CN111693211A - Micro-pressure difference calibrator - Google Patents

Micro-pressure difference calibrator Download PDF

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Publication number
CN111693211A
CN111693211A CN202010664696.3A CN202010664696A CN111693211A CN 111693211 A CN111693211 A CN 111693211A CN 202010664696 A CN202010664696 A CN 202010664696A CN 111693211 A CN111693211 A CN 111693211A
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China
Prior art keywords
micro
differential pressure
chamber
pressure difference
pressure
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CN202010664696.3A
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CN111693211B (en
Inventor
代雪娇
丁忠展
张怡
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Zhejiang Zhongqian Metrological Calibration Co ltd
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Zhejiang Zhongqian Metrological Calibration Co ltd
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Publication of CN111693211A publication Critical patent/CN111693211A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005Apparatus for calibrating pressure sensors

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a micro-differential pressure calibrator, and relates to calibration equipment. The micro differential pressure generating device comprises a micro differential pressure chamber, a micro differential pressure generating device, a first pressure equalizing pipe, a second pressure equalizing pipe and an upper computer. The micro-pressure difference generating device is arranged in the micro-pressure difference chamber and used for adjusting the micro-pressure difference of the first chamber and the second chamber; the first pressure equalizing pipe is communicated with the first cavity, and a plurality of interfaces are arranged on the first pressure equalizing pipe and the second pressure equalizing pipe and are used for connecting an air inlet nozzle of a micro differential pressure sensor to be calibrated or a standard micro differential pressure sensor; the upper computer is electrically connected with the micro-pressure difference sensor to be calibrated and the standard micro-pressure difference sensor to obtain and record a micro-pressure difference change curve of the micro-pressure difference sensor and the standard micro-pressure difference sensor. The invention provides stable pressure difference for the micro-differential pressure sensor, and the stable pressure difference is compared with the standard micro-differential pressure difference and is used for calibrating the micro-differential pressure sensor; the calibration process is controlled by an upper computer, so that a large amount of manpower is saved.

Description

Micro-pressure difference calibrator
Technical Field
The invention relates to calibration equipment, in particular to a micro-pressure difference calibrator.
Background
A micro differential pressure sensor is a sensor for measuring a minute pressure difference between front and rear ends of a certain device or component, and is widely used in various fields of modern industrial production because of its capability of performing various high-precision measurements. The micro differential pressure sensor needs to be calibrated at intervals because the measurement result has errors due to the use duration of the micro differential pressure sensor, the change of the use environment, the thought of misoperation and the like. In the calibration process of the micro differential pressure sensor, a relatively stable differential pressure needs to be provided, and the conventional calibration equipment cannot achieve the effect; in addition, the existing calibration equipment needs to manually adjust the pressure difference and record the result of each detection, which is time-consuming and labor-consuming.
Disclosure of Invention
The invention aims to provide a micro differential pressure calibrator which is used for providing stable differential pressure for a micro differential pressure sensor, comparing the differential pressure with a standard micro differential pressure and calibrating the micro differential pressure sensor; the calibration process is controlled by an upper computer, so that a large amount of manpower is saved.
In order to achieve the purpose, the invention provides the following technical scheme:
a micro-differential pressure calibrator is characterized by comprising a micro-differential pressure chamber, a micro-differential pressure generating device, a first pressure equalizing pipe, a second pressure equalizing pipe and an upper computer;
the micro-pressure difference generating device is arranged in the micro-pressure difference chamber, the micro-pressure difference chamber is divided into a first chamber and a second chamber which are independent, the micro-pressure difference of the first chamber and the second chamber is adjusted, and the first chamber and the second chamber are respectively provided with a vent valve;
the first pressure equalizing pipe is communicated with the first cavity, and is provided with a plurality of first interfaces for connecting an air inlet nozzle of a micro differential pressure sensor to be calibrated or a standard micro differential pressure sensor;
the second pressure equalizing pipe is communicated with the second chamber, and is provided with a plurality of second interfaces for connecting another air inlet nozzle of the micro differential pressure sensor to be calibrated or the standard micro differential pressure sensor;
and the upper computer is electrically connected with the micro-pressure difference sensor to be calibrated and the standard micro-pressure difference sensor to obtain and record a micro-pressure difference change curve of the micro-pressure difference sensor and the standard micro-pressure difference sensor.
Furthermore, the micro-pressure difference generating device comprises a first pipeline, a second pipeline, a first magnetic moving part, a second magnetic moving part, a connecting rod, a moving flat plate, an elastic diaphragm and an electromagnet which are oppositely arranged; the first magnetic moving piece is arranged in the first pipeline, and the second magnetic moving piece is arranged in the second pipeline; the first end of the connecting rod is fixedly connected with the first magnetic moving part, and the second end of the connecting rod is fixedly connected with the second magnetic moving part; the movable flat plate is fixedly arranged in the middle of the connecting rod; the inner side of the elastic diaphragm is hermetically connected with the periphery of the moving flat plate, and the outer side of the elastic diaphragm is hermetically connected with the inner wall of the micro-differential pressure chamber; the electromagnet is arranged on the outer sides of the first magnetic moving part and the second magnetic moving part, is electrically connected with an upper computer, receives a control signal of the upper computer, and drives the first magnetic moving part and the second magnetic moving part to move in the first pipeline and the second pipeline.
Further, first magnetism moving part includes first permanent magnet and first magnetic fluid, first permanent magnet sets up in first pipeline, and first magnetic fluid is located and forms the sealing ring between first permanent magnet and the first pipeline inner wall.
Further, the second magnetic moving part comprises a second permanent magnet and second magnetic liquid, the second permanent magnet is arranged in the second pipeline, and the second magnetic liquid is located between the second permanent magnet and the inner wall of the second pipeline to form a sealing ring.
Furthermore, a shielding layer is arranged on the outer side of the electromagnet.
Furthermore, the inner ends of the first pipeline and the second pipeline which are opposite to each other are provided with limiting blocks, so that the first magnetic moving piece and the second magnetic moving piece are prevented from being separated from the first pipeline and the second pipeline.
Further, the micro differential pressure chamber comprises a first shell and a second shell which are connected through a flange mechanism; the flange mechanism comprises a first flange on the first shell, a second flange on the second shell and a bolt; the flange mechanism is provided with at least one sealing mechanism, and the sealing mechanism comprises a sealing ring on the first shell/the second shell and a sealing groove corresponding to the position of the sealing ring on the second shell/the first shell.
Furthermore, the elastic membrane is clamped between the first flange and the second flange, and a through hole is formed in the position, corresponding to the bolt, of the elastic membrane.
Furthermore, a mounting seat is arranged in the micro-differential pressure chamber, and the first pipeline and the second pipeline are fixedly mounted on the mounting seat.
Furthermore, a mounting groove is formed in the mounting seat, and mounting columns for placing the mounting groove are arranged on the lower sides of the first pipeline and the second pipeline.
Compared with the prior art, the invention has the beneficial effects that: the invention controls the two chambers to generate stable pressure difference by controlling the magnetic moving piece; the pressure difference is led out by the pressure equalizing pipe, the micro differential pressure sensor to be calibrated and the standard micro differential pressure sensor are adopted for simultaneous detection, the detection result is collected by the upper computer, and a micro differential pressure change curve is generated for comparison and is used for calibrating the micro differential pressure sensor.
Drawings
Fig. 1 is a schematic overall structure diagram of an embodiment of the present invention.
Fig. 2 is a sectional view a-a of fig. 1.
Fig. 3 is a partial view of a micro-pressure differential generating device according to an embodiment of the invention.
Fig. 4 is a schematic view of a flange mechanism according to an embodiment of the present invention.
Fig. 5 is a schematic view of the working state of the present invention.
In the figure: 1. a micro-differential pressure chamber; 11. a first chamber; 12. a second chamber; 13. a first vent valve; 14. a second vent valve; 15. a first housing; 16. a second housing; 17. a mounting seat; 171. mounting grooves; 2. a micro-differential pressure generating device; 21. a first conduit; 22. a second conduit; 23. a first magnetic moving member; 24. a second magnetic moving member; 25. a connecting rod; 26. moving the flat plate; 27. an elastic diaphragm; 271. perforating; 28. an electromagnet; 29. a shielding layer; 3. a first pressure equalizing pipe; 31. a first interface; 4. a second pressure equalizing pipe; 41. a second pressure equalizing pipe; 5. an upper computer; 6. a flange mechanism; 61. a first flange; 611. a first seal ring; 612. a second seal groove; 62. a second flange; 621. a first seal groove; 622. a second seal ring; 63. a bolt; 7. calibrating the micro differential pressure sensor; 8. a standard micro-pressure difference sensor.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the present invention provides a micro-pressure difference calibrator, which includes a micro-pressure difference chamber 1, a micro-pressure difference generating device 2, a first pressure equalizing pipe 3, a second pressure equalizing pipe 4, and an upper computer 5.
To facilitate the installation of components within the micro pressure differential chamber 1, the micro pressure differential chamber 1 includes a first housing 15 and a second housing 16 connected via a flange mechanism 6. Referring to fig. 1 and 4, the flange mechanism 6 includes a first flange 61 on the first housing 15, a second flange 62 on the second housing 16, and a bolt 63. In order to ensure the air tightness of the micro differential pressure chamber 1, at least one sealing mechanism is arranged on the flange mechanism 6; in this embodiment, the present invention includes a first sealing mechanism and a second sealing mechanism, the first sealing mechanism includes a first sealing ring 611 on the first housing 15, and a first sealing groove 621 on the second housing 16 corresponding to the position of the first sealing ring 611; the second sealing mechanism includes a second sealing ring 622 on the second housing 16, and a second sealing groove 612 on the first housing 15 corresponding to the position of the second sealing ring 622.
The micro-pressure difference generating device 2 is arranged inside the micro-pressure difference chamber 1, and divides the micro-pressure difference chamber 1 into a first chamber 11 and a second chamber 12 which are independent, the micro-pressure difference of the first chamber 11 and the second chamber 12 is adjusted through the micro-pressure difference generating device 2, and a first air release valve 13 and a second air release valve 14 are respectively arranged on the first chamber 11 and the second chamber 12 and used for adjusting the pressure balance between the first chamber 11/the second chamber 12 and the outside.
Specifically, referring to fig. 1, the micro pressure difference generating device 2 includes a first pipe 21 and a second pipe 22, a first magnetic moving part 23, a second magnetic moving part 24, a connecting rod 25, a moving plate 26, an elastic diaphragm 27, and an electromagnet 28, which are oppositely disposed. The first magnetic moving part 23 is arranged in the first pipeline 21 and can slide along the direction of the first pipeline 21; similarly, the second magnetic mover 24 is disposed within the second conduit 22. The first end of the connecting rod 25 is fixedly connected with the first magnetic moving part 23, and the second end is fixedly connected with the second magnetic moving part 24, so that the first magnetic moving part 23 and the second magnetic moving part 24 form a whole; the moving plate 26 is fixedly disposed at the middle of the connecting rod 25, so that the moving plate 26 can move with the movement of the first and second magnetic moving parts 23 and 24. Referring to fig. 3, in the present embodiment, the first magnetic moving part 23 includes a first permanent magnet 231 and a first magnetic liquid 232, the first permanent magnet 231 is disposed in the first pipe 21, and the first magnetic liquid 232 is located between the first permanent magnet 231 and an inner wall of the first pipe 21 to form a sealing ring. Similarly, the second magnetic moving part 24 includes a second permanent magnet 241 and a second magnetic liquid 242, the second permanent magnet 241 is disposed in the second pipe 22, the second magnetic liquid 242 is located between the second permanent magnet 241 and the inner wall of the second pipe 22 to form a sealing ring, and the first permanent magnet 231 and the second permanent magnet 241 are respectively fixedly connected with two ends of the connecting rod.
In order to drive the first magnetic moving part 23 and the second magnetic moving part 24 to move, the electromagnet 28 is disposed outside the first magnetic moving part 23 and/or the second magnetic moving part 24, in this embodiment, the electromagnets are disposed outside the first magnetic moving part 23 and the second magnetic moving part 24, respectively, taking one side of the first magnetic moving part 23 as an example, the electromagnet 28 generates a magnetic field when being powered on, and the first permanent magnet 231 and the second permanent magnet 241 move along the first pipeline 21 and the second pipeline 22 under the action of the magnetic field. Meanwhile, the first magnetic liquid 232 and the second magnetic liquid 242 move along with the first magnetic liquid, so that the sealing effect is ensured at any time. It is worth mentioning that, a magnetic component is disposed inside the existing partial micro pressure difference sensor, and in order to avoid that the electromagnetic field affects the detection values of the micro pressure difference sensor to be calibrated and the standard micro pressure difference sensor, thereby affecting the calibration, a shielding layer 29 is disposed outside the electromagnet 28.
In order to realize automatic control, the electromagnet 28 is electrically connected with the upper computer 5, receives a control signal of the upper computer 5, and circulates currents with different directions and different magnitudes, so that magnetic fields with different directions and different strengths are realized, and the moving positions of the first magnetic moving part 23 and the second magnetic moving part 24 are controlled. Compared with other mechanical control modes, the invention adopts the electromagnet 28 to control the movement of the first magnetic moving part 23 and the second magnetic moving part 24, has simple structure, reduces the relative action between the micro differential pressure chamber 1 and the mechanical structure during working, and fully ensures the air tightness of the micro differential pressure chamber 1 in the working state.
In this embodiment, in order to avoid that the first magnetic moving part 23 and the second magnetic moving part 24 have too large moving amplitude and are separated from the first pipeline 21 or the second pipeline 22, so that the first magnetic moving part and the second magnetic moving part cannot normally work, the inner ends of the first pipeline 21 and the second pipeline 22, which are opposite to each other, are provided with limit blocks, which are respectively the first limit block 211 at the inner end of the first pipeline 21 and the second limit block 221 in the second pipeline 22, so as to limit the movement of the first magnetic moving part 23, the second magnetic moving part 24 and the connecting rod 25.
In order to realize the fixed installation of the first pipe 21 and the second pipe 22, as shown in fig. 3, taking the installation of the first pipe 21 as an example, an installation seat 17 is provided in the micro differential pressure chamber 1, and the first pipe 21 is fixedly installed on the installation seat 17. Specifically, the mounting seat 17 is provided with a mounting groove 171, and a mounting post 212 inserted into the mounting groove 171 is disposed at the lower side of the first pipeline 21. The fixed mounting structure of the second pipeline is the same, and is not repeated.
Referring to fig. 1 and 2, the inner side of the elastic diaphragm 27 is hermetically connected to the outer periphery of the moving plate 26, and the outer side of the elastic diaphragm 27 is hermetically connected to the inner wall of the micro differential pressure chamber 1. As shown in fig. 5, the elastic diaphragm 27 deforms with the movement of the moving plate 26, and a micro pressure difference is formed between the first chamber 11 and the second chamber 12. Referring to fig. 2 and 4, the elastic membrane 27 is clamped between the first flange 61 and the second flange 62, and a through hole 271 is formed in the elastic membrane 27 corresponding to the bolt 63 for the bolt to pass through.
The first pressure equalizing pipe 3 is communicated with the first chamber 11, and the first pressure equalizing pipe 11 is provided with a plurality of isobaric first interfaces 31 for connecting an air inlet nozzle of a micro differential pressure sensor 7 to be calibrated or a standard micro differential pressure sensor 8; the second pressure equalizing pipe 4 is communicated with the second chamber 12, and the second pressure equalizing pipe 12 is provided with a plurality of second interfaces 41 with equal pressure for connecting with another air inlet nozzle of the micro differential pressure sensor 7 to be calibrated or the standard micro differential pressure sensor 8.
The upper computer 5 is electrically connected with the micro differential pressure sensor 7 to be calibrated and the standard micro differential pressure sensor 8 to obtain and record micro differential pressure change curves of the two sensors. And the staff calibrates the micro differential pressure sensor 7 to be calibrated according to the micro differential pressure change curve until the micro differential pressure change curves of the two are superposed.
In order to better understand the details of the present embodiment, the following description is provided in conjunction with the method of installation and use thereof.
The installation method comprises the following steps:
s1, first moving the first magnetic moving part 23 to the position of the first pipe 21 near the inner end, and similarly, moving the second magnetic moving part 24 to the position of the second pipe 22 near the inner end;
s2, attaching the attaching posts 212 of the first duct 21 and the second duct 22 to the attaching seats of the first casing 15 and the second casing 16, respectively; at this time, because the first magnetic moving part 23 and the second magnetic moving part 24 are respectively positioned at the inner ends of the first pipe 21 and the second pipe 22, a gap is left between the first flange 61 and the second flange 62;
s3, sequentially passing the bolt 63 through the first flange 61, the elastic diaphragm 27 and the second flange 62; the first and second vent valves 13 and 14 are opened, and then the first and second flanges 61 and 62 are slowly approached, and the first and second magnetic moving pieces 23 and 24 are then moved toward the middle of the first and second pipes 21 and 22 until they are completely sealed.
The using method comprises the following steps:
t1, connecting the first air inlet nozzle of the micro differential pressure sensor 7 to be calibrated and the standard micro differential pressure sensor 8 to the first interface 31 and the other air inlet nozzle to the second interface 41 in the opening state of the first vent valve 13 and the second vent valve 14, and then closing the first vent valve 13 and the second vent valve 14; at this time, the pressure in the first chamber 11 and the pressure in the second chamber 12 are both equal to the external atmospheric pressure, and the measured pressure difference is zero;
t2, the upper computer 5 sends a control command, current with a certain direction and a certain magnitude flows in the electromagnet 28 as required, so that the moving flat plate 26 moves, the elastic diaphragm 27 deforms, pressure difference is generated between the first chamber 11 and the second chamber 12, and the micro differential pressure sensor 7 to be calibrated and the standard micro differential pressure sensor 8 measure the corresponding pressure difference and record the pressure difference on the upper computer;
and T3, changing the current direction and the current magnitude of the electromagnet 28, carrying out detection for multiple times, forming a micro differential pressure curve according to the detection result, and calibrating the micro differential pressure sensor 7 to be calibrated according to the micro differential pressure curves of the electromagnet 28 and the electromagnet until the micro differential pressure curves of the electromagnet 28 and the electromagnet coincide.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (10)

1. A micro-differential pressure calibrator is characterized by comprising a micro-differential pressure chamber, a micro-differential pressure generating device, a first pressure equalizing pipe, a second pressure equalizing pipe and an upper computer;
the micro-pressure difference generating device is arranged in the micro-pressure difference chamber, the micro-pressure difference chamber is divided into a first chamber and a second chamber which are independent, the micro-pressure difference of the first chamber and the second chamber is adjusted, and the first chamber and the second chamber are respectively provided with a vent valve;
the first pressure equalizing pipe is communicated with the first cavity, and is provided with a plurality of first interfaces for connecting an air inlet nozzle of a micro differential pressure sensor to be calibrated or a standard micro differential pressure sensor;
the second pressure equalizing pipe is communicated with the second chamber, and is provided with a plurality of second interfaces for connecting another air inlet nozzle of the micro differential pressure sensor to be calibrated or the standard micro differential pressure sensor;
and the upper computer is electrically connected with the micro-pressure difference sensor to be calibrated and the standard micro-pressure difference sensor to obtain and record a micro-pressure difference change curve of the micro-pressure difference sensor and the standard micro-pressure difference sensor.
2. The micro-differential pressure calibrator according to claim 1, wherein the micro-differential pressure generating device comprises a first pipeline and a second pipeline which are oppositely arranged, a first magnetic moving part, a second magnetic moving part, a connecting rod, a moving flat plate, an elastic diaphragm and an electromagnet; the first magnetic moving piece is arranged in the first pipeline, and the second magnetic moving piece is arranged in the second pipeline; the first end of the connecting rod is fixedly connected with the first magnetic moving part, and the second end of the connecting rod is fixedly connected with the second magnetic moving part; the movable flat plate is fixedly arranged in the middle of the connecting rod; the inner side of the elastic diaphragm is hermetically connected with the periphery of the moving flat plate, and the outer side of the elastic diaphragm is hermetically connected with the inner wall of the micro-differential pressure chamber; the electromagnet is arranged on the outer sides of the first magnetic moving part and the second magnetic moving part, is electrically connected with an upper computer, receives a control signal of the upper computer, and drives the first magnetic moving part and the second magnetic moving part to move in the first pipeline and the second pipeline.
3. The micro-differential pressure calibrator of claim 2, wherein the first magnetic moving member comprises a first permanent magnet and a first magnetic liquid, the first permanent magnet is disposed in the first pipe, and the first magnetic liquid is disposed between the first permanent magnet and an inner wall of the first pipe to form a sealing ring.
4. The micro-differential pressure calibrator of claim 2, wherein the second magnetic moving member comprises a second permanent magnet and a second magnetic liquid, the second permanent magnet is disposed in the second pipe, and the second magnetic liquid is disposed between the second permanent magnet and an inner wall of the second pipe to form a sealing ring.
5. The micro-differential pressure calibrator according to claim 2, wherein a shielding layer is disposed on an outer side of the electromagnet.
6. The micro-differential pressure calibrator according to claim 2, wherein the opposite inner ends of the first and second pipes are provided with stoppers to prevent the first and second magnetic moving members from being separated from the first and second pipes.
7. The micro differential pressure calibrator of claim 2, wherein the micro differential pressure chamber comprises a first housing and a second housing connected via a flange mechanism; the flange mechanism comprises a first flange on the first shell, a second flange on the second shell and a bolt; the flange mechanism is provided with at least one sealing mechanism, and the sealing mechanism comprises a sealing ring on the first shell/the second shell and a sealing groove corresponding to the position of the sealing ring on the second shell/the first shell.
8. The micro-differential pressure calibrator according to claim 7, wherein the elastic diaphragm is clamped between the first flange and the second flange, and a through hole is formed in the elastic diaphragm at a position corresponding to the bolt.
9. The micro-differential pressure calibrator according to claim 2, wherein a mounting seat is disposed in the micro-differential pressure chamber, and the first and second pipes are fixedly mounted on the mounting seat.
10. The micro-differential pressure calibrator according to claim 9, wherein the mounting seat has a mounting groove, and the lower sides of the first and second pipes have a mounting post inserted into the mounting groove.
CN202010664696.3A 2020-07-10 2020-07-10 Micro-pressure difference calibrator Active CN111693211B (en)

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CN114964599A (en) * 2022-06-14 2022-08-30 南京高华科技股份有限公司 Micromechanical pressure sensor and method for producing the same
CN116105925A (en) * 2023-03-22 2023-05-12 潍柴动力股份有限公司 Correction method and device for DPF differential pressure sensor measured value and vehicle

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114964599A (en) * 2022-06-14 2022-08-30 南京高华科技股份有限公司 Micromechanical pressure sensor and method for producing the same
CN116105925A (en) * 2023-03-22 2023-05-12 潍柴动力股份有限公司 Correction method and device for DPF differential pressure sensor measured value and vehicle

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