CN102776558B - A kind of seed rod lift steady arm - Google Patents
A kind of seed rod lift steady arm Download PDFInfo
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- CN102776558B CN102776558B CN201210269443.1A CN201210269443A CN102776558B CN 102776558 B CN102776558 B CN 102776558B CN 201210269443 A CN201210269443 A CN 201210269443A CN 102776558 B CN102776558 B CN 102776558B
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- feeler
- steady arm
- seed rod
- rod lift
- graphite
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Abstract
The invention discloses a kind of seed rod lift steady arm, comprise horizontally disposed seed rod lift steady arm body, the screw mandrel of vertical setting, walk abreast with screw mandrel and arrange and graphite rope for lifting graphite bars, and be located at graphite bars end, for connecting seed rod body, graphite bars and graphite rope and the lifting head of support screw; In the inside of seed rod lift steady arm body, switch that power supply is connected with power supply is installed and is connected to the indicating lamp component between feeler that power supply and seed rod lift steady arm body; The feeler of seed rod lift steady arm body, is connected with screw mandrel contact; Lifting head, is positioned at graphite bars end, and is rigidly connected with the lower end of screw mandrel.Seed rod of the present invention lift steady arm, can realize crystal growth temperature easy to control, lift the advantage that displacement is easily determined, intelligent decision reliability is high and crystal mass is secure.
Description
Technical field
The present invention relates to semiconductor production equipment technical field, particularly, relate to a kind of seed rod lift steady arm.
Background technology
Higher temperature line-material end spacing, is directly connected to the quality of silicon carbide crystal quality.Higher temperature line position is too high, then can make the mixed atmosphere deficiency be made up of Elements C and Si in crucible top, raw material supply is not gone up; Meanwhile, put again seed crystal in higher warm area and this warm area radial symmetry gradient is comparatively large, so likely cause the overall phase transformation of carborundum crystals, interface is more convex and corrode the malicious influences such as seed crystal dorsad; Higher temperature line position is too low, stock chart surface temperature then may be made too low, to such an extent as to the mixed atmosphere be made up of Elements C and Si is directly at raw material surface or internal crystallization, block the transfer passage of atmosphere, cause starving equally, and now seed crystal place temperature is too low, centerand edge growth velocity is all very fast, makes carborundum crystals be easy to occur the defects such as microtubule line is in blocks, center polycrystalline.
As shown in Figure 4 and Figure 5, wherein, Fig. 4 is for corrode seed crystal dorsad, and the slightly shallow region of color is that seed crystal heavily decomposes recrystallize region; Fig. 5 is that atmosphere transfer passage gets clogged, atmosphere directly forming core crystallization inside raw material.Visible, higher temperature line of controlling well is the lifeline of growing silicon carbice crystals.
Aborning, people are mainly through regulating seed crystal position, and growth temperature is come and crucible top lagging material controls higher temperature line.After crystal growth equipment debugs out, the growth temperature change of adjacent heat is more or less the same; Moreover crucible top lagging material does not generally at will change.So, regulate seed crystal position to be the most common means controlling higher temperature line.
But in actually operating, the adjustment of seed crystal position encounters some difficulties due to the reason of equipment itself.For aspect considerations such as the convenient turnover of plumbago crucible and carborundum crystals, the seed rod above the lifting rod of handle system and plumbago crucible is through with being flexible coupling of making of graphite rope by one.Owing to regulating the elasticity of graphite rope to be last procedure of shove charge, other processing parameter is ready to all, so people can only carry out this operation, so judge that the elasticity of graphite rope has been felt with individual entirely by a very little furnace chamber mouth.
But whether the elasticity of graphite rope, be related to and previously measured complete seed crystal position and maintain the original state.Graphite rope is too tight, very likely plumbago crucible has below been carried, has made seed crystal position rises several millimeter, and stayed certain gap below, have impact on original warm field; And graphite rope is more loose, then when running lift program in process of growth, actual lift displacement is less than default displacement, can have influence on the normal growth of crystal equally, bring a uncertain factor to the formulation of growth technique.
At present, for solving the elasticity problem of graphite rope and the method carried out is the sensation relying on workman in production, the sensation of people is the standardized instrument examination criteria of neither one certainly after all.
Realizing in process of the present invention, contriver is finding at least to exist in prior art that crystal growth temperature-field is difficult to control, lift displacement is being difficult to determine, artificial judgment poor reliability and crystal mass be without defects such as guarantees.
Summary of the invention
The object of the invention is to, for the problems referred to above, propose a kind of seed rod lift steady arm, to realize, crystal growth temperature is easy to control, the lift advantage that displacement is easily determined, intelligent decision reliability is high and crystal mass is secure.
For achieving the above object, the technical solution used in the present invention is: a kind of seed rod lift steady arm body, the screw mandrel of vertical setting, walk abreast with screw mandrel and arrange and graphite rope for lifting graphite bars, and be located at graphite bars end, for connecting seed rod lift steady arm body, graphite bars and graphite rope and the lifting head of support screw;
In the inside of seed rod lift steady arm body, switch that power supply is connected with power supply is installed and is connected to the indicating lamp component between feeler that power supply and seed rod lift steady arm body; The feeler of seed rod lift steady arm body, is connected with screw mandrel contact; Lifting head, is positioned at graphite bars end, and is rigidly connected with the lower end of screw mandrel.Crucible is seed crystal production Primary containers, and the material connecting crucible and seed crystal lifting bar is graphite bars and graphite rope, and the lifting of crucible is controlled by seed rod.
Further, described feeler, comprises the main feeler be located on described seed rod lift steady arm body, and the secondary feeler that main feeler is upper and lower;
Described main feeler, comprises movable contact, is located at the upper contact above described movable contact, and is located at the lower contact below described movable contact.
Further, described feeler, also comprises the feeler lid for protecting main feeler and secondary feeler at unused state.
Further, described indicating lamp component, comprise the high-position lamp for the bright light when described movable contact contacts with upper contact, the power lights for the bright light when switch opens, for the feeler lamp of the bright light when main feeler is communicated with secondary feeler and the low level lamp for bright light during at movable contact and lower contact, described high-position lamp, power lights, feeler lamp are connected with power supply respectively with low level lamp.
Further, described high-position lamp comprises white led lamps, and power lights comprises green LED lamp, and feeler lamp comprises blue led lamp, and low level lamp comprises white led lamps.
Further, the mode of connection between described lifting head and screw mandrel is for being flexible coupling.Here, what is called is flexible coupling, and namely seed rod and plumbago crucible are all hard material, middle by the connection of deformable material graphite rope.
Further, described lifting head is welded with two nuts symmetrically supporting with screw mandrel.
Further, between described feeler and seed rod lift steady arm body, be fixedly connected with by nut, during use, nut side upward.
Further, the length of described graphite rope, at least long than screw mandrel 20mm.
The seed rod lift steady arm of various embodiments of the present invention, owing to comprising horizontally disposed seed rod lift steady arm body, the screw mandrel of vertical setting, walk abreast with screw mandrel and arrange and graphite rope for lifting graphite bars, and be located at graphite bars end, for connecting seed rod lift steady arm body, graphite bars and graphite rope and the lifting head of support screw; In the inside of seed rod lift steady arm body, switch that power supply is connected with power supply is installed and is connected to the indicating lamp component between feeler that power supply and seed rod lift steady arm body; The feeler of seed rod lift steady arm body, is connected with screw mandrel contact; Lifting head, is positioned at graphite bars end, and is rigidly connected with the lower end of screw mandrel.Can utilize and drive the movable contact in feeler to move up and down with the screw mandrel of lifting rod gun iron link, judge whether graphite rope lifts crucible according to the contact with the upper and lower contact in feeler; Thus can overcome that crystal growth temperature-field in prior art is difficult to control, lift displacement is difficult to determine, artificial judgment poor reliability and crystal mass without the defect ensured, with realize crystal growth temperature easy to control, lift the advantage that displacement is easily determined, intelligent decision reliability is high and crystal mass is secure.
Other features and advantages of the present invention will be set forth in the following description, and, partly become apparent from specification sheets, or understand by implementing the present invention.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Accompanying drawing explanation
Accompanying drawing is used to provide a further understanding of the present invention, and forms a part for specification sheets, together with embodiments of the present invention for explaining the present invention, is not construed as limiting the invention.In the accompanying drawings:
Fig. 1 is the steady arm positioning work schematic diagram of seed rod of the present invention lift locating device;
Fig. 2 is the partial rear structural representation (switch is on pilot lamp opposite) of seed rod lift steady arm body in Fig. 1;
Fig. 3 is A portion in Fig. 1 (i.e. feeler and leading screw contact position during steady arm location) enlarged diagram;
Fig. 4 is for corroding seed crystal schematic diagram (the slightly shallow region of color is that seed crystal heavily decomposes recrystallize region) dorsad;
Fig. 5 is that atmosphere transfer passage gets clogged view (atmosphere directly forming core crystallization inside raw material).
By reference to the accompanying drawings, in the embodiment of the present invention, Reference numeral is as follows:
1-high-position lamp; 2-power lights; 3-feeler lamp; 4-low level lamp; 5-seed rod lift steady arm body; 6-nut; 7-feeler; 701-upper contact; 702-lower contact; 703-movable contact; 8-switch; 9-screw mandrel; 10-graphite rope; 11-lifting head.
Embodiment
Below in conjunction with accompanying drawing, the preferred embodiments of the present invention are described, should be appreciated that preferred embodiment described herein is only for instruction and explanation of the present invention, is not intended to limit the present invention.
According to the embodiment of the present invention, provide a kind of seed rod lift steady arm.As shown in Figure 1-Figure 3, the present embodiment comprises horizontally disposed seed rod lift steady arm body (as seed rod lift steady arm body 5), the screw mandrel (as screw mandrel 9) of vertical setting, walk abreast with screw mandrel and arrange and graphite rope (as graphite rope 10) for lifting graphite bars, and be located at graphite bars end, for connecting seed rod lift steady arm body, graphite bars and graphite rope and the lifting head of support screw (as lifting head 11); In the inside of seed rod lift steady arm body, power supply, the switch be connected with power supply are installed and are connected to the indicating lamp component between feeler (as feeler 7) that power supply and seed rod lift steady arm body; The feeler of seed rod lift steady arm body, is connected with screw mandrel contact; Lifting head, is positioned at graphite bars end, and is rigidly connected with the lower end of screw mandrel.
Here, the mode of connection between lifting head and screw mandrel, for being flexible coupling, lifting head is welded with two nuts symmetrically supporting with screw mandrel; Between feeler and seed rod lift steady arm body, be fixedly connected with by nut (as nut 6), during use, nut side upward; The length of graphite rope, at least long than screw mandrel 20mm.
Particularly, above-mentioned feeler, comprises the main feeler be located on seed rod lift steady arm body, the secondary feeler that main feeler is upper and lower, and for protecting the feeler lid of main feeler and secondary feeler at unused state; Main feeler, comprises movable contact (as movable contact 703), is located at the upper contact (as upper contact 701) above movable contact, and is located at the lower contact (as lower contact 702) below movable contact.
Above-mentioned indicating lamp component, comprise for the high-position lamp of the bright light when movable contact contacts with upper contact, the power lights for the bright light when switch opens, the feeler lamp for the bright light when main feeler is communicated with secondary feeler (when feeler lamp is bright, surface feeler can touch screw mandrel) and for the low level lamp (as low level lamp 4) of the bright light when movable contact and lower contact, high-position lamp (as high-position lamp 1), power lights (as power lights 2), feeler lamp (as feeler lamp 3) are connected with power supply respectively with low level lamp.Such as, high-position lamp comprises white led lamps, and power lights comprises green LED lamp, and feeler lamp comprises blue led lamp, and low level lamp comprises white led lamps.
The seed rod lift steady arm of above-described embodiment, positioning precision is better than 1mm, and its principle of work is exactly utilize to drive movable contact to move up and down with the screw mandrel of lifting rod gun iron link, judges whether graphite rope lifts crucible according to the contact with upper and lower contact.In the concrete using method of this seed rod lift steady arm, mainly comprise:
(1) on the lifting head be flexible coupling, after symmetrical two nuts of burn-oning supporting with screw mandrel, then carry out and be flexible coupling (noticing that the length of graphite rope should 20mm more than longer than screw mandrel);
(2) will be flexible coupling and install, after seed rod lifted steady arm body upwards slowly pull, after tightening, stop (estimating from tensioned state difference about 1mm) until moved to by graphite rope;
(3) being tightened in by screw mandrel on two nuts of lifting head, turning on the power switch (i.e. switch 8), should be now that power lights (green) and low level lamp (in vain) are bright; After seed rod lift steady arm presses the weight of a kilogram, the feeler again seed rod being lifted steady arm according to positive dirction slowly near screw mandrel (noting: nut 6 upward), (note will making blue lamp brightness stability and not glimmering, and too do not exert oneself in order to avoid damage feeler when screw mandrel) is contacted well with screw mandrel Deng feeler lamp bright explanation contact angle;
(4) localization method one (acquiescence): slowly upwards lift seed rod lift steady arm body by the speed of 50mm/h, now note observing the pilot lamp on seed rod lift steady arm, record now seed crystal position when low level lamp goes out, after record when high-position lamp is bright now seed crystal position and stop lift; Calculate the difference of these two positions, if deviation is more than 1mm, then it is not too accurate to measure, and should again measure once according to upper method again;
Take out seed rod lift steady arm and screw mandrel, close little fire door; The relative period of insurance of this method, but zero position can pull position height 0.5-1mm than just;
(5) localization method two: slowly upwards lift seed rod lift steady arm body by the speed of 50mm/h, now note observing the pilot lamp on seed rod lift steady arm, stop lift when low level lamp goes out, take out seed rod lift steady arm and screw mandrel, close little fire door; This method precision is high, but may make mistake during low level wrong report.
(6) illustrate that battery exhausts when power supply instruction green light does not work, should battery be changed, concrete grammar be twist off seed rod lift steady arm on screw, more slowly pulling wire is gone out to make it to expose battery, again battery and electric wire are loaded into after changing battery, finally set up screw.
When it should be noted that using above-mentioned seed rod lifts steady arm, must cover feeler lid, protection feeler, in order to avoid affect its precision; In addition, in seed rod lift steady arm, there is power supply (as battery), so close to high temperature, dry place must not should be kept at.
Last it is noted that the foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, although with reference to previous embodiment to invention has been detailed description, for a person skilled in the art, it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. a seed rod lift steady arm, is characterized in that,
with graphite bars with the use of;this seed rod lift steady arm, comprise horizontally disposed seed rod lift steady arm body, near the screw mandrel that described seed rod lift steady arm body end is vertically arranged, and screw mandrel walks abreast the graphite rope arranged, and is connected and the lifting head of support screw with graphite rope;
during work, the position of graphite bars in the below of lifting head, one end connection wire rod of lifting head and graphite rope, the other end of lifting head connects graphite bars;
Described graphite rope is for lifting graphite bars; Described lifting head is located at graphite bars end, and for connecting seed rod lift steady arm body, graphite bars and graphite rope and support screw;
In the described inside at seed rod lift steady arm body, switch that power supply is connected with power supply is installed and is connected to the indicating lamp component between feeler that power supply and seed rod lift steady arm body;
the feeler of seed rod lift steady arm body, is connected with screw mandrel contact; Lifting head, is positioned at graphite bars end, and is rigidly connected with the lower end of screw mandrel or is flexible coupling;
Described feeler, comprises the main feeler be located on described seed rod lift steady arm body, and
be located at respectivelymain feeler is upper and lower
side's
up and downsecondary feeler;
Described main feeler, comprises movable contact, is located at the upper contact above described movable contact, and is located at the lower contact below described movable contact;
Described indicating lamp component, comprise the high-position lamp for the bright light when described movable contact contacts with upper contact, the power lights for the bright light when switch opens, at main feeler and
up and downbright light when secondary feeler is communicated with
up and downfeeler lamp and the low level lamp for the bright light when movable contact and lower contact, described high-position lamp, power lights,
up and downfeeler lamp is connected with power supply respectively with low level lamp.
2. seed rod lift steady arm according to claim 1, is characterized in that, described feeler, also comprises the feeler lid for protecting main feeler and secondary feeler at unused state.
3. seed rod lift steady arm according to claim 1, it is characterized in that, described high-position lamp comprises white led lamps, and power lights comprises green LED lamp, and feeler lamp comprises blue led lamp, and low level lamp comprises white led lamps.
4. seed rod lift steady arm according to claim 1, is characterized in that, described lifting head is welded with two nuts symmetrically supporting with screw mandrel.
5. seed rod lift steady arm according to claim 1, is characterized in that, between described feeler and seed rod lift steady arm body, be fixedly connected with by nut, during use, nut side upward.
6. seed rod lift steady arm according to claim 1, is characterized in that, the length of described graphite rope, at least long than screw mandrel 20mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210269443.1A CN102776558B (en) | 2012-07-30 | 2012-07-30 | A kind of seed rod lift steady arm |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210269443.1A CN102776558B (en) | 2012-07-30 | 2012-07-30 | A kind of seed rod lift steady arm |
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| CN102776558A CN102776558A (en) | 2012-11-14 |
| CN102776558B true CN102776558B (en) | 2015-08-26 |
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| Application Number | Title | Priority Date | Filing Date |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2220480Y (en) * | 1995-03-06 | 1996-02-21 | 齐鲁乙烯塑料厂 | Crystallon fixed stand for quartz crystal production |
| CN2470372Y (en) * | 2001-04-06 | 2002-01-09 | 北京有色金属研究总院 | Straight-drawing crystal grower controlled by steam pressure |
| CN2476566Y (en) * | 2001-04-06 | 2002-02-13 | 北京有色金属研究总院 | Seed rod device |
| CN1598079A (en) * | 2004-08-13 | 2005-03-23 | 山东大学 | Apparatus for rotating and drawing of crystal with damping |
| CN2791004Y (en) * | 2005-03-28 | 2006-06-28 | 荀建华 | Crystal lifting device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0791153B2 (en) * | 1990-06-20 | 1995-10-04 | 三井造船株式会社 | Method for producing α-SiC single crystal |
| JPH05306199A (en) * | 1992-04-30 | 1993-11-19 | Nisshin Steel Co Ltd | Apparatus for producing silicon carbide single crystal |
-
2012
- 2012-07-30 CN CN201210269443.1A patent/CN102776558B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2220480Y (en) * | 1995-03-06 | 1996-02-21 | 齐鲁乙烯塑料厂 | Crystallon fixed stand for quartz crystal production |
| CN2470372Y (en) * | 2001-04-06 | 2002-01-09 | 北京有色金属研究总院 | Straight-drawing crystal grower controlled by steam pressure |
| CN2476566Y (en) * | 2001-04-06 | 2002-02-13 | 北京有色金属研究总院 | Seed rod device |
| CN1598079A (en) * | 2004-08-13 | 2005-03-23 | 山东大学 | Apparatus for rotating and drawing of crystal with damping |
| CN2791004Y (en) * | 2005-03-28 | 2006-06-28 | 荀建华 | Crystal lifting device |
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| CN102776558A (en) | 2012-11-14 |
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| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20121114 Assignee: Shenzhen Reinvested Tianke Semiconductor Co.,Ltd. Assignor: XINJIANG TANKEBLUE SEMICONDUCTOR Co.,Ltd. Contract record no.: X2023990000685 Denomination of invention: A seed crystal rod lifting locator Granted publication date: 20150826 License type: Common License Record date: 20230725 |
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