CN109291270A - A kind of cutter device of the Silicon Wafer for chip manufacturing - Google Patents
A kind of cutter device of the Silicon Wafer for chip manufacturing Download PDFInfo
- Publication number
- CN109291270A CN109291270A CN201811179319.XA CN201811179319A CN109291270A CN 109291270 A CN109291270 A CN 109291270A CN 201811179319 A CN201811179319 A CN 201811179319A CN 109291270 A CN109291270 A CN 109291270A
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- block
- slot
- sliding
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
The present invention relates to a kind of cutter devices of Silicon Wafer for chip manufacturing, including shell, guide block, sliding sleeve, first spring, fixed block, limited block, limiting slot, groove, motion bar, fixture block, movable block, handle, second spring, deck, card slot, mounting base, cutting blade, wheel carrier, driving wheel, motor, transmission belt, reel, becket bridle, traction rope, fixed plate, sliding slot, sliding block, third spring, limit hole, gag lever post, fixed link, clamping plate, bracket, tray, accumulator tank, support rod, crumb loading slot, stock guide, crumb loading hole, blow tank, buffer stopper and Anti-slip cover.Present invention solves the technical problem that being to overcome the cutting equipment of the prior art poor for applicability, it is not adjustable, it is unable to satisfy the defect of different size Silicon Wafer work piece cut demands, the present invention has cutting efficiency and cutting accuracy high, applicability is wide, the features such as convenient for adjusting, the cutting demand of different size Silicon Wafers can be met.
Description
Technical field
The present invention relates to electronic component technology field, the cutter device of specially a kind of Silicon Wafer for chip manufacturing.
Background technique
Chip generally refers to the knot of the carrier and integrated circuit of integrated circuit after design, manufacture, encapsulation, test
Fruit, and integrated circuit is most important part in electronic equipment, carries the function of operation and storage, integrated circuit applies model
It encloses and covers military project, civilian almost all of electronic equipment.Silicon Wafer refers to silicon used in silicon semiconductor production of integrated circuits
Chip, since its shape is circle, therefore referred to as Silicon Wafer.It can be processed on silicon and is fabricated to various circuit component structures, make
Become and have the IC products of specific electrical functionality, therefore it is the base stock for manufacturing integrated circuit and chip.Silicon wafer
Circle needs to carry out it cutting process in production and processing, and due to existing cutting equipment is designed structure, cutting
The size of blade be it is fixed, can only be cut for the workpiece of special diameter, and cannot be adjusted, therefore applicability
Difference is unable to satisfy the cutting demand of different size silicon wafer circular Curves.
Summary of the invention
Present invention solves the technical problem that being to overcome the cutting equipment of the prior art poor for applicability, it is not adjustable, it can not
The defect for meeting different size Silicon Wafer work piece cut demands, provides a kind of cutter device of Silicon Wafer for chip manufacturing.
A kind of cutter device of Silicon Wafer for chip manufacturing has cutting efficiency and cutting accuracy high, and applicability is wide, is convenient for
The features such as adjusting, the cutting demand of different size Silicon Wafers can be met.
To achieve the above object, the invention provides the following technical scheme: a kind of cutting of the Silicon Wafer for chip manufacturing
Device, including shell, the side intracavity sidewall of the shell are fixedly connected with guide block, and sliding sleeve is arranged on the guide block, described
The side of sliding sleeve is fixedly connected with the first spring, and the other end of first spring is fixedly connected on the intracavity sidewall of shell, institute
The other side for stating sliding sleeve is fixedly connected there are two fixed block, two sides side wall and top exterior walls of the guide block close to fixed block one end
It is fixedly connected to limited block, the two sides and top of the sliding sleeve offer the limiting slot matched with limited block, two institutes
It states and opens up fluted on fixed block, through there is motion bar, the bottom end of the motion bar is fixedly connected with for the slot bottom of the groove
Fixture block, and the top of the motion bar is fixedly connected with movable block, and handle, the motion bar are fixedly connected on the movable block
Shaft be wound with second spring, the both ends of the second spring are respectively fixedly connected on the slot bottom and fixture block of groove, two
Inserted with deck between the fixed block, the card slot matched with fixture block, and institute are offered on the two sides side wall of the deck
The side for stating deck is fixedly connected with mounting base, and cutting blade is equipped in the mounting base, and the intracavity bottom of the shell is solid
Surely it is connected with wheel carrier, the wheel carrier is located at the lower section of guide block, and the end of the wheel carrier is connected with driving wheel by wheel shaft,
The side wall of the wheel carrier is equipped with motor, is sequentially connected with transmission belt on the output shaft of the motor, the transmission belt it is another
End transmission connection is equipped with reel on driving wheel at the top of the shell, the two sides of the reel are provided with fixed plate,
The fixed plate is fixedly connected on the top exterior walls of shell, is opened up at the top of the shell there are two sliding slot, two sliding slots
It is located between reel and fixed plate, and inserted with sliding block in two sliding slots, the sliding block is close to reel side
Side wall be fixedly connected with becket bridle, be to have traction rope on the becket bridle, the other end of the traction rope is wrapped on reel, institute
It states sliding block and is fixedly connected with third spring far from the side wall of reel side, the other end of the third spring is fixedly connected on
The side wall of fixed board offers limit hole on two sliding blocks, the limited position bar of insertion in the limit hole, the gag lever post
Both ends are equally fixedly connected with limited block, and fixed link is fixedly connected at the top of the gag lever post, the top of the fixed link
It is fixedly connected on the inner cavity top of shell, the end of the sliding block is fixedly connected with clamping plate, and the bottom of the clamping plate is fixedly connected
There is bracket, the end of the bracket is fixedly connected with tray, and the intracavity bottom of the shell is also fixedly connected with accumulator tank, described
Accumulator tank is located at the lower section of clamping plate, and the slot bottom of the accumulator tank is fixedly connected with support rod, and the top of the support rod is fixed
It is connected with crumb loading slot, the inner wall of the crumb loading slot is fixedly connected with stock guide, several crumb loading holes are offered on the stock guide,
The two sides side wall of the crumb loading slot offers blow tank, and the blow tank is located above the end of stock guide.
Preferably, the stock guide is isosceles trapezoidal structure, and the top center of the stock guide is provided with buffer stopper, institute
Stating buffer stopper is hemispherical rubber block structure.
Preferably, the bottom of the sliding sleeve is provided with several triangle teeth, the half cincture wall setting of the driving wheel
The triangle gear teeth for thering are several to be meshed with tooth.
Preferably, it is arranged with Anti-slip cover on the handle, the Anti-slip cover is rubber nested structure, and the bottom of the Anti-slip cover
Portion is opened up there are four arc groove.
Preferably, the clamping plate is arc, and the inner wall of the clamping plate is provided with one layer of rubber sheet gasket, and the tray is arc
Shape rubber block structure.
Compared with prior art, the beneficial effects of the present invention are:
1, cutting blade can be replaced according to Silicon Wafer diameter of work size to be cut, to meet different size silicon
The cutting demand of wafer.
2, cutting blade can cooperate the feed motion of silicon wafer circular Curve that can constantly carry out along guide block bilateral reciprocation
Cutting operation saves the time to improve the efficiency of cutting.
3, silicon wafer circular Curve can be clamped and is fixed using clamping plate, the stabilization of silicon wafer circular Curve can be improved using tray
Property, prevent the precision for shaking and influencing cutting when cutting.
4, generated clast when cutting can be recycled in crumb loading slot, to be uniformly processed.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is enlarged drawing at the A of Fig. 1.
Figure label: 1 shell, 2 guide blocks, 3 sliding sleeves, 4 first springs, 5 fixed blocks, 6 limited blocks, 7 limiting slots, 8 grooves, 9
Motion bar, 10 fixture blocks, 11 movable blocks, 12 handles, 13 second springs, 14 decks, 15 card slots, 16 mounting bases, 17 cutting blades, 18
Wheel carrier, 19 driving wheels, 20 motors, 21 transmission belts, 22 reels, 221 becket bridles, 222 traction ropes, 23 fixed plates, 24 sliding slots, 25 are slided
Block, 26 third springs, 27 limit holes, 28 gag lever posts, 29 fixed links, 30 clamping plates, 31 brackets, 32 trays, 33 accumulator tanks, 34 supports
Bar, 35 crumb loading slots, 36 stock guides, 37 crumb loading holes, 38 blow tanks, 39 buffer stoppers, 40 Anti-slip covers.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The present invention provides a kind of technical solution referring to FIG. 1-2: a kind of cutting dress of the Silicon Wafer for chip manufacturing
It sets, including shell 1, the side intracavity sidewall of shell 1 is fixedly connected with guide block 2, it is arranged with sliding sleeve 3 on guide block 2, the one of sliding sleeve 3
Side is fixedly connected with the first spring 4, and the other end of the first spring 4 is fixedly connected on the intracavity sidewall of shell 1, sliding sleeve 3 it is another
Side is fixedly connected there are two fixed block 5, and two sides side wall and top exterior walls of the guide block 2 close to 5 one end of fixed block are fixedly connected to
Limited block 6, the two sides and top of sliding sleeve 3 offer the limiting slot 7 matched with limited block 6, open up on two fixed blocks 5
Fluted 8, for the slot bottom of groove 8 through there is motion bar 9, the bottom end of motion bar 9 is fixedly connected with fixture block 10, and the top of motion bar 9
End is fixedly connected with movable block 11, and handle 12 is fixedly connected on movable block 11, Anti-slip cover 40, Anti-slip cover are arranged on handle 12
40 be rubber nested structure, and the bottom of Anti-slip cover 40 is opened up there are four arc groove, and when manpower holds handle 12, four fingers can
It is tightly fitted in four arc grooves, to prevent from skidding, the shaft of motion bar 9 is wound with second spring 13, second spring 13
Both ends be respectively fixedly connected on the slot bottom and fixture block 10 of groove 8, inserted with deck 14, deck 14 between two fixed blocks 5
Two sides side wall on offer the card slot 15 matched with fixture block 10, fixture block 10 and card slot 15 are triangular structure, and are blocked
The side of seat 14 is fixedly connected with mounting base 16, power supply and switch is integrated in mounting base 16, and be equipped with and cut in mounting base 16
Cutting blade 17, the intracavity bottom of shell 1 are fixedly connected with wheel carrier 18, and wheel carrier 18 is located at the lower section of guide block 2, and the end of wheel carrier 18
It is connected with driving wheel 19 by wheel shaft, the side wall of wheel carrier 18 is equipped with motor 20, is sequentially connected on the output shaft of motor 20
There is transmission belt 21, the other end of transmission belt 21 is sequentially connected on driving wheel 19, and the bottom of sliding sleeve 3 is provided with several triangles
Tooth, half cincture wall of driving wheel 19 are provided with several triangle gear teeth being meshed with tooth, when driving wheel 19 rotates
Drive sliding sleeve 3 mobile using the engagement between the gear teeth and tooth, the top of shell 1 is equipped with reel 22, reel
22 two sides are provided with fixed plate 23, and fixed plate 23 is fixedly connected on the top exterior walls of shell 1, and the top of shell 1 offers two
A sliding slot 24, two sliding slots 24 are located between reel 22 and fixed plate 23, and inserted with sliding block in two sliding slots 24
25, side wall of the sliding block 25 close to 22 side of reel is fixedly connected with becket bridle 221, is to have traction rope 222 on becket bridle 221, traction
The other end of rope 222 is wrapped on reel 22, and sliding block 25 is fixedly connected with third spring far from the side wall of 22 side of reel
26, the other end of third spring 26 is fixedly connected on the side wall of fixed plate 23, and limit hole 27 is offered on two sliding blocks 25, limit
The limited position bar 28 of insertion in the hole 27 of position, the both ends of gag lever post 28 are equally fixedly connected with limited block 6, and the top of gag lever post 28 is solid
Surely it is connected with fixed link 29, the top of fixed link 29 is fixedly connected on the inner cavity top of shell 1, and the end of sliding block 25 is fixedly connected
There is clamping plate 30, clamping plate 30 is arc, and the inner wall of clamping plate 30 is provided with one layer of rubber sheet gasket, can play cushioning and protection,
Prevent clamping plate 30 from damaging silicon wafer circular Curve, the bottom of clamping plate 30 is fixedly connected with bracket 31, and the end of bracket 31 is fixedly connected with
Tray 32, tray 32 are arc rubber block structure, may be supported on the bottom of silicon wafer circular Curve, play the role of stable Silicon Wafer,
The intracavity bottom of shell 1 is also fixedly connected with accumulator tank 33, and accumulator tank 34 is located at the lower section of clamping plate 30, and the slot bottom of accumulator tank 33
It is fixedly connected with support rod 34, the top of support rod 34 is fixedly connected with crumb loading slot 35, and the inner wall of crumb loading slot 35 is fixedly connected with
Stock guide 36, stock guide 36 is isosceles trapezoidal structure, and the top center of stock guide 36 is provided with buffer stopper 39, and buffer stopper 39 is
Hemispherical rubber block structure, have elasticity, when the Silicon Wafer material of well cutting is fallen in crumb loading slot 35 can first with buffer stopper
39 contacts prevent Silicon Wafer material impaired, several crumb loading holes 37 are offered on stock guide 36 so as to play buffer function,
The two sides side wall of crumb loading slot 35 offers blow tank 38, and blow tank 38 is located above the end of stock guide 36.
Working principle: in the use of the present invention, silicon wafer circular Curve to be cut is placed between two clamping plates 30, and lead to
It crosses external power supply and switch driving reel 22 rotates, traction rope 222 can be tightened when reel 22 rotates, to drive two
Side slide 25, to intermediary movements, and makes the clamping plate 30 of 25 end of sliding block tightly be clamped in the two of silicon wafer circular Curve along sliding slot 24
Side prevents the efficiency for shaking and influencing cutting when cutting so that it is fixed, when cutting, by external power supply and
The switch rotation of driving motor 20 makes it through transmission belt 21 and driving wheel 19 is driven to rotate together, driving wheel 19 rotate after using its half
Engagement between the gear teeth and sliding sleeve bottom strip tooth of cincture wall can drive sliding sleeve 3 along guide block 2 towards silicon wafer circular Curve
The side of direction movement, sliding sleeve 3 is equipped with cutting blade 17 by mounting base 16, is integrated with power supply and switch in mounting base 16,
It can control cutting blade 17 to rotate by conducting wire, therefore cutter can be utilized when sliding sleeve 3 is moved towards silicon wafer circular Curve direction
Piece 17 cuts it, and the Silicon Wafer material after cutting is fallen in crumb loading slot 35, and slides to two along stock guide 36
The blow tank 38 of side, is finally skidded off by blow tank 38 and is fallen in accumulator tank 33, to complete cutting and recovery operation, and is cut
When generated clast the bottom of crumb loading slot 35 can be fallen on through crumb loading hole 37, to be recycled and to be uniformly processed to clast,
Under the elastic reaction of the first spring 4, sliding sleeve 3 along 2 bilateral reciprocation of guide block, can cooperate workpiece feeding can constantly into
Handle 12 can be held and be pulled out to row cutting operation when cutting the silicon wafer circular Curve of different-diameter size, drive it and live
Motion block 11 is moved together with motion bar 9, motion bar 9 can by fixture block 10 from extracting out and closed in groove 8 in card slot 15, so as to
Deck 14 is extracted together with cutting blade 17, to be replaced according to the diameter of silicon wafer circular Curve to cutting blade 17,
Deck 14 is inserted between two fixed blocks 5 again after the completion of replacement, second spring 13 can be due to fixture block 10 is squeezed when insertion
It shrinks, so as to which fixture block 10 is caught in card slot 15, so that deck 14 and cutting blade 17 are fixed, hair when preventing from cutting
It is raw to shake.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (5)
1. a kind of cutter device of the Silicon Wafer for chip manufacturing, including shell (1), it is characterised in that: the shell (1)
Side intracavity sidewall is fixedly connected with guide block (2), is arranged with sliding sleeve (3) on the guide block (2), and the side of the sliding sleeve (3) is solid
Surely it is connected with the first spring (4), the other end of first spring (4) is fixedly connected on the intracavity sidewall of shell (1), the cunning
The other side of set (3) is fixedly connected there are two fixed block (5), the guide block (2) close to fixed block (5) one end two sides side wall and
Top exterior walls are fixedly connected to limited block (6), and the two sides and top of the sliding sleeve (3) are offered to match with limited block (6)
The limiting slot (7) of conjunction opens up fluted (8) on two fixed blocks (5), and the slot bottom of the groove (8) is through there is activity
The bottom end of bar (9), the motion bar (9) is fixedly connected with fixture block (10), and the top of the motion bar (9) is fixedly connected with work
Motion block (11) is fixedly connected with handle (12) on the movable block (11), and the shaft of the motion bar (9) is wound with second spring
(13), the both ends of the second spring (13) are respectively fixedly connected on the slot bottom and fixture block (10) of groove (8), and two described solid
Determine between block (5) inserted with deck (14), offers on the two sides side wall of the deck (14) and matched with fixture block (10)
Card slot (15), and the side of the deck (14) is fixedly connected with mounting base (16), is equipped with cutting on the mounting base (16)
The intracavity bottom of blade (17), the shell (1) is fixedly connected with wheel carrier (18), and the wheel carrier (18) is located under guide block (2)
Side, and the end of the wheel carrier (18) is connected with driving wheel (19) by wheel shaft, the side wall of the wheel carrier (18) is equipped with
Motor (20) is sequentially connected with transmission belt (21) on the output shaft of the motor (20), and the other end of the transmission belt (21) passes
It is dynamic to be connected on driving wheel (19), it is equipped with reel (22) at the top of the shell (1), the two sides of the reel (22) are set
It is equipped with fixed plate (23), the fixed plate (23) is fixedly connected on the top exterior walls of shell (1), opens at the top of the shell (1)
If there are two sliding slot (24), two sliding slots (24) are located between reel (22) and fixed plate (23), and two institutes
It states inserted with sliding block (25) in sliding slot (24), side wall of the sliding block (25) close to reel (22) side is fixedly connected with rope
Ring (221) is to have traction rope (222) on the becket bridle (221), and the other end of the traction rope (222) is wrapped in reel
(22) on, the sliding block (25) is fixedly connected with third spring (26) far from the side wall of reel (22) side, the third bullet
The other end of spring (26) is fixedly connected on the side wall of fixed plate (23), offers limit hole on two sliding blocks (25)
(27), the limited position bar (28) of insertion in the limit hole (27), the both ends of the gag lever post (28) are equally fixedly connected with limit
Block (6), and fixed link (29) are fixedly connected at the top of the gag lever post (28), the top of the fixed link (29) is fixedly connected
The end of inner cavity top in shell (1), the sliding block (25) is fixedly connected with clamping plate (30), and the bottom of the clamping plate (30) is solid
Surely it is connected with bracket (31), the end of the bracket (31) is fixedly connected with tray (32), and the intracavity bottom of the shell (1) is also
It is fixedly connected with accumulator tank (33), the accumulator tank (34) is located at the lower section of clamping plate (30), and the slot bottom of the accumulator tank (33)
It is fixedly connected with support rod (34), the top of the support rod (34) is fixedly connected with crumb loading slot (35), the crumb loading slot (35)
Inner wall be fixedly connected with stock guide (36), several crumb loading holes (37), the crumb loading slot are offered on the stock guide (36)
(35) two sides side wall offers blow tank (38), and the blow tank (38) is located above the end of stock guide (36).
2. a kind of cutter device of Silicon Wafer for chip manufacturing according to claim 1, it is characterised in that: described to lead
Flitch (36) is isosceles trapezoidal structure, and the top center of the stock guide (36) is provided with buffer stopper (39), the buffer stopper
It (39) is hemispherical rubber block structure.
3. a kind of cutter device of Silicon Wafer for chip manufacturing according to claim 1, it is characterised in that: the cunning
The bottom of set (3) is provided with several triangle teeth, and half cincture wall of the driving wheel (19) is provided with several and a tooth
The triangle gear teeth being meshed.
4. a kind of cutter device of Silicon Wafer for chip manufacturing according to claim 1, it is characterised in that: described
It is arranged on hand (12) Anti-slip cover (40), the Anti-slip cover (40) is rubber nested structure, and the bottom of the Anti-slip cover (40) is opened
If there are four arc grooves.
5. a kind of cutter device of Silicon Wafer for chip manufacturing according to claim 1, it is characterised in that: the folder
Plate (30) is arc, and the inner wall of the clamping plate (30) is provided with one layer of rubber sheet gasket, and the tray (32) is arc rubber block
Structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811179319.XA CN109291270A (en) | 2018-10-10 | 2018-10-10 | A kind of cutter device of the Silicon Wafer for chip manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811179319.XA CN109291270A (en) | 2018-10-10 | 2018-10-10 | A kind of cutter device of the Silicon Wafer for chip manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109291270A true CN109291270A (en) | 2019-02-01 |
Family
ID=65162093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811179319.XA Pending CN109291270A (en) | 2018-10-10 | 2018-10-10 | A kind of cutter device of the Silicon Wafer for chip manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109291270A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111716574A (en) * | 2020-07-01 | 2020-09-29 | 罗浩 | Cutting device of wafer for chip manufacturing |
| CN111775353A (en) * | 2020-06-10 | 2020-10-16 | 浙江浦江中星有限公司 | High-efficient solar cell silicon chip cutterbar |
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|---|---|---|---|---|
| SU450260A1 (en) * | 1971-10-25 | 1974-11-15 | Предприятие П/Я А-3135 | Device for cutting semiconductor materials |
| US20040038629A1 (en) * | 2002-08-23 | 2004-02-26 | Seh America, Inc. | Internal diameter cutting blades and methods |
| CN102862239A (en) * | 2012-09-25 | 2013-01-09 | 刘鸿彬 | Rotary floating cutting numerical control machine tool for silicon rod |
| CN205057164U (en) * | 2015-10-22 | 2016-03-02 | 嘉兴职业技术学院 | Coil pipe cutting machine |
| CN206677283U (en) * | 2017-04-08 | 2017-11-28 | 李丽芳 | A kind of building pipe cutter device |
| CN107972191A (en) * | 2017-12-05 | 2018-05-01 | 河南格锐新材料科技有限公司 | A kind of globar processing positioner |
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2018
- 2018-10-10 CN CN201811179319.XA patent/CN109291270A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU450260A1 (en) * | 1971-10-25 | 1974-11-15 | Предприятие П/Я А-3135 | Device for cutting semiconductor materials |
| US20040038629A1 (en) * | 2002-08-23 | 2004-02-26 | Seh America, Inc. | Internal diameter cutting blades and methods |
| CN102862239A (en) * | 2012-09-25 | 2013-01-09 | 刘鸿彬 | Rotary floating cutting numerical control machine tool for silicon rod |
| CN205057164U (en) * | 2015-10-22 | 2016-03-02 | 嘉兴职业技术学院 | Coil pipe cutting machine |
| CN206677283U (en) * | 2017-04-08 | 2017-11-28 | 李丽芳 | A kind of building pipe cutter device |
| CN107972191A (en) * | 2017-12-05 | 2018-05-01 | 河南格锐新材料科技有限公司 | A kind of globar processing positioner |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111775353A (en) * | 2020-06-10 | 2020-10-16 | 浙江浦江中星有限公司 | High-efficient solar cell silicon chip cutterbar |
| CN111775353B (en) * | 2020-06-10 | 2022-05-31 | 浙江浦江中星有限公司 | High-efficient solar cell silicon chip cutterbar |
| CN111716574A (en) * | 2020-07-01 | 2020-09-29 | 罗浩 | Cutting device of wafer for chip manufacturing |
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