CN101793569A - Method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes and temperature compensation circuit - Google Patents

Method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes and temperature compensation circuit Download PDF

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CN101793569A
CN101793569A CN 201010115583 CN201010115583A CN101793569A CN 101793569 A CN101793569 A CN 101793569A CN 201010115583 CN201010115583 CN 201010115583 CN 201010115583 A CN201010115583 A CN 201010115583A CN 101793569 A CN101793569 A CN 101793569A
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China
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temperature
tuning fork
quartz
vk
sensitive device
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CN 201010115583
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Chinese (zh)
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张锐
朱振忠
李世国
王清亮
苏永川
蒋昭兴
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中国电子科技集团公司第二十六研究所
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Publication of CN101793569A publication Critical patent/CN101793569A/en

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Abstract

The invention relates to a method for measuring the temperature of sensitive devices of quartz micro-machined gyroscopes and a temperature compensation circuit. The tuning fork temperature T is obtained by measuring the output voltage Vk of an amplitude control voltage generator according to a mathematical relationship Vk=-aT+b. Based on the measurement method, the temperature compensation circuit can acquire timely and accurate tuning fork temperature signals by only arranging a signal conditioning circuit between the output terminal of the amplitude control voltage generator and the input terminal of the temperature compensation circuit. The actual tuning fork temperature information is acquired by utilizing the temperature characteristics of a quartz tuning fork per se. Compared with the traditional method for testing a temperature sensor, the real-time and accuracy of the temperature information of the method are improved greatly. The temperature measurement circuit is combined with correct compensating means to compensate the temperature of the quartz micro-machined gyroscopes, so the accuracy of the gyroscopes in a complex temperature environment can be improved substantially.

Description

石英微机械陀螺敏感器件温度测量方法及温度补偿电路 Quartz micromachined gyroscope sensitive device and the temperature measuring method of the temperature compensation circuit

技术领域 FIELD

[0001] 本发明涉及石英微机械陀螺的核心部件-敏感器件,具体指敏感器件温度测量方 [0001] The present invention relates to a quartz core member micromachined gyroscope - sensitive device, particularly a temperature measuring means sensitive device side

法,本方法能为石英微机械陀螺的温度补偿电路提供准确的温度信息。 Method, the present method can provide accurate temperature information to the temperature compensation circuit quartz micromechanical gyroscope. 同时,基于本方法设计了石英微机械陀螺温度补偿电路。 Meanwhile, the present method is designed based on a quartz micromachined gyroscope temperature compensation circuit.

背景技术 Background technique

[0002] 石英微机械陀螺具有体积小、重量轻、可靠性高、适合大批量生产等特点,可以在很多需要测量角速度的系统中使用,具有广阔的应用前景和市场。 [0002] quartz micromachined gyroscope having a small size, light weight, high reliability, suitable for mass production, etc., may be used in many systems require measuring angular velocity, and has broad application prospects market. 由于环境温度对其零位电压、标度因数等技术指标有一定影响,在工程应用中需要通过温度补偿措施消除或减弱温度误差,以提高该产品的环境适用性。 As the ambient temperature has some effect on the zero voltage, scale factor and other technical indicators, the need to eliminate in engineering applications by temperature or reduced temperature error compensation measures to improve the environmental suitability of the product. 现有许多同类产品中都使用了温度补偿技术。 Many existing similar products are used in a temperature compensation technology. 在温度补偿电路中,温度信息是补偿算法的依据,需要实时地精确获取,即温度补偿的关键点是实时、精确地获取音叉温度信息。 A temperature compensating circuit, the temperature compensation algorithm is based on the information necessary to precisely obtain in real time, i.e., the key point is that temperature compensation in real-time, accurate temperature information acquired tuning fork. 常规的方法是在石英微机械陀螺中装入温度传感器IC(或热敏电阻等),根据其输出得到温度信息,见图1。 The conventional method is to load a temperature sensor IC (or the thermistor, etc.) in a quartz micromechanical gyroscope in accordance with the output of the temperature information obtained, shown in Figure 1.

[0003] 石英微机械陀螺由敏感器件和处理电路组成。 [0003] quartz micromachined gyroscope sensitive device and a processing circuit. 敏感器件是陀螺的核心,其内部为双端音叉结构。 Is the core of the gyro sensitive device, the internal structure is a double-ended tuning fork. 音叉的性能随温度发生变化,是温度误差的根源。 Performance tuning fork changes with temperature, the temperature of the source of the error. 为了达到精确补偿的目的,必须准确获取音叉上的温度信息。 To achieve precise compensation must be accurately obtain temperature information on the tuning fork. 本发明所述的敏感器件温度即指敏感器件音叉温度。 A temperature sensitive device according to the present invention refers to the tuning fork temperature sensitive device. 由于敏感器件结构的特殊性,温度传感器无法封装于敏感器件内部。 Due to the particularity sensitive device configuration, the temperature sensor can not be packaged inside the sensitive device. 在敏感器件外壳上贴装温度传感器,既影响敏感器件性能,又影响电路结构的可靠性。 A temperature sensor mounted on the sensitive device housing, both the impact sensitive device performance, but also affect the reliability of the circuit configuration. 常规的方法是将温度传感器安装在电路板上尽量靠近敏感器件的位置。 The conventional method is to position a temperature sensor mounted on the circuit board as close to sensitive devices. 采用这种技术措施,音叉温度传递到温度传感器的过程将受到以下两种介质传热性能的影响: [0004] ①音叉与敏感器件外壳之间的气体[0005] ②敏感器件外壳与温度传感器之间的介质 Using this technique measures the temperature of the process is transmitted to the tuning fork sensor temperature will be influenced by the performance of two heat transfer media: [0004] ① gas sensitive device between the tuning fork and the housing [0005] ② sensitive device housing of the temperature sensor between media

[0006] 常规方法只能在陀螺内部达到热平衡时,才能准确获取音叉上的温度信息。 When the [0006] conventional methods can only reach thermal equilibrium inside the gyroscope, in order to obtain accurate temperature information on the tuning fork. 在温度变化过程中,这种温度信息不能反映音叉的即时温度。 During temperature changes, this information does not reflect the real-time temperature temperature tuning fork. 因此,依据这种温度信息进行补偿的实时性较差。 Thus, poor real-time compensation based on such temperature information. 在实际应用中,环境温度是随时变化的,变化方向和变化速率都不能预先确定,当温度变化速率较快时,由于迟滞效应,补偿结果将会产生严重偏离,导致石英微机械陀螺测量角速率的误差很大甚至出现错误的判断。 In practical applications, the ambient temperature is subject to change, direction of change and rate of change can not be determined in advance, when the rate of temperature change quickly, since the hysteresis effect, the result will have a serious deviation from the compensation, leading to quartz micromachined gyroscope angular rate measurements the great error of judgment error even occurs.

发明内容 SUMMARY

[0007] 针对现有技术存在的上述不足,本发明的目的是提供一种石英微机械陀螺敏感器件温度测量方法,本方法能显著提高石英微机械陀螺敏感器件温度测量的准确度和实时度,从而为温度补偿电路提供准确、实时的温度信息。 [0007] For the above-described disadvantages of the prior art, an object of the present invention to provide a method of measuring the device temperature a silica-sensitive micromechanical gyroscope, the method can significantly improve the accuracy of the real-time and quartz micromachined gyroscope measurement temperature sensitive device, to provide an accurate, real-time temperature information to the temperature compensation circuit. 本发明同时基于该测量方法设计了石英微机械陀螺温度补偿电路。 The present invention is also designed quartz micromachined gyroscope temperature compensation circuit based on the measurement method.

[0008] 本发明石英微机械陀螺敏感器件温度测量方法为:通过测量幅控电压发生器的输出电压Vk,根据关系式Vk = _aT+b,即得到音叉温度T。 [0008] The temperature measuring method of the present invention is a quartz micromachined gyroscope is sensitive devices: measuring the output voltage Vk amplitude control voltage generator, according to the relationship Vk = _aT + b, i.e. the tuning fork to obtain temperature T. [0009] 具体测量方法为:[0010] (1)在石英微机械陀螺的上、下极限工作温度点对幅控电压发生器输出电压Vk进行标定,从而确定Vk与敏感器件音叉温度T的关系式Vk = -aT+b中a和b的值; [0011] (2)实时测量幅控电压发生器输出电压Vk,从而根据关系式Vk = _^+13得到实时的敏感器件音叉温度T。 [0009] The specific measurement method is as follows: [0010] (1) on a quartz micromechanical gyroscope, the lower limit of the working temperature of the web site control voltage generator output calibration voltage Vk, Vk to determine the relationship between T and the temperature sensitive device tuning fork formula Vk = -aT + b values ​​of a and b; [0011] (2) real-time measurement of amplitude control voltage generator output voltage Vk, so that 13 = _ ^ + tuning fork to obtain real time temperature sensitive device according to the relationship Vk T.

[0012] 其中,第(2)步音叉温度T的具体确定方法为:在石英微机械陀螺的工作温度范围内,将Vk信号提取出来,经过信号调理电路变换为固定范围内的直流电压,该直流电压与敏感器件音叉温度T存在确定的对应关系,从而获得音叉温度信息。 [0012] wherein, (2) the specific method for determining the step tuning fork temperature T is: in a quartz micromachined gyroscope operating temperature range, the extracted Vk signal out through the conditioning circuit transformed signal into a DC voltage within a fixed range, the DC voltage sensitive devices the presence of the tuning fork temperature T corresponding to the determined relationship, thereby obtaining temperature information of the tuning fork.

[0013] 基于上述测量方法,只需要在幅控电压发生器的输出端和温度补偿电路输入端之间增设信号调理电路即可,温度补偿电路即能获得及时、准确的音叉温度信号,从而进行实时、准确的温度补偿。 [0013] Based on the above-described measuring method, only the need for additional signal conditioning circuitry to control the web between the output terminal of the voltage generator and the input terminal of the temperature compensation circuit, a temperature compensation circuit that is able to receive timely, accurate tuning fork temperature signal, thereby performing Real-time, accurate temperature compensation.

[0014] 本发明利用石英音叉自身的温度特性,获得真实的音叉温度信息。 [0014] The present invention utilizes the temperature characteristic of the quartz tuning fork itself, information to obtain the true temperature of the tuning fork. 与传统的温度传感器测试方法相比,本方法温度信息的实时性、准确性大幅度提高。 Compared with the conventional temperature sensor testing method, real-time temperature information of the present method, the accuracy greatly improved. 温度测量电路与正确的补偿手段相结合,对石英微机械陀螺进行温度补偿,可大幅度提高陀螺在复杂温度环境中的精度。 Temperature measurement circuit means for compensating the correct combination, quartz micromachined gyroscope temperature compensation, can greatly improve the accuracy of the gyro temperature in a complex environment.

附图说明 BRIEF DESCRIPTION

[0015] 图1-现有的带温度补偿的石英微机械陀螺原理框图[0016] 图2_本发明敏感器件内部温度测量原理框图; [0017] 图3-幅控电压发生器输出电压Vk和温度关系曲线; [0018] 图4-本发明一个具体的信号调理电路。 [0015] Figure 1 - block diagram of a conventional temperature compensated quartz micromachined gyroscope [0016] FIG sensitive internal temperature measurement 2_ block diagram of the device of the present invention; [0017] Figure 3 - amplitude control voltage generator and the output voltage Vk temperature curve; [0018] Figure 4 - a particular signal conditioning circuit according to the present invention.

具体实施方式 Detailed ways

[0019] 振荡器电路基本工作原理如下: [0019] The basic principle of the oscillator circuit is as follows:

[0020] 敏感器件的驱动音叉引出两个电极,分别是驱动端和反馈端。 Driving the tuning fork [0020] sensitive devices leads to two electrodes, respectively a drive end and a feedback end. 图2中Ud是振荡电路驱动信号,接入驱动端使驱动音叉振动。 Figure 2 is an oscillator circuit drive signal Ud, access to the drive end of the drive vibrating tuning fork. Uf是反馈端的输出经缓冲器后获得的反馈信号。 Uf is the feedback signal through the output terminal of the buffer feedback obtained.

反馈信号接入幅控放大器后,电路满足振荡条件,驱动音叉以其固有频率产生振动。 After the access signal amplitude feedback control amplifier, an oscillation circuit to meet the conditions, the tuning fork driven at its natural vibration frequency. [0021] 电路正常工作中,当Uf发生变化时,通过检波、比较和低通滤波电路,产生误差信号Ve,使幅控电压发生器的输出电Vk产生与误差信号相同方向的改变。 [0021] In normal operation of the circuit, when Uf changes, by detecting, comparing and low pass filter circuit generates an error signal Ve, the output control voltage generator electrically Vk web in the same direction to produce a change in the error signal. Vk反向控制幅控放大器,改变驱动信号Ud的振幅,Uf随之发生反向变化,直至误差信号Ve为零,达到保持Uf恒定的目的。 Vk reverse control amplifier controlled web, to change the amplitude of the drive signal Ud, Uf varies inversely ensued, until the error signal Ve to zero, to achieve the purpose of maintaining a constant Uf.

[0022] 温度测量电路的基本工作原理如下: [0022] The basic principle of the temperature measurement circuit is as follows:

[0023] 驱动音叉在振荡器电路激励下振动时: When the [0023] driving the tuning-fork vibration excited oscillator circuit:

[0024] Ud = VD sin wt = K2VK sin "t ① [0024] Ud = VD sin wt = K2VK sin "t ①

[0025] Uf = VF sin(wt+Ji) = K。 [0025] Uf = VF sin (wt + Ji) = K. KJ。 KJ. sin(wt+Ji) ② sin (wt + Ji) ②

[0026] 式中VD和VF分别是驱动信号和反馈信号的振幅,VK是幅控电压发生器的输出电压,"是驱动音叉的固有频率。KO是驱动信号经驱动端到反馈端的增益,取决于音叉的固有特性,在此我们定义K。为驱动音叉的传输比。!^是缓冲器的增益,为一常量。1(2是幅控信号对驱动信号的增益,也为一常量。 [0026] wherein VD and VF are the amplitude of the drive signal and the feedback signal, the output voltage VK is the amplitude of the control voltage generator, "is the natural frequency of the tuning fork is driven .KO driving signal driving end at the feedback gains, depending the inherent characteristics of the tuning fork, we define here as K. drive transmission ratio of the tuning fork.! ^ is a buffer gain I.1 is a constant (amplitude control signal gain is 2 for the drive signal, is also a constant.

[0027] 比较式①和式②中驱动信号和反馈信号的振幅值,可以得到如下关系式:[0028] VF = K。 [0027] Comparison of the formula ① and formula ② amplitude value of the driving signal and the feedback signal, the following relationship can be obtained: [0028] VF = K. KJd V0 = K2VK KJd V0 = K2VK

[0029] 贝UVK = (1/Ko)氺[VF/(Kiig ③ [0029] Pui UVK = (1 / Ko) Shui [VF / (Kiig ③

[0030] 理论分析和实际测试证明,驱动音叉的传输比K。 [0030] The theoretical analysis and practical tests prove that the transmission ratio of the drive of the tuning fork K. 具有随温度变化的特性,在一定 Having a temperature-dependent characteristics, a certain

的温度范围内,K。 Within the temperature range, K. 可近似表示为: It can be approximated as:

[0031] K0=l/(_pT+q) © [0031] K0 = l / (_ pT + q) ©

[0032] 式中p、q为系数,T为音叉温度。 [0032] wherein p, q is a coefficient, T is the temperature of the tuning fork. 且在一定的温度范围内,q〉pT。 And within a certain temperature range, q> pT. 根据式③和式©可得: According to formula and formula © ③ can be obtained:

[0033] VK = -T [ (pVF) / (KA) ] + [ (qVF) / (K^)] [0033] VK = -T [(pVF) / (KA)] + [(qVF) / (K ^)]

[0034] 振荡器电路正常工作时,VF为恒定值,V K2、 p、 q为常数,因此: [0035] VK = -aT+b ⑤ [0034] When the oscillator circuit is working properly, the VF is a constant value, V K2, p, q are constants, so: [0035] VK = -aT + b ⑤

[0036] 由式⑤可知,幅控电压发生器的输出电压Vk与音叉温度值成线性关系,且完全取决于音叉自身的温度。 [0036] apparent from the formula ⑤, the output voltage Vk tuning fork-controlled voltage generator web temperature value is linear, and depends entirely on the temperature of the tuning fork itself. 在石英微机械陀螺的工作温度范围内,将Vk信号提取出来,经过调理电路的缓冲、放大和电平转换,根据需要变换为与温度对应的、在固定范围内变化的直流电压,就可达到准确获取音叉温度信息的目的。 In the quartz micromachined gyroscope operating temperature range, the extracted signal Vk, buffered conditioning circuit, amplifying and level shifting, as needed corresponding to the temperature is converted into a DC voltage changes within a fixed range, can achieve the purpose of the tuning fork to obtain accurate temperature information.

[0037] 本发明的理论基础正是基于式⑤,因此通过测量幅控电压发生器的输出电压Vk, 即可得到音叉温度。 Theoretical Foundation [0037] The present invention is based on the formula ⑤, so by measuring the output voltage Vk amplitude control voltage generator, to obtain the temperature of the tuning fork. 敏感器件温度的具体测量为: Specific measurement of the temperature sensitive device:

[0038] (1)在石英微机械陀螺的上、下极限工作温度点(该两温度点即敏感器件音叉上、 下极限工作温度点,对于具体的石英微机械陀螺,该上、下极限工作温度点是预先确定的) 对幅控电压发生器输出电压Vk进行标定,从而确定关系式Vk = -aT+b中a和b的值;虽然幅控电压发生器的输出电压Vk与音叉温度值成线性关系,但对于不同的具体石英微机械陀螺而言,式中a和b取值不同,因此需要预先确定a和b。 [0038] (1) on a quartz micromechanical gyroscope, the lower operating temperature limit point (the two temperature points i.e. sensitive device tuning fork, at extreme operating temperature point for a particular quartz gyroscope, the upper and lower limits of the working is a predetermined temperature point) for width control voltage generator output voltage Vk is calibrated to determine the relation values ​​Vk = -aT + b where a and b; and although the output amplitude voltage Vk tuning fork-controlled voltage generator and temperature values a linear relationship, but for different specific purposes quartz micromachined gyroscope, where a and b are different values, it is necessary to determine in advance a and b.

[0039] (2)实时测量幅控电压发生器输出电压Vk,根据确定的关系式Vk = -^+13得到实时的敏感器件音叉温度T。 [0039] (2) real-time measurement of amplitude control voltage generator output voltage Vk, = determined according to the relationship Vk - ^ + 13 to obtain real time temperature sensitive device tuning fork T.

[0040] 因此,基于上述测量方法,只需要在幅控电压发生器的输出端和温度补偿电路输入端之间增设信号调理电路即可,温度补偿电路即能获得及时、准确的音叉温度信号,从而进行实时、准确的温度补偿。 [0040] Thus, based on the above-described measuring method, only the need for additional signal conditioning circuitry to control the web between the output terminal of the voltage generator and the input terminal of the temperature compensation circuit, a temperature compensation circuit that is able to receive timely, accurate tuning fork temperature signal, so in real time, accurate temperature compensation. 图2是石英微机械陀螺的敏感器件内部温度测量电路框图。 FIG 2 is a circuit block diagram of an internal temperature measuring device sensitive quartz micromachined gyroscope. 本方案的电路结构是在常规的振荡器电路中,提取出与温度相关的信号(即Vk),经过放大和电平转换,输出直接反映音叉温度的直流电压。 The circuit configuration of the present embodiment is a conventional oscillator circuit, the extracted signal (i.e., Vk is) associated with the temperature, after amplification and level conversion, the output DC voltage directly reflects the tuning fork temperature. 图2中主要示出与温度测量有关的部分,因此仅包括图1中振荡器电路的细化部分和增加的温度信号调理电路。 FIG 2 shows a main part related to the temperature measurement, and therefore only the oscillator circuit of Figure 1 comprises a refinement portion and an increased temperature signal conditioning circuit.

[0041] 本发明不用对原有的常规电路进行修改,只需增加一级信号调理电路即可。 [0041] The present invention is not to modify the existing conventional circuit, a signal conditioning circuit is simply to increase. 图3 所示的是二只常规石英微机械陀螺,在-4(TC〜+6(TC温度范围内幅控电压Vk的曲线。由于电路的增益VI^在此温度范围内有少量变化,所以图3曲线有一定的非线性误差。信号调理电路的增益在此温度范围也有少量变化,反向放大后非线性误差可以抵消。 [0042] 本方案的实施过程如下: Is shown in FIG. 3 two conventional quartz gyroscope, in -4 (TC~ + 6 (within the temperature range of TC-controlled voltage Vk web graph. Since the gain of the circuit VI ^ a small amount of change in this temperature range, FIG. 3 curve a certain nonlinear error gain signal conditioning circuit at this temperature range with few changes, the error can be offset by the inverting amplifier nonlinearity implementation [0042] the present embodiment is as follows:

[0043] ①在上、下极限工作温度点对Vk进行标定,获得近似的拟合直线数据; [0043] ① in the upper and lower limit of the operating temperature calibration points Vk, fitting a straight line to obtain an approximate data;

[0044] ②在电路中增加信号调理电路(图4为一个具体的信号调理电路,供参考),根据 [0044] ② to increase the signal conditioning circuit in the circuit (FIG. 4 is a specific signal conditioning circuitry, by reference), in accordance with

Vk的输出电压范围,和Vt要求的输出范围,确定电路的增益和偏置; Vk of output voltage range, and the desired output Vt range, and determining a gain offset circuit;

[0045] ③在上、下极限工作温度点对Vt进行标定,获得温度测量电路输出特性。 [0045] ③ upper and lower Vt limits of the operating temperature calibration point, to obtain a temperature measurement circuit output characteristics.

Claims (4)

  1. 石英微机械陀螺敏感器件温度测量方法,其特征在于:通过测量幅控电压发生器的输出电压Vk,根据关系式Vk=-aT+b,即得到音叉温度T。 Quartz micromachined gyroscope sensitive device temperature measuring method, wherein: measuring the output voltage Vk web control voltage generator, according to the relationship Vk = -aT + b, i.e. the tuning fork to obtain temperature T.
  2. 2. 根据权利要求1所述的石英微机械陀螺敏感器件温度测量方法,其特征在于:具体的测量步骤为:(1) 在石英微机械陀螺的上、下极限工作温度点对幅控电压发生器输出电压Vk进行标定,从而确定幅控电压发生器输出电压Vk与敏感器件音叉温度T的关系式Vk = -aT+b中a禾口b的值;(2) 实时测量幅控电压发生器输出电压Vk,从而根据关系式Vk = -aT+b得到实时的敏感器件音叉温度T。 The quartz micromachined gyroscope temperature measuring method according to claim 1 sensitive device, wherein: the specific measurement steps: (1) On a quartz micromechanical gyroscope, the lower operating temperature limit of the amplitude control voltage point occurs output voltage Vk is calibrated to determine the amplitude control voltage generator output voltage Vk with temperature sensitive device tuning fork relation T = Vk value Wo -aT + b in a port b; and (2) real-time measurement of the control voltage generator web output voltage Vk, so that the relation of formula Vk = -aT + b to obtain real-time tuning fork temperature sensitive device T.
  3. 3. 根据权利要求l所述的石英微机械陀螺敏感器件温度测量方法,其特征在于:第(2) 步音叉温度T的具体确定方法为:在石英微机械陀螺的工作温度范围内,将Vk信号提取出来,经过信号调理电路变换为固定范围内的直流电压,该直流电压与敏感器件音叉温度T 存在确定的对应关系,从而获得音叉温度信息。 The temperature measuring method of the quartz micromachined gyroscope sensitive device according to claim l, wherein: the first-step method for determining the specific tuning fork temperature T (2): in the quartz micromachined gyroscope operating temperature range, the Vk signal is extracted, via the signal conditioning circuit into a DC voltage within a fixed range, the DC voltage tuning fork temperature sensitive device to determine the presence of T correspondence relationship, a tuning fork to obtain temperature information.
  4. 4. 根据权利要求1所述的石英微机械陀螺敏感器件温度测量方法设计的石英微机械陀螺温度补偿电路,其特征在于:在幅控电压发生器的输出端和温度补偿电路输入端之间设有信号调理电路。 The quartz micromechanical gyroscope of claim 1 quartz micromachined gyroscope sensitive device temperature compensation circuit design temperature measuring method as claimed in claim, characterized in that: the input terminal is provided between the output terminal of the control voltage generator and the web temperature compensation circuit the signal conditioning circuit.
CN 201010115583 2010-03-01 2010-03-01 Method for measuring temperature of sensitive devices of quartz micro-machined gyroscopes and temperature compensation circuit CN101793569A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102519617A (en) * 2012-01-09 2012-06-27 北京理工大学 Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device
CN104819710A (en) * 2015-05-21 2015-08-05 北京航空航天大学 Resonant mode silicon micro-machined gyroscope with temperature compensation structure

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US5741074A (en) * 1995-06-06 1998-04-21 Thermo Electrioc Corporation Linear integrated sensing transmitter sensor
CN2929679Y (en) * 2006-06-23 2007-08-01 中国石油天然气集团公司 Temperature measurer
CN101109662A (en) * 2006-07-17 2008-01-23 梅特勒-托利多仪器(上海)有限公司 Thermal resistance temperature surveying circuit

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Publication number Priority date Publication date Assignee Title
US5741074A (en) * 1995-06-06 1998-04-21 Thermo Electrioc Corporation Linear integrated sensing transmitter sensor
CN2929679Y (en) * 2006-06-23 2007-08-01 中国石油天然气集团公司 Temperature measurer
CN101109662A (en) * 2006-07-17 2008-01-23 梅特勒-托利多仪器(上海)有限公司 Thermal resistance temperature surveying circuit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102519617A (en) * 2012-01-09 2012-06-27 北京理工大学 Digitalized detection method for temperature information of micromechanical quartz gyroscope sensitive device
CN104819710A (en) * 2015-05-21 2015-08-05 北京航空航天大学 Resonant mode silicon micro-machined gyroscope with temperature compensation structure
CN104819710B (en) * 2015-05-21 2017-09-26 北京航空航天大学 A kind of resonant micromechanical silicon gyro with temperature compensation structure

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