CN102740963A - 用于连续基底的常压等离子处理的机器和方法 - Google Patents
用于连续基底的常压等离子处理的机器和方法 Download PDFInfo
- Publication number
- CN102740963A CN102740963A CN2011800080299A CN201180008029A CN102740963A CN 102740963 A CN102740963 A CN 102740963A CN 2011800080299 A CN2011800080299 A CN 2011800080299A CN 201180008029 A CN201180008029 A CN 201180008029A CN 102740963 A CN102740963 A CN 102740963A
- Authority
- CN
- China
- Prior art keywords
- substrate
- roller
- machine
- chamber
- feeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06B—TREATING TEXTILE MATERIALS USING LIQUIDS, GASES OR VAPOURS
- D06B19/00—Treatment of textile materials by liquids, gases or vapours, not provided for in groups D06B1/00 - D06B17/00
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
- D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
- D06M10/025—Corona discharge or low temperature plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32825—Working under atmospheric pressure or higher
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0816—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes involving moving electrodes
- B01J2219/0818—Rotating electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0824—Details relating to the shape of the electrodes
- B01J2219/0826—Details relating to the shape of the electrodes essentially linear
- B01J2219/083—Details relating to the shape of the electrodes essentially linear cylindrical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0879—Solid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
- B01J2219/0896—Cold plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
- B05D3/145—After-treatment
- B05D3/148—After-treatment affecting the surface properties of the coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/47—Generating plasma using corona discharges
- H05H1/473—Cylindrical electrodes, e.g. rotary drums
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Textile Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITBO2010A000058 | 2010-02-02 | ||
ITBO2010A000058A IT1397827B1 (it) | 2010-02-02 | 2010-02-02 | Macchina e metodo per il trattamento al plasma atmosferico di substrati continui |
PCT/IB2011/050417 WO2011095930A1 (en) | 2010-02-02 | 2011-01-31 | Machine and method for atmospheric plasma treatment of continuous substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
CN102740963A true CN102740963A (zh) | 2012-10-17 |
Family
ID=42797032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011800080299A Pending CN102740963A (zh) | 2010-02-02 | 2011-01-31 | 用于连续基底的常压等离子处理的机器和方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9321027B2 (zh) |
EP (1) | EP2531288A1 (zh) |
CN (1) | CN102740963A (zh) |
IT (1) | IT1397827B1 (zh) |
WO (1) | WO2011095930A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105734951A (zh) * | 2016-03-28 | 2016-07-06 | 北京睿昱达科技有限公司 | 一种基于辉光放电的纤维织物表面处理装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5966490B2 (ja) * | 2012-03-23 | 2016-08-10 | 株式会社リコー | 被記録媒体の表面改質装置、インクジェット式プリンタ |
ITBO20120612A1 (it) * | 2012-11-07 | 2014-05-08 | Veneto Nanotech S C P A | Procedimento per il trattamento di un substrato in fibre e macchina per attuare tale procedimento. |
DK177766B3 (da) * | 2013-03-19 | 2018-04-30 | Tresu As | Enhed og fremgangsmåde til koronabehandling |
ITBO20130339A1 (it) | 2013-06-28 | 2014-12-29 | Veneto Nanotech S C P A | Metodo di condizionamento di materiale in fibra di lana |
JP2015116811A (ja) | 2013-11-15 | 2015-06-25 | 株式会社リコー | 被処理物改質装置、印刷装置、印刷システムおよび印刷物の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001279457A (ja) * | 2000-01-24 | 2001-10-10 | Sekisui Chem Co Ltd | 常圧プラズマを用いた連続表面処理法又は連続成膜法及び連続表面処理装置又は連続成膜装置 |
CN1594713A (zh) * | 2004-04-13 | 2005-03-16 | 中国科学院等离子体物理研究所 | 用于布匹印染前处理的无水常压等离子精练方法 |
WO2009104957A1 (en) * | 2008-02-21 | 2009-08-27 | Fujifilm Manufacturing Europe B.V. | Plasma treatment apparatus and method for treatment of a substrate with atmospheric pressure glow discharge electrode configuration |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US21968A (en) * | 1858-11-02 | Sash-eastehek | ||
BE635191A (zh) * | 1962-08-16 | |||
US3674667A (en) * | 1969-07-23 | 1972-07-04 | Allis Chalmers Mfg Co | Process for increasing water repellency of cotton cloth |
US3959104A (en) * | 1974-09-30 | 1976-05-25 | Surface Activation Corporation | Electrode structure for generating electrical discharge plasma |
DE2836867A1 (de) * | 1978-08-23 | 1980-03-13 | Bp Benzin Und Petroleum Ag | Verfahren und vorrichtung zur coronabehandlung von noppenfolien |
DE3115958C2 (de) * | 1981-04-22 | 1983-12-29 | Hahne, Ernst August, 4123 Allschwill | "Verfahren zum Anfeuchten eines flexiblen bahnförmigen und mit einer durch Trocknung verfestigten Beschichtung versehenen Trägermaterials |
WO1995012697A1 (fr) * | 1993-11-03 | 1995-05-11 | Aktsionernoe Obschestvo 'tsvet' | Procede de traitement de fibres au plasma a basse temperature et dispositif prevu a cet effet |
GB0410749D0 (en) * | 2004-05-14 | 2004-06-16 | Dow Corning Ireland Ltd | Coating apparatus |
-
2010
- 2010-02-02 IT ITBO2010A000058A patent/IT1397827B1/it active
-
2011
- 2011-01-31 CN CN2011800080299A patent/CN102740963A/zh active Pending
- 2011-01-31 EP EP11708320A patent/EP2531288A1/en not_active Withdrawn
- 2011-01-31 WO PCT/IB2011/050417 patent/WO2011095930A1/en active Application Filing
- 2011-01-31 US US13/519,446 patent/US9321027B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001279457A (ja) * | 2000-01-24 | 2001-10-10 | Sekisui Chem Co Ltd | 常圧プラズマを用いた連続表面処理法又は連続成膜法及び連続表面処理装置又は連続成膜装置 |
CN1594713A (zh) * | 2004-04-13 | 2005-03-16 | 中国科学院等离子体物理研究所 | 用于布匹印染前处理的无水常压等离子精练方法 |
WO2009104957A1 (en) * | 2008-02-21 | 2009-08-27 | Fujifilm Manufacturing Europe B.V. | Plasma treatment apparatus and method for treatment of a substrate with atmospheric pressure glow discharge electrode configuration |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105734951A (zh) * | 2016-03-28 | 2016-07-06 | 北京睿昱达科技有限公司 | 一种基于辉光放电的纤维织物表面处理装置 |
CN105734951B (zh) * | 2016-03-28 | 2017-10-27 | 北京睿昱达科技有限公司 | 一种基于辉光放电的纤维织物表面处理装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2531288A1 (en) | 2012-12-12 |
IT1397827B1 (it) | 2013-02-04 |
US20120295036A1 (en) | 2012-11-22 |
WO2011095930A1 (en) | 2011-08-11 |
US9321027B2 (en) | 2016-04-26 |
ITBO20100058A1 (it) | 2011-08-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102740963A (zh) | 用于连续基底的常压等离子处理的机器和方法 | |
EP2590802B1 (en) | Method and device for atmospheric pressure plasma treatment | |
EP1623064B1 (en) | Plasma treatment apparatus and method | |
JP5240782B2 (ja) | 連続成膜装置 | |
EP2492369B1 (en) | Cvd film forming device | |
EP2976210B1 (en) | Unit and method for corona treatment | |
JP5913745B2 (ja) | 粉末プラズマ処理装置 | |
WO2012086119A1 (ja) | 巻取り式連続成膜装置 | |
US20160221328A1 (en) | Method and device for surface treatment of a three-dimensional body | |
CN102946685A (zh) | 大气压诱导空气介质阻挡放电低温等离子体发生装置 | |
US7806981B2 (en) | Method for the treatment of a web-type material in a plasma-assisted process | |
WO2016128259A1 (en) | Installation for film deposition onto and/or modification of the surface of a moving substrate | |
EP3162912A1 (en) | Film formation device for cutting tool provided with coating film, and film formation method for cutting tool provided with coating film | |
CN104822871A (zh) | 纤维基质处理方法以及用于实施该方法的机器 | |
JP2008181704A (ja) | 高密度プラズマ処理装置 | |
CN204874748U (zh) | 离子束清洗刻蚀设备 | |
CN104878392A (zh) | 离子束清洗刻蚀设备 | |
US20180016674A1 (en) | Deposition apparatus and method for manufacturing coated cutting tool | |
EP1887609B1 (en) | Equipment for the plasma treatment of one- or two-dimentional articles | |
KR101615494B1 (ko) | 다방향 유전체 장벽 방전 플라즈마 발생기 | |
JP5068264B2 (ja) | 成膜装置 | |
JP2009052098A (ja) | 成膜装置 | |
JP2011086390A (ja) | プラズマ処理装置 | |
KR20200001588A (ko) | 플라즈마를 이용한 식품 살균 장치 | |
CN108189381A (zh) | 一种电晕处理膜的装置及方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: VENETO NANOTECH S. C. P. A Free format text: FORMER OWNER: ME RO S. R. L. Effective date: 20150717 Free format text: FORMER OWNER: VENETO NANOTECH S. C. P. A Effective date: 20150717 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150717 Address after: Italy Padova Applicant after: Veneto Nanotech S. C. P. A. Address before: Italy Luca Applicant before: Me Ro S. R. L Applicant before: Veneto Nanotech S. C. P. A. |
|
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20121017 |