CN102730719A - Industrial ammonia continuous purification apparatus and technology - Google Patents

Industrial ammonia continuous purification apparatus and technology Download PDF

Info

Publication number
CN102730719A
CN102730719A CN2012102232837A CN201210223283A CN102730719A CN 102730719 A CN102730719 A CN 102730719A CN 2012102232837 A CN2012102232837 A CN 2012102232837A CN 201210223283 A CN201210223283 A CN 201210223283A CN 102730719 A CN102730719 A CN 102730719A
Authority
CN
China
Prior art keywords
tower
distillation
strainer
hot water
ammonia
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012102232837A
Other languages
Chinese (zh)
Other versions
CN102730719B (en
Inventor
赵毅
窦明洪
计燕秋
张琳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dalian Kelide Semiconductor Materials Co.,Ltd.
Original Assignee
Dalian Free Trade Zone Credit Chemical Technology Development Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dalian Free Trade Zone Credit Chemical Technology Development Co Ltd filed Critical Dalian Free Trade Zone Credit Chemical Technology Development Co Ltd
Priority to CN201210223283.7A priority Critical patent/CN102730719B/en
Publication of CN102730719A publication Critical patent/CN102730719A/en
Application granted granted Critical
Publication of CN102730719B publication Critical patent/CN102730719B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Abstract

The invention relates to an industrial ammonia continuous purification apparatus and a technology employing the apparatus. The invention belongs to the field of chemical engineering. The invention relates to a purification technology with which industrial liquid ammonia is adopted as a raw material for preparing high-purity ammonia required by electronic industries. A raw material tank is connected to a liquid ammonia pump through a pipeline, and is then connected to a filter through the ammonia pump. A distillation tower is then connected. A hot water heating kettle is arranged on the distillation tower. A water cooling device is arranged on the top of the distillation tower. Through the water cooling device, another filter is connected, and a multi-stage absorbing device is connected. A third filter and a flow meter are respectively connected to the top of the multi-stage absorbing device. The other end of the flow meter is directly connected to a rectification tower. A refrigerating fluid condenser is arranged on the top of the rectification tower. The other end of the rectification tower is connected to a hot water heating kettle. A product storage tank is connected at last. According to the invention, a technology of one-tower rectification, multi-stage absorption, and re-rectification is adopted. With the technology, continuous stable operation is realized, and an impurity removal rate is high, such that the product quality is stable. The product purity reaches 99.99999%.

Description

A kind of continuous purifying industrial ammonia device and technology
Technical fieldThe present invention relates to a kind of continuous purifying industrial ammonia device and technology, belong to chemical field, relating to industrial liquefied ammonia is raw material, the purifying technique of the high-purity ammon that the preparation electronic industry is required.
Background technologyIn production process of semiconductor, high-purity ammon is used for compound semiconductor, FPD, solar cell manufacturing and large-scale integrated circuit.
Along with the fast development of microelectronic industry, qualitative leap will take place in ULSI (VLSI) and photodiode (LED) manufacturing technology.Therefore, to high-purity ammon purity require increasingly high.In recent years, the development of China's high-purity ammon has obtained bigger progress, and purity is near foreign level.Be accompanied by development of semiconductor, it will be inevitable selecting practical high-purity ammon.
At present, the technology of the purification ammonia technologies that adopt a tower rectifying, multistage absorption more, the rectifying that has still is step, and this technical process shortcoming is that technological parameter fluctuation is bigger, influences quality product, suddenly waits to improve.
Summary of the inventionThe present invention is in order to remedy above-mentioned technological deficiency, a kind of continuous purifying industrial ammonia device and technology to be provided, this invention employing one tower rectifying, multistage absorption, rectifying again; Realized continuous quiet run; Removal of impurity is high, thereby makes constant product quality, and purity is up to 99.99999%.
To achieve these goals, technical scheme of the present invention is following:
A kind of continuous purifying industrial ammonia device comprises head tank, strainer, distillation tower, watercooler, multistage adsorber, rectifying tower, refrigerating fulid condensing surface, product stock jar, ammonia pump, hot water heating kettle and under meter; Head tank connects ammonia pump through pipeline, links to each other with strainer through ammonia pump, connects distillation tower then; On distillation tower, be provided with the hot water heating kettle, be provided with watercooler, through watercooler at the distillation tower top; Connect strainer once more, connect multistage adsorber then, connect strainer and under meter respectively on multistage adsorber top; The under meter the other end directly connects rectifying tower, and the rectifying tower top is provided with the refrigerating fulid condensing surface, simultaneously; Connect the hot water heating kettle at the rectifying tower the other end, connect the product stock jar at last.
Its technical process is following:
In incoming stock jar of the raw material; Remove oil and mechanical impurity with ammonia pump through strainer, strainer, enters in the distillation tower after the under meter metering with 40 ~ 50kg/h; Vaporization of hot water heating kettle and the condensation of overhead water water cooler at the bottom of tower; Distill, heat with 38 ~ 45 ℃ of hot water distillation tower 3 bottoms, and cat head is with 20 ~ 30 ℃ of water coolings.Heavy constituent impurity after the distillation is got rid of at the bottom of being transported to tower, and tower bottom pressure is controlled at 1 ~ 1.1MPa, and tower top pressure is controlled at about 0.9MPa.Gas phase is filtered through strainer, gets into multistage adsorber and removes wherein water and carbonic acid gas, and outlet NH3 pressure is 0.5MPa; Measure through under meter; Enter into rectifying in the rectifying tower then, fill the θ ring packing in the tower, constitute precise distillation by hot water heating kettle at the bottom of cat head freezer condenser and the tower; Cat head makes it liquefaction with-5 ~-10 ℃ of cryogenic condensation liquid cold gas NH3, heats with 15 ~ 20 ℃ of water at the bottom of the tower.Behind precise distillation, be condensed into liquefied ammonia, discharge high-purity fluid NH3 product at the bottom of the tower, can directly dash dress 40L, 200L, 900L steel cylinder, also can be filled into product storage tank 3 (20M3).
Beneficial effect of the present invention is: adopt a tower rectifying, multistage absorption, the technology of rectifying again, realized continuous quiet run, removal of impurity is high, thereby makes constant product quality, and purity is up to 99.99999%.
Description of drawings
Fig. 1 is the structural representation of continuous purifying industrial ammonia device.
Among the figure, 1, head tank, 2, strainer one, 3, distillation tower 4, watercooler; 5, multistage adsorber, 6, rectifying tower, 7, the refrigerating fulid condensing surface, 8, the product stock jar; 9, ammonia pump, 10, hot water heating kettle one, 11, under meter one, 12, strainer two; 13, strainer three, 14, hot water heating kettle two, 15, under meter two.
Embodiment
Below in conjunction with accompanying drawing and specific examples the present invention is elaborated:
Among the figure, comprise head tank 1, strainer 2, distillation tower 3, watercooler 4, multistage adsorber 5, rectifying tower 6, refrigerating fulid condensing surface 7, product stock jar 8, ammonia pump 9, hot water heating kettle 10 and under meter 11; Head tank 1 connects ammonia pump 9 through pipeline, links to each other with strainer 1 through ammonia pump 9, connects distillation tower 3 then; On distillation tower 3, be provided with hot water heating kettle 10, be provided with watercooler 4, through watercooler 4 at distillation tower 3 tops; Connect strainer 2 12 once more, connect multistage adsorber 8 then, connect strainer 3 13 and under meter 15 respectively on multistage adsorber 8 tops; Under meter 15 the other ends directly connect rectifying tower 6, and rectifying tower 6 tops are provided with refrigerating fulid condensing surface 7, simultaneously; Connect hot water heating kettle 2 14 at rectifying tower 6 the other ends, connect product stock jar 8 at last.
In incoming stock jar 1 of the raw material; Remove oil and mechanical impurity with ammonia pump 9 through strainer 1, strainer, enters in the distillation tower 3 after under meter one 11 meterings with 40 ~ 50kg/h; Hot water heating kettle one 10 vaporizations and 4 condensations of overhead water water cooler at the bottom of tower; Distill, heat with 38 ~ 45 ℃ of hot water distillation tower 3 bottoms, and cat head is with 20 ~ 30 ℃ of water coolings.Heavy constituent impurity after the distillation is got rid of at the bottom of being transported to tower, and tower bottom pressure is controlled at 1 ~ 1.1MPa, and tower top pressure is controlled at about 0.9MPa.Gas phase is filtered through strainer 2 12, gets into multistage adsorber 5 and removes wherein water and carbonic acid gas, and outlet NH3 pressure is 0.5MPa; Through under meter 2 15 meterings; Enter into rectifying in the rectifying tower 6 then, fill the θ ring packing in the tower, constitute precise distillation by cat head freezer condenser 7 and hot water heating kettle 2 14 at the bottom of the tower; Cat head makes it liquefaction with-5 ~-10 ℃ of cryogenic condensation liquid cold gas NH3, heats with 15 ~ 20 ℃ of water at the bottom of the tower.Behind precise distillation, be condensed into liquefied ammonia, discharge high-purity fluid NH3 product at the bottom of the tower, can directly dash dress 40L, 200L, 900L steel cylinder, also can be filled into product storage tank 8 (20M3).
In order to confirm its liquefied ammonia purification degree, the present invention carries out data declaration through specific embodiment:
Raw materials ammonia concentration is 99.5% industrial ammonia, and can obtain liquefied ammonia purity after adopting above-mentioned technology to purify is 99.99999%, and foreign matter content contrasts as follows:
Figure 2012102232837100002DEST_PATH_IMAGE001
The workshop can obtain the high-purity ammoniacal liquor NH of 32kg with 40kg raw materials ammonia per hour 3Product is an example, continuous production, and product data are following:
Figure 2012102232837100002DEST_PATH_IMAGE002

Claims (2)

1. continuous purifying industrial ammonia device and technology is characterized in that comprising head tank, strainer, distillation tower, watercooler, multistage adsorber, rectifying tower, refrigerating fulid condensing surface, product stock jar, ammonia pump, hot water heating kettle and under meter; Head tank connects ammonia pump through pipeline, links to each other with strainer through ammonia pump, connects distillation tower then; On distillation tower, be provided with the hot water heating kettle, be provided with watercooler, through watercooler at the distillation tower top; Connect strainer once more, connect multistage adsorber then, connect strainer and under meter respectively on multistage adsorber top; The under meter the other end directly connects rectifying tower, and the rectifying tower top is provided with the refrigerating fulid condensing surface, simultaneously; Connect the hot water heating kettle at the rectifying tower the other end, connect the product stock jar at last.
2. a kind of continuous purifying industrial ammonia device according to claim 1 and technology is characterized in that removing oil and mechanical impurity with ammonia pump through strainer in the incoming stock jar of raw material; Strainer with 40 ~ 50kg/h after under meter metering; Enter in the distillation tower, vaporization of hot water heating kettle and the condensation of overhead water water cooler are distilled at the bottom of tower; Heat with 38 ~ 45 ℃ of hot water distillation tower 3 bottoms, and cat head is with 20 ~ 30 ℃ of water coolings; Heavy constituent impurity after the distillation is got rid of at the bottom of being transported to tower, and tower bottom pressure is controlled at 1 ~ 1.1MPa, and tower top pressure is controlled at about 0.9MPa; Gas phase is filtered through strainer, gets into multistage adsorber and removes wherein water and carbonic acid gas, and outlet NH3 pressure is 0.5MPa; Measure through under meter; Enter into rectifying in the rectifying tower then, fill the θ ring packing in the tower, constitute precise distillation by hot water heating kettle at the bottom of cat head freezer condenser and the tower; Cat head makes it liquefaction with-5 ~-10 ℃ of cryogenic condensation liquid cold gas NH3, heats with 15 ~ 20 ℃ of water at the bottom of the tower; Behind precise distillation, be condensed into liquefied ammonia, discharge high-purity fluid NH3 product at the bottom of the tower, can directly collide 40L, 200L, 900L steel cylinder, also can be filled into product storage tank 3 (20M 3).
CN201210223283.7A 2012-07-02 2012-07-02 Industrial ammonia continuous purification apparatus and technology Active CN102730719B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210223283.7A CN102730719B (en) 2012-07-02 2012-07-02 Industrial ammonia continuous purification apparatus and technology

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210223283.7A CN102730719B (en) 2012-07-02 2012-07-02 Industrial ammonia continuous purification apparatus and technology

Publications (2)

Publication Number Publication Date
CN102730719A true CN102730719A (en) 2012-10-17
CN102730719B CN102730719B (en) 2014-02-26

Family

ID=46987125

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210223283.7A Active CN102730719B (en) 2012-07-02 2012-07-02 Industrial ammonia continuous purification apparatus and technology

Country Status (1)

Country Link
CN (1) CN102730719B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103073026A (en) * 2013-02-07 2013-05-01 周礼誉 Ammonia gas recovery system
CN106495183A (en) * 2016-11-07 2017-03-15 广东华特气体股份有限公司 A kind of purification process of ammonia
WO2018090460A1 (en) * 2016-11-17 2018-05-24 天津大学 Re-refining process and system for use with unqualified liquid ammonia in oil refining waste water production
CN112299445A (en) * 2020-11-20 2021-02-02 苏州金宏气体股份有限公司 Method for preparing ultra-pure ammonia by filler rectification

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202030539U (en) * 2011-03-15 2011-11-09 苏州金宏气体股份有限公司 Device for producing 7N electronic grade hyperpure ammonia through rectification separation
CN102249259A (en) * 2010-05-19 2011-11-23 上海普锐克索特种气体有限公司 Purification process of high-purity ammonia
CN102464341A (en) * 2010-11-02 2012-05-23 住友精化株式会社 System for purifying ammonia
CN202705056U (en) * 2012-07-02 2013-01-30 大连保税区科利德化工科技开发有限公司 Device for continuously purifying industrial ammonia

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102249259A (en) * 2010-05-19 2011-11-23 上海普锐克索特种气体有限公司 Purification process of high-purity ammonia
CN102464341A (en) * 2010-11-02 2012-05-23 住友精化株式会社 System for purifying ammonia
CN202030539U (en) * 2011-03-15 2011-11-09 苏州金宏气体股份有限公司 Device for producing 7N electronic grade hyperpure ammonia through rectification separation
CN202705056U (en) * 2012-07-02 2013-01-30 大连保税区科利德化工科技开发有限公司 Device for continuously purifying industrial ammonia

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103073026A (en) * 2013-02-07 2013-05-01 周礼誉 Ammonia gas recovery system
CN103073026B (en) * 2013-02-07 2015-07-01 上海兄弟微电子技术有限公司 Ammonia gas recovery system
CN106495183A (en) * 2016-11-07 2017-03-15 广东华特气体股份有限公司 A kind of purification process of ammonia
CN106495183B (en) * 2016-11-07 2018-12-18 广东华特气体股份有限公司 A kind of purification process of ammonia
WO2018090460A1 (en) * 2016-11-17 2018-05-24 天津大学 Re-refining process and system for use with unqualified liquid ammonia in oil refining waste water production
CN112299445A (en) * 2020-11-20 2021-02-02 苏州金宏气体股份有限公司 Method for preparing ultra-pure ammonia by filler rectification

Also Published As

Publication number Publication date
CN102730719B (en) 2014-02-26

Similar Documents

Publication Publication Date Title
CN101704524B (en) Production device and method of high purity trichlorosilane by using heat pump distillation
CN102730719B (en) Industrial ammonia continuous purification apparatus and technology
CN105502295A (en) Electronic grade hydrogen chloride purification method
CN102923714A (en) Next-door thermal coupling distillation method and equipment for producing polycrystalline silicon
CN105502294B (en) A kind of electronic grade high-purity hydrogen chloride high pressure method for preparing
CN107413194A (en) Preparation method and equipment of concentrated ammonia water for desulfurization and denitrification
CN108534463A (en) Polycrystalline silicon reduction exhaust deep-purifying method and system
CN215781616U (en) Purification device for preparing ultra-pure ammonia from low-temperature industrial ammonia
CN102616789B (en) Heat pump rectification dividing wall tower device for separating ultrapure trichlorosilane and operation method
CN107648976B (en) Method for preparing ultra-high-purity gas through low-temperature separation and low-temperature separation system
CN102502701B (en) Production process and preparation method of ultrapure ammonia
CN202705056U (en) Device for continuously purifying industrial ammonia
CN115105850B (en) Electronic grade trichlorosilane purifying device and method
CN103466549A (en) High-purity chlorine gas rectifying technology and equipment thereof
CN203461817U (en) High-purity chlorine gas rectification device
CN105462641A (en) Small mobile skid-mounted natural gas purification device
CN202898052U (en) Production device of <11>boron trifluoride electronic specific gas
CN102030335B (en) Method and device for removing boron impurity in chlorosilane system by rectification through double-tower thermocouple reaction
CN205709899U (en) A kind of ammonia gas purification device
CN109231238B (en) High-purity ammonia continuous production system and production process thereof
CN208948863U (en) A kind of high-purity ammon continuous process system
CN102730717A (en) Technology and apparatus for purifying 7N electronic grade hyperpure ammonia with low energy consumption
CN107036393B (en) Device and process for producing 5N-grade high-purity propane by adopting double-tower continuous rectification
CN201376900Y (en) High-purity nitrogen equipment
CN103318859B (en) Rectification dehydration tower and dehydration method for nitrogen dioxide

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180607

Address after: No. 8, Huayuan street, Shangcheng, Ganjingzi District, Dalian, Liaoning 2-4-1

Co-patentee after: Zhao Chao

Patentee after: Zhao Yi

Co-patentee after: Ji Yanqiu

Co-patentee after: Wang Tianyuan

Address before: 116600 Liaoning Dalian bonded area storage processing area IE-33

Patentee before: DALIAN FREE TRADE ZONE CREDIT CHEMICAL SCIENCE AND TECHNOLOGY DEVELOPMENT CO.,LTD.

EE01 Entry into force of recordation of patent licensing contract
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20121017

Assignee: Quanjiao kelide Electronic Materials Co.,Ltd.

Assignor: Zhao Yi|Zhao Chao|Ji Yanqiu|Wang Tianyuan

Contract record no.: X2020340000006

Denomination of invention: A device and process for continuous purification of industrial ammonia

Granted publication date: 20140226

License type: Exclusive License

Record date: 20200806

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20210317

Address after: 116600 Liaoning Dalian bonded area storage processing area IE-33

Patentee after: DALIAN FREE TRADE ZONE CREDIT CHEMICAL SCIENCE AND TECHNOLOGY DEVELOPMENT Co.,Ltd.

Address before: No. 8, Huayuan street, Shangcheng, Ganjingzi District, Dalian, Liaoning 2-4-1

Patentee before: Zhao Yi

Patentee before: Zhao Chao

Patentee before: Ji Yanqiu

Patentee before: Wang Tianyuan

PE01 Entry into force of the registration of the contract for pledge of patent right
PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of invention: A device and process for continuous purification of industrial ammonia

Effective date of registration: 20220927

Granted publication date: 20140226

Pledgee: China Minsheng Bank Co.,Ltd. Dalian Branch

Pledgor: DALIAN FREE TRADE ZONE CREDIT CHEMICAL SCIENCE AND TECHNOLOGY DEVELOPMENT CO.,LTD.

Registration number: Y2022980016620

CP03 Change of name, title or address
CP03 Change of name, title or address

Address after: No. 1-1, Haike Road, Dalian Free Trade Zone, Liaoning 116600

Patentee after: Dalian Kelide Semiconductor Materials Co.,Ltd.

Address before: 116600 Liaoning Dalian bonded area storage processing area IE-33

Patentee before: DALIAN FREE TRADE ZONE CREDIT CHEMICAL SCIENCE AND TECHNOLOGY DEVELOPMENT CO.,LTD.

EC01 Cancellation of recordation of patent licensing contract
EC01 Cancellation of recordation of patent licensing contract

Assignee: Quanjiao kelide Electronic Materials Co.,Ltd.

Assignor: Zhao Yi|Zhao Chao|Ji Yanqiu|Wang Tianyuan

Contract record no.: X2020340000006

Date of cancellation: 20230419

PC01 Cancellation of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20230529

Granted publication date: 20140226

Pledgee: China Minsheng Bank Co.,Ltd. Dalian Branch

Pledgor: DALIAN FREE TRADE ZONE CREDIT CHEMICAL SCIENCE AND TECHNOLOGY DEVELOPMENT CO.,LTD.

Registration number: Y2022980016620