CN102862239B - Silicon rod rotates the cutting Digit Control Machine Tool that floats - Google Patents

Silicon rod rotates the cutting Digit Control Machine Tool that floats Download PDF

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Publication number
CN102862239B
CN102862239B CN201210360148.7A CN201210360148A CN102862239B CN 102862239 B CN102862239 B CN 102862239B CN 201210360148 A CN201210360148 A CN 201210360148A CN 102862239 B CN102862239 B CN 102862239B
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China
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silicon rod
cutting
rotation support
active rotation
support roller
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CN201210360148.7A
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Chinese (zh)
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CN102862239A (en
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刘鸿彬
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刘鸿彬
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Publication of CN102862239B publication Critical patent/CN102862239B/en

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Abstract

A kind of silicon rod rotates the cutting Digit Control Machine Tool that floats and relates to a kind of Digit Control Machine Tool, particularly relates to a kind of numerical control cutting machine for cutting silicon rod.Comprise numerical control box, lathe bed, transmission mechanism, be arranged on cutting mechanism on lathe bed and silicon rod clamping device, it is characterized in that: described silicon rod clamping device comprises active rotation support roller and the floating rotating pinch roller that vertical direction coordinates clamping silicon rod; Described floating rotating pinch roller connects elastic pressuring clamping device, and elastic pressuring clamping device drives floating rotating pinch roller to compress silicon rod; Described transmission mechanism is connected with active rotation supporting-roller shaft.The present invention can, appearance irregular, the breakable polycrystalline silicon rod such as workpiece have axial bending, diametric(al) have ovality, diameter inconsistent more sparse to material structure density when floating rotating state, realizing non-concentric axial-rotation to float radius cutting, is a kind of Digit Control Machine Tool of novel automatic radius cutting.

Description

Silicon rod rotates the cutting Digit Control Machine Tool that floats

Technical field

The present invention relates to a kind of Digit Control Machine Tool, particularly relating to a kind of numerical control cutting machine for cutting silicon rod.

Background technology

In polysilicon industry production producer domestic at present, all need the silicon rod of the 2--8 inch diameter restored to carry out radial Length-fixing cutting, for product inspection with meet different subsequent processing need of productions.

The patent No. is 200920287130.2, publication date is that the Chinese patent " list/polycrystalline silicon rod cutting machine " of 2010.12.22 discloses a kind of silicon rod cutting machine, this cutting machine comprises crystal bar fixture, diced system and cooling system, described crystal bar fixture comprises and somely fixes to clamp frock, fixing to clamp frock establishes on the table, fix to clamp the left and right sides that frock is located at grinding wheel respectively, workbench is provided with dust cover and rule in addition, this utility model mainly utilizes and fixes to clamp frock and part to be cut and cut-out are fixed respectively, reliable to reach location, cut lengths are stablized, solve the object moving and collapse the problems such as limit in crystal bar cutting process.

The patent No. is 201120383908.7, publication date is that the Chinese patent " a kind of silicon rod cutting device of improvement " of 2012.5.30 discloses a kind of silicon rod cutting device, it comprises home roll, gauze and main body feed unit clamp system, main body feed unit clamp system comprises two groups, the left and right clamping unit be positioned at above gauze, clamping unit is included in Silicon rod workpiece plate and installs work plate, steel disc is set up between Silicon rod workpiece plate and installation work plate, by artificially forcing down silicon rod inside height in advance, when cutting is completed, inside and outside both sides depth of cut is consistent, and then reach the object reducing fragment.

The cutting mode of above-mentioned two patents all adopts full diameter cutting mode, and thus its vibration is comparatively large, and the axis that cut direction cannot be bending with silicon rod keeps vertical, and cut part is easily broken.

The patent No. is 200820223950.0, publication date is that the Chinese patent " silicon rod taper or cylindrical numerical control grinder " of 2009.10.21 discloses a kind of silicon rod numerically control grinder, comprise frame and numerical control box, also comprise and control reciprocating workbench by numerical control box, frame be provided with the rack of place work piece and controlled to drive the workpiece on rack to make the transmission device of concentric circles rotation by numerical control box, being provided with the emery wheel that at least one is controlled by numerical control box to coordinate with workpiece end to be ground on the table.Its goal of the invention is ground by silicon core rod end concentrically to spend high cylinder or cone, and silicon plug one end is clamped by transmission device, and the other end lies in a horizontal plane on rack, its objective is that allowing silicon plug do concentric circles on the table rotates.

In reality is produced, due to the specific reasons of production technology, the polycrystalline silicon rod lattice tissue being reduced out comparatively loosens usually, intensity is poor; Cannot ensure within the scope of total length 2.8 meters axiality, all have bending; The ovality differed in size generally is produced at sectional area line of vision; Within the scope of different length, generally there is the not first-class multiple appearance irregular status of diameter.This silicon rod to be cut, using old-fashioned digital controlled cutting machine, single-point forced draught formula location is adopted to silicon rod, when carrying out radial direction with cutterhead instrument diameter cuts entirely, silicon rod itself is subject to very big bang, and the axis that cut direction cannot bend with silicon rod keeps vertical, cut part is very easily broken, is difficult to cut out finished product.Not only this traditional cutting technique and equipment, cause larger economic loss, but also incur loss through delay the production of subsequent processing, make enterprise's production cost significantly increase.

Summary of the invention

In order to overcome the defect of above-mentioned prior art, the invention provides a kind of silicon rod and rotate the cutting Digit Control Machine Tool that floats, this Digit Control Machine Tool can overcome the multiple irregular status that silicon rod appearance has completely, can be more sparse to material structure density, workpiece has axial bending, diametric(al) has ovality, the appearances such as diameter is inconsistent are irregular, breakable polycrystalline silicon rod is when floating rotating state, realize the automatic radius cutting of non-concentric axial-rotation, and in the process of cutting silicon rod, cut direction is all the time perpendicular to the axle center that silicon rod non-concentric rotates, namely the present invention can adjust silicon rod axially overall concentricity automatically, automatically the ovality because of silicon rod can be adjusted, flexibility, the drawback that the cylindrical object that not isometrical reason causes cannot rotate.

In order to solve the problems of the technologies described above, the technical solution used in the present invention is:

A kind of silicon rod rotates the cutting Digit Control Machine Tool that floats, comprise numerical control box, lathe bed, transmission mechanism, be arranged on cutting mechanism on lathe bed and silicon rod clamping device, it is characterized in that: described silicon rod clamping device comprises active rotation support roller and the floating rotating pinch roller that vertical direction coordinates clamping silicon rod; Described active rotation support roller drives silicon rod under the compression of floating rotating pinch roller, and the horizontal level of active rotation support roller and driven support roller makes non-concentric axial-rotation .

Described floating rotating pinch roller is vertically positioned at the top of silicon rod, and is connected with elastic squeezing unit, and elastic squeezing unit drives floating rotating pinch roller to press silicon rod around the shape of silicon rod cylindrical in good time.

Described active rotation support roller is positioned at the below of silicon rod, is connected with transmission mechanism, and transmission mechanism drives silicon rod to rotate by active rotation support roller.

Described active rotation support roller is two, and two active rotation supporting-roller shaft are to be arrangeding in parallel, and silicon rod is placed on two active rotation supporting-roller shaft in the groove formed.

Each section of described silicon rod have at least one group be made up of and the corresponding silicon rod clamping device arranged active rotation support roller and floating rotating pinch roller, has one group of silicon rod clamping device arranged by driven rotation support roller and floating rotating pinch roller correspondence at least, and the rotation support roller in each group silicon rod clamping device is positioned on same level position, top is provided with the elastic squeezing unit to silicon rod clamping.

Described elastic squeezing unit is floating cylinder, piston is provided with in described floating cylinder, piston connects a driving shaft, the other end of driving shaft connects cross bar, the two ends of cross bar connect floating rotating pinch roller respectively, floating cylinder drives driving shaft to press down, and drives the floating rotating pinch roller at cross bar two ends to press silicon rod cylindrical position around the shape of silicon rod cylindrical in good time.

Described elastic squeezing unit is spring compacting device, spring is established to connect a driving shaft in described spring compacting device, the other end of driving shaft connects cross bar, the two ends of cross bar connect floating rotating pinch roller respectively, spring compacting device drives driving shaft to press down, and drives the floating rotating pinch roller at cross bar two ends to press silicon rod cylindrical position around the shape of silicon rod cylindrical in good time.

Described active rotation support roller is coaxial is provided with two groups, forms locating slot between two groups of axis.On described silicon rod, cover has cutting scale ring, and cutting scale ring is placed in the locating slot of active rotation support roller or is positioned at the side of active rotation support roller, and cutting scale ring is with the equidirectional rotation of silicon rod.

Described transmission mechanism comprises drive sprocket, driving chain, the driven sprocket be arranged in active rotation supporting-roller shaft fixing on silicon rod electric rotating machine, driving belt, reductor, reductor turning cylinder, silicon rod electric rotating machine is connected with reductor by driving belt, and drive sprocket is connected with driven sprocket by driving chain.

Described cutting mechanism comprises number controlcutting working platform, the below of described cutting working platform is provided with servo drive motor, ball-screw, linear slide rail, cutting working platform is positioned on linear slide rail, and the ball-screw connecting wire stem nut of described driven by servomotor drives Numerical control cutting workbench to move reciprocatingly on linear slide rail; The top of described cutting working platform is provided with cutting motor, motor-driven belt, cutting main shaft, cut workpiece cutter, and described cutting motor is connected with cutting main shaft by motor-driven belt, and cut workpiece cutter is connected on cutting main shaft.

Operation principle of the present invention and process as follows:

By (the longest 2.8 meters for the silicon rod preparing to cut off, φ 200--40 millimeter) the safe cutting scale ring 13 through being positioned at active rotation support roller in locating slot, be placed in that the active rotation support roller be made up of two parastates of level and two parastates form driven rotation support roller between concave surface on, to be fixed on stainless steel ruler on lathe bed for standard, determine to need Cutting Length and fastening cutting scale ring three screws circumferentially, press system hand switch, start floating cylinder (or spring assembly), air pressure is utilized to make floating rotating pinch roller be pressed in the cylindrical of silicon rod, can freely rotate with the irregular silicon rod of profile, and can not be broken as standard by floating rotating pinch roller by excessive air pressure, the silicon rod of different-diameter need adjust different air pressures and cutting scale ring.Install transparent watertight plate, start digital control system, system can bring into operation according to the numerical control program woven according to processing request:

First: start silicon rod electric rotating machine and drive driving belt, reductor, drive drive sprocket, driving chain, driven sprocket, active rotation supporting-roller shaft by the output shaft on reductor, drive the two section support roller of the active rotation of excellent elasticity to rotate.Silicon rod is fixed in the middle part locating slot of the two section support roller of active rotation by cutting scale ring, makes the irregular silicon rod of profile start to carry out non-concentric rotation under the floating pressure of two cover floating rotating pinch rollers.

Secondly: start cutting motor, cut workpiece cutter is driven to start the rotation of high linear speed again through motor-driven belt drive cutting main shaft.

3rd: start cooling water magnetic valve, make cooling water be sprayed at the outward flange position of cut workpiece cutter by water nozzle.Start servo drive motor and drive ball-screw, Numerical control cutting workbench is driven to run along linear slide rail toward silicon rod direction by feed screw nut, and silicon rod is cut, when penetraction depth reach be greater than silicon rod along non-concentric rotating diameter two/for the moment, cut-off silicon rod falls into blank and connects dish.

Cut complete, according to the work of program stopped silicon rod electric rotating machine, stopped the rotation by the silicon rod that silicon rod electric rotating machine 1 power drives.The Numerical control cutting workbench that cut workpiece cutter is housed returns original position according to program automatically along linear slide rail, and cooling water magnetic valve cuts out automatically, and stop water spray, cut workpiece cutter stops operating.

Remove transparent water fender, press system hand switch, unclamp floating cylinder and drive floating rotating pinch roller to depart from silicon rod.Take out cut-off silicon rod, again adjust silicon rod and need Cutting Length, repeat above-mentioned action, next circular process can be entered.

The present invention has following technique effect:

1, the present invention's air taken full advantage of in cylinder has the operation principle of compressibility or spring, make the irregular silicon rod of profile can under air pressure (or spring) clamping position between the two section support roller of a set of active rotation, a set of driven rotation pinch roller, non-concentric axial rotation motion can be carried out, cutting mechanism changes radius cutting into by the original full diameter cutting to workpiece, such cutting tool reduces the excellent body vibration that silicon rod causes, control the fragmentation of silicon rod greatly, decrease clipping time, reduce production cost.

2, old-fashioned digital controlled cutting machine adopts single-point forced draught formula location to silicon rod, makes silicon rod produce very large internal stress, and due to polycrystalline silicon rod properties of materials (extremely crisp, easily broken, inflexibility), therefore it is broken very easily to make silicon rod produce when cutting.The present invention adopts silicon rod to rotate the cutting mode that floats, and overcomes the drawback of old-fashioned Digit Control Machine Tool completely, makes that profile is irregular, the silicon rod of tissue looseness is cut into reality, can enhance productivity to a great extent and reduce production cost.

3, work piece cut scale ring of the present invention is be fixed on floating rotating workpiece to be cut and make it in the fit clearance of the two section support roller interfix groove of active rotation, with floating rotating workpiece synchronous rotary to be cut, due to the use of work piece cut scale ring, make silicon rod in floating rotating cutting process can Length-fixing cutting accurately, length accuracy can reach 0.1MM, can meet every production technology index request easily.

4, lathe bed of the present invention is connected with support, support is provided with two driven rotation support rollers, the axis of described two driven rotation support rollers is parallel to each other, described driven rotation support roller with initiatively revolve two section and ask and take turns in same level, the axle of active rotation supporting-roller shaft and driven rotation support roller is distinguished on the same axis; Silicon rod can be placed more steady, under the two section support roller of a set of active rotation, a set of driven rotation support roller and two air pressure (or spring) clamping positions overlapping between driven rotation pinch roller, carry out the rotation of non-concentric axial float, make that radius cutting is carried out to workpiece more accurate, at double decrease clipping time, significantly can reduce production cost.

5, automaticity of the present invention is very high, and silicon rod rotary motion, Pneumatic clamping, radius cutting etc. are operation all, by numerical control box programme-control, except loading and unloading, can realize full-automatic CR production, can alleviate staff labor intensity.

Accompanying drawing explanation

Fig. 1 is constructional device front view of the present invention (without silicon rod 10);

Fig. 2 is floating rotating cutter sweep partial elevation view (having silicon rod 10);

Fig. 3 is constructional device right view of the present invention (having silicon rod 10);

Fig. 4 is constructional device left view of the present invention (having silicon rod 10);

Fig. 5 is constructional device top view of the present invention (without silicon rod 10);

The structural representation of Fig. 6 to be elastic squeezing unit of the present invention be floating cylinder

The structural representation of Fig. 7 to be elastic squeezing unit of the present invention be spring compacting device

Mark 1, silicon rod electric rotating machine in figure; 2, driving belt; 3, reductor; 4 drive sprockets; 5 driving chains; 6, driven sprocket; 7, active rotation supporting-roller shaft; 8, active rotation support roller; 9, driven rotation support roller; 10, silicon rod; 11, floating rotating pinch roller; 12, elastic pressuring clamping device; 13, work piece cut scale ring; 14, numerical control box; 15, servo drive motor; 16, cutting motor; 17, Numerical control cutting workbench; 18, motor-driven belt; 19, main shaft is cut; 20, cut workpiece cutter; 21, lathe bed; 22, support; 23, ball-screw; 24, linear slide rail; 25, cylinder block; 26, piston; 27, driving shaft; 28, cross bar, 29, spring; 30, driving shaft; 31, cross bar, 32, groove;

Detailed description of the invention

Embodiment 1

A kind of silicon rod rotates the cutting Digit Control Machine Tool that floats, comprise numerical control box, lathe bed, transmission mechanism, be arranged on cutting mechanism on lathe bed and silicon rod clamping device, it is characterized in that: described silicon rod clamping device comprises active rotation support roller 8 and the floating rotating pinch roller 11 that vertical direction coordinates clamping silicon rod 10; Described active rotation support roller 8 drives silicon rod 10 under the compression of floating rotating pinch roller 11, and the horizontal level of active rotation support roller 8 and driven support roller 9 makes non-concentric axial-rotation

Described floating rotating pinch roller 11 is vertically positioned at the top of silicon rod 10, and is connected with elastic squeezing unit 12, and elastic squeezing unit 12 drives floating rotating pinch roller 11 to press silicon rod 10 around the shape of silicon rod cylindrical in good time.

Described active rotation support roller 8 is positioned at the below of silicon rod 10, is connected with transmission mechanism, and transmission mechanism drives silicon rod 10 to rotate by active rotation support roller 8.

Described active rotation support roller 8 is two, and two active rotation support rollers 8 axially be arranged in parallel, and silicon rod 10 is placed in the axial groove 32 formed of two active rotation support rollers 8.

On each section of described silicon rod 10, namely in the scope of silicon rod 10 overall length, has one group of silicon rod clamping device arranged by active rotation support roller 8 and floating rotating pinch roller 11 correspondence at least, has one group of silicon rod clamping device arranged by driven rotation support roller 9 and floating rotating pinch roller 11 correspondence at least, and the rotation support roller 8,9 in silicon rod clamping device is positioned on same level position, top is provided with the elastic squeezing unit 12 clamped silicon rod 10.

Described elastic squeezing unit 12 is floating cylinders, piston is provided with in described floating cylinder, piston connects a driving shaft, the other end of driving shaft connects cross bar, the two ends of cross bar connect floating rotating pinch roller 11 respectively, floating cylinder 12 drives driving shaft to press down, and drives the floating rotating pinch roller 11 at cross bar two ends to press silicon rod 10 cylindrical position around the shape of silicon rod cylindrical in good time.

On described silicon rod 10, cover has cutting scale ring 13, and cutting scale ring 13 is arranged in active rotation support roller 8, and cutting scale ring 13 is with silicon rod 10 rotating in same direction.

Described transmission mechanism comprises drive sprocket 4, driving chain 5, the driven sprocket 6 be arranged in active rotation supporting-roller shaft 7 fixing on silicon rod electric rotating machine 1, driving belt 2, reductor 3, reductor turning cylinder, silicon rod electric rotating machine 1 is connected with reductor 3 by driving belt 2, and drive sprocket 4 is connected with driven sprocket 6 by driving chain 5.

Described cutting mechanism comprises Numerical control cutting workbench 17, the below of described cutting working platform 17 is provided with servo drive motor 15, ball-screw 23, linear slide rail 24, cutting working platform 17 is positioned on linear slide rail 24, and the ball-screw 23 connecting wire stem nut that described servomotor 15 drives drives Numerical control cutting workbench 17 to move reciprocatingly on linear slide rail 24; The top of described cutting working platform 17 is provided with cutting motor 16, motor-driven belt 18, cutting main shaft 19, cut workpiece cutter 20, described cutting motor 16 is connected with cutting main shaft 19 by motor-driven belt 18, and cut workpiece cutter 20 is connected on cutting main shaft 19.

Embodiment 2

As shown in Figure 1 and Figure 2, a kind of silicon rod rotates the cutting Digit Control Machine Tool that floats, comprise on numerical control box 14, lathe bed 21, transmission mechanism, lathe bed and be respectively equipped with cutting mechanism and silicon rod clamping device, silicon rod clamping device structure comprises active rotation support roller 8 and the floating rotating pinch roller 11 that vertical direction coordinates clamping silicon rod 10; Floating rotating pinch roller connects floating cylinder, the gas-powered air cylinder driven axle of floating cylinder 12, air cylinder driven axle connects floating rotating pinch roller 11, open floating cylinder 12, air cylinder driven axle drives floating rotating pinch roller 11 to press silicon rod 10 cylindrical, and floating rotating pinch roller 11 realizes moving up and down with the fluctuating of the cylindrical of silicon rod 10;

Described transmission mechanism and active rotation support roller 8 are rotationally connected, and transmission mechanism drives active rotation support roller 8 to rotarily drive silicon rod 10 and reversely rotates, and silicon rod rotates 10 and drives floating rotating pinch roller 11 to reversely rotate.

Active rotation support roller 8 is along active rotation supporting-roller shaft to being arranged with two in parallel, and silicon rod 10 is placed between two active rotation support rollers; The perpendicular top floating rotating pinch roller 11 of silicon rod 10 is two, air cylinder driven axle is connected with two floating rotating pinch rollers 11, open floating cylinder 12, air cylinder driven axle drives two floating rotating pinch rollers 11 to press the cylindrical of silicon rod 10, and two floating rotating pinch rollers 11 realize fluctuating with the fluctuating of the cylindrical of silicon rod 10;

Especially because the external peripheral surface of silicon rod 10 is irregular, floating rotating pinch roller 11 realizes fluctuating pressing in its surface, thus needs to use air cylinder driven side or Spring driving mode, and can not adopt oil pressure or hydraulic driving mode.

More accurate in order to realize cutting silicon rod 10, the above-mentioned same water surface is arranged side by side two active rotation support rollers (8), is coaxially provided with two groups, two groups axially between form locating slot, workpiece 10 to be cut for irregular for profile floating rotating is placed on it, cutting scale ring 13 is fixed on the cylindrical of the irregular floating rotating of profile workpiece 10 to be cut, and be placed in the locating slot of two groups of active rotation support roller 8 middle parts, (namely formed in locating slot between two groups of axis, ) will the silicon rod 10 cut off be prepared, through the cutting scale ring 13 be positioned in two section support roller 8 medial launder of active rotation, be placed in level, the two section support roller 8 of the active rotation be made up of 2 parastates and 2 parastates form driven rotation support roller 9 concave surface on, to be fixed on stainless steel ruler on lathe bed for standard, after measuring the silicon rod length that need cut, and fastening cutting scale ring 13 three screws circumferentially, floating rotating pinch roller 11 presses on the cylindrical of silicon rod 10, cutting scale ring is with silicon rod rotating in same direction (shown in Fig. 2), cutting mechanism carries out radius cutting to silicon rod.

Steady when cutting for realizing silicon rod 10, avoid rocking or being moved, lathe bed 21 is connected with support 22, support 22 is provided with two driven rotation support rollers 9 (as shown in Figure 1 and Figure 2), two driven rotation support roller 9 two axial lines are parallel to each other, that is to say that two driven rotation support roller 9 side by side parallel are arranged, and driven rotation support roller 9 with initiatively revolve two section and ask wheel 8 in same level, the axle of active rotation supporting-roller shaft 7 and driven rotation support roller 9 is respectively on the same axis; Floating cylinder 12 is provided with equally above driven rotation support roller 9 is vertical, two floating rotating pinch rollers 11 are connected below floating cylinder 12, when floating cylinder 12 drives, floating rotating pinch roller 11 vertically presses down, and presses the cylindrical of silicon rod 10, makes silicon rod 10 in the vertical direction two ends all by floating clamping.Two groups of floating rotating pinch rollers 11 can move under in the vertical direction.

The cylindrical of described two active rotation support rollers drives silicon rod 10 to rotate, and silicon rod 10 rotarily drives floating rotating pinch roller and reversely rotates.

Piston is provided with in described floating cylinder 12, piston connects a driving shaft, the other end of driving shaft connects cross bar, the two ends of cross bar connect floating rotating pinch roller 11 respectively, open floating cylinder 12, gas compression drives driving shaft to press down, and drives the floating rotating pinch roller 11 at cross bar two ends press the cylindrical of silicon rod 10 and reversely rotate thereupon, controls cut workpiece cutter 20 carry out radial cuts to by the silicon rod 10 of work piece cut scale ring 13 scale by numerical control box 14.

In the present invention, transmission device comprises the silicon rod electric rotating machine 1 being controlled to be arranged on lathe bed inside by numerical control box 14 and drives driving belt 2, reductor 3, drives drive sprocket 4, driving chain 5, driven sprocket 6, active rotation supporting-roller shaft 7, drives the active rotation support roller 8 of excellent elasticity to rotate by the output shaft on reductor 3.Workpiece 10 to be cut for floating rotating is fixed in the locating slot of active rotation support roller 8 by cutting scale ring 13, makes the irregular floating rotating of profile workpiece 10 to be cut start to carry out non-concentric rotation under the floating pressure of two cover floating rotating pinch rollers 11.

As shown in Figure 4, Figure 5, lathe bed is also provided with cutting mechanism, cutting mechanism comprises Numerical control cutting workbench 17, and described cutting working platform 17 is provided with servo drive motor 15, ball-screw 23, linear slide rail 24, and cutting working platform 17 is positioned on linear slide rail 24; The ball-screw 23 connecting wire stem nut that servomotor 15 drives drives Numerical control cutting workbench 17 to move reciprocatingly on linear slide rail 24;

Numerical control table, NC table 17 is provided with cutting motor 16, motor-driven belt 18, cutting main shaft 19, cut workpiece cutter 20, cutting motor 16 is connected with cutting main shaft 19 by motor-driven belt 18, cut workpiece cutter 20 is connected on cutting main shaft 19, and the power transmission of cutting motor 16 is carried out radial cuts to cutting main shaft 19, drive cut workpiece cutter 20 pairs of profiles floating rotating workpiece 10 to be cut that is irregular, non-concentric rotation by cutting motor belt 18.

The accessory system that the present invention also comprises oil pump, lighting lamp for work, electric cabinet, work warning lamp, waterway electromagnetic valve, cooling water pipeline and nozzle, compressed air line and air pressure regulator, air-operated solenoid valve, positioning rule, silicon rod blank connect the annex compositions such as dish, machine tool outer casing, transparent water fender is well-known category system architecture, does not list in detail item by item in this diagram.

Embodiment 3

The same reason, described elastic squeezing unit 12 is spring compacting devices, spring 29 is established to connect a driving shaft 30 in described spring compacting device (Fig. 7), the other end of driving shaft 30 connects cross bar 31, the two ends of cross bar 31 connect floating rotating pinch roller 11 respectively, spring 29 drives driving shaft 30 to press down, and drives the floating rotating pinch roller (11) at cross bar 31 two ends to press silicon rod 10 cylindrical position around the shape of silicon rod cylindrical in good time.

Described active rotation support roller 8 is coaxial is provided with two groups, forms locating slot 32 between two groups of axis; On described silicon rod 10, cover has cutting scale ring 13, and cutting scale ring 13 is arranged in locating slot, and cutting scale ring 13 is with silicon rod 10 rotating in same direction.

The accessory system that the present invention also comprises oil pump, lighting lamp for work, electric cabinet, work warning lamp, waterway electromagnetic valve, cooling water pipeline and nozzle, compressed air line and air pressure regulator, air-operated solenoid valve, positioning rule, silicon rod blank connect the annex compositions such as dish, machine tool outer casing, transparent water fender is well-known category system architecture, does not list in detail item by item in this diagram.

Above-described is only the preferred embodiments of the invention.Should be understood that.For the person of ordinary skill of the art; under the premise without departing from the principles of the invention; without the need to the technical characteristic just can associated through creative work; some distortion and improvement can also be made; these changes obviously all should be considered as equivalent feature, within the protection domain still belonging to patent of the present invention.

Claims (8)

1. a silicon rod rotates the cutting Digit Control Machine Tool that floats, comprise numerical control box, lathe bed, transmission mechanism, be arranged on cutting mechanism on lathe bed and silicon rod clamping device, it is characterized in that: described silicon rod clamping device comprises active rotation support roller (8) and the floating rotating pinch roller (11) that vertical direction coordinates clamping silicon rod (10), described active rotation support roller (8) drives silicon rod (10) under the compression of floating rotating pinch roller (11), the horizontal level of active rotation support roller (8) and driven rotation support roller (9) makes non-concentric axial-rotation, described floating rotating pinch roller (11) is vertically positioned at the top of silicon rod (10), and be connected with elastic pressuring clamping device (12), elastic pressuring clamping device (12) drives floating rotating pinch roller (11) to press silicon rod (10) around the shape of silicon rod cylindrical in good time, described active rotation support roller (8) is coaxial is provided with two groups, locating slot is formed between two groups of axis, the upper cover of described silicon rod (10) has cutting scale ring (13), cutting scale ring (13) is placed in the locating slot of active rotation support roller (8) or is positioned at the side of active rotation support roller (8), cutting scale ring (13) is with silicon rod (10) equidirectional rotation.
2. silicon rod according to claim 1 rotates the cutting Digit Control Machine Tool that floats, it is characterized in that: described active rotation support roller (8) is positioned at the below of silicon rod (10), be connected with transmission mechanism, transmission mechanism drives silicon rod (10) to rotate by active rotation support roller (8).
3. silicon rod according to claim 1 and 2 rotates the cutting Digit Control Machine Tool that floats, it is characterized in that: described active rotation support roller (8) is two, two active rotation support rollers (8) axially be arranged in parallel, and silicon rod (10) is placed in the axial groove (32) formed of two active rotation support rollers (8).
4. a kind of silicon rod according to claim 1 rotates the cutting Digit Control Machine Tool that floats, it is characterized in that: each section of described silicon rod (10) has one group of silicon rod clamping device arranged by active rotation support roller (8) and floating rotating pinch roller (11) correspondence at least, has one group of silicon rod clamping device arranged by driven rotation support roller (9) and floating rotating pinch roller (11) correspondence at least, and the rotation support roller (8,9) in silicon rod clamping device is positioned on same level position, top is provided with the elastic pressuring clamping device (12) clamped silicon rod (10).
5. a kind of silicon rod according to claim 1 rotates the cutting Digit Control Machine Tool that floats, it is characterized in that: described elastic pressuring clamping device (12) is floating cylinder, piston (26) is provided with in described floating cylinder (25), piston (26) connects a driving shaft (27), the other end of driving shaft (27) connects cross bar (28), the two ends of cross bar (28) connect floating rotating pinch roller (11) respectively, floating cylinder (25) drives driving shaft (27) to press down, drive the floating rotating pinch roller (11) at cross bar (28) two ends to press silicon rod (10) cylindrical position around the shape of silicon rod cylindrical in good time.
6. a kind of silicon rod according to claim 1 rotates the cutting Digit Control Machine Tool that floats, it is characterized in that: described elastic pressuring clamping device (12) is spring attachment, spring (29) is established to connect a driving shaft (30) in described spring attachment, the other end of driving shaft (30) connects cross bar (31), the two ends of cross bar (31) connect floating rotating pinch roller (11) respectively, spring attachment drives driving shaft (30) to press down, drive the floating rotating pinch roller (11) at cross bar (31) two ends to compress silicon rod (10) cylindrical position around the shape of silicon rod cylindrical in good time.
7. silicon rod according to claim 5 rotates the cutting Digit Control Machine Tool that floats, it is characterized in that: described transmission mechanism comprises drive sprocket (4), driving chain (5), the driven sprocket (6) be arranged in active rotation supporting-roller shaft (7) fixing on silicon rod electric rotating machine (1), driving belt (2), reductor (3), reductor turning cylinder, silicon rod electric rotating machine (1) is connected with reductor (3) by driving belt (2), and drive sprocket (4) is connected with driven sprocket (6) by driving chain (5).
8. silicon rod according to claim 6 rotates the cutting Digit Control Machine Tool that floats, it is characterized in that: described cutting mechanism comprises Numerical control cutting workbench (17), the below of described cutting working platform (17) is provided with servo drive motor (15), ball-screw (23), linear slide rail (24), cutting working platform (17) is positioned on linear slide rail (24), and ball-screw (23) the connecting wire stem nut that described servo drive motor (15) drives drives Numerical control cutting workbench (17) to move reciprocatingly on linear slide rail (24); The top of described cutting working platform (17) is provided with cutting motor (16), motor-driven belt (18), cutting main shaft (19), cut workpiece cutter (20), described cutting motor (16) is connected with cutting main shaft (19) by motor-driven belt (18), and cut workpiece cutter (20) is connected in cutting main shaft (19).
CN201210360148.7A 2012-09-25 2012-09-25 Silicon rod rotates the cutting Digit Control Machine Tool that floats CN102862239B (en)

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Application Number Priority Date Filing Date Title
CN201210360148.7A CN102862239B (en) 2012-09-25 2012-09-25 Silicon rod rotates the cutting Digit Control Machine Tool that floats

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CN102862239B true CN102862239B (en) 2015-09-09

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CN103552166A (en) * 2013-09-30 2014-02-05 洛阳鸿泰半导体有限公司 Device for adjusting crystal-orientation deviation degree of silicon rod
CN104743780B (en) * 2015-01-16 2017-05-17 中天科技精密材料有限公司 Continuous high-temperature extension and uninterrupted glass rod cutting method and device thereof
CN105058594A (en) * 2015-08-20 2015-11-18 无锡中强电碳有限公司 Multifunctional hole forming and cleaning device for carbon rod
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CN106927094B (en) * 2017-03-09 2018-01-19 亚洲硅业(青海)有限公司 The automatic packing apparatus and packing method of polycrystalline silicon rod
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CN109291270A (en) * 2018-10-10 2019-02-01 唐燕 A kind of cutter device of the Silicon Wafer for chip manufacturing
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