CN102853784A - Non-contact optical automatic detecting device for linearity of scale shell of grating scale - Google Patents
Non-contact optical automatic detecting device for linearity of scale shell of grating scale Download PDFInfo
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- CN102853784A CN102853784A CN2012103125118A CN201210312511A CN102853784A CN 102853784 A CN102853784 A CN 102853784A CN 2012103125118 A CN2012103125118 A CN 2012103125118A CN 201210312511 A CN201210312511 A CN 201210312511A CN 102853784 A CN102853784 A CN 102853784A
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Abstract
The invention discloses a non-contact optical automatic detecting device for a linearity of a scale shell of a grating scale, belonging to the field of the optical automatic detection of the linearity. The non-contact optical automatic detecting device comprises a computer, a collecting card, a charge-coupled device (CCD) camera, a lens, a light source, a collecting mirror, a piece of coated glass, a linear translation mechanism, a clamp and a base; the light which is emitted by the light source in a detecting light path is collected by the collecting mirror, reflected by the coated glass and the surface of the scale shell, penetrates through the lens, and forms ''bright-dark-bright'' alternated light strips with clear boundaries on the CCD. The width of the dark strip is measured when the detecting device moves in a length direction of the scale shell, so that the linearity data of the scale shell is calculated. According to the optical automatic detecting device, a technical problem of mini deformation of the scale shell and subsequently an error due to contact stress in the conventional contact measurement is solved, and an influence of the measurement error on a total-length accumulated error and a minor-cycle error of the grating scale is greatly reduced; and furthermore, detection precision and quality of the grating scale are improved.
Description
Technical field
The invention belongs to the automatic detection field of optics of linearity, be specifically related to a kind of non-contact optical automatic detection device of grating scale chi shell linearity.
Background technology
The chi shell of grating scale adopts and draws aluminium is material, is drawn to produce by aluminium section bar plant and finishes.In the process that draws moulding, flexural deformation can appear in the surface of chi shell, causes chi shell surface to produce straightness error, and this error all can have a huge impact total length cumulative errors and the minor-cyclic error of grating scale, has a strong impact on precision and the quality of grating scale.Existing grating scale chi shell Linearity surveying adopts the contact measurement method more, because there is certain error in detection head self, and the power that contact produces in the process of measuring causes the miniature deformation of chi shell also can affect grating scale chi shell accuracy of detection.Therefore, improve the accuracy of detection to grating scale chi shell, to producing and to filter out the qualified grating scale of precision significant.
Summary of the invention
Adopt the contact measurement method for solving existing grating scale chi shell Linearity surveying more, there is certain error detection head in self, the power that contact produces in the process of contact measurement simultaneously causes chi shell miniature deformation, have a strong impact on the technical matters of grating scale chi shell accuracy of detection, the invention provides a kind of non-contact optical automatic detection device of grating scale chi shell linearity.
The technical scheme that technical solution problem of the present invention is taked is as follows:
The non-contact optical automatic detection device of grating scale chi shell linearity comprises computer, capture card, CCD camera, object lens, light source, condenser, coated glass, straight line parallel moving mechanism, anchor clamps and pedestal; Light source, condenser, coated glass, object lens, CCD camera and straight line parallel moving mechanism consist of Systems for optical inspection jointly; Anchor clamps are fixedly connected with pedestal, and it clamps grating scale chi shell and be positioned over the below of coated glass, and grating scale chi shell is parallel with the lower surface of coated glass, and the direction of motion of straight line parallel moving mechanism is parallel with grating scale chi shell;
Described coated glass is sheet glass, and its lower surface is provided with reflectance coating district and the uncoated non-reflecting coating district of plated film, and the separatrix between reflectance coating district and the non-reflecting coating district is straight line; The detection light that light source sends sees through the upper surface of coated glass and shines on the lower surface of coated glass after refraction after condenser converges; The incident light that is radiated in the reflectance coating district is the first incident light, and the incident ray that is radiated at the non-reflecting coating district is the second incident light; After the first incident light is reflected the reflection of film district, through upper surface ejaculation formation first emergent light of coated glass; The second incident light penetrates from the non-reflecting coating district and forms the second emergent light, and the second emergent light is after the reflection of grating scale chi shell, and from the incident of non-reflecting coating district, the upper surface outgoing from coated glass forms the 3rd emergent light again; Emergent ray after condenser converges is directional light, and the incident angle when it incides the coated glass upper surface is acute angle;
Described object lens converge to the first emergent light and the 3rd emergent light of coated glass respectively on the CCD camera, and the CCD camera shows image on computers through capture card storage data and while after light signal is converted to corresponding picture signal; The first emergent light is imaged as a bright light belt on computers; The 3rd emergent light is imaged as a gloomy light belt on computers; Shadow region between the first emergent light and the 3rd emergent light is imaged as a black band on computers.
The invention has the beneficial effects as follows: by the non-contact optical automatic detection device grating scale chi shell linearity is detected, the technical matters that causes chi shell miniature deformation and then generation error when having overcome traditional contact type measurement because of contact, significantly dwindle measuring error to the impact that total length cumulative errors and the minor-cyclic error of grating scale produces, improved accuracy of detection and the quality of grating scale.
Description of drawings
Fig. 1 is the structural representation of the non-contact optical automatic detection device of grating scale chi shell linearity of the present invention;
Fig. 2 is the light path schematic diagram of the coated glass among the present invention;
Fig. 3 is the imaging schematic diagram of the CCD camera among the present invention;
Fig. 4 is coated glass echo area among the present invention and the structural representation in non-reflective district.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in further details.
As shown in Figure 1, the non-contact optical automatic detection device of grating scale chi shell linearity of the present invention comprises: computer 1, capture card 2, CCD camera 3, object lens 4, light source 5, condenser 6, coated glass 7, straight line parallel moving mechanism 8, anchor clamps 10 and pedestal 11; Light source 5, condenser 6, coated glass 7, object lens 4, CCD camera 3 and straight line parallel moving mechanism 8 common formation Systems for optical inspections; Anchor clamps 10 are fixedly connected with pedestal 11, and it clamps grating scale chi shell 9 and be positioned over the below of coated glass 7, and grating scale chi shell 9 is parallel with the lower surface of coated glass 7, and the direction of motion of straight line parallel moving mechanism 8 is parallel with grating scale chi shell 9.
To shown in Figure 4, coated glass 7 is clear plate glass such as Fig. 2, and its lower surface is provided with reflectance coating district 7-1 and the uncoated non-reflecting coating district 7-2 of plated film, and the separatrix between reflectance coating district 7-1 and the non-reflecting coating district 7-2 is straight line; The detection light that light source 5 sends converges through condenser 6, and the emergent ray after condenser 6 converges is directional light, and the incident angle β 1 when it incides coated glass 7 upper surface is acute angle.Emergent ray after condenser 6 converges sees through the upper surface of coated glass 7 and shines on the lower surface of coated glass 7 after refraction; The incident light that is radiated on the reflectance coating district 7-1 is the first incident light a, and the incident ray that is radiated at non-reflecting coating district 7-2 is the second incident light b; After the first incident light a is reflected film district 7-1 reflection, penetrate and form the first emergent light a-1 through the upper surface of coated glass 7; The second incident light b penetrates and forms the second emergent light c from non-reflecting coating district 7-2, and the second emergent light c is after the reflection of grating scale chi shell 9, from non-reflecting coating district 7-2 incident, again from the upper surface outgoing of coated glass 7 and form the 3rd emergent light d.
Object lens 4 converge to the first emergent light a-1 and the 3rd emergent light d of coated glass 7 respectively on the CCD camera 3, and CCD shows image through capture card 2 storage datas and while at computer 1 after light signal is converted to corresponding picture signal; The first emergent light a-1 is imaged as a bright light belt A at computer 1; The 3rd emergent light d is imaged as a gloomy light belt D at computer 1; Shadow region f between the first emergent light a-1 and the 3rd emergent light d is imaged as a black band F at computer 1.
When using non-contact optical automatic detection device of the present invention the linearity of grating scale chi shell being detected, drive Systems for optical inspections along the direction rectilinear motion of grating scale chi shell 9 by straight line parallel moving mechanism 8, the surface of grating scale chi shell 9 is scanned.Try to achieve the width H of black band F by 1 pair of calculating of computer, and instead inquire into to get the width h3 of shadow region f of incident end of CCD camera 3; According to the propagation principle of light and trigonometric function as can be known, this shadow region f is the sine trigonometric function relation at width h2 and the h3 of the lower surface of coated glass 7, distance h 1 between grating scale chi shell 9 and coated glass 7 lower surfaces is the height of isosceles right triangle, can be in the hope of the height of h1 by the base length h2 of this right-angle triangle.When incident angle β 1 remained 45° angle, the numerical value of h1 equaled half of h2 numerical value just.
When chi shell surface is scanned, try to achieve continuously and record the numerical value of whole h1, if the rate of change of h1 numerical value, thinks then that the linearity of grating scale chi shell 9 meets the requirements less than error rate.If the rate of change of h1 numerical value greater than the error upper limit, illustrates on the chi shell that h1 numerical value is corresponding at this moment depression is arranged; Otherwise, if the rate of change of h1 numerical value less than the error lower limit, illustrates on the chi shell that h1 numerical value is corresponding at this moment projection is arranged.
Claims (3)
1. the non-contact optical automatic detection device of a grating scale chi shell linearity, it is characterized in that: this pick-up unit comprises computer (1), capture card (2), CCD camera (3), object lens (4), light source (5), condenser (6), coated glass (7), straight line parallel moving mechanism (8), anchor clamps (10) and pedestal (11); Light source (5), condenser (6), coated glass (7), object lens (4), CCD camera (3) consist of Systems for optical inspection jointly with straight line parallel moving mechanism (8); Anchor clamps (10) are fixedly connected with pedestal (11), and it clamps grating scale chi shell (9) and be positioned over the below of coated glass (7), and the direction of motion of straight line parallel moving mechanism (8) is parallel with grating scale chi shell (9);
Described coated glass (7) is sheet glass, and its lower surface is provided with reflectance coating district (7-1) and the uncoated non-reflecting coating district (7-2) of plated film, and the separatrix between reflectance coating district (7-1) and non-reflecting coating district (7-2) is straight line; The detection light that light source (5) sends sees through the upper surface of coated glass (7) and shines on the lower surface of coated glass (7) after refraction after condenser (6) converges; The incident light that is radiated in the reflectance coating district (7-1) is the first incident light (a), and the incident ray that is radiated at non-reflecting coating district (7-2) is the second incident light (b); After the first incident light (a) is reflected film district (7-1) reflection, through upper surface ejaculation formation first emergent light (a-1) of coated glass (7); The second incident light (b) penetrates from non-reflecting coating district (7-2) and forms the second emergent light (c), the second emergent light (c) is after the reflection of grating scale chi shell (9), from non-reflecting coating district (7-2) incident, the upper surface outgoing from coated glass (7) forms the 3rd emergent light (d) again;
Described object lens (4) converge to the first emergent light (a-1) and the 3rd emergent light (d) of coated glass (7) respectively on the CCD camera (3), after CCD camera (3) is converted to corresponding picture signal with light signal, through capture card (2) storage data and simultaneously at computer (1) demonstration image; The first emergent light (a-1) is imaged as a bright light belt (A) at computer (1); The 3rd emergent light (d) is imaged as a gloomy light belt (D) at computer (1); Shadow region (f) between the first emergent light (a-1) and the 3rd emergent light (d) is imaged as black band (F) at computer (1).
2. automatic detection device as claimed in claim 1, it is characterized in that: described grating scale chi shell (9) is parallel with the lower surface of coated glass (7).
3. automatic detection device as claimed in claim 1, it is characterized in that: described emergent ray after condenser (6) converges is directional light, the incident angle when it incides coated glass (7) upper surface is acute angle.
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| CN2012103125118A CN102853784A (en) | 2012-08-29 | 2012-08-29 | Non-contact optical automatic detecting device for linearity of scale shell of grating scale |
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| CN2012103125118A CN102853784A (en) | 2012-08-29 | 2012-08-29 | Non-contact optical automatic detecting device for linearity of scale shell of grating scale |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103267486A (en) * | 2013-06-08 | 2013-08-28 | 张明亮 | Non-contact displacement or angle sensor and displacement or angle measuring method thereof |
| CN105247352A (en) * | 2013-05-29 | 2016-01-13 | 伊斯拉表面视觉有限公司 | Method for determining the refractive power of a transparent object, and corresponding device |
| CN110487219A (en) * | 2019-08-15 | 2019-11-22 | 卢振武 | A kind of detection system and its detection method of movement mechanism straightness |
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| SU1397732A1 (en) * | 1987-01-07 | 1988-05-23 | Московский авиационный институт им.Серго Орджоникидзе | Device for measuring thickness of thin walls of glass pipes |
| CN1033479A (en) * | 1987-12-08 | 1989-06-21 | 恩哈特工业公司 | The measuring method of wall thickness of transparent articles |
| US4902902A (en) * | 1986-05-14 | 1990-02-20 | Beta Instrument Co. | Apparatus for determining the thickness of material |
| CN201281587Y (en) * | 2008-10-31 | 2009-07-29 | 徐熙平 | Photoelectric on-line detecting system for wall thickness of quartz tube |
| CN102607445A (en) * | 2012-03-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Gap detection device of indicating grating of grating linear displacement sensor |
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2012
- 2012-08-29 CN CN2012103125118A patent/CN102853784A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4902902A (en) * | 1986-05-14 | 1990-02-20 | Beta Instrument Co. | Apparatus for determining the thickness of material |
| SU1397732A1 (en) * | 1987-01-07 | 1988-05-23 | Московский авиационный институт им.Серго Орджоникидзе | Device for measuring thickness of thin walls of glass pipes |
| CN1033479A (en) * | 1987-12-08 | 1989-06-21 | 恩哈特工业公司 | The measuring method of wall thickness of transparent articles |
| CN201281587Y (en) * | 2008-10-31 | 2009-07-29 | 徐熙平 | Photoelectric on-line detecting system for wall thickness of quartz tube |
| CN102607445A (en) * | 2012-03-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Gap detection device of indicating grating of grating linear displacement sensor |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105247352A (en) * | 2013-05-29 | 2016-01-13 | 伊斯拉表面视觉有限公司 | Method for determining the refractive power of a transparent object, and corresponding device |
| US9797833B2 (en) | 2013-05-29 | 2017-10-24 | Isra Surface Vision Gmbh | Method for determining the refractive power of a transparent object, and corresponding device |
| CN103267486A (en) * | 2013-06-08 | 2013-08-28 | 张明亮 | Non-contact displacement or angle sensor and displacement or angle measuring method thereof |
| CN110487219A (en) * | 2019-08-15 | 2019-11-22 | 卢振武 | A kind of detection system and its detection method of movement mechanism straightness |
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Application publication date: 20130102 |