is scattered, then sequentially passes through the second convex lens, the first convex lens and the concave lens, is reflected by the beam splitter, passes through a sleeve lens, and is captured and imaged by a high-speed CCD camera arranged on the sleeve lens;
the CCD camera can feed back the size of the captured focusing light spot to the control and signal processing module, and the control and signal processing module sends a command to the electric control motor; the coordinate tracking camera can transmit the updated focusing light spot position to the control and signal processing module; and finally, reconstructing the captured data through a high-performance computer to obtain a test result.
2. The hand-held autofocus laser ultrasonic non-destructive inspection system of claim 1, wherein: a transmission guide rail is arranged on the periphery of the second convex lens, a transmission wheel is connected to the side part of the transmission guide rail, a lead screw penetrates through the center of the transmission wheel, and the end part of the lead screw is connected with a driving shaft of an electric control motor; the bonding mode between the driving wheel and the driving guide rail is gear meshing.
3. The hand-held autofocus laser ultrasonic non-destructive inspection system of claim 2, wherein: the distance of the transmission guide rail moving forwards and backwards is +/-20 mm.
4. The hand-held autofocus laser ultrasonic non-destructive inspection system of claim 1, wherein: the bandwidth of the high-speed signal acquisition card is 100-600 MHz, and the sampling rate is 1-10 GSa/S; the upper computer software is MATLAB, and the vibration meter is a double-glass mixed interferometer.
5. The hand-held autofocus laser ultrasonic non-destructive inspection system of claim 1, wherein: the multimode fiber is fused silica fiber with a fiber diameter of 200 microns, and the two ends of the multimode fiber are connected in an SMA interface mode.
6. The hand-held autofocus laser ultrasonic non-destructive inspection system of claim 1, wherein: the coordinate tracking camera is arranged on the tripod.
7. The hand-held autofocus laser ultrasonic non-destructive inspection system of claim 1, wherein: when the light-emitting window is excited by a point light source, a plane mirror with high transmissivity is arranged in the window, or when the light-emitting window is excited by a line light source, a circular plano-convex cylindrical lens is adopted.
CN202010107939.3A 2020-02-21 2020-02-21 Handheld automatic focusing laser ultrasonic nondestructive testing system Pending CN111323480A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
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CN113588566A (en) * 2021-08-23 2021-11-02 南京大学 Laser-ultrasonic-based laser spot welding micro-welding point quality detection device and method
CN114018822A (en) * 2021-09-18 2022-02-08 宝宇(武汉)激光技术有限公司 Remote laser nondestructive flaw detection device and method
CN114088811A (en) * 2021-11-16 2022-02-25 宝宇(武汉)激光技术有限公司 Nondestructive testing method and system for laser variable-focus special-shaped workpiece
CN115656188A (en) * 2022-12-12 2023-01-31 北京国光领航科技有限公司 Self-calibration laser therapeutic instrument
CN117443858A (en) * 2023-12-26 2024-01-26 合肥国镜仪器科技有限公司 Cleaning method and cleaning system for cold field electron source

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113588566A (en) * 2021-08-23 2021-11-02 南京大学 Laser-ultrasonic-based laser spot welding micro-welding point quality detection device and method
CN113588566B (en) * 2021-08-23 2022-06-21 南京大学 Laser-ultrasonic-based laser spot welding micro-welding point quality detection device and method
CN114018822A (en) * 2021-09-18 2022-02-08 宝宇(武汉)激光技术有限公司 Remote laser nondestructive flaw detection device and method
CN114018822B (en) * 2021-09-18 2023-03-21 宝宇(武汉)激光技术有限公司 Remote laser nondestructive flaw detection device and method
CN114088811A (en) * 2021-11-16 2022-02-25 宝宇(武汉)激光技术有限公司 Nondestructive testing method and system for laser variable-focus special-shaped workpiece
CN115656188A (en) * 2022-12-12 2023-01-31 北京国光领航科技有限公司 Self-calibration laser therapeutic instrument
CN115656188B (en) * 2022-12-12 2023-04-11 北京国光领航科技有限公司 Self-calibration laser therapeutic instrument
CN117443858A (en) * 2023-12-26 2024-01-26 合肥国镜仪器科技有限公司 Cleaning method and cleaning system for cold field electron source
CN117443858B (en) * 2023-12-26 2024-03-05 合肥国镜仪器科技有限公司 Cleaning method and cleaning system for cold field electron source

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