CN102818673B - High-accuracy static extra high pressure sensor and pressure measurement method - Google Patents
High-accuracy static extra high pressure sensor and pressure measurement method Download PDFInfo
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- CN102818673B CN102818673B CN201210138226.9A CN201210138226A CN102818673B CN 102818673 B CN102818673 B CN 102818673B CN 201210138226 A CN201210138226 A CN 201210138226A CN 102818673 B CN102818673 B CN 102818673B
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Abstract
The invention relates to a pressure sensor, belongs to the field of extra high pressure measurement and particularly relates to a high-accuracy static extra high pressure sensor. The high-accuracy static extra high pressure sensor is characterized by comprising a sensor casing, the sensor casing is sealed by a casing cover, an inner cavity which is resistant to extra high pressure is arranged in the casing, a sensing element and a lead seat are arranged in the inner cavity, the lead seat leads out electrical signals from the sensing element, the sensing element comprises a seal chamber which is filled with sensing media and used for inducing pressure, a sensing component is arranged in the seal chamber, the sensing component is a rod which is wound by sensing metal wires, the sensing metal wires lead out the electrical signals through two lead awls arranged in the lead seat, an insulation layer is arranged between the lead awls and the lead seat, the two lead awls are connected with lead-out electric wires, the lead seat seals the sensing component, and the lead-out electric wires connected with the lead awls are lead out from the middle of the casing cover. The high-accuracy static extra high pressure sensor is rapid in response, light, small in size and capable of guaranteeing high-accuracy measurement.
Description
Technical field
The present invention relates to a kind of pressure transducer, relate in particular to a kind of method that there is high-precision static hyperpressure sensor and adopt hyperpressure sensors measure pressure.
Background technology
The related pressure limit of pressure measurement, from MPa more than several Pa to 2000, is divided into minute-pressure (<10kPa), low pressure (0.01MPa-0.25MPa), middle pressure (0.25MPa-100MPa), high pressure (>100MPa), UHV (ultra-high voltage) (>600MPa) conventionally.The instrument of gaging pressure has liquid manometer, piston gage, elastic pressure gauge and electric measuring type pressure gauge with regard to its principle.The electric measuring type pressure of measuring for hyperpressure is at present in respect of copper-manganese electric resistance manometer, and its structure has diaphragm type, paper tinsel formula and Si Shi.
Patent CN1303005A, CN1595084A have introduced a kind of diaphragm type hyperpressure sensor, as shown in Figure 1, this pressure transducer can be measured pressure more than 50GPa, is mainly used in dynamic pressure measurement, have very fast responding ability, its accuracy of measurement may be in 1% left and right.
Patent CN1789940A has introduced a kind of paper tinsel formula copper-manganese pressure transducer, and as shown in Figure 2, also, for the measurement of dynamic pressure, its gaging pressure is high, and response is fast, and accuracy neither be very high.
Also made the pressure gauge of manganese-copper filament structure both at home and abroad, its structure as shown in Figure 3, is mainly used in static pressure and measures, and gaging pressure can reach several GPa, and accuracy is about 1%-0.5%.
At present, it is control gap piston gage the most accurately that hyperpressure is measured, as shown in Figure 4, its highest pressure of measuring 3GPa, accuracy can reach 0.02%-0.1%, is the datum pressure meter of current hyperpressure.But the pressure gauge of this structure, carrys out gaging pressure by pascal's principle and hydrostatic equilibrium principle, during measurement, by the counterweight being carried in above piston, carry out the unknown pressure of balance, therefore response is very slow; In addition, hyperpressure control gap piston gage is bulky, cannot move, so its use is very restricted.
Summary of the invention
Technical matters to be solved by this invention is to provide the method for the static hyperpressure sensor of a kind of high precision and gaging pressure, solve present hyperpressure surveying instrument when pressure survey or precision is not high, low-response, bulky so use limited defect.
Technical scheme
The static hyperpressure sensor of a kind of high precision, it is characterized in that: comprise sensor housing, described sensor housing is hermetically enclosed with cap, in housing, it is the inner chamber of resistance to hyperpressure, in described inner chamber, be provided with sensing element and from sensing element, draw the wire holder of electric signal, described sensing element comprises and is full of sensor information for the airtight chamber of induction pressure, in airtight chamber, there is sensing member, described sensing member is for being wound with sensing rod member wiry, described sensing tinsel is drawn electric signal by two lead-in wire cones that are arranged in wire holder, between wire holder and lead-in wire cone, be provided with sealed insulation layer, two lead-in wire cones are connected with respectively and draw electric wire, described wire holder sealing sensing member, the electric wire of drawing that described lead-in wire cone connects is drawn in the middle of cap.
On the internal chamber wall of described sensor housing inside, be provided with multi-layer annular step, the large lower diameter of described wire holder upper diameter is little, upper diameter is identical with the internal diameter of installed inner chamber, outside described wire holder bottom and be surrounded with seal ring assembly between internal chamber wall, described seal ring assembly is arranged on the step of below.
Described sensor housing top indent, cap seals by gland nut press seal coil assembly.
The sensing tinsel of described sensing element adopts manganese-copper filament.
Described sensor information adopts white gas.
On the rod member outer ring of described sensing member, be provided with spiral groove, described sensing tinsel is fixed in described spiral groove, and described rod member adopts aluminium alloy to make, and by dense anodic oxide, forms the aluminum oxide film rete of one deck densification on rod member surface.
The cavity of the airtight chamber of described sensing element comprises bellows piece cavity.
Described lead-in wire cone comprises upper, middle and lower three parts, upper part and bottom are divided into right cylinder, center section is up-small and down-big cone, and the cylindrical diameter of upper part and lower part is less than the base diameter of middle circle cone, and lower part puts in the airtight chamber of sensing element.
The method that adopts the static hyperpressure sensors measure pressure of high precision as claimed in claim 1, is characterized in that comprising the following steps:
1) hyperpressure is delivered to the inner chamber of sensor housing by the lower end interface of the liquid pressure transmitting medium by measuring pressure and sensor housing;
2) seal ring assembly that in inner chamber, liquid pressure transmitting medium is compressed by cap seals, and interior cavity pressure raises, and pressure acts on the sensor information in airtight chamber by the bellows piece cavity of airtight chamber simultaneously;
3) sensor information transfers the pressure to as sensing manganese-copper filament wiry again, thereby causes the variation of manganese-copper filament resistance, utilizes digital multimeter to bore and the conduction measurement resistance value of electric wire by lead-in wire;
4) by computer communication, monitor and process in real time the resistance relative variation of manganese-copper filament when measured resistance value, and resistance relative variation is characterized by force value.
Beneficial effect
The static hyperpressure sensor of high precision of the present invention can not only guarantee high-precision measurement under hyperpressure and high temperature, and response rapidly, and volume is little, easy to carry, is beneficial to measurement.
Accompanying drawing explanation
Fig. 1 is diaphragm type copper-manganese pressure transducer schematic diagram.
Fig. 2 is paper tinsel formula copper-manganese pressure transducer schematic diagram.
Fig. 3 is the pressure transducer schematic diagram of manganese-copper filament structure.
Fig. 4 is control gap piston gage schematic diagram.
Fig. 5 is schematic diagram of the present invention.
Wherein: 1-sensor housing, 2-cap, 3-inner chamber, 4-sensing element, 5-wire holder, 6-sensing member, the 7-cone that goes between, 8-airtight chamber, 9-seal ring assembly, 10-bellows piece cavity, 11-stainless steel sleeve pipeline section cavity, 12-nozzle belt cavity, 13-end socket.
Embodiment
Below in conjunction with specific embodiments and the drawings, further set forth the present invention.
The static hyperpressure sensor of a kind of high precision, as shown in Figure 5, comprise sensor housing 1, described sensor housing 1 is hermetically enclosed with cap 2, in housing, it is the inner chamber 3 of resistance to hyperpressure, in described inner chamber 3, be provided with sensing element 4 and from sensing element 4, draw the wire holder 5 of electric signal, described sensing element 4 comprises and is full of sensor information for the airtight chamber 8 of induction pressure, in airtight chamber 8, there is sensing member 6, described sensing member is for being wound with sensing rod member wiry, described sensing tinsel is drawn electric signal by two lead-in wire cones 7 that are arranged in wire holder 5, two lead-in wire cones 7 are connected with respectively and draw electric wire, described wire holder 5 sealing sensing members 6, the electric wire of drawing that described lead-in wire cone 7 connects is drawn in the middle of cap 2.
On inner chamber 3 walls of described sensor housing 1 inside, be provided with multi-layer annular step, the large lower diameter of described wire holder 5 upper diameter is little, upper diameter is identical with the internal diameter of installed inner chamber 3, outside described wire holder 5 bottoms and between inner chamber 3 walls, be surrounded with seal ring assembly 9, described seal ring assembly 9 is arranged on the step of below.Described sensor housing 1 top indent, cap 2 adopts gland nut sealing.
The position that pedestal and the gland nut of sensing element 4 integral body by seal ring assembly 9, wire holder 5 is fixed on second step, gland nut is mainly the seal ring assembly 9 compressing below the pedestal of wire holder 5, guarantee the sealing between housing and sensing element 4, enclosure interior provides the inner chamber 3 of a resistance to hyperpressure.
The sensing tinsel of described sensing element 4 adopts manganese-copper filament, sensor information adopts white gas, on the rod member outer ring of the sensing member 6 of sensing element 4, be provided with spiral groove, manganese-copper filament is fixed in described spiral groove, described rod member adopts aluminium alloy to make, and by dense anodic oxide, on rod member surface, form the aluminum oxide film rete of one deck densification.The cavity of the airtight chamber of described sensing element 4 comprises bellows piece cavity 10.Manganese-copper filament is coiled into thin diameter spring, and then is entangled on the rod member of spiral groove.
The cavity of the airtight chamber of described sensing element 4 comprises stainless steel sleeve pipeline section cavity 11, bellows piece cavity 10, nozzle belt cavity 12 and the end socket 13 being connected with wire holder 5, stainless steel sleeve pipeline section cavity 11, nozzle belt cavity 12 and bellows piece cavity 10 are by roll welding welded seal, stainless steel sleeve pipeline section cavity 11 passes through Laser Welding (LBW) welded seal with wire holder 5, end socket 13, by being screwed on nozzle belt cavity 12, gets up whole sensing element 4 and pressure transmitting medium seal isolation.
Described sensing element 4 adopts white gas as pressure transmitting medium, can not cause bypass effect when pressure drag is measured under hyperpressure, can not produce systematic error to measuring pressure of sensor; And under hyperpressure, white gas can not undergo phase transition, therefore can isotropic transmission of pressure, seal adopts part corrugated tube to compensate the volume shrinkage mass that pressure transmitting medium produces under hyperpressure effect, thereby solved under hyperpressure, cannot detect and error large, the problem that precision is low, by improved pressure transmitting medium and structural change, not only make sensing element 4 normally work under hyperpressure, and can guarantee the smooth and precision of detection.
Described lead-in wire cone 7 comprises upper, middle and lower three parts, upper part and bottom are divided into right cylinder, center section is up-small and down-big cone, and the cylindrical diameter of upper part and lower part is less than the base diameter of middle circle cone, and lower part puts in the airtight chamber 8 of sensing element 4.Lead-in wire cone 7 is the electrode of sensing member 6.
In the middle of described wire holder 5, there is taper hole, place lead-in wire cone 7, between taper hole inwall and lead-in wire cone 7, be provided with sealed insulation layer.Lead-in wire cone 7 coordinates with the taper hole of wire holder 5, centre accompanies sealed insulation layer, this pedestal has very high intensity and toughness, can pressure break and brittle failure under hyperpressure effect, in addition, this base structure is under high pressure effect, taper hole shrinks, make to connect between wire holder 5 and lead-in wire cone 7 tightr, lead-in wire cone 7 and sealed insulation layer can not move under hyperpressure effect in taper hole, are therefore conducive to hyperpressure sealing; The lead-in wire cone 7 that beryllium-bronze is made has extraordinary electric conductivity, and the thermoelectrical potential between copper-manganese is very little, is very rational electrode material; Sealed insulation layer under high pressure can phase transformation, still has extraordinary insulativity and sealing, adopts pyrophillite processing, and this insulation course also has extraordinary resistance to elevated temperatures.
The method that adopts the static hyperpressure sensors measure pressure of above-mentioned high precision, comprises the following steps:
1) hyperpressure is delivered to the inner chamber of sensor housing by the lower end interface of liquid pressure transmitting medium and sensor housing;
2) the seal ring assembly sealing that in inner chamber, the compacted nut cap of liquid pressure transmitting medium compresses, interior cavity pressure raises, and pressure is simultaneously by bellows action on the sensor information in airtight chamber;
3) sensor information transfers the pressure to as sensing manganese-copper filament wiry again, thereby causes the variation of manganese-copper filament resistance, utilizes digital multimeter to bore and the conduction measurement resistance value of electric wire by lead-in wire;
4) by computer communication, monitor and process in real time the resistance relative variation of manganese-copper filament when measured resistance value, and resistance relative variation is characterized by force value.
The resistance relative variation of manganese-copper filament and the relation between pressure are determined by control gap piston gage.This superhigh pressure sensor, after assembling completes, is first demarcated the corresponding resistance value of a plurality of spot pressures by piston manometer, then by linear fit, determines the relation between pressure and resistance relative variation.
The static hyperpressure sensor of this high precision is forced into 1200MPa pressure, pressurize 10min, and this pressure transducer does not go to pot and explosion, and insulated enclosure is all reliable.
The maximum error of indication
meet the accuracy technical requirement of 0.1 grade.
Reproducibility error ξ
s=0.048%FS, is less than 0.1%FS.
Stability deviation is
Be less than 0.1%FS.
This pressure transducer is easy to use, is convenient to on-the-spot test and base measuring pressure, and its precision is high, can be used as the Transfer Standards of value comparison between the piston gage of control gap.
Claims (8)
1. the static hyperpressure sensor of a high precision, it is characterized in that: comprise sensor housing (1), described sensor housing (1) is hermetically enclosed with cap (2), in sensor housing (1), it is the inner chamber (3) of resistance to hyperpressure, in described inner chamber (3), be provided with sensing element (4) and from sensing element (4), draw the wire holder (5) of electric signal, described sensing element (4) comprises and is full of sensor information for the airtight chamber (8) of induction pressure, in airtight chamber (8), there is sensing member (6), described sensing member is for being wound with sensing rod member wiry, described sensing tinsel is drawn electric signal by two the lead-in wire cones (7) that are arranged in wire holder (5), two lead-in wire cones (7) are connected with respectively draws electric wire, between wire holder (5) and lead-in wire cone (7), be provided with sealed insulation layer, described wire holder (5) sealing sensing member (6), the electric wire of drawing that described lead-in wire cone (7) connects is drawn in the middle of cap (2), on inner chamber (3) wall of described sensor housing (1) inside, be provided with multi-layer annular step, the large lower diameter of described wire holder (5) upper diameter is little, upper diameter is identical with the internal diameter of installed inner chamber (3), outside described wire holder (5) bottom and be surrounded with seal ring assembly (9) between internal chamber wall, described seal ring assembly (9) is arranged on the step of below.
2. the static hyperpressure sensor of high precision as claimed in claim 1, is characterized in that: described sensor housing (1) top indent, cap (2) seals by gland nut press seal coil assembly (9).
3. the static hyperpressure sensor of high precision as claimed in claim 1, is characterized in that: the sensing tinsel of described sensing element (4) adopts manganese-copper filament.
4. the static hyperpressure sensor of the high precision as described in claim 1 or 3, is characterized in that: described sensor information adopts white gas.
5. the static hyperpressure sensor of the high precision as described in claim 1 or 3, it is characterized in that: on the rod member outer ring of described sensing member (6), be provided with spiral groove, described sensing tinsel is fixed in described spiral groove, described rod member adopts aluminium alloy to make, and by dense anodic oxide, on rod member surface, form the aluminum oxide film rete of one deck densification.
6. the static hyperpressure sensor of the high precision as described in claim 1 or 3, is characterized in that: the cavity of the airtight chamber (8) of described sensing element (4) comprises bellows piece cavity (10).
7. the static hyperpressure sensor of high precision as claimed in claim 1, it is characterized in that: described lead-in wire cone (7) comprises upper, middle and lower three parts, upper part and bottom are divided into right cylinder, center section is up-small and down-big cone, the cylindrical diameter of upper part and lower part is less than the base diameter of middle circle cone, and lower part puts in the airtight chamber (8) of sensing element (4).
8. adopt the method for the static hyperpressure sensors measure pressure of high precision as claimed in claim 1, it is characterized in that comprising the following steps:
1) hyperpressure is delivered to the inner chamber of sensor housing by the lower end interface of the liquid pressure transmitting medium by measuring pressure and sensor housing;
2) seal ring assembly that in inner chamber, liquid pressure transmitting medium is compressed by cap seals, and interior cavity pressure raises, and pressure acts on the sensor information in airtight chamber by the bellows piece cavity of airtight chamber simultaneously;
3) sensor information transfers the pressure to as sensing manganese-copper filament wiry again, thereby causes the variation of manganese-copper filament resistance, utilizes digital multimeter to bore and the conduction measurement resistance value of electric wire by lead-in wire;
4) by computer communication, monitor and process in real time the resistance relative variation of manganese-copper filament when measured resistance value, and resistance relative variation is characterized by force value.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210138226.9A CN102818673B (en) | 2012-05-05 | 2012-05-05 | High-accuracy static extra high pressure sensor and pressure measurement method |
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| CN201210138226.9A CN102818673B (en) | 2012-05-05 | 2012-05-05 | High-accuracy static extra high pressure sensor and pressure measurement method |
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| CN102818673A CN102818673A (en) | 2012-12-12 |
| CN102818673B true CN102818673B (en) | 2014-12-10 |
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| CN103196617B (en) * | 2013-03-21 | 2014-10-15 | 西安交通大学 | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure |
| CN107677409A (en) * | 2017-11-06 | 2018-02-09 | 嘉兴御创电力科技有限公司 | A kind of high-precision hyperpressure sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2121687U (en) * | 1992-06-10 | 1992-11-11 | 中国兵器工业第二○二研究所 | Portable testing device for super-high pressure |
| CN2602358Y (en) * | 2003-03-21 | 2004-02-04 | 上海申鹿均质机有限公司 | Extra-high tension pressure sensor |
| JP3567877B2 (en) * | 2000-09-26 | 2004-09-22 | 株式会社デンソー | Sensor device |
| CN101762357A (en) * | 2009-12-29 | 2010-06-30 | 西安交通大学 | Strain supervoltage pressure transformer |
| CN102012288A (en) * | 2010-10-28 | 2011-04-13 | 西安交通大学 | Composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101200837B1 (en) * | 2010-06-25 | 2012-11-13 | 대양전기공업 주식회사 | Pressure senser structure body for car and mothod of packaging |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2121687U (en) * | 1992-06-10 | 1992-11-11 | 中国兵器工业第二○二研究所 | Portable testing device for super-high pressure |
| JP3567877B2 (en) * | 2000-09-26 | 2004-09-22 | 株式会社デンソー | Sensor device |
| CN2602358Y (en) * | 2003-03-21 | 2004-02-04 | 上海申鹿均质机有限公司 | Extra-high tension pressure sensor |
| CN101762357A (en) * | 2009-12-29 | 2010-06-30 | 西安交通大学 | Strain supervoltage pressure transformer |
| CN102012288A (en) * | 2010-10-28 | 2011-04-13 | 西安交通大学 | Composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor |
Non-Patent Citations (1)
| Title |
|---|
| JP特许第3567877 2002.04.05 * |
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