CN102804333A - 微器件的制备方法 - Google Patents
微器件的制备方法 Download PDFInfo
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- CN102804333A CN102804333A CN2011800099577A CN201180009957A CN102804333A CN 102804333 A CN102804333 A CN 102804333A CN 2011800099577 A CN2011800099577 A CN 2011800099577A CN 201180009957 A CN201180009957 A CN 201180009957A CN 102804333 A CN102804333 A CN 102804333A
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- Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
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Abstract
Description
Claims (55)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510551019.XA CN105147517B (zh) | 2010-02-18 | 2011-02-13 | 微器件的制备方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/707,731 US8828246B2 (en) | 2010-02-18 | 2010-02-18 | Method of fabricating micro-devices |
US12/707,731 | 2010-02-18 | ||
PCT/US2011/024672 WO2011103041A1 (en) | 2010-02-18 | 2011-02-13 | Method of fabricating micro-devices |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510551019.XA Division CN105147517B (zh) | 2010-02-18 | 2011-02-13 | 微器件的制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102804333A true CN102804333A (zh) | 2012-11-28 |
CN102804333B CN102804333B (zh) | 2016-08-24 |
Family
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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WO2016101778A1 (zh) * | 2014-12-22 | 2016-06-30 | 清华大学 | 一种基于生物兼容薄膜的柔性可延展电子器件及制备方法 |
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CN111584354A (zh) * | 2014-04-18 | 2020-08-25 | 株式会社荏原制作所 | 蚀刻方法 |
CN112386564A (zh) * | 2019-08-12 | 2021-02-23 | 湖南早晨纳米机器人有限公司 | 载药纳米机器人及其制备方法 |
WO2023086458A1 (en) * | 2021-11-10 | 2023-05-19 | Northwestern University | Methods for performing high-speed, scanned laser structuring of multi-layered eco-bioresorbable materials and fabricating bioresorbable electronic devices, and applications thereof |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10126291B2 (en) * | 2013-02-18 | 2018-11-13 | Anpac Bio-Medical Science Co., Ltd. | Apparatus for disease detection |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040106914A1 (en) * | 2002-09-23 | 2004-06-03 | Coppeta Jonathan R. | Micro-reservoir osmotic release systems and microtube array device |
US20050019213A1 (en) * | 2000-10-31 | 2005-01-27 | Caliper Life Sciences, Inc. | Methods and systems for processing microscale devices for reuse |
US20060216740A1 (en) * | 1993-11-01 | 2006-09-28 | Edman Carl F | Methods for the electronic, homogeneous assembly and fabrication of devices |
CN101563562A (zh) * | 2006-12-19 | 2009-10-21 | 皇家飞利浦电子股份有限公司 | 微流控装置 |
Family Cites Families (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3095229B2 (ja) * | 1990-08-31 | 2000-10-03 | 株式会社日立製作所 | マイクロプロセッサ及び複合論理回路 |
KR100306951B1 (ko) | 1995-12-05 | 2001-11-15 | 테칸 보스턴, 인코포레이티드 | 내장된정보과학에의해미세유체공학시스템내의유체유동을구동시키기위해구심가속도를이용하는장치및방법 |
US5797898A (en) * | 1996-07-02 | 1998-08-25 | Massachusetts Institute Of Technology | Microchip drug delivery devices |
CA2295177C (en) | 1997-06-13 | 2007-01-09 | Medinova Medical Consulting Gmbh | Drug targeting system, method of its preparation and its use |
US6165440A (en) | 1997-07-09 | 2000-12-26 | Board Of Regents, The University Of Texas System | Radiation and nanoparticles for enhancement of drug delivery in solid tumors |
KR100232853B1 (ko) * | 1997-10-15 | 1999-12-01 | 윤종용 | 잉크젯 프린터 헤드의 가열장치 및 이의 제조방법 |
US6240312B1 (en) * | 1997-10-23 | 2001-05-29 | Robert R. Alfano | Remote-controllable, micro-scale device for use in in vivo medical diagnosis and/or treatment |
US20030007991A1 (en) | 1998-09-25 | 2003-01-09 | Masters David B. | Devices including protein matrix materials and methods of making and using thereof |
US7064472B2 (en) * | 1999-07-20 | 2006-06-20 | Sri International | Electroactive polymer devices for moving fluid |
US6527762B1 (en) | 1999-08-18 | 2003-03-04 | Microchips, Inc. | Thermally-activated microchip chemical delivery devices |
US6492273B1 (en) | 1999-08-31 | 2002-12-10 | Micron Technology, Inc. | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
WO2001035928A1 (en) | 1999-11-17 | 2001-05-25 | Microchips, Inc. | Microfabricated devices for the delivery of molecules into a carrier fluid |
US7736687B2 (en) * | 2006-01-31 | 2010-06-15 | Advance Bio Prosthetic Surfaces, Ltd. | Methods of making medical devices |
AU2728601A (en) * | 1999-12-17 | 2001-06-25 | Motorola, Inc. | Devices and methods for making bioarrays |
AU2001252890B2 (en) * | 2000-03-02 | 2005-06-02 | Microchips, Inc. | Microfabricated devices for the storage and selective exposure of chemicals and devices |
US6773823B2 (en) | 2000-04-07 | 2004-08-10 | University Of New Orleans Research And Technology Foundation, Inc. | Sequential synthesis of core-shell nanoparticles using reverse micelles |
US6867448B1 (en) * | 2000-08-31 | 2005-03-15 | Micron Technology, Inc. | Electro-mechanically polished structure |
US6602791B2 (en) | 2001-04-27 | 2003-08-05 | Dalsa Semiconductor Inc. | Manufacture of integrated fluidic devices |
US20030010638A1 (en) * | 2001-06-15 | 2003-01-16 | Hansford Derek J. | Nanopump devices and methods |
US7067327B2 (en) | 2001-06-15 | 2006-06-27 | The University Of Houston System | Thin film optical detectors for retinal implantation and methods for making and using same |
US6827250B2 (en) | 2001-06-28 | 2004-12-07 | Microchips, Inc. | Methods for hermetically sealing microchip reservoir devices |
US8440093B1 (en) * | 2001-10-26 | 2013-05-14 | Fuidigm Corporation | Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels |
US7125731B2 (en) * | 2001-10-31 | 2006-10-24 | Hewlett-Packard Development Company, L.P. | Drop generator for ultra-small droplets |
KR20050037992A (ko) | 2002-06-05 | 2005-04-25 | 유니버시티 오브 플로리다 | 안약 전달 장치 |
US7610942B2 (en) | 2003-01-15 | 2009-11-03 | Amnis Corporation | Cell suspension rotating fluidic pump |
US6949888B2 (en) * | 2003-01-15 | 2005-09-27 | International Rectifier Corporation | Dimming ballast control IC with flash suppression circuit |
US20040202994A1 (en) * | 2003-02-21 | 2004-10-14 | West Virginia University Research Corporation | Apparatus and method for on-chip concentration using a microfluidic device with an integrated ultrafiltration membrane structure |
US20040236278A1 (en) | 2003-05-22 | 2004-11-25 | Atrium Medical Corp. | Therapeutic agent delivery |
WO2005016536A1 (en) * | 2003-08-04 | 2005-02-24 | Caliper Life Sciences, Inc. | Methods and systems for processing microscale devices for reuse |
US7375404B2 (en) | 2003-12-05 | 2008-05-20 | University Of Maryland Biotechnology Institute | Fabrication and integration of polymeric bioMEMS |
KR101281775B1 (ko) | 2003-12-19 | 2013-07-15 | 더 유니버시티 오브 노쓰 캐롤라이나 엣 채플 힐 | 소프트 또는 임프린트 리소그래피를 이용하여 분리된마이크로- 및 나노- 구조를 제작하는 방법 |
JP2007527784A (ja) * | 2004-02-13 | 2007-10-04 | ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒル | マイクロ流体デバイスを作製するための官能性材料及び新規方法 |
US7182894B2 (en) | 2004-03-12 | 2007-02-27 | Council Of Scientific & Industrial Research | Process for the preparation of free standing membranes |
CN1218682C (zh) * | 2004-03-30 | 2005-09-14 | 西安交通大学 | 可体内降解高分子材料微器件真空热融封装方法 |
US8019413B2 (en) | 2007-03-19 | 2011-09-13 | The Invention Science Fund I, Llc | Lumen-traveling biological interface device and method of use |
US7635562B2 (en) | 2004-05-25 | 2009-12-22 | Helicos Biosciences Corporation | Methods and devices for nucleic acid sequence determination |
WO2006006462A1 (ja) | 2004-07-08 | 2006-01-19 | Mitsubishi Materials Corporation | 金属微粒子の製造方法、およびそれにより製造された金属微粒子、並びにそれを含有してなる組成物、光吸収材、応用品 |
US20060040390A1 (en) | 2004-08-19 | 2006-02-23 | Minor John S Jr | Device, method, system, and program for intelligent in vivo cell-level chemical or genetic material delivery |
CN100488635C (zh) * | 2004-09-01 | 2009-05-20 | 微芯片公司 | 用于控制释放或者暴露储库内容物的多盖储库装置 |
JP2006100456A (ja) * | 2004-09-29 | 2006-04-13 | Sony Corp | 表面段差測定方法および表面段差測定装置 |
DE102005004877A1 (de) * | 2005-02-03 | 2006-08-10 | Robert Bosch Gmbh | Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren |
WO2006116752A2 (en) * | 2005-04-28 | 2006-11-02 | The Regents Of The University Of California | Compositions comprising nanostructures for cell, tissue and artificial organ growth, and methods for making and using same |
US20060283465A1 (en) | 2005-06-16 | 2006-12-21 | Nickel Janice H | Smart drug delivery system and a method of implementation thereof |
WO2007005683A2 (en) | 2005-07-01 | 2007-01-11 | The Regents Of The University Of California | Method and apparatus for angle of inclination acquisition and display on radiographic image |
CN101395247B (zh) | 2006-01-06 | 2013-04-17 | 新加坡国立大学 | 纳米结构材料的制备方法和由该方法得到的材料的应用 |
US7505110B2 (en) * | 2006-03-14 | 2009-03-17 | International Business Machines Corporation | Micro-electro-mechanical valves and pumps |
US7887508B2 (en) | 2006-03-14 | 2011-02-15 | The University Of Southern California | MEMS device and method for delivery of therapeutic agents |
EP2012748A2 (en) | 2006-04-26 | 2009-01-14 | Koninklijke Philips Electronics N.V. | Device for the controlled release of a substance and method of releasing a substance |
US7661319B2 (en) | 2006-06-02 | 2010-02-16 | The Board Of Trustees Of The University Of Illinois | Micromachined artificial haircell |
US8159107B2 (en) * | 2006-06-02 | 2012-04-17 | Microzeus Llc | Micro rotary machine and methods for using same |
US20080241264A1 (en) | 2006-11-13 | 2008-10-02 | Solomon Research Llc | System and methods for collective nanorobotics for medical applications |
WO2008112565A2 (en) | 2007-03-09 | 2008-09-18 | Anthony Manganaro | Method and composition for treating cancer |
US20090008146A1 (en) | 2007-03-16 | 2009-01-08 | Michael William Oleske | Optimizing in-building wireless signal propagation while ensuring data network security |
JP4892732B2 (ja) * | 2007-03-28 | 2012-03-07 | 国立大学法人岐阜大学 | 血管画像化方法、血管画像化システム及び血管画像化プログラム |
US8579858B2 (en) * | 2008-06-23 | 2013-11-12 | Cardiobridge Gmbh | Catheter pump for circulatory support |
-
2010
- 2010-02-18 US US12/707,731 patent/US8828246B2/en active Active
-
2011
- 2011-02-13 JP JP2012553951A patent/JP5849351B2/ja active Active
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- 2011-02-13 CA CA2789682A patent/CA2789682C/en active Active
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- 2011-02-13 CA CA3068756A patent/CA3068756A1/en not_active Abandoned
-
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- 2012-08-21 IL IL221564A patent/IL221564B/en active IP Right Grant
-
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- 2014-05-30 US US14/292,396 patent/US9487394B2/en active Active
-
2016
- 2016-09-26 US US15/275,776 patent/US20170043147A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060216740A1 (en) * | 1993-11-01 | 2006-09-28 | Edman Carl F | Methods for the electronic, homogeneous assembly and fabrication of devices |
US20050019213A1 (en) * | 2000-10-31 | 2005-01-27 | Caliper Life Sciences, Inc. | Methods and systems for processing microscale devices for reuse |
US20040106914A1 (en) * | 2002-09-23 | 2004-06-03 | Coppeta Jonathan R. | Micro-reservoir osmotic release systems and microtube array device |
CN101563562A (zh) * | 2006-12-19 | 2009-10-21 | 皇家飞利浦电子股份有限公司 | 微流控装置 |
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WO2014139482A1 (en) | 2013-03-15 | 2014-09-18 | Anpac Bio-Medical Science (Lishui) Co., Ltd. | Methods and apparatus for enhanced detection of diseases |
CN105705088A (zh) * | 2013-03-15 | 2016-06-22 | 安派科生物医学科技(丽水)有限公司 | 增强型疾病检测仪器及方法 |
US10012642B2 (en) | 2013-03-15 | 2018-07-03 | Anpac Bio-Medical Science (Lishui) Co., Ltd. | Methods and apparatus for enhanced detection of diseases |
CN111584354A (zh) * | 2014-04-18 | 2020-08-25 | 株式会社荏原制作所 | 蚀刻方法 |
CN111584354B (zh) * | 2014-04-18 | 2021-09-03 | 株式会社荏原制作所 | 蚀刻方法 |
WO2016101778A1 (zh) * | 2014-12-22 | 2016-06-30 | 清华大学 | 一种基于生物兼容薄膜的柔性可延展电子器件及制备方法 |
US10932722B2 (en) | 2014-12-22 | 2021-03-02 | Tsinghua University | Flexible and stretchable electronic device based on biocompatible film and preparation method |
CN106353285A (zh) * | 2015-07-15 | 2017-01-25 | 力晶科技股份有限公司 | 具有纳米腔的集成生物感测器及其制作方法 |
CN112386564A (zh) * | 2019-08-12 | 2021-02-23 | 湖南早晨纳米机器人有限公司 | 载药纳米机器人及其制备方法 |
WO2023086458A1 (en) * | 2021-11-10 | 2023-05-19 | Northwestern University | Methods for performing high-speed, scanned laser structuring of multi-layered eco-bioresorbable materials and fabricating bioresorbable electronic devices, and applications thereof |
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US20110200948A1 (en) | 2011-08-18 |
US20170043147A1 (en) | 2017-02-16 |
US20140299574A1 (en) | 2014-10-09 |
IL221564B (en) | 2019-03-31 |
JP5849351B2 (ja) | 2016-01-27 |
AU2011218339B2 (en) | 2015-11-26 |
CA2789682C (en) | 2020-03-24 |
CN102804333B (zh) | 2016-08-24 |
EP2537176A4 (en) | 2017-03-29 |
CN105147517B (zh) | 2018-10-16 |
US9487394B2 (en) | 2016-11-08 |
JP2013520422A (ja) | 2013-06-06 |
AU2011218339A1 (en) | 2012-09-13 |
US8828246B2 (en) | 2014-09-09 |
CA3068756A1 (en) | 2011-08-25 |
EP2537176A1 (en) | 2012-12-26 |
KR101842516B1 (ko) | 2018-03-27 |
WO2011103041A1 (en) | 2011-08-25 |
KR20130057966A (ko) | 2013-06-03 |
CA2789682A1 (en) | 2011-08-25 |
CN105147517A (zh) | 2015-12-16 |
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