CN102776558A - Pulling locator for seed crystal rod - Google Patents
Pulling locator for seed crystal rod Download PDFInfo
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- CN102776558A CN102776558A CN2012102694431A CN201210269443A CN102776558A CN 102776558 A CN102776558 A CN 102776558A CN 2012102694431 A CN2012102694431 A CN 2012102694431A CN 201210269443 A CN201210269443 A CN 201210269443A CN 102776558 A CN102776558 A CN 102776558A
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- feeler
- seed rod
- lamp
- steady arm
- lifts
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Abstract
The invention discloses a pulling locator for a seed crystal rod. The pulling locator for the seed crystal rod comprises a horizontally arranged pulling locator body for the seed crystal rod, a vertically arranged screw, a graphite rope which is arranged in parallel with the screw and is used for pulling a graphite rod, and a pulling head which is arranged at the tail end of the graphite rod, is used for connecting a seed crystal rod body, the graphite rod and the graphite rope, and is used for supporting the screw. A power supply, a switch connected with the power supply, and an indicator light component which is connected between the power supply and an antenna of the pulling locator body for the seed crystal rod are arranged inside the pulling locator body for the seed crystal rod, and the antenna of the pulling locator body for the seed crystal rod is in contact connection with the screw; and the pulling head is positioned at the tail end of the graphite rod and is rigidly connected with the lower end of the screw. The pulling locator for the seed crystal rod has the advantages that the temperature of crystal growth is easily controlled, the pulling displacement is easy to determine, the reliability of intelligent judgment is high and the crystal quality is ensured.
Description
Technical field
The present invention relates to the semiconductor production equipment technical field, particularly, relate to a kind of seed rod and lift steady arm.
Background technology
Higher temperature line-material end spacing is directly connected to the quality of carborundum crystals quality.The higher temperature line position is too high, can make that then the mixed atmosphere of being made up of Elements C and Si in the crucible top is not enough, and raw material supply is not gone up; Simultaneously, it is bigger in higher warm area and this warm area radial symmetry gradient to put seed crystal again, and then might cause the whole phase transformation of carborundum crystals, the interface is more protruding and corrodes pernicious influence such as seed crystal dorsad; The higher temperature line position is low excessively; Then may make the stock chart surface temperature low excessively, to such an extent as to the mixed atmosphere of being made up of Elements C and Si has blocked the transfer passage of atmosphere directly at raw material surface or internal crystallization; Cause starving equally; And this moment, seed crystal place temperature was low excessively, and center and marginal growth speed are all very fast, made carborundum crystals be easy to occur defectives such as the microtubule line is in blocks, center polycrystalline.
Like Fig. 4 and shown in Figure 5, wherein, Fig. 4 is for corrode seed crystal dorsad, and the slightly shallow zone of color is that seed crystal heavily decomposes the recrystallize zone; Fig. 5 gets clogged for the atmosphere transfer passage, and atmosphere is directly in the forming core crystallization of raw material the inside.It is thus clear that the higher temperature line of controlling well is the lifeline of growing silicon carbice crystals.
Aborning, people are mainly through regulating the seed crystal position, and growth temperature is next controls higher temperature line with crucible top lagging material.Because after crystal growth equipment was debugged out, the variation of the growth temperature of adjacent heat was more or less the same; Moreover crucible top lagging material does not generally at will change.So, regulate the most common means that the seed crystal position is the control higher temperature line.
But in actually operating, the adjusting of seed crystal position is owing to the reason of equipment itself has run into some difficulties.Consider that from aspects such as plumbago crucible and the convenient turnover of carborundum crystals the lifting rod of handle system and the seed rod above the plumbago crucible are the perforations that is flexible coupling made from the graphite rope through.Because regulating the elasticity of graphite rope is last procedure of shove charge, other processing parameter all is ready to, so people can only carry out this operation through a very little furnace chamber mouth, feels to accomplish with the individual entirely so judge the elasticity of graphite rope.
But whether the elasticity of graphite rope is related to and has before measured the seed crystal position that finishes and maintain the original state.Graphite rope is too tight, has very likely carried following plumbago crucible, make to rise several millimeters on the seed crystal position, and below stayed certain slit, influenced original temperature; And the graphite rope is loose, and when then operation lifted program in process of growth, the actual displacement that lifts was less than preset displacement, can have influence on the crystalline normal growth equally, has brought a uncertain factor for the formulation of growth technique.
At present, the method for carrying out for the elasticity problem that solves the graphite rope in the production is the sensation that relies on the workman, and people's sensation is the standardized instrument detecting standard of none certainly after all.
In realizing process of the present invention, the contriver finds to exist at least in the prior art that crystal growth temperature field is difficult to control, lifts that displacement is difficult to confirm, artificial judgment poor reliability and crystal mass do not have defectives such as guarantee.
Summary of the invention
The objective of the invention is to,, propose a kind of seed rod and lift steady arm to the problems referred to above, with realize that crystal growth temperature is easy to control, lift that displacement is prone to confirm, intelligent decision safety height and the secure advantage of crystal mass.
For realizing above-mentioned purpose; The technical scheme that the present invention adopts is: a kind of seed rod lifts the steady arm body; The screw mandrel that vertically is provided with; With the parallel graphite rope that is provided with and is used to lift graphite bars of screw mandrel, and be located at the graphite bars end, be used to connect the head that lifts of seed rod body, graphite bars and graphite rope and support screw;
Lift the inside of steady arm body at seed rod, power supply, the switch that is connected with power supply are installed and are connected power supply and seed rod lifts the PL assembly between the feeler of steady arm body; Seed rod lifts the feeler of steady arm body, is connected with the screw mandrel contact; Lift head, be positioned at the graphite bars end, and be rigidly connected with the lower end of screw mandrel.Crucible is used main container for seed crystal production, and the material that connects crucible and seed crystal lifting rod is graphite bars and graphite rope, and the up-down of crucible is controlled by seed rod.
Further, said feeler comprises that being located at said seed rod lifts the main feeler on the steady arm body, and main feeler secondary feeler up and down;
Said main feeler comprises moving contact, is located at the upper contact of said moving contact top, and the lower contact that is located at said moving contact below.
Further, said feeler also comprises the feeler lid that is used for protecting at unused state main feeler and secondary feeler.
Further; Said PL assembly; Comprise high-order lamp, the power lights that is used for bright lamp when switch opens that is used for bright lamp when said moving contact contacts with upper contact, the feeler lamp that is used for bright lamp when main feeler is communicated with secondary feeler and the low level lamp that is used for bright lamp when moving contact contacts with lower contact, said high-order lamp, power lights, feeler lamp and low level lamp are connected with power supply respectively.
Further, said high-order lamp comprises white led lamps, and power lights comprises green LED lamp, and the feeler lamp comprises the blue led lamp, and the low level lamp comprises white led lamps.
Further, said lift the head and screw mandrel between mode of connection for being flexible coupling.Here, what is called is flexible coupling, and promptly seed rod and plumbago crucible all are hard material, and is middle through the connection of deformable material graphite rope.
Further, be welded with two nuts supporting on the head symmetrically said lifting with screw mandrel.
Further, between said feeler and the seed rod body, be fixedly connected through nut, the nut side up during use.
Further, the length of said graphite rope is at least than the long 20mm of screw mandrel.
The seed rod of various embodiments of the present invention lifts steady arm; Owing to comprise that horizontally disposed seed rod lifts the steady arm body; The screw mandrel that vertically is provided with; With the parallel graphite rope that is provided with and is used to lift graphite bars of screw mandrel, and be located at the graphite bars end, be used to connect the head that lifts of seed rod body, graphite bars and graphite rope and support screw; Lift the inside of steady arm body at seed rod, power supply, the switch that is connected with power supply are installed and are connected power supply and seed rod lifts the PL assembly between the feeler of steady arm body; Seed rod lifts the feeler of steady arm body, is connected with the screw mandrel contact; Lift head, be positioned at the graphite bars end, and be rigidly connected with the lower end of screw mandrel.The moving contact that can utilize the screw mandrel that is connected with the lifting rod rigidity to drive in the feeler moves up and down, according to feeler in contacting of upper and lower contact judge whether the graphite rope has lifted crucible; Thereby the defective of can overcome that the field of crystal growth temperature in the prior art is difficult to control, lift that displacement is difficult to confirm, artificial judgment poor reliability and crystal mass not having guarantee, with realize that crystal growth temperature is easy to control, lift that displacement is prone to confirm, intelligent decision safety height and the secure advantage of crystal mass.
Other features and advantages of the present invention will be set forth in specification sheets subsequently, and, partly from specification sheets, become obvious, perhaps understand through embodiment of the present invention.
Through accompanying drawing and embodiment, technical scheme of the present invention is done further detailed description below.
Description of drawings
Accompanying drawing is used to provide further understanding of the present invention, and constitutes the part of specification sheets, is used to explain the present invention with embodiments of the invention, is not construed as limiting the invention.In the accompanying drawings:
Fig. 1 lifts the steady arm location work synoptic diagram of locating device for seed rod of the present invention;
Fig. 2 is the local backsight structural representation (switch is on the PL opposite) of seed rod body among Fig. 1;
Fig. 3 is A portion among Fig. 1 (feeler and leading screw contact position when being the steady arm location) enlarged diagram;
Fig. 4 is for corrode seed crystal synoptic diagram (the slightly shallow zone of color is that seed crystal heavily decomposes the recrystallize zone) dorsad;
Fig. 5 is the atmosphere transfer passage view (the directly forming core crystallization in raw material the inside of atmosphere) that gets clogged.
In conjunction with accompanying drawing, Reference numeral is following in the embodiment of the invention:
The high-order lamp of 1-; The 2-power lights; 3-feeler lamp; 4-low level lamp; The 5-seed rod lifts the steady arm body; The 6-nut; The 7-feeler; The 701-upper contact; The 702-lower contact; The 703-moving contact; The 8-switch; The 9-screw mandrel; 10-graphite rope; 11-lifts head.
Embodiment
Below in conjunction with accompanying drawing the preferred embodiments of the present invention are described, should be appreciated that preferred embodiment described herein only is used for explanation and explains the present invention, and be not used in qualification the present invention.
According to the embodiment of the invention, provide a kind of seed rod to lift steady arm.Like Fig. 1-shown in Figure 3; Present embodiment comprises that horizontally disposed seed rod lifts steady arm body (lifting steady arm body 5 like seed rod); The screw mandrel (like screw mandrel 9) that vertically is provided with; With the parallel graphite rope that is provided with and is used to lift graphite bars of screw mandrel (like graphite rope 10), and be located at the graphite bars end, be used to connect seed rod body, graphite bars and graphite rope and support screw lift a head (as lift 11); Lift the inside of steady arm body at seed rod, power supply, the switch that is connected with power supply are installed and are connected power supply and seed rod lifts the PL assembly between the feeler (like feeler 7) of steady arm body; Seed rod lifts the feeler of steady arm body, is connected with the screw mandrel contact; Lift head, be positioned at the graphite bars end, and be rigidly connected with the lower end of screw mandrel.
Here, lift mode of connection between head and the screw mandrel for being flexible coupling, be welded with two nuts supporting on the head symmetrically lifting with screw mandrel; Between feeler and the seed rod body, be fixedly connected through nut (like nut 6), the nut side up during use; The length of graphite rope is at least than the long 20mm of screw mandrel.
Particularly, above-mentioned feeler comprises that being located at seed rod lifts the main feeler on the steady arm body, main feeler secondary feeler up and down, and the feeler lid that is used for protecting at unused state main feeler and secondary feeler; Main feeler comprises moving contact (like moving contact 703), is located at the upper contact (like upper contact 701) of moving contact top, and the lower contact (like lower contact 702) that is located at the moving contact below.
Above-mentioned PL assembly; The feeler lamp that comprises the high-order lamp, the power lights that is used for bright lamp when switch opens that are used for bright lamp when moving contact contacts with upper contact, is used for bright lamp when main feeler and secondary feeler are communicated with is (when the feeler lamp is bright; The surface feeler can touch screw mandrel) and the low level lamp (like low level lamp 4) that is used for bright lamp when moving contact contacts with lower contact, high-order lamp (like high-order lamp 1), power lights (like power lights 2), feeler lamp (like feeler lamp 3) are connected with power supply respectively with the low level lamp.For example, high-order lamp comprises white led lamps, and power lights comprises green LED lamp, and the feeler lamp comprises the blue led lamp, and the low level lamp comprises white led lamps.
The seed rod of the foregoing description lifts steady arm, and bearing accuracy is superior to 1mm, and its principle of work is exactly to utilize the screw mandrel that is connected with the lifting rod rigidity to drive moving contact to move up and down, according to judging with contacting of upper and lower contact whether the graphite rope has lifted crucible.Lift in the concrete method of use of steady arm at this seed rod, mainly comprise:
⑴ lift on the head what be flexible coupling, symmetric burn-on with supporting two nuts of screw mandrel after, carry out and be flexible coupling (length of noting the graphite rope should be than more than the long 20mm of screw mandrel) again;
⑵ will be flexible coupling and install, after with the upwards slowly pulling of seed rod body, up to the graphite rope being moved near after tightening to stop (estimation) from the about 1mm of tensioned state difference;
⑶ be tightened in screw mandrel on two nuts that lift head, turns on the power switch (being switch 8), and should be that power lights (green) and low level lamp (in vain) are bright this moment; After lifting the weight that presses a kilogram on the steady arm at seed rod; The feeler that again seed rod is lifted steady arm according to positive dirction slowly near screw mandrel (note: nut 6 up); Contact well (attention will make blue lamp brightness stability and not glimmer, and during not too firmly in order to avoid damage feeler) with screw mandrel Deng the bright explanation contact angle of feeler lamp near screw mandrel;
⑷ localization method one (acquiescence): the speed with 50mm/h slowly upwards lifts the seed rod body; Notice that observing seed rod lifts the PL on the steady arm this moment; When the low level lamp goes out record this moment the seed crystal position, after when high-order lamp is bright record seed crystal position and stop to lift at this moment; Calculate the difference of these two positions, if deviation surpasses 1mm, it is not too accurate then to measure, and should measure once according to last method again again;
Take out seed rod and lift steady arm and screw mandrel, close little fire door; The relative period of insurance of this method, but zero position can be than the high 0.5-1mm in firm pulling position;
⑸ localization method two: the speed with 50mm/h slowly upwards lifts the seed rod body, notices that observing seed rod lifts the PL on the steady arm this moment, when the low level lamp goes out, stops to lift, and takes out seed rod and lifts steady arm and screw mandrel, closes little fire door; This method precision is high, but may make mistake during the low level wrong report.
⑹ the explanation battery did not exhaust when worked when power supply indication green light; Should change battery, concrete grammar is to twist seed rod to lift the screw on the steady arm, more slowly pulling wire is gone out to make it to expose battery; Again battery and electric wire are loaded into after changing battery, set up screw at last.
When it should be noted that using above-mentioned seed rod lifts steady arm, must cover the feeler lid, the protection feeler is in order to avoid influence its precision; In addition, seed rod lifts has power supply (like battery) in the steady arm, so must not should be kept at the exsiccant place near high temperature.
What should explain at last is: the above is merely the preferred embodiments of the present invention; Be not limited to the present invention; Although the present invention has been carried out detailed explanation with reference to previous embodiment; For a person skilled in the art, it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a seed rod lifts steady arm; It is characterized in that; Comprise that horizontally disposed seed rod lifts the steady arm body; The parallel graphite rope that is provided with and is used to lift graphite bars of screw mandrel that vertically is provided with and screw mandrel, and be located at the graphite bars end, be used to connect the head that lifts of seed rod body, graphite bars and graphite rope and support screw;
Lift the inside of steady arm body said at seed rod, power supply, the switch that is connected with power supply are installed and are connected power supply and seed rod lifts the PL assembly between the feeler of steady arm body; Seed rod lifts the feeler of steady arm body, is connected with the screw mandrel contact; Lift head, be positioned at the graphite bars end, and be rigidly connected with the lower end of screw mandrel.
2. seed rod according to claim 1 lifts steady arm, it is characterized in that, said feeler comprises that being located at said seed rod lifts the main feeler on the steady arm body, and main feeler secondary feeler up and down;
Said main feeler comprises moving contact, is located at the upper contact of said moving contact top, and the lower contact that is located at said moving contact below.
3. seed rod according to claim 2 lifts steady arm, it is characterized in that said feeler also comprises the feeler lid that is used for protecting at unused state main feeler and secondary feeler.
4. lift steady arm according to each described seed rod among the claim 1-3; It is characterized in that; Said PL assembly; Comprise high-order lamp, the power lights that is used for bright lamp when switch opens that is used for bright lamp when said moving contact contacts with upper contact, the feeler lamp that is used for bright lamp when main feeler is communicated with secondary feeler and the low level lamp that is used for bright lamp when moving contact contacts with lower contact, said high-order lamp, power lights, feeler lamp and low level lamp are connected with power supply respectively.
5. seed rod according to claim 4 lifts steady arm, it is characterized in that, said high-order lamp comprises white led lamps, and power lights comprises green LED lamp, and the feeler lamp comprises the blue led lamp, and the low level lamp comprises white led lamps.
6. seed rod according to claim 1 lifts steady arm, it is characterized in that, said lift the head and screw mandrel between mode of connection for being flexible coupling.
7. seed rod according to claim 6 lifts steady arm, it is characterized in that, is welded with two nuts supporting with screw mandrel on the head symmetrically said lifting.
8. seed rod according to claim 1 lifts steady arm, it is characterized in that, between said feeler and the seed rod body, is fixedly connected through nut, and the nut side up during use.
9. seed rod according to claim 1 lifts steady arm, it is characterized in that, the length of said graphite rope is at least than the long 20mm of screw mandrel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210269443.1A CN102776558B (en) | 2012-07-30 | 2012-07-30 | A kind of seed rod lift steady arm |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210269443.1A CN102776558B (en) | 2012-07-30 | 2012-07-30 | A kind of seed rod lift steady arm |
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| CN102776558A true CN102776558A (en) | 2012-11-14 |
| CN102776558B CN102776558B (en) | 2015-08-26 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0455397A (en) * | 1990-06-20 | 1992-02-24 | Mitsui Eng & Shipbuild Co Ltd | Production of alpha-sic single crystal |
| JPH05306199A (en) * | 1992-04-30 | 1993-11-19 | Nisshin Steel Co Ltd | Apparatus for producing silicon carbide single crystal |
| CN2220480Y (en) * | 1995-03-06 | 1996-02-21 | 齐鲁乙烯塑料厂 | Crystallon fixed stand for quartz crystal production |
| CN2470372Y (en) * | 2001-04-06 | 2002-01-09 | 北京有色金属研究总院 | Straight-drawing crystal grower controlled by steam pressure |
| CN2476566Y (en) * | 2001-04-06 | 2002-02-13 | 北京有色金属研究总院 | Seed rod device |
| CN1598079A (en) * | 2004-08-13 | 2005-03-23 | 山东大学 | Apparatus for rotating and drawing of crystal with damping |
| CN2791004Y (en) * | 2005-03-28 | 2006-06-28 | 荀建华 | Crystal lifting device |
-
2012
- 2012-07-30 CN CN201210269443.1A patent/CN102776558B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0455397A (en) * | 1990-06-20 | 1992-02-24 | Mitsui Eng & Shipbuild Co Ltd | Production of alpha-sic single crystal |
| JPH05306199A (en) * | 1992-04-30 | 1993-11-19 | Nisshin Steel Co Ltd | Apparatus for producing silicon carbide single crystal |
| CN2220480Y (en) * | 1995-03-06 | 1996-02-21 | 齐鲁乙烯塑料厂 | Crystallon fixed stand for quartz crystal production |
| CN2470372Y (en) * | 2001-04-06 | 2002-01-09 | 北京有色金属研究总院 | Straight-drawing crystal grower controlled by steam pressure |
| CN2476566Y (en) * | 2001-04-06 | 2002-02-13 | 北京有色金属研究总院 | Seed rod device |
| CN1598079A (en) * | 2004-08-13 | 2005-03-23 | 山东大学 | Apparatus for rotating and drawing of crystal with damping |
| CN2791004Y (en) * | 2005-03-28 | 2006-06-28 | 荀建华 | Crystal lifting device |
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| CN102776558B (en) | 2015-08-26 |
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Application publication date: 20121114 Assignee: Shenzhen Reinvested Tianke Semiconductor Co.,Ltd. Assignor: XINJIANG TANKEBLUE SEMICONDUCTOR Co.,Ltd. Contract record no.: X2023990000685 Denomination of invention: A seed crystal rod lifting locator Granted publication date: 20150826 License type: Common License Record date: 20230725 |