CN101793569A - Method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes and temperature compensation circuit - Google Patents
Method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes and temperature compensation circuit Download PDFInfo
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- CN101793569A CN101793569A CN 201010115583 CN201010115583A CN101793569A CN 101793569 A CN101793569 A CN 101793569A CN 201010115583 CN201010115583 CN 201010115583 CN 201010115583 A CN201010115583 A CN 201010115583A CN 101793569 A CN101793569 A CN 101793569A
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Abstract
The invention relates to a method for measuring the temperature of sensitive devices of quartz micro-machined gyroscopes and a temperature compensation circuit. The tuning fork temperature T is obtained by measuring the output voltage Vk of an amplitude control voltage generator according to a mathematical relationship Vk=-aT+b. Based on the measurement method, the temperature compensation circuit can acquire timely and accurate tuning fork temperature signals by only arranging a signal conditioning circuit between the output terminal of the amplitude control voltage generator and the input terminal of the temperature compensation circuit. The actual tuning fork temperature information is acquired by utilizing the temperature characteristics of a quartz tuning fork per se. Compared with the traditional method for testing a temperature sensor, the real-time and accuracy of the temperature information of the method are improved greatly. The temperature measurement circuit is combined with correct compensating means to compensate the temperature of the quartz micro-machined gyroscopes, so the accuracy of the gyroscopes in a complex temperature environment can be improved substantially.
Description
Technical field
The present invention relates to the core component-Sensitive Apparatus of quartz micro mechanical gyroscope, specifically refer to the Sensitive Apparatus thermometry, this method can provide temperature information accurately for the temperature-compensation circuit of quartz micro mechanical gyroscope.Simultaneously, designed the quartz micro mechanical gyroscope temperature-compensation circuit based on this method.
Background technology
Quartz micro mechanical gyroscope has characteristics such as volume is little, in light weight, reliability is high, suitable production in enormous quantities, can use in the system that much needs measured angular speed, has broad application prospects and market.Because environment temperature has certain influence to technical indicators such as its total null voltage, constant multipliers, in using, engineering needs to eliminate or weaken temperature error, to improve the environment applicability of this product by the temperature compensation measure.All used technique for temperature compensation in existing many like products.In temperature-compensation circuit, temperature information is the foundation of backoff algorithm, needs accurately to obtain in real time, i.e. the key point of temperature compensation is in real time, accurately to obtain the tuning fork temperature information.Conventional method is the temperature sensor IC (or thermistor etc.) that packs in quartz micro mechanical gyroscope, obtains temperature information according to its output, sees Fig. 1.
Quartz micro mechanical gyroscope is made up of Sensitive Apparatus and treatment circuit.Sensitive Apparatus is the core of gyro, and its inside is the double-ended tuning fork structure.The performance of tuning fork changes with temperature, is the root of temperature error.In order to reach the purpose of fine compensation, must accurately obtain the temperature information on the tuning fork.Sensitive Apparatus temperature of the present invention promptly refers to Sensitive Apparatus tuning fork temperature.Because the singularity of sensitive device structure, temperature sensor can't be packaged in Sensitive Apparatus inside.On the Sensitive Apparatus shell, mount temperature sensor, both influenced the Sensitive Apparatus performance, influence the reliability of circuit structure again.Conventional method is the position that temperature sensor is installed in as far as possible close Sensitive Apparatus on the circuit board.Adopt this technical measures, the tuning fork temperature transfer will be subjected to the influence of following two media heat transfer property to the process of temperature sensor:
1. the gas between tuning fork and the Sensitive Apparatus shell
2. the medium between Sensitive Apparatus shell and the temperature sensor
Conventional method can only could accurately be obtained the temperature information on the tuning fork when gyro inside reaches thermal equilibrium.In temperature changing process, this temperature information can not reflect the real-time temperature of tuning fork.Therefore, the real-time that compensates according to this temperature information is relatively poor.In actual applications, environment temperature changes at any time, change direction and rate of change all can not pre-determine, when rate temperature change is very fast, because hesitation, compensation result will produce substantial deviation, causes the judgement that error is very big even appearance is wrong of quartz micro mechanical gyroscope measured angular speed.
Summary of the invention
At the prior art above shortcomings, the purpose of this invention is to provide a kind of method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes, this method can significantly improve the accuracy of measuring temperature of sensitive devices of quartz micro-machined gyroscopes and real-time degree, thereby provides accurate, real-time temperature information for temperature-compensation circuit.The present invention has designed the quartz micro mechanical gyroscope temperature-compensation circuit based on this measuring method simultaneously.
Method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes of the present invention is: by measuring the output voltage V k of width of cloth control voltage generator, according to relational expression Vk=-aT+b, promptly obtain the tuning fork temperature T.
Concrete measuring method is:
(1) at the upper and lower limit of working temperature point of quartz micro mechanical gyroscope width of cloth control voltage generator output voltage V k is demarcated, thereby determine the value of a and b among the relational expression Vk=-aT+b of Vk and Sensitive Apparatus tuning fork temperature T;
(2) measure width of cloth control voltage generator output voltage V k in real time, thereby obtain real-time Sensitive Apparatus tuning fork temperature T according to relational expression Vk=-aT+b.
Wherein, the concrete of (2) step tuning fork temperature T determines that method is: in the operating temperature range of quartz micro mechanical gyroscope, Vk signal extraction is come out, be transformed to the interior DC voltage of fixed range through signal conditioning circuit, there are the corresponding relation of determining in this DC voltage and Sensitive Apparatus tuning fork temperature T, thereby obtain the tuning fork temperature information.
Based on above-mentioned measuring method, only need set up signal conditioning circuit between the output terminal of width of cloth control voltage generator and temperature-compensation circuit input end gets final product, temperature-compensation circuit can obtain in time, tuning fork temperature signal accurately, thereby carries out in real time, temperature compensation accurately.
The present invention utilizes the temperature characterisitic of quartz tuning-fork self, obtains real tuning fork temperature information.Compare with traditional temperature sensor method of testing, real-time, the accuracy of this method temperature information increase substantially.Temperature measuring circuit combines with correct compensatory device, and quartz micro mechanical gyroscope is carried out temperature compensation, can increase substantially the precision of gyro in complicated temperature environment.
Description of drawings
The quartz micro mechanical gyroscope theory diagram of Fig. 1-existing band temperature compensation;
Fig. 2-Sensitive Apparatus inside temperature measurement theory diagram of the present invention;
Fig. 3-width of cloth control voltage generator output voltage V k and temperature relation curve;
Concrete signal conditioning circuit of Fig. 4-the present invention.
Embodiment
The pierce circuit basic functional principle is as follows:
The driving tuning fork of Sensitive Apparatus is drawn two electrodes, is respectively drive end and feedback end.Ud is the oscillatory circuit drive signal among Fig. 2, inserts drive end and makes the driving tuning fork vibration.Uf is the feedback signal that the output of feedback end obtains behind impact damper.After feedback signal inserted width of cloth control amplifier, circuit satisfied oscillating condition, drove tuning fork and produced vibration with its natural frequency.
In the circuit operate as normal, when Uf changes,, produce error signal Ve, make the output electricity Vk generation of width of cloth control voltage generator and the change of error signal equidirectional by detection, comparison and low-pass filter circuit.Vk oppositely controls width of cloth control amplifier, changes the amplitude of drive signal Ud, and inverse change takes place Uf thereupon, is zero until error signal Ve, reaches to keep the constant purpose of Uf.
The basic functional principle of temperature measuring circuit is as follows:
When the driving tuning fork vibrates under the pierce circuit excitation:
Ud＝V
D?sin?ωt＝K
2V
K?sin?ωt ①
Uf＝V
F?sin(ωt+π)＝K
0K
1V
D?sin(ωt+π) ②
V in the formula
DAnd V
FBe respectively the amplitude of drive signal and feedback signal, V
KBe the output voltage of width of cloth control voltage generator, ω is the natural frequency that drives tuning fork.K0 is a drive signal through the gain of drive end to feedback end, depends on the inherent characteristic of tuning fork, and we define K at this
0For driving the transfer ratio of tuning fork.K
1Being the gain of impact damper, is a constant.K
2Being the gain of width of cloth control signal to drive signal, is a constant also.
V
F＝K
0K
1V
D V
0＝K
2V
K
V then
K=(1/K
0) * [V
F/ (K
1K
2) 3.
Theoretical analysis and actual test proof, the transfer ratio K of driving tuning fork
0Have temperature variant characteristic, in certain temperature range, K
0But approximate representation is:
K
0＝1/(-pT+q) ④
P, q are coefficient in the formula, and T is the tuning fork temperature.And in certain temperature range, q＞pT.3. 4. can get with formula according to formula:
V
K＝-T[(pV
F)/(K
1K
2)]+[(qV
F)/(K
1K
2)]
During the pierce circuit operate as normal, V
FBe steady state value, K
1, K
2, p, q be constant, therefore:
V
K＝-aT+b ⑤
By formula 5. as can be known, the output voltage V k and the tuning fork temperature value of width of cloth control voltage generator are linear, and depend on the temperature of tuning fork self fully.In the operating temperature range of quartz micro mechanical gyroscope, Vk signal extraction is come out, buffering, amplification and level conversion through modulate circuit are transformed to DC voltage corresponding with temperature, that change as required in fixed range, just can reach the purpose of accurately obtaining the tuning fork temperature information.
5. theoretical foundation of the present invention just be based on formula, therefore by measuring the output voltage V k of width of cloth control voltage generator, can obtain the tuning fork temperature.Specifically being measured as of Sensitive Apparatus temperature:
(1) (this two temperatures point is the upper and lower limit of working temperature point of Sensitive Apparatus tuning fork at the upper and lower limit of working temperature point of quartz micro mechanical gyroscope, for concrete quartz micro mechanical gyroscope, this upper and lower limit of working temperature point is predetermined) width of cloth control voltage generator output voltage V k is demarcated, thus determine the value of a and b among the relational expression Vk=-aT+b; Though the output voltage V k and the tuning fork temperature value of width of cloth control voltage generator are linear, for different concrete quartz micro mechanical gyroscopes, a is different with the b value in the formula, therefore need pre-determine a and b.
(2) measure width of cloth control voltage generator output voltage V k in real time, obtain real-time Sensitive Apparatus tuning fork temperature T according to the relational expression Vk=-aT+b that determines.
Therefore, based on above-mentioned measuring method, only need set up signal conditioning circuit between the output terminal of width of cloth control voltage generator and temperature-compensation circuit input end and get final product, temperature-compensation circuit can obtain in time, tuning fork temperature signal accurately, thereby carries out in real time, temperature compensation accurately.Fig. 2 is the Sensitive Apparatus inside temperature measurement circuit block diagram of quartz micro mechanical gyroscope.The circuit structure of this programme is in the pierce circuit of routine, extracts the signal (being Vk) with temperature correlation, and through amplifying and level conversion, output directly reflects the DC voltage of tuning fork temperature.The part relevant with temperature survey mainly is shown among Fig. 2, therefore only comprises the refinement part of pierce circuit among Fig. 1 and the temperature signal regulation circuit that increases.
The present invention need not make amendment to original custom circuit, only needs to increase the one stage signal modulate circuit and gets final product.Shown in Figure 3 is two conventional quartz micro mechanical gyroscopes, the curve of width of cloth control voltage Vk in-40 ℃～+ 60 ℃ temperature ranges.Because the gain K of circuit
1, K
2A small amount of variation is arranged, so Fig. 3 curve has certain nonlinearity erron in this temperature range.The gain of signal conditioning circuit also has a small amount of variation in this temperature range, oppositely amplifies the back nonlinearity erron and can offset.
The implementation process of this programme is as follows:
1. at the upper and lower limit of working temperature point Vk is demarcated, obtain approximate fitting a straight line data;
2. in circuit, increase signal conditioning circuit (Fig. 4 is a concrete signal conditioning circuit, and is for reference),, determine the gain and the biasing of circuit according to the output voltage range of Vk and the output area of Vt requirement;
3. at the upper and lower limit of working temperature point Vt is demarcated, obtain the temperature measuring circuit output characteristics.
Claims (4)
1. method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes is characterized in that: by measuring the output voltage V k of width of cloth control voltage generator, according to relational expression Vk=-aT+b, promptly obtain the tuning fork temperature T.
2. method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes according to claim 1 is characterized in that: concrete measuring process is:
(1) at the upper and lower limit of working temperature point of quartz micro mechanical gyroscope width of cloth control voltage generator output voltage V k is demarcated, thereby determine the value of a and b among the relational expression Vk=-aT+b of width of cloth control voltage generator output voltage V k and Sensitive Apparatus tuning fork temperature T;
(2) measure width of cloth control voltage generator output voltage V k in real time, thereby obtain real-time Sensitive Apparatus tuning fork temperature T according to relational expression Vk=-aT+b.
3. method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes according to claim 1, it is characterized in that: the concrete of (2) step tuning fork temperature T determines that method is: in the operating temperature range of quartz micro mechanical gyroscope, Vk signal extraction is come out, be transformed to the interior DC voltage of fixed range through signal conditioning circuit, there are the corresponding relation of determining in this DC voltage and Sensitive Apparatus tuning fork temperature T, thereby obtain the tuning fork temperature information.
4. the quartz micro mechanical gyroscope temperature-compensation circuit of method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes according to claim 1 design is characterized in that: be provided with signal conditioning circuit between the output terminal of width of cloth control voltage generator and temperature-compensation circuit input end.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519617A (en) * | 2012-01-09 | 2012-06-27 | 北京理工大学 | Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device |
| CN104819710A (en) * | 2015-05-21 | 2015-08-05 | 北京航空航天大学 | Resonant mode silicon micro-machined gyroscope with temperature compensation structure |
| CN112697121A (en) * | 2020-12-10 | 2021-04-23 | 北京自动化控制设备研究所 | Quartz tuning fork gyroscope temperature compensation method and system and quartz tuning fork gyroscope |
| CN113280935A (en) * | 2021-07-21 | 2021-08-20 | 中国电子科技集团公司第九研究所 | Ferrite phase shifter magnetic core temperature detection device and detection method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5741074A (en) * | 1995-06-06 | 1998-04-21 | Thermo Electrioc Corporation | Linear integrated sensing transmitter sensor |
| CN2929679Y (en) * | 2006-06-23 | 2007-08-01 | 中国石油天然气集团公司 | Temperature measurer |
| CN101109662A (en) * | 2006-07-17 | 2008-01-23 | 梅特勒-托利多仪器（上海）有限公司 | Thermal resistance temperature surveying circuit |
-
2010
- 2010-03-01 CN CN 201010115583 patent/CN101793569A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5741074A (en) * | 1995-06-06 | 1998-04-21 | Thermo Electrioc Corporation | Linear integrated sensing transmitter sensor |
| CN2929679Y (en) * | 2006-06-23 | 2007-08-01 | 中国石油天然气集团公司 | Temperature measurer |
| CN101109662A (en) * | 2006-07-17 | 2008-01-23 | 梅特勒-托利多仪器（上海）有限公司 | Thermal resistance temperature surveying circuit |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519617A (en) * | 2012-01-09 | 2012-06-27 | 北京理工大学 | Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device |
| CN104819710A (en) * | 2015-05-21 | 2015-08-05 | 北京航空航天大学 | Resonant mode silicon micro-machined gyroscope with temperature compensation structure |
| CN104819710B (en) * | 2015-05-21 | 2017-09-26 | 北京航空航天大学 | A kind of resonant micromechanical silicon gyro with temperature compensation structure |
| CN112697121A (en) * | 2020-12-10 | 2021-04-23 | 北京自动化控制设备研究所 | Quartz tuning fork gyroscope temperature compensation method and system and quartz tuning fork gyroscope |
| CN113280935A (en) * | 2021-07-21 | 2021-08-20 | 中国电子科技集团公司第九研究所 | Ferrite phase shifter magnetic core temperature detection device and detection method |
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Application publication date: 20100804 |