CN101704524B - Production device and method of high purity trichlorosilane by using heat pump distillation - Google Patents
Production device and method of high purity trichlorosilane by using heat pump distillation Download PDFInfo
- Publication number
- CN101704524B CN101704524B CN2009102286356A CN200910228635A CN101704524B CN 101704524 B CN101704524 B CN 101704524B CN 2009102286356 A CN2009102286356 A CN 2009102286356A CN 200910228635 A CN200910228635 A CN 200910228635A CN 101704524 B CN101704524 B CN 101704524B
- Authority
- CN
- China
- Prior art keywords
- removing column
- weight
- lightness
- column
- reboiler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Abstract
The invention relates to a production device and a method of high purity trichlorosilane by using heat pump distillation. Trichlorosilane raw materials enter a de-heavy fractionator to eliminate heavy components after light component elimination through a light component eliminating tower, thereby obtaining high purity trichlorosilane. On the basis, the light component eliminating tower and the de-heavy fractionator both adopt a heat pump distillation process. Cooling medium in a condenser absorbs heat after exchanging the heat with materials on the top of the tower and is evaporated into gas, the gas enters a reboiler as tower reactor heat source reactor liquid after pressure and temperature enhancement through compression, and the gas is condensed into liquid. The liquid returns to the condenser after reduction of expenditure and pressure so as to finish a cycle. Therefore, the heat at the low temperature part of the tower top is transferred to the high temperature part of a tower reactor through the cooling medium. The invention has the advantages that by adopting the heat pump distillation process, the energy consumption can be greatly lowered, and the annual economic benefit is greatly enhanced.
Description
Technical field
The present invention relates to the energy-conservation separation technology field of high-purity trichlorosilane, specifically is high purity trichlorosilane by using heat pump distillation production equipment and method.
Background technology
Polysilicon is the basic raw material of solar energy industry and semiconductor industry, is China's electronics and information industry and the necessary strategic materials of photovoltaic industry development.
The improvement Siemens Method is the main working method of the existing polysilicon of present China; Can the compatible electronic level and the production of solar-grade polysilicon; Comprise primary processes such as trichlorosilane is synthetic, trichlorosilane is purified, trichlorosilane reduction, reduction tail gas dry process rectifying recovery, hydrogenation of silicon tetrachloride, mainly have problems such as energy consumption is high, potentially contaminated is serious.In this process, except that the trichlorosilane reduction, other process all relates to rectifying, and required distillation system has high reflux ratio and high theoretical stage characteristic, requires foreign matter contents such as B, P at the PPT order of magnitude, is highly energy-consuming, the high pollution process of generally acknowledging.At present, there are the significance difference distance in used distillation technology and developed country in the domestic production of polysilicon, have become one of major technique bottleneck of restriction China high quality polycrystalline silicon material production, are badly in need of technological breakthrough.
Heat pump distillation has been widely used in the various Chemical Manufacture as a kind of power-saving technology that can effectively improve rectified heat efficient.As must separate at systems such as ethylbenzene-vinylbenzene, propylene-propane, Trimethylmethane-normal butane, ethane-ethylenes and alcohol production in, exist the instances that successfully use in a large number heat pump techniques, in recent years; Along with polysilicon becomes the strategic industry that country first develops gradually; Trichlorosilane stripping technique in the production of polysilicon technology is improved particularly difficulty, and at present, this field does not still have the introduction of heat pump distillation technology; Seeing that heat pump distillation and technology can greatly reduce the production process energy consumption; Obtain distinct economic, in the trichlorosilane sepn process, introduce heat pump techniques and have great advantage to cutting down the consumption of energy, technical feasibility is higher.
Summary of the invention
The object of the invention provides a kind of high purity trichlorosilane by using heat pump distillation separation method and device that cuts down the consumption of energy.It adopts two regular packed tower serial process, all adopts atmospheric operation.The heat-pump rectifying process that adopts it is advantageous that the tower working pressure is low, and unit consumption of energy is low, and production cost reduces greatly, and is simple in structure, safe and reliable.
Technology of the present invention is following:
A kind of high purity trichlorosilane by using heat pump distillation production equipment comprises lightness-removing column (1), lightness-removing column reboiler (4), condenser of light component removal column (3), lightness-removing column surge tank (7), lightness-removing column compressor (9), lightness-removing column dropping valve (18), heat pump (14), weight-removing column (2), weight-removing column condensing surface (5), weight-removing column surge tank (8), weight-removing column compressor (10), weight-removing column reboiler (6), weight-removing column dropping valve (24); Opening for feed is established at lightness-removing column (1) middle part; Pipeline of lightness-removing column bottoms stream and the bottom of returning lightness-removing column (1) after lightness-removing column reboiler (4) is connected; Another pipeline links to each other with the middle part of weight-removing column through pump (14); Lightness-removing column (1) overhead stream links to each other with lightness-removing column surge tank (7) behind condenser of light component removal column (3), and lightness-removing column surge tank (7) outlet at bottom is provided with feed back and material extraction; Condenser of light component removal column (3) one ends link to each other with lightness-removing column reboiler (4) through lightness-removing column compressor (9) through pipeline, and lightness-removing column reboiler (4) the other end links to each other with condenser of light component removal column (3) one ends through lightness-removing column dropping valve (18), form the lightness-removing column heat pump circulating system; Weight-removing column (2) tower base stream and the bottom of returning weight-removing column (2) after weight-removing column reboiler (6) is connected; Weight-removing column (2) overhead stream links to each other with weight-removing column surge tank (8) behind weight-removing column condensing surface (5), and weight-removing column surge tank (8) outlet at bottom is provided with feed back and material extraction; Weight-removing column condensing surface (5) one ends link to each other with weight-removing column reboiler (6) through weight-removing column compressor (10) through pipeline, and weight-removing column reboiler (6) the other end links to each other with weight-removing column condensing surface (5) one ends through weight-removing column dropping valve (24), form the weight-removing column heat pump circulating system.
Wherein heat pump adopts the enclosed heat pump.The condenser condenses medium adopts heat pump cycle working medium.The reboiler heating medium adopts heat pump cycle working medium.
A kind of high purity trichlorosilane by using heat pump distillation working method: trichlorosilane liquid stock (11) gets into the middle part of lightness-removing column (1), returns lightness-removing column (1) through trichlorosilane solution (a 12) part at the bottom of the tower after taking off gently through lightness-removing column reboiler (4); Another part is squeezed into weight-removing column (2) by pump (14) and is taken off heavily; Lightness-removing column overhead gas phase materials (13) staple is dichloro-dihydro silicon and micro-light impurity, after condenser of light component removal column (3) cooling, gets into lightness-removing column surge tank (7), returns lightness-removing column (1), a part of extraction from the effusive material part of lightness-removing column surge tank (7); Weight-removing column cat head gas-phase product (15) gets into weight-removing column surge tank (8) behind weight-removing column condensing surface (5), be high-purity trichlorosilane from weight-removing column surge tank (8) material that comes out, and wherein a part is returned weight-removing column (2), and a part is as the product extraction.
The heat pump cycle characteristic of lightness-removing column (1) is: the heat-eliminating medium (20) in the condenser of light component removal column (3) is lightness-removing column gas (21) with cat head end material heat exchange post-absorption heat of vaporization; Lightness-removing column gas (21) is after compression pressurize and temperature; Get into lightness-removing column reboiler (4) as tower still thermal source still liquid; And itself condensing into lightness-removing column liquid (17), lightness-removing column liquid (17) returns condenser of light component removal column (3) behind expenditure and pressure, accomplish a circulation; The heat pump cycle characteristic of weight-removing column (2) is: the heat-eliminating medium (22) in the weight-removing column condensing surface (5) is weight-removing column gas (23) with cat head end material heat exchange post-absorption heat of vaporization; Weight-removing column gas (23) is after compression pressurize and temperature; Get into weight-removing column reboiler (6) as tower still thermal source still liquid; And itself condensing into weight-removing column liquid (19), weight-removing column liquid (19) returns weight-removing column condensing surface (5) behind expenditure and pressure, accomplish a circulation.
The lightness-removing column reflux ratio is 20-50, and the weight-removing column reflux ratio is 3-10.Lightness-removing column pressure is 300KPa, and tower top temperature is controlled at 60~70 ℃, and the temperature difference is in 10 degree at the bottom of the cat head tower.Weight-removing column pressure is 600KPa, and tower top temperature is controlled at 80~90 ℃, and the temperature difference is controlled in 10 degree at the bottom of the cat head tower.
The product that slightly heats up in a steamer workshop section mainly contains trichlorosilane, dichloro-dihydro silicon, silicon tetrachloride and trace impurity; Get into lightness-removing column and isolate dichloro-dihydro silicon and micro-light impurity by cat head; The bottoms material gets into weight-removing column and isolates high-purity trichlorosilane product by cat head, and the bottoms material gets into residual liquid tank.Because high-purity trichlorosilane product requirement is very high, electronic-grade need reach more than 99.9999999%, so lightness-removing column and weight-removing column all need big reflux ratio operation, the lightness-removing column reflux ratio is 20-50, weight-removing column reflux ratio 3-30, thereby power consumption is very big.Heat-pump rectifying process is applicable to that relatively rectification temperature is low, the rectifying tower that has a narrow range of temperature at the bottom of the cat head tower.
The present invention relates to high purity trichlorosilane by using heat pump distillation production equipment and method.Thereby get into weight-removing column again after the trichlorosilane liquid stock takes off gently through lightness-removing column and take off heavy high-purity trichlorosilane that obtains.Dehydrogenation tower and weight-removing column all adopt heat-pump rectifying process on this basis.Heat-eliminating medium in the condensing surface and cat head end material heat exchange post-absorption heat of vaporization are gas, and gas get into reboiler as tower still thermal source still liquid, and itself condenses into liquid after compression pressurize and temperature.Liquid returns condensing surface behind expenditure and pressure, accomplish a circulation.So the heat at cat head low temperature place is delivered to tower still high temperature place through heat-eliminating medium.Advantage of the present invention is to adopt heat-pump rectifying process, can cut down the consumption of energy greatly, and a year economic benefit improves greatly.
Description of drawings
Fig. 1: high purity trichlorosilane by using heat pump distillation working method schema of the present invention.
Embodiment
Below in conjunction with embodiment and accompanying drawing the present invention is done further explain.
As shown in Figure 1: as to comprise lightness-removing column (1), lightness-removing column reboiler (4), condenser of light component removal column (3), lightness-removing column surge tank (7), lightness-removing column compressor (9), lightness-removing column dropping valve (18), heat pump (14), weight-removing column (2), weight-removing column condensing surface (5), weight-removing column surge tank (8), weight-removing column compressor (10), weight-removing column reboiler (6), weight-removing column dropping valve (24); It is characterized in that: opening for feed is established at lightness-removing column (1) middle part; Pipeline of lightness-removing column bottoms stream and the bottom of returning lightness-removing column (1) after lightness-removing column reboiler (4) is connected; Another pipeline links to each other with the middle part of weight-removing column through pump (14); Lightness-removing column (1) overhead stream links to each other with lightness-removing column surge tank (7) behind condenser of light component removal column (3), and lightness-removing column surge tank (7) outlet at bottom is provided with feed back and material extraction; Condenser of light component removal column (3) one ends link to each other with lightness-removing column reboiler (4) through lightness-removing column compressor (9) through pipeline, and lightness-removing column reboiler (4) the other end links to each other with condenser of light component removal column (3) one ends through lightness-removing column dropping valve (18), form the lightness-removing column heat pump circulating system; Weight-removing column (2) tower base stream and the bottom of returning weight-removing column (2) after weight-removing column reboiler (6) is connected; Weight-removing column (2) overhead stream links to each other with weight-removing column surge tank (8) behind weight-removing column condensing surface (5), and weight-removing column surge tank (8) outlet at bottom is provided with feed back and material extraction; Weight-removing column condensing surface (5) one ends link to each other with weight-removing column reboiler (6) through weight-removing column compressor (10) through pipeline, and weight-removing column reboiler (6) the other end links to each other with weight-removing column condensing surface (5) one ends through weight-removing column dropping valve (24), form the weight-removing column heat pump circulating system.
Trichlorosilane liquid stock (11) gets into the middle part of lightness-removing column (1), returns lightness-removing column (1) through trichlorosilane solution (a 12) part at the bottom of the tower after taking off gently through lightness-removing column reboiler (4); Another part is squeezed into weight-removing column (2) by pump (14) and is taken off heavily; Lightness-removing column overhead gas phase materials (13) staple is dichloro-dihydro silicon and micro-light impurity, after condenser of light component removal column (3) cooling, gets into lightness-removing column surge tank (7), returns lightness-removing column (1), a part of extraction from the effusive material part of lightness-removing column surge tank (7); Weight-removing column cat head gas-phase product (15) gets into weight-removing column surge tank (8) behind weight-removing column condensing surface (5), be high-purity trichlorosilane from weight-removing column surge tank (8) material that comes out, and wherein a part is returned weight-removing column (2), and a part is as the product extraction.
The heat pump cycle characteristic of lightness-removing column (1) is: the heat-eliminating medium (20) in the condenser of light component removal column (3) is lightness-removing column gas (21) with cat head end material heat exchange post-absorption heat of vaporization; Lightness-removing column gas (21) is after compression pressurize and temperature; Get into lightness-removing column reboiler (4) as tower still thermal source still liquid; And itself condensing into lightness-removing column liquid (17), lightness-removing column liquid (17) returns condenser of light component removal column (3) behind expenditure and pressure, accomplish a circulation; The heat pump cycle characteristic of weight-removing column (2) is: the heat-eliminating medium (22) in the weight-removing column condensing surface (5) is weight-removing column gas (23) with cat head end material heat exchange post-absorption heat of vaporization; Weight-removing column gas (23) is after compression pressurize and temperature; Get into weight-removing column reboiler (6) as tower still thermal source still liquid; And itself condensing into weight-removing column liquid (19), weight-removing column liquid (19) returns weight-removing column condensing surface (5) behind expenditure and pressure, accomplish a circulation.
The lightness-removing column reflux ratio is 20-50, and the weight-removing column reflux ratio is 3-10.Lightness-removing column pressure is 300KPa, and tower top temperature is controlled at 60~70 ℃, and the temperature difference is in 10 degree at the bottom of the cat head tower.Weight-removing column pressure is 600KPa, and tower top temperature is controlled at 80~90 ℃, and the temperature difference is controlled in 10 degree at the bottom of the cat head tower.
Embodiment 1
The purification of processing trichlorosilane in 2000 tons of/year production of polysilicon is an example.Production equipment comprises lightness-removing column, weight-removing column and thermal-pump unit, and Liang Tashang is respectively arranged with condensing surface and reboiler, and condensing surface one end joins through compressor and reboiler through pipeline in the thermal-pump unit, and the reboiler the other end joins through reducing valve and condensing surface one end.Wherein lightness-removing column pressure is 300KPa, and tower top temperature is 60 ℃, and reflux ratio is 20; Weight-removing column pressure is 600KPa, and tower top temperature is 80 ℃, and reflux ratio is 3.
Press 8000h/ and calculate working time in year, and the steam price is by 150 yuan of/ton calculating, and electricity price is by 0.5 yuan/Kwh, and water price is pressed 2.0 yuan of/ton calculating:
After adopting heat pump technology, compare with common process:
The purification of processing trichlorosilane in 1000 tons of/year production of polysilicon is an example.Production equipment comprises lightness-removing column, weight-removing column and thermal-pump unit, and Liang Tashang is respectively arranged with condensing surface and reboiler, and condensing surface one end joins through compressor and reboiler through pipeline in the thermal-pump unit, and the reboiler the other end joins through reducing valve and condensing surface one end.Wherein lightness-removing column pressure is 300KPa, and tower top temperature is 70 ℃, and reflux ratio is 50; Weight-removing column pressure is 600KPa, and tower top temperature is 90 ℃, and reflux ratio is 10.
Press 8000h/ and calculate working time in year, and the steam price is by 150 yuan of/ton calculating, and electricity price is by 0.5 yuan/Kwh, and water price is pressed 2.0 yuan of/ton calculating:
Heat pump technology is compared with common process:
Claims (5)
1. a high purity trichlorosilane by using heat pump distillation production equipment comprises lightness-removing column (1), lightness-removing column reboiler (4), condenser of light component removal column (3), lightness-removing column surge tank (7), lightness-removing column compressor (9), lightness-removing column dropping valve (18), pump (14), weight-removing column (2), weight-removing column condensing surface (5), weight-removing column surge tank (8), weight-removing column compressor (10), weight-removing column reboiler (6), weight-removing column dropping valve (24); It is characterized in that: opening for feed is established at lightness-removing column (1) middle part; Pipeline of lightness-removing column bottoms stream and the bottom of returning lightness-removing column (1) after lightness-removing column reboiler (4) is connected; Another pipeline links to each other with the middle part of weight-removing column through pump (14); Lightness-removing column (1) overhead stream links to each other with lightness-removing column surge tank (7) behind condenser of light component removal column (3), and lightness-removing column surge tank (7) outlet at bottom is provided with feed back and material extraction; Condenser of light component removal column (3) one ends link to each other with lightness-removing column reboiler (4) through lightness-removing column compressor (9) through pipeline, and lightness-removing column reboiler (4) the other end links to each other with condenser of light component removal column (3) one ends through lightness-removing column dropping valve (18), form the lightness-removing column heat pump circulating system; Weight-removing column (2) tower base stream and the bottom of returning weight-removing column (2) after weight-removing column reboiler (6) is connected; Weight-removing column (2) overhead stream links to each other with weight-removing column surge tank (8) behind weight-removing column condensing surface (5), and weight-removing column surge tank (8) outlet at bottom is provided with feed back and material extraction; Weight-removing column condensing surface (5) one ends link to each other with weight-removing column reboiler (6) through weight-removing column compressor (10) through pipeline, and weight-removing column reboiler (6) the other end links to each other with weight-removing column condensing surface (5) one ends through weight-removing column dropping valve (24), form the weight-removing column heat pump circulating system.
2. high purity trichlorosilane by using heat pump distillation working method: it is characterized in that trichlorosilane liquid stock (11) gets into the middle part of lightness-removing column (1), returns lightness-removing column (1) through lightness-removing column reboiler (4) through trichlorosilane solution (a 12) part at the bottom of taking off the tower after light; Another part is squeezed into weight-removing column (2) by pump (14) and is taken off heavily; Lightness-removing column overhead gas phase materials (13) staple is dichloro-dihydro silicon and micro-light impurity, after condenser of light component removal column (3) cooling, gets into lightness-removing column surge tank (7), returns lightness-removing column (1), a part of extraction from the effusive material part of lightness-removing column surge tank (7); Weight-removing column cat head gas-phase product (15) gets into weight-removing column surge tank (8) behind weight-removing column condensing surface (5), be high-purity trichlorosilane from weight-removing column surge tank (8) material that comes out, and wherein a part is returned weight-removing column (2), and a part is as the product extraction; Heat pump adopts the enclosed heat pump; The heat pump cycle characteristic of lightness-removing column (1) is: the heat-eliminating medium (20) in the condenser of light component removal column (3) is lightness-removing column gas (21) with cat head end material heat exchange post-absorption heat of vaporization; Lightness-removing column gas (21) is after compression pressurize and temperature; Get into lightness-removing column reboiler (4) as tower still thermal source still liquid; And itself condensing into lightness-removing column liquid (17), lightness-removing column liquid (17) returns condenser of light component removal column (3) behind expenditure and pressure, accomplish a circulation; The heat pump cycle characteristic of weight-removing column (2) is: the heat-eliminating medium (22) in the weight-removing column condensing surface (5) is weight-removing column gas (23) with cat head end material heat exchange post-absorption heat of vaporization; Weight-removing column gas (23) is after compression pressurize and temperature; Get into weight-removing column reboiler (6) as tower still thermal source still liquid; And itself condensing into weight-removing column liquid (19), weight-removing column liquid (19) returns weight-removing column condensing surface (5) behind expenditure and pressure, accomplish a circulation.
3. method as claimed in claim 2, lightness-removing column reflux ratio are 20-50, and the weight-removing column reflux ratio is 3-10.
4. working method as claimed in claim 2 is characterized in that lightness-removing column pressure is 300KPa, and tower top temperature is controlled at 60~70 ℃, and the temperature difference is in 10 degree at the bottom of the cat head tower.
5. method as claimed in claim 2 is characterized in that weight-removing column pressure is 600KPa, and tower top temperature is controlled at 80~90 ℃, and the temperature difference is controlled in 10 degree at the bottom of the cat head tower.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102286356A CN101704524B (en) | 2009-11-20 | 2009-11-20 | Production device and method of high purity trichlorosilane by using heat pump distillation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102286356A CN101704524B (en) | 2009-11-20 | 2009-11-20 | Production device and method of high purity trichlorosilane by using heat pump distillation |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101704524A CN101704524A (en) | 2010-05-12 |
CN101704524B true CN101704524B (en) | 2012-11-07 |
Family
ID=42374795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009102286356A Active CN101704524B (en) | 2009-11-20 | 2009-11-20 | Production device and method of high purity trichlorosilane by using heat pump distillation |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101704524B (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102234112B (en) * | 2010-09-30 | 2012-06-27 | 河南尚宇新能源股份有限公司 | Method for rectifying trichlorosilane |
CN101955187B (en) * | 2010-10-21 | 2012-11-21 | 天津大学 | Method and apparatus for preparing trichlorosilane through rectification by using proportionate reaction |
CN102451573B (en) * | 2010-11-03 | 2014-12-03 | 中国石油化工股份有限公司 | Acetic acid dehydrating tower rectifying method |
CN102452925B (en) * | 2010-11-03 | 2014-04-02 | 中国石油化工股份有限公司 | Method for separating acetic acid from water |
CN102452927A (en) * | 2010-11-03 | 2012-05-16 | 中国石油化工股份有限公司 | Method for separating acetic acid from water |
CN102452924B (en) * | 2010-11-03 | 2014-04-30 | 中国石油化工股份有限公司 | Method for separating acetic acid from water by acetic acid dehydration tower |
CN102451574A (en) * | 2010-11-03 | 2012-05-16 | 中国石油化工股份有限公司 | Acetic acid dehydrating method |
CN102452926B (en) * | 2010-11-03 | 2014-06-04 | 中国石油化工股份有限公司 | Method for separating acetic acid and water |
CN102451572B (en) * | 2010-11-03 | 2014-07-02 | 中国石油化工股份有限公司 | Method for separating acetic acid from water by rectification of acetic acid dehydrating tower |
CN102134080B (en) * | 2011-04-12 | 2012-07-04 | 天津大学 | Heat-pump energy-saving separating device for extracting trichlorosilane by adopting static mixing booster and method |
CN102153092B (en) * | 2011-04-27 | 2012-12-26 | 天津大学 | Heat pump distillation and multi-effect distillation integrated device and process for purifying trichlorosilane |
CN102992993B (en) * | 2011-09-17 | 2014-08-27 | 天华化工机械及自动化研究设计院有限公司 | Acetic acid+water azeotropic-rectification energy-saving consumption-reduction method by adding heat pump |
CN102583395A (en) * | 2012-03-15 | 2012-07-18 | 华陆工程科技有限责任公司 | Heat pump rectification method for refining trichlorosilane |
CN102649019B (en) * | 2012-04-17 | 2014-10-22 | 中国恩菲工程技术有限公司 | Trichlorosilane rectification system |
CN102661654B (en) * | 2012-05-02 | 2014-04-30 | 北京华宇同方化工科技开发有限公司 | Method and system for preparing high purity gas by rectification method |
CN110652741A (en) * | 2019-10-08 | 2020-01-07 | 广州首联环境工程有限公司 | Heat pump rectification system and process method for preparing electronic-grade ethyl lactate by using same |
CN111253428A (en) * | 2020-03-27 | 2020-06-09 | 北京诺维新材科技有限公司 | Separation device and separation method of organic silicon monomer |
CN113955723A (en) * | 2021-11-02 | 2022-01-21 | 杭州聚纬科技工程有限公司 | Rectification separation purification method and system for gas containing hydrogen chloride sulfur dioxide |
CN114522637A (en) * | 2022-01-06 | 2022-05-24 | 浙江大学 | Method and device for separating vinyl acetate by heat pump extractive distillation |
CN116534864A (en) * | 2023-05-22 | 2023-08-04 | 新疆协鑫新能源材料科技有限公司 | Chlorosilane rectifying and impurity removing process and system in polysilicon production |
-
2009
- 2009-11-20 CN CN2009102286356A patent/CN101704524B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN101704524A (en) | 2010-05-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101704524B (en) | Production device and method of high purity trichlorosilane by using heat pump distillation | |
CN102153092B (en) | Heat pump distillation and multi-effect distillation integrated device and process for purifying trichlorosilane | |
CN101538045A (en) | Trichlorosilane differential pressure coupling rectification system and operation method thereof | |
CN107382810B (en) | Device and method for purifying N-methyl pyrrolidone | |
CN203710716U (en) | Device for improving recycling rate of alcohol ketone components in refining process of cyclohexanone | |
CN101920964B (en) | Method for purifying silicon tetrachloride by double-effect distillation | |
CN101786630A (en) | Trichlorosilane three-tower differential pressure coupling energy-saving rectifying and purifying system and operating method | |
CN100551895C (en) | A kind of method that from contain acetic acid containing waste water, reclaims acetic acid | |
CN102923714A (en) | Next-door thermal coupling distillation method and equipment for producing polycrystalline silicon | |
CN106276920B (en) | A kind of system and its processing method purifying trichlorosilane using quadruple effect coupling rectification | |
CN103896281A (en) | Method for rectifying and purifying silicon tetrachloride by complete thermal coupling | |
CN201701768U (en) | Device for double-effect distillation of dimethyl carbonate and alcohol | |
CN102616789B (en) | Heat pump rectification dividing wall tower device for separating ultrapure trichlorosilane and operation method | |
CN202070276U (en) | Purification device for polycrystalline silicon tail gas circulating condensation and scrubbing | |
CN203803139U (en) | Thionyl chloride differential pressure thermal coupling distillation equipment | |
CN102030335B (en) | Method and device for removing boron impurity in chlorosilane system by rectification through double-tower thermocouple reaction | |
CN113233960A (en) | Multi-effect methanol rectification process method and device for avoiding ethanol accumulation | |
CN102730719A (en) | Industrial ammonia continuous purification apparatus and technology | |
CN102851057A (en) | Crude oil stripping stabilization device | |
CN215906119U (en) | Multi-effect methanol rectification process method device for avoiding ethanol accumulation | |
CN203976674U (en) | Hexalin tripping device in the cyclohexene method preparing cyclohexanone production process | |
CN102583395A (en) | Heat pump rectification method for refining trichlorosilane | |
CN210314061U (en) | Rectification and purification device for synthesizing dimethyl oxalate by carbonylation of coal-made ethylene glycol | |
CN202499718U (en) | Heat pump distillation dividing wall column device for ultrapure trichlorosilane separation | |
CN102617627A (en) | Device and method for continuously separating silicon tetrachloride, propyl trichlorosilane and 3-chloropropyltrichlorosilane |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |