CN102778332A - Micro differential pressure generating and calibrating device - Google Patents

Micro differential pressure generating and calibrating device Download PDF

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Publication number
CN102778332A
CN102778332A CN2011101209082A CN201110120908A CN102778332A CN 102778332 A CN102778332 A CN 102778332A CN 2011101209082 A CN2011101209082 A CN 2011101209082A CN 201110120908 A CN201110120908 A CN 201110120908A CN 102778332 A CN102778332 A CN 102778332A
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pressure
minute
differential pressure
cylinder
standard
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CN102778332B (en
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周江华
卢莹
何泽青
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Academy of Opto Electronics of CAS
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Abstract

The invention discloses a micro differential pressure generating and calibrating device, which relates to the micro differential pressure sensor detection and calibration technology and comprises two micro differential pressure sources in the same structure, a pressure lead pipe, a standard differential pressure meter and a differential pressure sensor to be calibrated, wherein the two micro differential pressure sources are respectively connected onto two pressure conveying openings of the differential pressure sensor to be calibrated and the standard differential pressure meter through the pressure lead pipe, and each micro differential pressure source consists of a cylindrical main air cylinder, a pressure adjusting piston cylinder, a precise pressure adjusting lead screw piston, a fine-adjustment piston cylinder, a fine-adjustment lead screw piston and a check valve. A series of micro differential pressures can be generated through the manual adjustment of the two micro differential pressure sources, the measuring value of the standard differential pressure meter is used as the reference, the measuring value and the deviation value of the differential pressure sensor to be calibrated are recorded through a computer, and the calibration of the differential pressure sensor to be calibrated is realized. The two micro differential pressure sources in the same structure are adopted, the positive and negative differential pressure regulation is convenient, the influence caused by ambient atmosphere is isolated, and the stability and the precision of the manufactured pressure can be easily maintained. The invention provides a determining method of key parameters of the device disclosed by the invention.

Description

The minute-pressure difference takes place and calibrating installation
Technical field
The present invention relates to the detection and the calibration technique field of micro-pressure sensor, the minute-pressure that device can produce and examine and determine in some handkerchiefs to one kPa scope is poor.The objective of the invention is to be the pressure reduction pitot meter of lighter-than-air flight devices such as the current blimp that is used widely day by day, captive balloon and the demarcation and the calibration of utricule differential pressure pickup, provide a cover device easy to use, with low cost.But other field, every demarcation and calibration that relates to the differential pressure pickup of range in above-mentioned pressure differential range equally can be used apparatus of the present invention.
Background technology
In recent years in the regional atmospheric environmental monitoring, prevent and reduce natural disasters, under the driving of demands such as high resolving power real time monitoring, early warning and missile defence, anti-terrorism, area communication, be that the lighter-than-air flight device of representative has obtained using widely with soft unmanned airship and captive balloon.This type of aircraft has two characteristics:
One of which, air speed are very low, are generally less than 20m/s, and corresponding dynamic pressure is between 0~250Pa, and the typical range of used differential pressure pickup is about 400Pa;
Two, profile is an airbag structure, keeps profile through utricule is implemented holding pressure control.Utricule and ambient atmosphere pressure reduction generally maintain between 200Pa~700Pa, and used differential pressure pickup typical case range is about 1000Pa.
Differential pressure pickup to above-mentioned range is accurately calibrated, and the minimal pressure difference generation precision and the stability in the pressure reduction source of calibrating installation need reach the magnitude of Pa.With 1 standard atmospheric pressure 101325Pa is reference, 1Pa be about 100,000 of 1 standard atmospheric pressure/.Make the pressure reduction source reach and be stabilized in very difficulty of this level, only external at present minority producer can provide this series products, and price is very expensive.
By The Ideal-Gas Equation, in theory, as long as make the volume change 100,000 of the sealing gas of 1 standard atmospheric pressure/, can make that the minute-pressure that produces about 1Pa between itself and the standard pressure is poor.Difficult is the stability that how to keep pressure reduction.To like this small pressure reduction, switch door, the personnel formed pressure reduction pulsation of atmospheric disturbance that causes such as walk about all is enough to it is flooded.
The present invention constructs low-cost minute-pressure difference calibrating installation through following thinking:
The air-capacitor compression set of one of which, a precision of design, can make the volume change of airtight air be accurate to 100,000/, thereby possess the ability of the following minute-pressure difference of 1Pa;
When two, minute-pressure difference takes place and calibrating installation is worked, isolate with ambient atmosphere, thereby isolated the atm difference disturbance.So, only exist between pressure reduction source and the atmospheric environment by the faint pressure reduction that heat interchange caused drift.Because the thermal equilibrium process is a gradual process, the pressure reduction source keeps the stable time to be at least branch kind magnitude.
Differential pressure measurement value (measured value that comprises standard differential manometer measured value and differential pressure pickup to be checked) in generation of three, minute-pressure difference and the calibrating installation is carried out synchronous acquisition by computing machine.Since the response time of differential pressure pickup is general<1s, the stable time constant much smaller than the pressure reduction source.So long as synchronous acquisition, the drift in pressure reduction source is to the not influence of calibrating of differential pressure pickup.
The ingenious part of above-mentioned thinking is the traditional view broken, and promptly as calibrating installation, the pressure reduction that the pressure reduction source produces just must be kept for a long time and stablize.In fact, from the application point of view analysis, as long as the stable time constant in pressure reduction source is far longer than the time constant of differential pressure pickup.Can reduce cost greatly like this.
Summary of the invention
The objective of the invention is to disclose a kind of minute-pressure difference takes place and calibrating installation; The pressure reduction pitot meter and the utricule differential pressure pickup that can be the lighter-than-air flight devices such as blimp, captive balloon of current increasingly extensive use are done and are demarcated and calibration, and this device is easy to use, with low cost.
For achieving the above object, technical solution of the present invention is:
A kind of minute-pressure difference takes place and calibrating installation, and it comprises a minute-pressure difference source, a cylinder, standard differential manometer U7, differential pressure pickup U8 and pressure guiding pipe U9 to be examined and determine;
Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are parallel with one another, and two ends interlink with minute-pressure difference source, cylinder respectively through pressure guiding pipe U9;
Minute-pressure difference source comprises cylindrical primary stainless steel cylinder U1A, relief piston cylinder U2A, precision lead screw relief piston U3A, fine setting piston cylinder U4A; Fine setting leading screw piston U5A, stop valve U6A; Wherein, relief piston cylinder U2A, fine setting piston cylinder U4A, master cylinder U1A are communicated with each other;
Cylinder U1B casing wall is provided with stop valve U6B;
Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are connected with computer-electrical respectively, and both-way communication;
The minute-pressure that can produce and examine and determine in several handkerchiefs to one kPa scope is poor, is used for the demarcation and the calibration of the differential pressure pickup of range in above-mentioned scope.
Described minute-pressure difference takes place and calibrating installation, and its said stop valve U6A, U6B are manual or solenoid valve; Precision lead screw relief piston U3A is a manual adjustments, or drive link is connected with lead screw shaft on being connected in step motor shaft with the form of leading screw sleeve, is regulated by stepper motor.
A kind of minute-pressure difference takes place and calibrating installation, and it comprises the minute-pressure difference source, standard differential manometer U7 of two same configuration, differential pressure pickup U8 and pressure guiding pipe U9 to be examined and determine;
Minute-pressure difference source comprises cylindrical primary stainless steel cylinder U1, relief piston cylinder U2, precision lead screw relief piston U3, fine setting piston cylinder U4, fine setting leading screw piston U5, stop valve U6, and relief piston cylinder U2, fine setting piston cylinder U4, master cylinder U1 are communicated with each other;
Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are parallel with one another, and two ends interlink with two minute-pressure difference sources respectively through pressure guiding pipe U9; Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are connected with computer-electrical respectively, and both-way communication;
The minute-pressure that can produce and examine and determine in several handkerchiefs to one kPa scope is poor, is used for the demarcation and the calibration of the differential pressure pickup of range in above-mentioned scope.
Described minute-pressure difference takes place and calibrating installation, the minute-pressure difference source of two same configuration of its said employing, and first positive and negative pressure is regulated more convenient, and it two is influences of having isolated the ambient atmosphere disturbance, has guaranteed to make to press precision and degree of stability.
Described minute-pressure difference takes place and calibrating installation, and its said standard differential manometer U7 is the high precision standard differential manometer of demarcating in advance, measuring error<1Pa, and resolution reaches 0.1Pa, and range is not less than 1000Pa.
Described minute-pressure difference takes place and calibrating installation, and its operating process is following:
A) open stop valve U6A, U6B, make cylinder U1A, U1B and atmosphere, guarantee that the initial pressure of air in the cylinder equals ambient pressure;
B) position of adjusting precision lead screw piston U3A, U3B; Make the air in cylinder U1A, the U1B receive slight compression or expansion; Volume to air in cylinder U1A, the U1B carries out point-device adjusting, thereby produces accurate and stable pressure reduction in two connectivity ports of standard differential manometer U7, differential pressure pickup U8 to be examined and determine;
C) fine setting leading screw piston U5A, U5B further carry out fine tuning to the minute-pressure difference that is generated;
D) pressure reduction that produced of pressure reduction source simultaneously by standard differential manometer U7 and differential pressure pickup U8 to be examined and determine sensitivity, and carry out synchronous acquisition by computing machine;
E) measured value with standard differential manometer U7 is a benchmark; Automatically regulate the pressure reduction source through manual or stepper motor; Produce a series of standard pressure reduction, by the measured value of standard pressure reduction under the computer recording and differential pressure pickup U8 to be examined and determine, can realize treating the calibrating and the calibration of calibrating sensor respectively.
Described minute-pressure difference takes place and calibrating installation, and the design parameter in its said minute-pressure difference source comprises: cylinder U1 inside diameter D; Interior length L, the piston diameter d of relief piston cylinder U2, the stepping of leading screw piston rotation one circle is apart from x and leading screw range l; Wherein, the minimal pressure difference in pressure reduction source generates precision δ P Min, estimate by following formula:
δ P min ≈ 1 2 · 101325 · ( d D ) 2 x L
The estimation equation of the maximum differential pressure range delta P that single pressure reduction source produces is following:
ΔP = δP · l x = 2 · δ P min · l x .
Apparatus of the present invention adopt the minute-pressure difference source of two same configuration, make positive and negative pressure easy to adjust, and have isolated the pressure reduction pulsation that the ambient atmosphere disturbance is caused, and have guaranteed to make pressure precision and degree of stability.
Apparatus of the present invention have the following advantages:
1, low-down pressure reduction can be generated, and meticulous adjusting can be carried out;
2, isolated the influence of ambient atmosphere disturbance, pressure reduction stability is high;
3, pressure reduction is easy to adjust, and can produce positive pressure differential or Negative Pressure Difference according to the calibrating needs;
4, simple and reliable, be easy to processing realize, with low cost.
Description of drawings
Fig. 1 is the structural representation of minute-pressure difference generation of the present invention and calibrating installation;
Fig. 2 is the minute-pressure difference generation of the present invention's simplification and the structural representation of calibrating installation;
Fig. 3 adopts the minute-pressure generation and the calibrating installation structural representation of electrical control mechanism for the present invention;
Fig. 4 is the key design parameter synoptic diagram of minute-pressure generation of the present invention and calibrating installation;
Fig. 5 is according to the minute-pressure difference generation of Fig. 1 enforcement and the three-dimensional appearance synoptic diagram of calibrating installation.
Embodiment
It is poor to the minute-pressure in the hundreds of handkerchief scope that apparatus of the present invention can produce and examine and determine several handkerchiefs common in the above-mentioned field.This device comprises: the minute-pressure difference source of two same configuration, pressure guiding pipe, high precision standard differential manometer and level pressure gap sensor to be checked.These two minute-pressure difference sources through pressure guiding pipe, are connected to two defeated pressures on the mouth of standard differential manometer and level pressure gap sensor to be checked.Standard pressure reduction is counted the prior high precision differential manometer of demarcating, and requires measuring error<1Pa, and resolution reaches 0.1Pa, and range is not less than 1000Pa.
Minute-pressure difference source is the core of whole device, and by cylindrical master cylinder, relief piston cylinder, accurate voltage regulating leading screw piston, fine setting piston cylinder, fine setting leading screw piston and stop valve constitute.Keep being communicated with between relief piston cylinder, fine setting piston cylinder and the master cylinder.The present invention has provided minute-pressure difference source key parameter determination method, utilizes the formula that provides in the invention, can design the minute-pressure difference source that is lower than the 1Pa generative capacity.
Through rotating precision lead screw, pressure regulation leading screw piston can carry out minute adjustment to the volume of the air in the master cylinder, thereby it is poor to produce the very high minute-pressure of resolving accuracy.The fine setting leading screw can further carry out fine tuning to the minute-pressure difference that is generated.Stop valve is used to make cylinder and atmosphere, makes the initial pressure of gas in the cylinder equal ambient pressure.
Measured value with the standard differential manometer is a benchmark; Can produce a series of standard pressure reduction through two pressure reduction sources of manual adjustments; By the measured value of standard pressure reduction under the computer recording and level pressure gap sensor to be checked, can realize treating the calibrating and the calibration of calibrating sensor respectively.
As shown in Figure 1, generation of minute-pressure difference and calibrating installation are made up of minute-pressure difference source, high precision standard differential manometer U7, the differential pressure pickup U8 and the pressure guiding pipe U9 to be examined and determine of two same configuration.Wherein, two minute-pressure difference sources through pressure guiding pipe U9, are connected to two defeated pressures on the mouth of standard differential manometer U7 and level pressure gap sensor U8 to be checked.Minute-pressure difference source is the core of calibrating installation, and by cylindrical primary stainless steel cylinder U1, relief piston cylinder U2, precision lead screw relief piston U3, fine setting piston cylinder U4, fine setting leading screw piston U5, stop valve U6 constitute.Be communicated with between relief piston cylinder U2, fine setting piston cylinder U4 and the master cylinder U1.
Calibrating installation is at first opened stop valve U6A, U6B before using, and makes cylinder U1A, U1B and atmosphere, guarantees that the initial pressure of air in the cylinder equals ambient pressure.Close stop valve U6A, U6B afterwards.After this; When rotating the handle of precision lead screw piston U3A, U3B; The mobile meeting of leading screw piston U3A, U3B makes the air in cylinder U1A, the U1B receive slight compression or expansion, thereby poor in two connectivity ports generation minute-pressures of standard differential manometer U7, differential pressure pickup U8 to be checked.
Through regulating the position of precision lead screw piston U3A, U3B, can carry out point-device adjusting to the volume of the air in cylinder U1A, the U1B, thereby produce accurate and stable pressure reduction.Fine setting leading screw piston U5A, U5B can further carry out fine tuning to the minute-pressure difference that is generated.
Pressure reduction that the pressure reduction source is produced simultaneously by high precision standard differential manometer U7 and differential pressure pickup U8 to be examined and determine sensitivity, and carry out synchronous acquisition by computing machine.Standard pressure reduction is counted the prior high precision differential manometer of demarcating, and requires measuring error<1Pa, and resolution reaches 0.1Pa, and range is not less than 1000Pa.
Measured value with the standard differential manometer is a benchmark; Can produce a series of standard pressure reduction through two pressure reduction sources of manual adjustments; Respectively by the measured value of standard pressure reduction under the computer recording and level pressure gap sensor to be checked; And obtain under each standard pressure reduction point, the measured deviation value of differential pressure pickup U8 has promptly realized treating the calibrating of calibrating sensor.
The calibrating installation of Fig. 1, the minute-pressure difference source of having adopted two same configuration, the purpose of doing like this has two, and first positive and negative pressure is regulated more convenient, and it two is influences of having isolated the ambient atmosphere disturbance, has guaranteed to make to press precision and degree of stability.Reduce cost like needs, can only adopt a minute-pressure difference source, calibrating installation is simplified to the structure of Fig. 2, be about to second pressure reduction source and be simplified to only surplus cylinder U1B and stop valve U6B.What need special instruction is that the purpose that keeps cylinder U1B and stop valve U6B is still the disturbance for the isolation environment atmosphere.If removed; Then minute-pressure difference source be easy to receive the ambient atmosphere disturbance influence (for example, the formed pressure reduction pulsation of atmospheric disturbance that switch door, personnel walk about etc. and to cause, this pressure reduction pulsation is propagated with velocity of sound; And can come back reflective indoor), with the degree of stability that is difficult to keep enough.When adopting a minute-pressure difference source, the pressure reduction formation range can reduce by half.
Micromatic setting (fine setting piston cylinder U4, fine setting leading screw piston U5) is also nonessential, if the leading screw of regulator (piston cylinder U2, precision lead screw piston U3) is enough accurate, then micromatic setting can save.
If with among Fig. 1 or Fig. 2, leading screw piston U3 changes step motor drive into by manual adjustments, and stop valve U6 also changes solenoid valve into by hand control valve, then can minute-pressure difference calibrating installation be transformed into automatically controlled regulating device by manual regulating device.Fig. 3 has provided the structural representation of automatically controlled minute-pressure difference calibrating installation.
Fig. 4 has provided the key design parameter in minute-pressure difference source, comprising: cylinder U1 inside diameter D, and interior length L, the piston diameter d of relief piston cylinder U2, the stepping of leading screw piston rotation one circle is apart from x, leading screw range l.The selection of above-mentioned parameter is to realize that the height in pressure reduction source generates the key of precision and stability.
Can get the maximum volume of cylinder U1 by L and D
V = 1 4 π D 2 L - - - ( 1 )
By d and x, can determine when leading screw piston rotation one circle the volume change of the air in the cylinder U1
δV V = 1 4 π d 2 x 1 4 π D 2 L = ( d D ) 2 x L - - - ( 2 )
The adjustment process of minute-pressure difference can be considered isothermal process, according to The Ideal-Gas Equation, can derive, and the pressure reduction that causes during leading screw piston rotation one circle is changed to
δP = P · δV V ≈ 101325 · ( d D ) 2 x L - - - ( 3 )
Wherein, P is the pressure in the cylinder U1, is approximately equal to environmental stress, gets 1 standard atmospheric pressure during design.
Consider the gap factor that precision lead screw exists, regulation precision lead screw piston rotation 1/2 circle, the minimal pressure difference that the pressure reduction that causes is changed to the pressure reduction source generates precision, promptly
δ P min ≈ 1 2 · 101325 · ( d D ) 2 x L - - - ( 4 )
If expectation minimal pressure difference generates ability less than 1Pa, then by formula (4), design parameter need satisfy
( d D ) 2 x L < 2 101325 &ap; 2 &times; &ap; 10 - 5 - - - ( 5 )
Apart from x and leading screw range l, can determine the producible maximum differential pressure scope in single pressure reduction source by the leading screw minimum step
&Delta;P = &delta;P &CenterDot; l x = 2 &CenterDot; &delta; P min &CenterDot; l x - - - ( 6 )
If minute-pressure difference calibrating installation has been equipped with two pressure reduction sources by shown in Figure 1, then the maximum differential pressure scope of calibrating installation is 2 times that formula (6) is estimated the result.
Provide a design example below in conjunction with formula (1)~formula (6).Get inside diameter D=10cm of cylinder U1, interior length L=30cm, the piston diameter d=1cm of precision lead screw piston U3, precision lead screw one encloses stepping apart from x=0.02cm, leading screw piston U3 effective travel l=20cm.Substitution formula (4) can get, and it is δ P that the minimal pressure difference in pressure reduction source generates precision Min=0.34Pa, can calculate single pressure reduction source maximum differential pressure scope by formula (6) is 675Pa.If calibrating installation adopts the structure of Fig. 1, then the pressure reduction formation range is 1350Pa.Adopt Fig. 2 structure, then the pressure reduction formation range is 675Pa.

Claims (7)

1. a minute-pressure difference takes place and calibrating installation, it is characterized in that, comprises a minute-pressure difference source, a cylinder, standard differential manometer U7, differential pressure pickup U8 and pressure guiding pipe U9 to be examined and determine;
Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are parallel with one another, and two ends interlink with minute-pressure difference source, cylinder respectively through pressure guiding pipe U9;
Minute-pressure difference source comprises cylindrical primary stainless steel cylinder U1A, relief piston cylinder U2A, precision lead screw relief piston U3A, fine setting piston cylinder U4A; Fine setting leading screw piston U5A, stop valve U6A; Wherein, relief piston cylinder U2A, fine setting piston cylinder U4A, master cylinder U1A are communicated with each other;
Cylinder U1B casing wall is provided with stop valve U6B;
Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are connected with computer-electrical respectively, and both-way communication;
The minute-pressure that can produce and examine and determine in several handkerchiefs to one kPa scope is poor, is used for the demarcation and the calibration of the differential pressure pickup of range in above-mentioned scope.
2. minute-pressure difference as claimed in claim 1 takes place and calibrating installation, it is characterized in that said stop valve U6A, U6B are manual or solenoid valve; Precision lead screw relief piston U3A is a manual adjustments, or drive link is connected with lead screw shaft on being connected in step motor shaft with the form of leading screw sleeve, is regulated by stepper motor.
3. a minute-pressure difference takes place and calibrating installation, it is characterized in that, comprises the minute-pressure difference source, standard differential manometer U7 of two same configuration, differential pressure pickup U8 and pressure guiding pipe U9 to be examined and determine;
Minute-pressure difference source comprises cylindrical primary stainless steel cylinder U1, relief piston cylinder U2, precision lead screw relief piston U3, fine setting piston cylinder U4, fine setting leading screw piston U5, stop valve U6, and relief piston cylinder U2, fine setting piston cylinder U4, master cylinder U1 are communicated with each other;
Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are parallel with one another, and two ends interlink with two minute-pressure difference sources respectively through pressure guiding pipe U9; Standard differential manometer U7, differential pressure pickup U8 to be examined and determine are connected with computer-electrical respectively, and both-way communication;
The minute-pressure that can produce and examine and determine in several handkerchiefs to one kPa scope is poor, is used for the demarcation and the calibration of the differential pressure pickup of range in above-mentioned scope.
4. minute-pressure difference as claimed in claim 3 takes place and calibrating installation; It is characterized in that, the minute-pressure difference source of two same configuration of said employing, first positive and negative pressure is regulated more convenient; It two is influences of having isolated the ambient atmosphere disturbance, has guaranteed to make to press precision and degree of stability.
5. take place and calibrating installation like claim 1 or 3 described minute-pressure differences, it is characterized in that said standard differential manometer U7 is the high precision standard differential manometer of demarcating in advance, measuring error<1Pa, resolution reaches 0.1Pa, and range is not less than 1000Pa.
6. take place and calibrating installation like claim 1 or 3 described minute-pressure differences, it is characterized in that operating process is following:
A) open stop valve U6A, U6B, make cylinder U1A, U1B and atmosphere, guarantee that the initial pressure of air in the cylinder equals ambient pressure;
B) position of adjusting precision lead screw piston U3A, U3B; Make the air in cylinder U1A, the U1B receive slight compression or expansion; Volume to air in cylinder U1A, the U1B carries out point-device adjusting, thereby produces accurate and stable pressure reduction in two connectivity ports of standard differential manometer U7, differential pressure pickup U8 to be examined and determine;
C) fine setting leading screw piston U5A, U5B further carry out fine tuning to the minute-pressure difference that is generated;
D) pressure reduction that produced of pressure reduction source simultaneously by standard differential manometer U7 and differential pressure pickup U8 to be examined and determine sensitivity, and carry out synchronous acquisition by computing machine;
E) measured value with standard differential manometer U7 is a benchmark; Automatically regulate the pressure reduction source through manual or stepper motor, produce a series of standard pressure reduction, respectively by the measured value of standard pressure reduction under the computer recording and differential pressure pickup U8 to be examined and determine; Through Computing; Obtain under each standard pressure reduction point, the measured deviation value of differential pressure pickup U8 has promptly realized treating the calibrating of calibrating sensor.
7. take place and calibrating installation like claim 1 or 3 described minute-pressure differences, it is characterized in that the design parameter in said minute-pressure difference source; Comprise: cylinder U1 inside diameter D; Interior length L, the piston diameter d of relief piston cylinder U2, the stepping of leading screw piston rotation one circle is apart from x and leading screw range l; Wherein, the minimal pressure difference in pressure reduction source generates precision δ P Min, estimate by following formula:
&delta; P min &ap; 1 2 &CenterDot; 101325 &CenterDot; ( d D ) 2 x L
The estimation equation of the maximum differential pressure range delta P that single pressure reduction source produces is following:
&Delta;P = &delta;P &CenterDot; l x = 2 &CenterDot; &delta; P min &CenterDot; l x .
CN201110120908.2A 2011-05-11 2011-05-11 Micro differential pressure generating and calibrating device Expired - Fee Related CN102778332B (en)

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