CN102782465B - 紧凑式干涉仪分光计 - Google Patents

紧凑式干涉仪分光计 Download PDF

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Publication number
CN102782465B
CN102782465B CN201180011869.0A CN201180011869A CN102782465B CN 102782465 B CN102782465 B CN 102782465B CN 201180011869 A CN201180011869 A CN 201180011869A CN 102782465 B CN102782465 B CN 102782465B
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China
Prior art keywords
detector
interferometer
path
optics
beams
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CN201180011869.0A
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Chinese (zh)
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CN102782465A (zh
Inventor
H·莫特梅尔
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British Research And Innovation Organization
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SCIENCE AND TECHNOLOGY FACILIT
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4531—Devices without moving parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4532—Devices of compact or symmetric construction

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CN201180011869.0A 2010-01-18 2011-01-14 紧凑式干涉仪分光计 Active CN102782465B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB1000775.5A GB201000775D0 (en) 2010-01-18 2010-01-18 Interferometer spectrometer
GB1000775.5 2010-01-18
PCT/GB2011/000045 WO2011086357A1 (en) 2010-01-18 2011-01-14 Compact interferometer spectrometer

Publications (2)

Publication Number Publication Date
CN102782465A CN102782465A (zh) 2012-11-14
CN102782465B true CN102782465B (zh) 2015-02-18

Family

ID=42028504

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180011869.0A Active CN102782465B (zh) 2010-01-18 2011-01-14 紧凑式干涉仪分光计

Country Status (6)

Country Link
US (1) US9046412B2 (enExample)
EP (1) EP2526392B1 (enExample)
JP (1) JP5635624B2 (enExample)
CN (1) CN102782465B (enExample)
GB (1) GB201000775D0 (enExample)
WO (1) WO2011086357A1 (enExample)

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US9377758B1 (en) 2012-04-27 2016-06-28 University Of South Florida Incoherent digital holographic adaptive optics
US9915565B2 (en) 2012-10-26 2018-03-13 Applied Spectral Imaging Ltd. Method and system for spectral imaging
WO2014190027A1 (en) 2013-05-22 2014-11-27 Massachusetts Institute Of Technology Methods, systems, and apparatus for imaging spectroscopy
WO2015052715A1 (en) * 2013-10-07 2015-04-16 Ramot At Tel-Aviv University Ltd. Polarization-independent differential interference contrast optical arrangement
DE102015208796A1 (de) 2015-05-12 2016-11-17 Technische Universität München Statisches Fourier-Transformations-Spektrometer
WO2016203245A1 (en) * 2015-06-16 2016-12-22 Spectra Medical Limited High resolution remote imaging system
WO2017011752A1 (en) 2015-07-15 2017-01-19 Massachusetts Institute Of Technology Systems, apparatus, and methods for spectral imaging
JP6678253B2 (ja) * 2016-06-03 2020-04-08 エーエスエムエル ホールディング エヌ．ブイ． アライメントシステムウェーハスタックビーム分析器
US10228283B2 (en) 2016-08-12 2019-03-12 Spectral Insights Private Limited Spectral imaging system
WO2018029544A1 (en) * 2016-08-12 2018-02-15 Spectral Insights Private Limited Spectral imaging system
GB201614185D0 (en) * 2016-08-19 2016-10-05 Keit Ltd Compact interferometer spectrometer
RU2649048C1 (ru) 2016-11-25 2018-03-29 Самсунг Электроникс Ко., Лтд. Система компактного спектрометра, предназначенного для неинвазивного измерения спектров поглощения и пропускания образцов биологической ткани
GB2557311B (en) 2016-12-06 2021-05-12 Rsp Systems As Analyte Detection apparatus and method of detecting an analyte
GB201701998D0 (en) * 2017-02-07 2017-03-22 Science And Tech Facilities Council Compact interferometer
US20180292374A1 (en) 2017-04-05 2018-10-11 International Business Machines Corporation Detecting gas leaks using unmanned aerial vehicles
GB201710100D0 (en) * 2017-06-23 2017-08-09 Keit Ltd Noise suppression in spectrometers
KR102561100B1 (ko) * 2017-11-21 2023-07-28 삼성전자주식회사 메타 표면을 이용한 푸리에 변환 간섭계
US11221211B2 (en) 2018-01-26 2022-01-11 Vanderbilt University Systems and methods for non-destructive evaluation of optical material properties and surfaces
EP3531064A1 (de) * 2018-02-27 2019-08-28 Metrohm Ag Strahlenführung im interferometer
US11493751B2 (en) 2019-01-23 2022-11-08 Vanderbilt University Systems and methods for compact optical relay
CN111208072A (zh) * 2019-11-05 2020-05-29 苏州智曜科技有限公司 一种痕量气体浓度检测的光谱系统
WO2021154772A1 (en) * 2020-01-27 2021-08-05 Layer Metrics Inc. Spectroferometer
CN111612955A (zh) * 2020-05-19 2020-09-01 中航机场设备有限公司 一种非接触式自助防爆安检通道系统及安检方法
US11761750B1 (en) 2022-02-25 2023-09-19 Utah State University Space Dynamics Laboratory Multi-environment Rayleigh interferometer
GB202203991D0 (en) 2022-03-22 2022-05-04 Keit Ltd Method of calibrating one or more spectrometers
GB202203993D0 (en) 2022-03-22 2022-05-04 Keit Ltd Methods of analysing a sample and calibrating a spectrometer
GB2629813A (en) * 2023-05-11 2024-11-13 Res & Innovation Uk Compact interferometer

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JPH01203936A (ja) * 1988-02-09 1989-08-16 Nec Corp 光センサー分光感度測定装置
US4946280A (en) * 1988-09-15 1990-08-07 Massachusetts Institute Of Technology Wavefront analysis for segmented mirror control
US5493398A (en) * 1992-02-28 1996-02-20 Pfister; Klaus Device for observing test-piece surfaces by the speckle-shearing-method for the measurement of deformations
US5495334A (en) * 1990-07-26 1996-02-27 Research Development Corporation Of Japan Fourier transform spectroscope with quadrangular common path interferometer
EP0732582A2 (en) * 1995-03-16 1996-09-18 Bio-Rad Laboratories, Inc. Tunable excitation and/or tunable emission fluorescence imaging

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US3597091A (en) 1968-01-18 1971-08-03 Itek Corp Interferometer
DE2104903A1 (de) 1970-02-09 1971-08-19 British Steel Corp Interferometer Dickenlehre
US3741657A (en) 1971-03-03 1973-06-26 Raytheon Co Laser gyroscope
US4383763A (en) 1979-09-12 1983-05-17 Litton Systems, Inc. Controllable mirrors
US4850708A (en) * 1988-06-06 1989-07-25 Litton Systems, Inc. Method and apparatus for planar alignment of a ring laser gyroscope for minimum magnetic bias sensitivity
US4976542A (en) 1988-07-25 1990-12-11 Washington University Digital array scanned interferometer
JPH06347324A (ja) * 1993-06-11 1994-12-22 Res Dev Corp Of Japan 並列多重画像フーリエ分光映像法
US6051835A (en) * 1998-01-07 2000-04-18 Bio-Rad Laboratories, Inc. Spectral imaging apparatus and methodology
US6721057B1 (en) 1999-03-13 2004-04-13 California Institute Of Technology Spatially modulated interferometer and beam shearing device therefor
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US7643157B2 (en) 2007-01-04 2010-01-05 Lasertec Corporation Phase shift amount measurement apparatus and transmittance measurement apparatus

Patent Citations (6)

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JPH01203936A (ja) * 1988-02-09 1989-08-16 Nec Corp 光センサー分光感度測定装置
US4946280A (en) * 1988-09-15 1990-08-07 Massachusetts Institute Of Technology Wavefront analysis for segmented mirror control
US5495334A (en) * 1990-07-26 1996-02-27 Research Development Corporation Of Japan Fourier transform spectroscope with quadrangular common path interferometer
US5493398A (en) * 1992-02-28 1996-02-20 Pfister; Klaus Device for observing test-piece surfaces by the speckle-shearing-method for the measurement of deformations
EP0732582A2 (en) * 1995-03-16 1996-09-18 Bio-Rad Laboratories, Inc. Tunable excitation and/or tunable emission fluorescence imaging
US5885531A (en) * 1995-03-16 1999-03-23 Bio-Rad Laboratories, Inc. Fluorescence imaging instrument utilizing fish

Also Published As

Publication number Publication date
EP2526392B1 (en) 2017-04-05
WO2011086357A1 (en) 2011-07-21
US9046412B2 (en) 2015-06-02
EP2526392A1 (en) 2012-11-28
GB201000775D0 (en) 2010-03-03
CN102782465A (zh) 2012-11-14
JP5635624B2 (ja) 2014-12-03
US20120281223A1 (en) 2012-11-08
JP2013517465A (ja) 2013-05-16

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