CN102735430A - Method and device for detecting phase delay - Google Patents
Method and device for detecting phase delay Download PDFInfo
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- CN102735430A CN102735430A CN201210204835XA CN201210204835A CN102735430A CN 102735430 A CN102735430 A CN 102735430A CN 201210204835X A CN201210204835X A CN 201210204835XA CN 201210204835 A CN201210204835 A CN 201210204835A CN 102735430 A CN102735430 A CN 102735430A
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Abstract
The invention belongs to the technical field of laser detection, and relates to a method for detecting phase delay of an optical element by using a laser weak feedback orthogonal light intensity phase difference effect. According to method, the phase delay of the element is detected by using the phase difference effect existing between two paths of light intensity signals output by a laser in an orthogonal direction under the condition with anisotropy outer cavity laser weak feedback. The method does not have special requirements on a detected sample, and according to a detection principle, the phase delay of the detected sample is amplified, so that the sensitivity is high.
Description
Technical field
The invention belongs to the laser measuring technology field, be about a kind of utilize laser a little less than feedback quadrature light intensity phasic difference effect come the method and the pick-up unit thereof of detection optical component position phase retardation.
Background technology
Bit phase delay detects the detection of the birefringence effect of generation such as the reason that is mainly used in birefringent optical element or stress.Wherein, most typical application is exactly the detection of wave plate retardation.Wave plate application quantity in optical system is very big, especially in the system relevant with polarized light, has a wide range of applications, like optoisolator, optical filter, CD optical picking-up head, laser heterodyne interferometer, ellipsometer etc.The precision of wave plate self bit phase delay can influence the result of use of total system, wants the wave plate of machining high-precision or must high precision confirms the application scenario of wave plate actual bit phase retardation, all needs the method for accurate detection wave plate.Another typical application is exactly to detect the internal stress of glass.Glass material often has unrelieved stress inevitably in process; Glass material also has unrelieved stress when combining with other materials in addition; These unrelieved stresss cause the influence of can not ignore in some applied field credit union, and therefore needing method accurately detects this type unrelieved stress.Detect unrelieved stress, also can be converted in fact and detect the bit phase delay that stress birefrin causes.
The method that is widely used in the wave plate retardation detection at present has rotation light extinction method and elliptic polarization method.There is the problem of the not enough or complicated operation of accuracy of detection in these two kinds of methods.The rotation light extinction method need add the quarter wave plate of a standard in light path, the error of this standard quarter wave plate can influence the accuracy of detection of system, and this error can't predict and eliminate through rotation light extinction method system self.The light source that the elliptic polarization method is used is wide spectrum light source, obtains the detection optical wavelength that needs through beam split, and the detection center wavelength of light error that obtains like this is bigger, detects error thereby introduce.
Summary of the invention
In sum, necessary a kind of degree of precision that has is provided, and the bit phase delay detection method and the pick-up unit thereof of easy operating.
A kind of detection method of bit phase delay; May further comprise the steps: a pick-up unit is provided; Said pick-up unit comprises laser instrument, the weak feedback exocoel of laser and data Collection & Processing System; The laser original state of polarization that said laser instrument produces is a linear polarization, and the weak feedback exocoel of said laser is used for ccontaining sample, and said data acquisition and disposal system comprise a wollaston prism; Sample is arranged at a little less than the laser in the feedback exocoel, makes the fast axle of sample corresponding consistent with o light and two optical axis directions of e light of said wollaston prism, and form an angle with the initial polarization direction of laser with slow-axis direction; With the said sample of laser radiation that laser instrument sends, after feedback, laser instrument forms light intensity signal respectively on the fast and slow axis direction of said sample, and separates through wollaston prism, and has phasic difference between the two-way light intensity signal; Receive the light intensity signal of said sample on the fast and slow axis direction respectively with data Collection & Processing System, and compare computing, obtain bit phase delay through wollaston prism output.
A kind of pick-up unit of bit phase delay; Comprise: a laser instrument, said laser instrument comprise that inner chamber concave mirror, gain tube, anti-reflection window, inner chamber flat output mirror constitute jointly, and wherein: the inner chamber concave mirror is fixed on the upper end of said gain tube; The gain tube upper end is fixed with the inner chamber concave mirror; Lower end and anti-reflection window are fixed, and anti-reflection window is fixed on the lower end of said gain tube, and the inner chamber flat output mirror is positioned at the below of said anti-reflection window and is provided with at interval with said anti-reflection window; The weak feedback exocoel of one laser, the weak feedback exocoel of said laser comprise that inner chamber flat output mirror, beam-expanding collimation lens combination, specimen holder, the weak catoptron in exocoel plane are provided with successively at interval from top to bottom; One data Collection & Processing System; Said data Collection & Processing System comprises that wollaston prism, first photodetector, second photodetector, A/D converter and computing machine constitute jointly, and wherein: wollaston prism is divided into the output light of laser instrument the component of two cross polarizations along sample fast and slow axis direction; First photodetector, second photodetector are positioned at the wollaston prism top, survey the light intensity signal on the orthogonal directions respectively and convert voltage signal to; A/D converter, the voltage signal that photodetector is exported converts digital signal to and exports to computing machine; Computing machine, its input end is connected with the output terminal of said A/D converter, and receiving digital signals compares computing.
The present invention utilizes half outside gas laser and outer surface level catoptron to constitute the laser feedback system, utilizes the bit phase delay of the phasic difference effect detection optical element of light intensity curve.The optical axis direction of wollaston prism overlaps with fast (slowly) direction of principal axis of sample, thereby the light of laser instrument output is divided into two parts.This two-way light intensity signal presence bit differs, and there is linear relationship in the bit phase delay of this phasic difference and sample.Measure the phasic difference between the light intensity signal on the pairwise orthogonal direction, promptly can obtain the bit phase delay of sample.This detection method is simple to operate, and sample is not had specific (special) requirements, and has the potentiality that minimal stress such as unrelieved stress of being applied to detects demand.
Description of drawings
Fig. 1 is the said device synoptic diagram that utilizes the weak feedback quadrature light intensity phasic difference effect detection bit phase delay of laser of the embodiment of the invention;
Fig. 2 is that the fast and slow axis direction of sample and the position between initial polarization direction of laser and the wollaston prism optical axis direction concern synoptic diagram;
Fig. 3 is the schematic diagram of the weak feedback quadrature light intensity phasic difference effect of laser;
Fig. 4 is the lab diagram of the weak feedback quadrature light intensity phasic difference effect of laser.
The main element symbol description
| |
1 |
| |
2 |
| Wollaston |
3 |
| The inner chamber |
4 |
| Gain |
5 |
| |
6 |
| The inner chamber flat output mirror | 7 |
| The inner chamber |
8 |
| The beam-expanding |
9 |
| |
10 |
| The weak catoptron in |
11 |
| The exocoel piezoelectric ceramics | 12 |
| A/ |
13 |
| |
14 |
| Inner chamber Piezoelectric |
15 |
| Exocoel Piezoelectric |
16 |
Following specific embodiment will combine above-mentioned accompanying drawing to further specify the present invention.
Embodiment
Below will be described with reference to the accompanying drawings the detection method and the pick-up unit of bit phase delay provided by the invention.
As shown in Figure 1, first embodiment of the invention provides a kind of pick-up unit and method thereof of bit phase delay, and its device comprises laser instrument, the weak feedback exocoel of laser and data Collection & Processing System.
Said laser instrument both provided detection light as light source; Conduct receives the sensor of laser feedback again, half outer (interior) cavity configuration, and its original state of polarization is a linear polarization; Single longitudinal mode, fundamental transverse mode output, laser type can be gas laser, semiconductor laser and solid state laser.
Said laser instrument is made up of inner chamber concave mirror 4, gain tube 5, anti-reflection window 6, inner chamber flat output mirror 7 and inner chamber piezoelectric ceramics 8 jointly.Said gain tube 5 stores gain medium; Said inner chamber concave mirror 4 is fixed on the upper end of said gain tube 5; Said anti-reflection window 6 is fixed on the lower end of said gain tube 5; Said inner chamber flat output mirror 7 is positioned at the below of said anti-reflection window 6, and is provided with at interval with said anti-reflection window 6; Said inner chamber piezoelectric ceramics 8 is positioned at the lower end of inner chamber flat output mirror 7, and fixedly installs with said inner chamber flat output mirror 7.Through controlling the change in voltage on the said inner chamber piezoelectric ceramics 8, said inner chamber piezoelectric ceramics 8 can promote said inner chamber flat output mirror 7 and move in the micron order scope along the laser axis direction, is used for the stabilized lasers output mode.Be appreciated that also available other fine motion elements of said inner chamber piezoelectric ceramics 8 substitute, do micron-sized moving along the laser axis direction as long as can promote said inner chamber flat output mirror 7.
The weak feedback exocoel of said laser by inner chamber flat output mirror 7, beam-expanding collimation lens combination 9, specimen holder 10, exocoel plane a little less than catoptron 11, exocoel piezoelectric ceramics 12 from top to bottom set gradually jointly and constitute.Said beam-expanding collimation lens combination 9 is made up of concavees lens and convex lens, is positioned at inner chamber piezoelectric ceramics 8 belows, and is provided with at interval with said inner chamber piezoelectric ceramics 8; Said beam-expanding collimation lens combination 9 can be carried out beam-expanding collimation with the light of laser instrument output, makes laser beam cover certain area at sample surfaces; Between two lens of said beam-expanding collimation the lens combination 9 and position between lens combination and the said built in laser cavity flat output mirror 7 can be regulated.The weak feedback exocoel of said laser is used to hold sample, and the laser of being exported by built in laser cavity flat output mirror 7 can incide sample; Under feedback effect a little less than the laser, the output intensity signal of laser instrument has phasic difference on sample fast and slow axis direction, and this phasic difference is by the bit phase delay decision of sample.
The weak catoptron 11 in exocoel plane; Be positioned at specimen holder 10 belows; And be provided with at interval with said specimen holder 10, will pass the laser-bounce of sample, preferred; The weak catoptron 11 in said exocoel plane is the integral multiple of distance between said inner chamber flat output mirror 7 and the said inner chamber concave mirror 4 with distance between the said inner chamber flat output mirror 7, thus the speckle effect of existence when weakening use semiconductor laser etc.
Exocoel piezoelectric ceramics 12, fixing with catoptron a little less than the said exocoel plane 11, and a little less than the exocoel plane catoptron 11 lower ends; Through the voltage of control loaded on said exocoel piezoelectric ceramics 12; Said exocoel piezoelectric ceramics 12 can promote the weak catoptron 11 in said exocoel plane along the to-and-fro movement of laser axis direction, makes to produce the continuous feedback waveform signal that can be used for the detecting position facies relationship.
Said data Collection & Processing System is in order to receiving the light intensity signal on the fast and slow axis direction, and compares computing, obtains bit phase delay; The output control signal is regulated feedback external cavity length a little less than built in laser cavity length and the laser.Among the present invention, said " on ", D score all is the basis with structure shown in Figure 1, direction and position relation.
Said data Collection & Processing System comprises that wollaston prism 3, first photodetector 1, second photodetector 2, A/D converter 13, inner chamber Piezoelectric Ceramic module 15, exocoel Piezoelectric Ceramic module 16 and computing machine 14 constitute jointly, wherein:
Wollaston prism 3; Be positioned at the top of said inner chamber concave mirror 4; Said wollaston prism 3 is its plane of incidence near the surface of said inner chamber concave mirror 4; And will be divided into the component of two cross polarizations from the laser of plane of incidence incident along sample fast and slow axis direction, its particular location can be selected according to actual needs, as long as guarantee that laser can be from plane of incidence incident;
A/D converter 13 converts the voltage signal of first photodetector 1,2 outputs of second photodetector digital signal to and exports to computing machine 14;
Inner chamber Piezoelectric Ceramic module 15, the control signal of receiving computer 14 outputs, stretching of control inner chamber piezoelectric ceramics 8 moved thereby drive inner chamber flat output mirror 7 trace on the laser axis direction, with the stabilized lasers output mode;
Exocoel Piezoelectric Ceramic module 16, the control signal of receiving computer 14 outputs is controlled the flexible of exocoel piezoelectric ceramics 12, thereby drives the weak catoptron 11 in exocoel plane along the to-and-fro movement of laser axis.
In the said computing machine 14, its input end is connected with the output terminal of said A/D converter 13, and receiving digital signals compares computing; Its output terminal is connected with the input end of said inner chamber Piezoelectric Ceramic module 15 and exocoel Piezoelectric Ceramic module 16, the motion of control piezoelectric ceramics.Be appreciated that said data Collection & Processing System is not limited to the above element of lifting, can change according to experimental situation and specific requirement.
Be appreciated that; The concrete distance of said each element and position relation can be selected as required; Can shine sample surfaces as long as guarantee the laser that laser instrument sends; And in the catoptron 11 reflected back laser cavitys, wollaston prism 3 along separating on the sample fast and slow axis direction, can be got final product laser output by first photodetector 1 and 2 receptions of second photodetector a little less than the exocoel plane.Preferably, said inner chamber concave mirror 4, gain tube 5, anti-reflection window 6, inner chamber flat output mirror 7, inner chamber piezoelectric ceramics 8, beam-expanding collimation lens combination 9, specimen holder 10, the weak catoptron 11 in exocoel plane, exocoel piezoelectric ceramics 12 are all along the coaxial setting of the axis direction of laser.
The present invention further provides a kind of detection method of bit phase delay, may further comprise the steps:
At first; One pick-up unit is provided, and said pick-up unit comprises laser instrument, the weak feedback exocoel of laser and data Collection & Processing System, and said laser instrument is in order to produce laser; And the original state of polarization of laser is a linear polarization; The weak feedback exocoel of said laser comprises the weak catoptron in an exocoel plane, and reflector laser produces laser feedback, and said data acquisition and disposal system are in order to gather and deal with data; Said data acquisition and disposal system comprise a wollaston prism, are divided into two bundles with the laser that will incide wollaston prism along its o light and e light optical axis direction;
Secondly, sample is arranged at a little less than the laser in the feedback exocoel, makes the fast axle of sample corresponding consistent with o light and two optical axis directions of e light of said wollaston prism with slow-axis direction;
Once more, with the said sample of laser radiation that laser instrument sends, after feedback, laser instrument forms light intensity signal respectively on the fast and slow axis direction of said sample, and through wollaston prism output, and have phasic difference between the two-way light intensity signal;
At last, receive the light intensity signal on the said sample fast and slow axis direction of wollaston prism output respectively with data Collection & Processing System, and compare computing, obtain bit phase delay.
Concrete, the method for utilizing the weak feedback quadrature light intensity phasic difference effect detection bit phase delay of laser of the present invention can comprise the steps:
The 1st step; The initial output state of laser is set at single longitudinal mode, linearly polarized light; Laser is from the plane of incidence incident of wollaston prism 3; Perpendicular to the rotation of laser axis direction, make the initial polarization direction of one of its two optical axis directions and laser parallel wollaston prism 3 planes of incidence, this moment, wollaston prism 3 back emergent lights had only a luminous point;
In the 2nd step, the plane of incidence of wollaston prism 3 perpendicular to the rotation of laser axis direction, there are two luminous points at wollaston prism 3 back emergent lights; Preferably; The plane of incidence of wollaston prism 3 is rotated 45 ° perpendicular to the laser axis, and the initial polarization direction of laser this moment all becomes 45 ° of angles with two optical axis directions of wollaston prism 3, and wollaston prism 3 back emergent lights have two luminous points; The light field direction of vibration that this two luminous point is corresponding is an orthogonality relation, so claim the quadrature light intensity;
In the 3rd step, first photodetector 1, second photodetector 2 are aligned aforementioned two luminous points respectively;
The 4th step; Sample is put on the specimen holder 10 of said weak feedback exocoel; Perpendicular to laser axis direction rotary sample seat 10; Make fast (or slow) direction of principal axis of sample parallel with the initial polarization direction of laser, the light intensity signal coordination that receives of first photodetector 1 and second photodetector 2 mutually at this moment;
The 5th step, rotate the specimen holder 10 that carries sample, make the fast and slow axis direction of sample corresponding consistent, and form an angle with the initial polarization direction of laser with o light and two optical axis directions of e light of wollaston prism 3;
The corresponded manner that is appreciated that said fast and slow axis direction and said o light and two optical axises of e light is not limit, and can be the corresponding o optical axis of fast axle, and the corresponded manner of the corresponding e optical axis of slow axis also can be the corresponding o optical axis of slow axis, the corresponded manner of the corresponding e optical axis of fast axle.Said wollaston prism 3 gets final product with the angle that the initial polarization direction of laser forms, and its angular dimension is not limit.Simultaneously, the plane of incidence of said wollaston prism 3 is not limit perpendicular to the angle of laser axis direction rotation, as long as emergent light forms two luminous points.In the present embodiment; Preferably; Sample is rotated 45 °, and this moment, the fast and slow axis direction of sample all became 45 ° of angles with the initial polarization direction of laser, and two components of laser output on sample fast and slow axis direction are received respectively by first photodetector 1 and second photodetector 2; Occur phasic difference Δ φ between two light intensity signals, have following relation between the bit phase delay δ of this phasic difference Δ φ and sample:
（*）
θ in the formula
cCan be regarded as the detection compensation rate, and can obtain through the examination criteria wave plate.(*) can find out from formula, and the phasic difference between the two-way quadrature light intensity signal is 2 times of sample bit phase delay, so resolution is improved.
The 6th step, gather light intensity signal and compare calculating by A/D converter 13 and computing machine 14, obtain the phasic difference Δ φ of two light intensity signals, and then calculate the bit phase delay δ of sample:
In the above-mentioned steps process; Computing machine 14 is controlled voltages through exocoel Piezoelectric Ceramic module 16 to 12 outputs of exocoel piezoelectric ceramics; Thereby drive the weak catoptron 11 in exocoel plane along the to-and-fro movement of laser axis direction; And through inner chamber Piezoelectric Ceramic module 15 control inner chamber piezoelectric ceramics 8, stabilized lasers output state.Preferably; Said catoptron 4, gain tube 5, anti-reflection window 6, inner chamber flat output mirror 7, inner chamber piezoelectric ceramics 8, beam-expanding collimation lens combination, specimen holder, the weak catoptron in exocoel plane, the coaxial setting of exocoel piezoelectric ceramics, thus the degree of accuracy of testing result can be improved.
After being illustrated in figure 2 as above-mentioned the 5th step of completion, the fast and slow axis direction of sample and the optical axis direction of wollaston prism (o axle and e axle), and the initial polarization direction E of laser
iThe position concern synoptic diagram, first photodetector and second photodetector receive the laser output component E on sample fast and slow axis direction respectively
sAnd E
f
Be illustrated in figure 3 as the schematic diagram of the weak feedback quadrature light intensity phasic difference effect of laser, from figure, can see that presence bit differs Δ φ between the two-way light intensity signal, this phasic difference is by the bit phase delay decision of sample;
Be illustrated in figure 4 as the lab diagram of the weak feedback quadrature light intensity phasic difference effect of laser; From figure, can see and exist tangible phasic difference between the two-way light intensity signal; This phasic difference changes with the difference of wave plate retardation; And with the difference of exocoel piezoelectric ceramics direction of motion, the phase relation between the two-way light intensity signal is exchanged.
The weak feedback of laser according to the invention belongs to a kind of of laser feedback phenomenon.Laser feedback (laser feedback) is called laser self-mixing interference (self-mixing interference) or backscattering modulation (back-scattering modulation) again; The output beam that is meant laser instrument is returned in the laser cavity by external mirror (or object) reflection (or scattering); With light field effect in the chamber, thereby cause the phenomenon that the laser instrument output light field changes.
Concrete, as a specific embodiment of this pick-up unit, laser instrument adopts half external cavity helium neon laser, the reflectivity R of its inner chamber concave mirror and inner chamber flat output mirror
1And R
2Be respectively 99.6% and 99%, the distance between them, promptly the laser inner chamber is long is L=180mm; Be filled with the He-Ne mixed gas in the gain tube, the inflation ratio is He
3: Ne
20: Ne
22=9:0.5:0.5; Anti-reflection window is fixed on an end of gain tube; The inner chamber piezoelectric ceramics is fixed on the above-mentioned inner chamber flat output mirror, and under the input voltage effect, it can promote the inner chamber flat output mirror and move along the laser axis direction, makes laser instrument stablize output state; The reflectivity R of the weak catoptron in exocoel plane
3Be 4%; The exocoel piezoelectric ceramics is fixed on the weak catoptron in said exocoel plane, and catoptron is along the to-and-fro movement of laser axis direction a little less than can promoting said exocoel plane under the driving voltage effect; Tested waveplate material is quartzy, and diameter 11mm, wave plate are placed on the specimen holder, and specimen holder can rotate thereby drive wave plate perpendicular to the rotation of laser axis direction, and there is light hole at the specimen holder center, and laser passes from the hole during detection.
In addition, those skilled in the art also can do other and change in spirit of the present invention, and these all should be included in the present invention's scope required for protection according to the variation that the present invention's spirit is done certainly.
Claims (10)
1. the detection method of a bit phase delay may further comprise the steps:
One pick-up unit is provided; Said pick-up unit comprises laser instrument, the weak feedback exocoel of laser and data Collection & Processing System; The laser original state of polarization that said laser instrument produces is a linear polarization; The weak feedback exocoel of said laser comprises the weak catoptron in an exocoel plane, and the weak catoptron in said exocoel plane is arranged at the below of said laser instrument, and said data acquisition and disposal system comprise that a wollaston prism is arranged at the top of said laser instrument;
Sample is arranged at a little less than the laser in the feedback exocoel, makes the fast axle of sample corresponding consistent with o light and two optical axis directions of e light of said wollaston prism, and form an angle with the initial polarization direction of laser with slow-axis direction;
The said sample of laser radiation that sends with laser instrument; After catoptron feedback a little less than the exocoel plane; Laser instrument forms light intensity signal respectively on the fast and slow axis direction of said sample, and through wollaston prism output, between the two-way light intensity signal, forms phasic difference;
Receive the light intensity signal of said sample on the fast and slow axis direction respectively with data Collection & Processing System, and compare computing, obtain bit phase delay through wollaston prism output.
2. the detection method of bit phase delay according to claim 1 is characterized in that, said laser instrument comprises that inner chamber concave mirror, gain tube, anti-reflection window, inner chamber flat output mirror and inner chamber piezoelectric ceramics constitute jointly, wherein:
The inner chamber concave mirror is fixed on the upper end of said gain tube;
The gain tube upper end is fixed with the inner chamber concave mirror, and lower end and anti-reflection window are fixed;
Anti-reflection window is fixed on the lower end of said gain tube;
The inner chamber flat output mirror is positioned at the below of said anti-reflection window, and is provided with at interval with said anti-reflection window;
Inner chamber piezoelectric ceramics and said inner chamber flat output mirror are fixed, and in inner chamber flat output mirror lower end.
3. the detection method of bit phase delay according to claim 2 is characterized in that, the weak feedback exocoel of said laser comprises that inner chamber flat output mirror, beam-expanding collimation lens combination, specimen holder, the weak catoptron in exocoel plane, exocoel piezoelectric ceramics constitute jointly, wherein:
The beam-expanding collimation lens combination is positioned at inner chamber piezoelectric ceramics below, and is provided with at interval with said inner chamber piezoelectric ceramics;
Specimen holder is positioned at beam-expanding collimation lens combination below, and is provided with at interval with said beam-expanding collimation lens combination;
The weak catoptron in exocoel plane is positioned at the specimen holder below, and is provided with at interval with said beam-expanding collimation lens combination;
The weak catoptron in exocoel piezoelectric ceramics and said exocoel plane is fixed, and a little less than the exocoel plane catoptron lower end.
4. the detection method of bit phase delay according to claim 3; It is characterized in that; Said data Collection & Processing System comprises that wollaston prism, first photodetector, second photodetector, A/D converter, inner chamber Piezoelectric Ceramic module, exocoel Piezoelectric Ceramic module and computing machine constitute jointly, wherein:
Wollaston prism is divided into the output light of laser instrument the component of two cross polarizations along sample fast and slow axis direction;
First photodetector, second photodetector are positioned at the wollaston prism top, survey the light intensity signal on the orthogonal directions respectively and convert voltage signal to;
A/D converter, the voltage signal that photodetector is exported converts digital signal to and exports to computing machine;
Inner chamber Piezoelectric Ceramic module, the control signal of receiving computer output, stretching of control inner chamber piezoelectric ceramics moved thereby drive inner chamber flat output mirror trace on the laser axis direction;
Exocoel Piezoelectric Ceramic module, the control signal of receiving computer output is controlled the flexible of exocoel piezoelectric ceramics, thereby drives the weak catoptron in exocoel plane along the to-and-fro movement of laser axis;
Computing machine, its input end is connected with the output terminal of said A/D converter, and receiving digital signals compares computing; Its output terminal is connected with the input end of said inner chamber Piezoelectric Ceramic module and exocoel Piezoelectric Ceramic module, the motion of control inner chamber piezoelectric ceramics and exocoel piezoelectric ceramics.
5. the detection method of bit phase delay according to claim 4 is characterized in that, further comprises the steps:
In the 1st step, perpendicular to the rotation of laser axis, one of two optical axis directions of o light and e light that make wollaston prism are parallel with the initial polarization direction of laser with the wollaston prism plane of incidence, and emergent light has only a luminous point behind the wollaston prism at this moment;
The 2nd step; The wollaston prism plane of incidence is rotated 45 ° perpendicular to the laser axis; Make the initial polarization direction of laser all become 45 ° of angles with two optical axis directions of wollaston prism; Emergent light has two luminous points behind the wollaston prism at this moment, and the light field direction of vibration that these two luminous points are corresponding is an orthogonality relation, forms the quadrature light intensity;
In the 3rd step, first photodetector, second photodetector are aligned said two luminous points respectively;
The 4th step; Sample is arranged at the specimen holder of feedback exocoel a little less than the said laser; And with specimen holder perpendicular to the rotation of its plane of incidence normal direction; Make fast (or slow) direction of principal axis of sample parallel with the initial polarization direction of laser, the light intensity signal coordination that receives of first photodetector and second photodetector mutually at this moment;
The 5th step; The laser entrance face of sample is rotated 45 ° perpendicular to plane of incidence normal direction direction; Make the fast and slow axis direction of sample all become 45 ° of angles with the initial polarization direction of laser; And the fast and slow axis direction of sample is consistent with two optical axis directions of wollaston prism; Two components of laser output are received respectively by first photodetector and second photodetector on sample fast and slow axis direction, occur phasic difference Δ φ between the strong signal of said two components, have following relation between the bit phase delay δ of this phasic difference Δ φ and sample:
θ in the formula
cCan be regarded as the detection compensation rate, and can obtain through the examination criteria wave plate;
In the 6th step, by A/D converter and computer acquisition light intensity signal and compare calculating, obtain the phasic difference Δ φ of two light intensity signals, and then calculate the bit phase delay δ of sample:
6. the detection method of bit phase delay according to claim 5; It is characterized in that; In the above-mentioned steps process, computing machine is controlled voltage through exocoel Piezoelectric Ceramic module to the output of exocoel piezoelectric ceramics, thereby drives the weak catoptron in exocoel plane along the to-and-fro movement of laser axis direction; And through inner chamber Piezoelectric Ceramic module controls inner chamber piezoelectric ceramics, stabilized lasers output state.
7. the detection method of bit phase delay according to claim 2 is characterized in that, the distance between the weak catoptron in said inner chamber flat output mirror and exocoel plane is the integral multiple of distance between said inner chamber flat output mirror and the said inner chamber concave mirror.
8. the detection method of bit phase delay according to claim 2; It is characterized in that said inner chamber concave mirror, gain tube, anti-reflection window, inner chamber flat output mirror, inner chamber piezoelectric ceramics, beam-expanding collimation lens combination, specimen holder, the weak catoptron in exocoel plane, the coaxial setting of exocoel piezoelectric ceramics.
9. the pick-up unit of a bit phase delay comprises:
One laser instrument; Said laser instrument comprises that inner chamber concave mirror, gain tube, anti-reflection window, inner chamber flat output mirror constitute jointly; Wherein: the inner chamber concave mirror is fixed on the upper end of said gain tube, and the gain tube upper end is fixed with the inner chamber concave mirror, and lower end and anti-reflection window are fixed; Anti-reflection window is fixed on the lower end of said gain tube, and the inner chamber flat output mirror is positioned at the below of said anti-reflection window and is provided with at interval with said anti-reflection window;
The weak feedback exocoel of one laser, the weak feedback exocoel of said laser comprise that inner chamber flat output mirror, beam-expanding collimation lens combination, specimen holder, the weak catoptron in exocoel plane are provided with successively at interval from top to bottom;
One data Collection & Processing System, said data Collection & Processing System comprise that wollaston prism, first photodetector, second photodetector, A/D converter and computing machine constitute jointly, wherein:
Wollaston prism is divided into the output light of laser instrument the component of two cross polarizations along sample fast and slow axis direction;
First photodetector, second photodetector are positioned at the wollaston prism top, survey the light intensity signal on the orthogonal directions respectively and convert voltage signal to;
A/D converter, the voltage signal that photodetector is exported converts digital signal to and exports to computing machine;
Computing machine, its input end is connected with the output terminal of said A/D converter, and receiving digital signals compares computing.
10. the pick-up unit of bit phase delay as claimed in claim 9 is characterized in that, further comprises:
One inner chamber Piezoelectric Ceramic module, the control signal of receiving computer output, stretching of control inner chamber piezoelectric ceramics carried out micron-sized moving thereby drive the inner chamber flat output mirror on the laser axis direction;
One exocoel Piezoelectric Ceramic module, the control signal of receiving computer output is controlled the flexible of exocoel piezoelectric ceramics, thereby drives the weak catoptron in exocoel plane along the to-and-fro movement of laser axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210204835.XA CN102735430B (en) | 2012-06-20 | 2012-06-20 | Method and device for detecting phase delay |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210204835.XA CN102735430B (en) | 2012-06-20 | 2012-06-20 | Method and device for detecting phase delay |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102735430A true CN102735430A (en) | 2012-10-17 |
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| CN103018747A (en) * | 2012-11-26 | 2013-04-03 | 中国人民解放军第四军医大学 | Laser self-mixing distance measuring system based on uncollimated feedback external cavity |
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| CN105043612A (en) * | 2015-07-13 | 2015-11-11 | 清华大学 | Stress measuring system of optical materials |
| CN103337784B (en) * | 2013-06-25 | 2016-06-15 | 清华大学 | A kind of laser polarization state control method based on polarized light feedback |
| CN109564133A (en) * | 2016-09-02 | 2019-04-02 | 株式会社Lg化学 | The test device of optical characteristics and the test method of optical characteristics |
| CN109813227A (en) * | 2017-11-20 | 2019-05-28 | 中国人民解放军第四军医大学 | Multiple feedback displacement measuring device and measuring method are tuned based on laser cavity |
| CN114174903A (en) * | 2019-07-26 | 2022-03-11 | 奇跃公司 | Panel delay measurement |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103018747A (en) * | 2012-11-26 | 2013-04-03 | 中国人民解放军第四军医大学 | Laser self-mixing distance measuring system based on uncollimated feedback external cavity |
| CN103185550A (en) * | 2013-03-13 | 2013-07-03 | 清华大学 | Rotation angle measurement method |
| CN103185550B (en) * | 2013-03-13 | 2015-08-12 | 清华大学 | The measuring method of rotational angle |
| CN103337784B (en) * | 2013-06-25 | 2016-06-15 | 清华大学 | A kind of laser polarization state control method based on polarized light feedback |
| CN104571141A (en) * | 2014-11-26 | 2015-04-29 | 中国人民解放军第二炮兵装备研究院第三研究所 | Object perpendicularity adjustment device and method based on optical feedback effect |
| CN105043612A (en) * | 2015-07-13 | 2015-11-11 | 清华大学 | Stress measuring system of optical materials |
| CN109564133A (en) * | 2016-09-02 | 2019-04-02 | 株式会社Lg化学 | The test device of optical characteristics and the test method of optical characteristics |
| CN109564133B (en) * | 2016-09-02 | 2020-10-27 | 株式会社Lg化学 | Optical characteristic testing device and optical characteristic testing method |
| CN109813227A (en) * | 2017-11-20 | 2019-05-28 | 中国人民解放军第四军医大学 | Multiple feedback displacement measuring device and measuring method are tuned based on laser cavity |
| CN109813227B (en) * | 2017-11-20 | 2021-01-05 | 中国人民解放军第四军医大学 | Laser cavity tuning-based multiple feedback displacement measuring device and measuring method |
| CN114174903A (en) * | 2019-07-26 | 2022-03-11 | 奇跃公司 | Panel delay measurement |
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