CN102730717A - Technology and apparatus for purifying 7N electronic grade hyperpure ammonia with low energy consumption - Google Patents
Technology and apparatus for purifying 7N electronic grade hyperpure ammonia with low energy consumption Download PDFInfo
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- CN102730717A CN102730717A CN2011100849486A CN201110084948A CN102730717A CN 102730717 A CN102730717 A CN 102730717A CN 2011100849486 A CN2011100849486 A CN 2011100849486A CN 201110084948 A CN201110084948 A CN 201110084948A CN 102730717 A CN102730717 A CN 102730717A
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 title claims abstract description 232
- 229910021529 ammonia Inorganic materials 0.000 title claims abstract description 115
- 238000005516 engineering process Methods 0.000 title claims abstract description 21
- 238000005265 energy consumption Methods 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 29
- 239000002994 raw material Substances 0.000 claims abstract description 20
- 238000000746 purification Methods 0.000 claims abstract description 13
- 238000000108 ultra-filtration Methods 0.000 claims abstract description 12
- 238000001179 sorption measurement Methods 0.000 claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 238000007670 refining Methods 0.000 claims abstract description 4
- 238000002309 gasification Methods 0.000 claims description 21
- 238000010521 absorption reaction Methods 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 8
- 238000009833 condensation Methods 0.000 claims description 6
- 230000005494 condensation Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000003463 adsorbent Substances 0.000 claims description 4
- 238000009835 boiling Methods 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 4
- 230000006837 decompression Effects 0.000 claims description 4
- 238000013461 design Methods 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002808 molecular sieve Substances 0.000 claims description 4
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims description 4
- 229910021536 Zeolite Inorganic materials 0.000 claims description 3
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- -1 metals ion Chemical class 0.000 claims description 3
- 239000002594 sorbent Substances 0.000 claims description 3
- 230000009466 transformation Effects 0.000 claims description 3
- 239000010457 zeolite Substances 0.000 claims description 3
- 238000009834 vaporization Methods 0.000 claims 2
- 230000008016 vaporization Effects 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
- 230000010354 integration Effects 0.000 claims 1
- 239000003921 oil Substances 0.000 description 13
- 238000003860 storage Methods 0.000 description 6
- 238000007710 freezing Methods 0.000 description 5
- 230000008014 freezing Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000010734 process oil Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000010977 unit operation Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
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- Drying Of Gases (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention discloses a technology and an apparatus for purifying 7N electronic grade hyperpure ammonia with low energy consumption, the technology comprises the following steps: 1) purifying and gasifying industrial grade raw material ammonia; 2) gasifying raw material liquefied ammonia and simultaneously removing oil and removing water; 3) heating and gasifying in an auxiliary heated gasifier and removing liquid drops in gas ammonia in a liquid drops collector; 4) carrying out an ultrafiltration oil removal process; 5) changing temperature, entering into an adsorption dryer, and removing water; 6) purifying in a high efficiency and precision rectifying tower; and 7) carrying out a terminal refining and purifying process. According to the gradual purification technology, the purity of product ammonia can reach 99.99999% (7N), a refrigerator assembly in a traditional technology can be thoroughly canceled, the heating of the liquefied ammonia gasifier is changed to auxiliary heating, and the energy consumption can be greatly reduced.
Description
Technical field
Present technique relates to a kind of purifying process and device of gas, particularly 99.99999% of a kind of less energy-consumption (7N) electronic-grade ultra-pure ammonia purifying process and device.
Background technology
Ultra-pure ammonia is an important electron gas in the semi-conductor industry, is usually used in synthesizing nitride as a kind of ideal nitrogenous source, and it has mainly been used:
1, metal organic chemical vapor deposition (mocvd) (MOCVD) preparation gan (GaN) is the basis of LED.Ultra-pure ammonia is a nitrogenous source.
2, chemical meteorology deposition (CVD) preparation Si
3N
4Insulation layer is widely used in large-scale integrated circuit, liquid-crystal display.Ultra-pure ammonia is a nitrogenous source.
3, plasma gas-phase deposit stove (PECVD) preparation Si
3N
4Subtract transmitting film, subtract transmitting film and be deposited on the crystal silicon solar energy battery surface, increase of the absorption of battery sheet solar ray.Ultra-pure ammonia is a nitrogenous source.
4, ultra-pure ammonia is at ultra hard ceramic such as SP 1, and biology and field of medicaments also are widely used.
Along with development of science and technology, for synthetic high-quality nitride, microelectronics industry etc. are increasingly high to the purity requirement of ultra-pure ammonia; From 99.9995% (5N5), develop into 99.99994% (6N4, blue ammonia) like the ultra-pure ammonia national standard; The market requirement 99.99999% (7N, white ammonia) up to now.
Simultaneously, along with market is increasing to the demand of ultra-pure ammonia, the purifying process of ultra-pure ammonia also continues to bring out; Total principle is to adopt different means of purification reasonable combination; Carry out purifying step by step, finally reach 5N5,6N4; Different grades requirements such as 7N, means of purification commonly used has filtration, absorption, rectifying etc.
In many existing patents; CN101817540A, the described purifying process of CN201520645U; Raw materials ammonia is squeezed into gasifier through ammonia pump; Heating and gasifying, then through absorption oil removing, absorption dewater, this technology of purifying progressively of the rectifying of ppb level, terminal adsorption and purification, obtain 7N electronic-grade ultra-pure ammonia, have certain feasibility and representativeness.From the narration of the technology of patent, whole purge process is carried out each item unit operation round the liquefied ammonia gentle ammonia condensing that gasifies all the time.Material passes through each operating unit in proper order; Liquefied ammonia gasification in gasifier and the rectifying reboiler is by independently heating system heating; Gas ammonia condensation in rectifying tower top condensing surface and the terminal purifying outlet condensing surface is by independently freezing unit cooling; How unilateral the paying close attention to of whole process removes impurity in the ammonia, improves the purity of ammonia, does not consider from the angle of total energy approach technical process is optimized.Certainly will energy consumption very high for industrial applications.Also there is same problem in other existing patents.
Summary of the invention
The objective of the invention is only to pursue high product purity, ignore the deficiency of technology high energy consumption, a kind of 7N electronic-grade ultra-pure ammonia purifying process and device of less energy-consumption is provided in order to overcome existing ammonia purifying process.
Technical scheme of the present invention is: a kind of 7N electronic-grade ultra-pure ammonia purifying process and device of novel less energy-consumption, and concrete process step is:
(1) purification of raw material ammonia gasification: the industrial ammonia with 99.8% is transported to rectifying tower top high efficiency energy convertor and terminal purifying outlet high efficiency energy convertor from raw material ammonia jar dependence self pressure; In the time of raw material ammonia decompression gasification, what rectifying tower top was come out obtains condensation through the gas ammonia of purification and the finished product gas ammonia of terminal purifying outlet.Because the physico-chemical property according to liquefied ammonia can be known; The liquefied ammonia highly volatile gasification of decompression back, and absorb a large amount of heats, usually as refrigeration agent; The present invention combines the raw materials ammonia gasification and the back gas ammonia condensation of purifying through the high efficiency energy convertor; Accomplish the energy efficient conversion, cut down the consumption of energy significantly, thoroughly remove the freezing unit in the traditional technology.
In above-mentioned process step, raw materials ammonia also obtains preliminary oil removing and dewaters in gasification.Because though ammonia and water have good mutual solubility; But the equilibrium solubility of water in the gas-liquid two-phase of ammonia has very big-difference; The new and effective energy transfer machine of this process using, through residual liquefied ammonia amount and stable energy transformation in the control convertor, the liquefied ammonia that the water cut with about 20% is very high is discharged into useless ammonia jar; Simultaneously effectively explosive evaporatoin does not take place in control liquefied ammonia, and moisture content is reduced to about 100ppm.
(2) drop in boosting gasification and the gas ammonia captures: the raw material ammonia that in the high efficiency energy convertor, obtains gasifying gets into has the gasifier of boosting to carry out further heating and gasifying; 40-60 ℃ of the strict control of gasification gasification temperature reduces moisture evaporation as far as possible.If seeking out high-purity gas ammonia must overcome intrinsic notion, just consider oil removing, dewater in gasification process, because blob viscosity is big; The drip gauge surface tension increases; The present invention is provided with drip-saver pan on gasifier top, and drop in the gas ammonia is effectively removed, and makes that profit reaches 50-80ppm in the gas ammonia; This measure will make back operation processing power greatly increase, and save processing cost.
(3) ultrafiltration oil removing: the gas ammonia of gasification and removal drop gets into the ultrafiltration oil eliminator, utilizes sophisticated ultra-filtration technique, can oil-contg effectively be controlled at below the 0.1ppm.Simultaneously, can overcome the drawback of utilizing the gac oil removing in the traditional technology, reduce the rectifying load greatly, because gac in oil removing, is prone to carry secretly activated carbon granule and regeneration consumes high.
(4) adsorption dry dewaters: the ammonia after the oil removing gets into adsorption dehumifier; Utilizing special zeolite molecular sieve to carry out the degree of depth dewaters; Characteristics are that high intensity molecular sieve is fit to long-term operation; Selective adsorption simultaneously can effectively overcome the Van der Waals force between ammonia, the water, and dewatering efficiency is high, purifies water-content≤1ppm in the gas ammonia of back.
(5) high-efficiency and precision rectification and purification: utilize the high-efficiency and precision rectifying tower of CAD, light constituent H is removed on tower top
2, O
2, N
2, Ar, CH
4, impurity such as CO make it and drop to≤10ppb.Utilize one-level two-stage rectification reboiler, control the reboiler liquid level and remove CO switching time
2, make it≤1ppm; Remove moisture simultaneously, reach the ppb level; Impurity such as high boiling material and metals ion reaches the ppt level.In position near the tower still, the rectifying discharging.
(6) the refining purifying in terminal: the gas ammonia that comes out from rectifying tower can be stable reaches 5N5; The purity level of 6N4; Want to reach the purity requirement of 7N level, must utilize special compound-type adsorbent, the sorbent material strictness of different choice property is carried out the layering filling by design requirements.By suction; Inhale CO, CO
2, CH
4Inhale H2, N2, O2, Ar; Last one deck is inhaled the order of CxHy, absorption successively, and the degree of depth is removed H
2O, CO
2, CxHy.Can make stable 99.99999% (7N) that reach of product purity.
Through purifying process of the present invention and equipment, not only can product purity reach 7N, and completely abolish the freezing unit of traditional technology, the heating of liquefied ammonia gasifier has also become boosting, has reduced energy consumption significantly.
Description of drawings
Fig. 1 is a background technology purifying process general flow chart.Wherein: 1. freezing units 12. useless ammonia storage tanks of liquid ammonia storage tank 2. ammonia pump 3-1.3-2. gasifier 4-1.4-2. oil eliminator 5-1.5-2. adsorption dehumifiers 6. rectifying tower 7-1.7-2. reboiler 8-1.8-2. terminal purifier 9-1.9-2. condensing surfaces 10. product storage tanks 11.
Fig. 2 is a patent art purifying process general flow chart.Wherein: 1. useless ammonia storage tanks of liquid ammonia storage tank 2-1.2-2. high efficiency energy convertor 3-1.3-2. gasifier 4. gas ammonia pump 5-1.5-2. ultrafiltration oil eliminator 6-1.6-2. adsorption dehumifiers 7. rectifying tower 8-1.8-2. reboiler 9-1.9-2. terminal purifiers, 10. product storage tanks 11.
Embodiment
It is following that the present invention will be described with reference to accompanying drawing.
Raw material ammonia of the present invention adopts the liquefied ammonia of technical grade 99.8%, 1500 tons of design 7N electronic-grade ultra-pure ammonia YO.
As shown in Figure 2; Industrial ammonia with 99.8% is transported to rectifying tower top high efficiency energy convertor 2-1 and terminal purifying outlet high efficiency energy convertor 2-2 from raw material ammonia jar 1 dependence self pressure; In the time of raw material ammonia decompression gasification, what rectifying tower top 7 was come out obtains condensation through the gas ammonia of purification and the finished product gas ammonia of terminal purifying 9 outlets.
In above-mentioned process step, raw materials ammonia also obtains preliminary oil removing and dewaters in gasification.The new and effective energy transfer machine 2-1 of this process using; 2-2; Through residual liquefied ammonia amount and stable energy transformation in the control convertor; The liquefied ammonia that water cut with about 20% is very high is discharged into useless ammonia jar, and effectively explosive evaporatoin does not take place control liquefied ammonia simultaneously, and moisture content is reduced to about 100ppm.
The raw material ammonia that in the high efficiency energy convertor, obtains gasifying gets into the gasifier 3-1 that boosting is arranged, and 3-2 carries out further heating and gasifying, and 40-60 ℃ of the strict control of gasification gasification temperature reduces moisture evaporation as far as possible.On gasifier top drip-saver pan is set, drop in the gas ammonia is effectively removed, make that profit reaches 50-80ppm in the gas ammonia, this measure will make back operation processing power greatly increase, and save processing cost.
The gas ammonia of gasification and removal drop gets into ultrafiltration oil eliminator 5-1, and 5-2 utilizes sophisticated ultra-filtration technique, can oil-contg effectively be controlled at below the 0.1ppm.
Ammonia after the oil removing gets into adsorption dehumifier 6-1, and 6-2 purifies water-content≤1ppm in the gas ammonia of back.
Gas ammonia entering high-efficiency and precision rectifying tower 7 purifications that the process oil removing dewaters and gives purifying: light constituent H is removed on tower top
2, O
2, N
2, Ar, CH
4, impurity such as CO make it and drop to≤10ppb.Utilize one-level two-stage rectification reboiler 8-1,8-2 controls the reboiler liquid level and removes CO switching time
2, make it≤1ppm; Remove moisture simultaneously, reach the ppb level; Impurity such as high boiling material and metals ion reaches the ppt level.In position near the tower still, the rectifying discharging.
The gas ammonia that comes out from rectifying tower can be stable reach 5N5, the purity level of 6N4, the purifier 9-1 at the terminal, 9-2 utilizes special compound-type adsorbent, and the sorbent material strictness of different choice property is carried out the layering filling by design requirements.By suction; Inhale CO, CO
2, CH
4Inhale H2, N2, O2, Ar; Inhale the order of CxHy, absorption successively, the degree of depth is removed H
2O, CO
2, CxHy.Can make stable 99.99999% (7N) that reach of product purity.Ultra-pure ammonia foreign matter content through obtaining after a whole set of purifying process processing is as shown in table 1:
Table 1: ultra-pure ammonia purity and each item foreign matter content index
Table 2 is seen in the contrast of the equal scale of the present invention and background technology (1500 tons/year) energy consumption:
The equal scale of the present invention and background technology (1500 tons/year) energy consumption contrast table
| Main project | Background technology | The present invention | Savings |
| The raw material ammonia gasifier | 90KW*2 | 45KW*2 | 90KW |
| The rectifying reboiler | 160KW*2 | 160KW*2 | 0 |
| Freezing unit | 250KW | 0 | 250KW |
| Total volume | 750KW | 410KW | 340KW |
In sum, technology of the present invention and equipment, when stablizing output 7N electronic-grade ultra-pure ammonia, can be more than 45% than background technology energy efficient.
Claims (2)
1. the present invention provides a kind of purifying process and tooling of 7N electronic-grade ultra-pure ammonia of less energy-consumption, and its technology characteristics is:
(1) purification of raw material ammonia gasification: the industrial ammonia with 99.8% is transported to rectifying tower top high efficiency energy convertor and terminal purifying outlet high efficiency energy convertor from raw material ammonia jar dependence self pressure; In the time of raw material ammonia decompression gasification, what rectifying tower top was come out obtains condensation through the gas ammonia of purification and the finished product gas ammonia of terminal purifying outlet.
(2) raw materials ammonia also obtains preliminary oil removing and dewaters in gasification.This technology is discharged into useless ammonia jar through residual liquefied ammonia amount and stable energy transformation in the control high efficiency energy convertor with water cut liquefied ammonia very, and moisture content is reduced to about 100ppm.
(3) drop in boosting gasification and the gas ammonia captures: the raw material ammonia that in the high efficiency energy convertor, obtains gasifying gets into has the gasifier of boosting to carry out further heating and gasifying.On gasifier top drip-saver pan is set, drop in the gas ammonia is effectively removed, make that profit reaches 50-80ppm in the gas ammonia.
(4) ultrafiltration oil removing: the gas ammonia of gasification and removal drop gets into the ultrafiltration oil eliminator, utilizes sophisticated ultra-filtration technique, can oil-contg effectively be controlled at below the 0.1ppm.
(5) adsorption dry dewaters: the ammonia after the oil removing gets into adsorption dehumifier, utilizes special zeolite molecular sieve to carry out the degree of depth and dewaters, water-content≤1ppm in the gas ammonia behind the purifying.
(6) high-efficiency and precision rectification and purification: the high-efficiency and precision rectifying tower, light constituent H is removed on tower top
2, O
2, N
2, Ar, CH
4, impurity such as CO make it and drop to≤10ppb.Tower bottom is controlled the reboiler liquid level and is removed CO switching time
2, make it≤1ppm; Remove moisture, reach the ppb level; Remove impurity such as high boiling material and metals ion, reach the ppt level.
(7) the refining purifying in terminal: adopt compound-type adsorbent, the sorbent material strictness of different choice property is carried out the layering filling by design requirements, absorption successively, the degree of depth is removed H
2O, CO
2, CxHy.Can make stable 99.99999% (7N) that reach of product purity.
2. device technique of the present invention, its principal character is:
(1) high efficiency energy convertor: liquefied ammonia evaporates and gas ammonia condensation integration apparatus, and the liquefied ammonia reduction vaporization is provided with evaporating space, and the liquefied ammonia liquid level is controlled simultaneously, and the liquefied ammonia that moisture oleaginousness is high drains into useless ammonia jar, and the liquefied ammonia vaporization obtains preliminary purification simultaneously.
(2) the auxiliary gasifier of band drip-saver pan: gasifier top is provided with drip-saver pan, and the moisture oil-containing of the drop of capture drains into useless ammonia jar
(3) ultrafiltration oil eliminator: adopt the micron order filter core to carry out the ultrafiltration oil removing.
(4) adsorption dry water eliminator: adopt the absorption of polarity zeolite molecular sieve alternating temperature to carry out the degree of depth and dewater.
(5) high-efficiency and precision rectifying tower: top extraction light constituent H
2, O
2, N
2, Ar, CH
4, CO; High boiling material, metallic impurity and CO are removed in the bottom
2
(6) the refining purifier in terminal: fill compound-type adsorbent, the layering filling, absorption successively, the degree of depth is removed H
2O, CO
2, CxHy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100849486A CN102730717A (en) | 2011-04-06 | 2011-04-06 | Technology and apparatus for purifying 7N electronic grade hyperpure ammonia with low energy consumption |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100849486A CN102730717A (en) | 2011-04-06 | 2011-04-06 | Technology and apparatus for purifying 7N electronic grade hyperpure ammonia with low energy consumption |
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|---|---|
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ID=46987123
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|---|---|---|---|
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103112872A (en) * | 2013-02-18 | 2013-05-22 | 苏州晶瑞化学有限公司 | Preparation method of ultrapure fluorine-ammonium etching solution for micro-electronics |
| CN109200747A (en) * | 2017-06-29 | 2019-01-15 | 宝山钢铁股份有限公司 | A kind of ammonia drying device and drying means based on temp.-changing adsorption |
| CN109467104A (en) * | 2018-10-18 | 2019-03-15 | 海宁市英德赛电子有限公司 | A kind of ultra-pure ammonia low-energy-consumption distillation equipment |
-
2011
- 2011-04-06 CN CN2011100849486A patent/CN102730717A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103112872A (en) * | 2013-02-18 | 2013-05-22 | 苏州晶瑞化学有限公司 | Preparation method of ultrapure fluorine-ammonium etching solution for micro-electronics |
| CN109200747A (en) * | 2017-06-29 | 2019-01-15 | 宝山钢铁股份有限公司 | A kind of ammonia drying device and drying means based on temp.-changing adsorption |
| CN109200747B (en) * | 2017-06-29 | 2021-08-17 | 宝山钢铁股份有限公司 | Ammonia gas drying device and method based on temperature swing adsorption |
| CN109467104A (en) * | 2018-10-18 | 2019-03-15 | 海宁市英德赛电子有限公司 | A kind of ultra-pure ammonia low-energy-consumption distillation equipment |
| CN109467104B (en) * | 2018-10-18 | 2022-04-12 | 浙江英德赛半导体材料股份有限公司 | Ultra-pure ammonia low-energy consumption rectification equipment |
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