CN102692422A - Metering type high-precision x-ray microscope sample scanning table - Google Patents

Metering type high-precision x-ray microscope sample scanning table Download PDF

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CN102692422A
CN102692422A CN2012102010013A CN201210201001A CN102692422A CN 102692422 A CN102692422 A CN 102692422A CN 2012102010013 A CN2012102010013 A CN 2012102010013A CN 201210201001 A CN201210201001 A CN 201210201001A CN 102692422 A CN102692422 A CN 102692422A
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scanning
platform
error
turntable
run
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CN102692422B (en
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须颖
董友
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Tianjin Sanying Precision Instruments Co ltd
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DONGYING SANYING PRECISION ENGINEERING RESEARCH CENTER
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Abstract

The invention discloses a metering type high-precision x-ray microscope sample scanning table. A scanning rotary table (2) is arranged on a fixed base (1) and is used for providing rotary scanning motion needed by a scanned sample; a three-dimensional positioning platform (6) is fixedly arranged on the upper part of the scanning rotary table (6); a sensor installation seat (3) is arranged outside the fixed base (1); a radial run-out error measuring sensor (4) and an axial run-out error and swing error measuring sensor group (5) are respectively arranged on the sensor installation seat (3); a sample strand (8) is fixed above a y-direction platform. The metering type high-precision x-ray microscope sample scanning table can achieve real-time measuring of radial errors, axial errors, and swing error of a rotary shaft in a rotary process of the sample scanning table; a measured error result can be used for carrying out error correction on the motion of the sample, so that the difficulty of three-dimensional image reconstructing distortion caused by precision error of the sample scanning table can be solved.

Description

A kind of metering type high precision x ray microscope scanning samples platform
Technical field
The invention belongs to the microscopic CT scanning technical field of imaging, particularly a kind of metering type high precision x ray microscope scanning samples platform.
Background technology
Micro-in recent years CT technology comes into one's own in scientific research and industrial circle day by day, and its application has contained a plurality of fields such as new material, semiconductor/microelectronics, oil/mining/geology, archaeology/historical relic, biology/medical treatment, life science, food inspection, space technology, military project/national defence.Therefore, product has the enormous and latent market scale.
Because the characteristics that penetrate of x ray make the measurement of complex parts inner structure become possibility.Just remedied the inadequate natural endowment that traditional fine measuring instruments such as three coordinate measuring machine can only be measured external dimensions.
Fig. 1 is an x ray scanning imaging schematic diagram.Get into imaging system after the x ray that x-ray source sends penetrates sample, can obtain scan image after handling through imaging system.The scanning samples platform must keep x ray beam axis, sample observation central point and imaging system center relative position to remain unchanged in scanning process in theory.In the reality,, in scanning process,, make that above-mentioned requirements is difficult to satisfy, cause the reconstruct of image error or distortion to occur often owing to the beating and swing of rotating shaft because the precision of scanning samples platform limits.Thereby whether the positional precision of the rotating shaft of sample stage exists distortion to play crucial effects to the imaging after scanning.The trueness error of CT scan sample stage is mainly produced in its processing and assembling process by key components and parts; Cause sample observation center in scanning process diameter run-out, axial runout and axis swing to occur; The site error of turntable rotary course shaft will cause the skew of sample position, and then cause image error.The precision of universal scan sample stage generally is difficult to satisfy the demand of high-resolution imaging, makes to have certain distortion between scanning result and the scanned object practical structures, therefore need measure and revise with stagger beating of scan table rotating shaft.Sample stage rotating shaft position error can be divided into five components, promptly along x, y, three directions of z beat and around the swing of x axle and z axle.Because the imaging characteristics of x ray microscopic system; Rotating shaft runout error along the x direction is little to the imaging precision influence with the axis stagger along the z axle; Generally can ignore; The sensing system that disposes among the present invention only measure y and z direction beating with along the axis stagger of x axle, and sample stage revised in the error of these three directions.
Summary of the invention
Fundamental purpose of the present invention provides and a kind ofly can reduce or eliminate the metering type high precision x ray microscope scanning samples platform that is caused scanner distorsion by the positional precision error of turntable rotating shaft.
Technical scheme of the present invention is:
A kind of metering type high precision x ray microscope scanning samples platform; Scanning turntable (2) is installed on the firm banking (1); Scanning turntable (2) provides by the required rotation sweep motion of scanning samples; Scanning turntable (2) top fixed installation three-dimensional localization platform (6); Firm banking (1) outside sensor installation mount pad (3) is installed run-out error survey sensor (4) and axial runout sum of errors stagger survey sensor group (5) respectively on the sensor mount pad (3), specimen holder (8) is fixed on the y direction platform; Axial runout sum of errors stagger survey sensor group (5) comprises two each and every one sensors, and said two sensors are symmetrically distributed along the symcenter of firm banking (1); The mean value of said two sensor output values is the axial runout error of the scanning turntable (2) that records; The difference of said two sensor output values is the stagger of scanning turntable (2); Run-out error survey sensor (4) is used for measuring scanning process and scans the run-out error that turntable (2) rotating shaft generation diameter run-out causes; According to said axial runout error, said stagger, said run-out error, eliminate the image fault that causes by error.
Described scanning samples platform; Said three-dimensional localization platform (6) comprises that three platform z direction platforms that can move freely along x, y, z direction respectively can move along the guide rail that is fixedly mounted on the scanning turntable (2); X direction platform can move along being fixedly mounted on the guide rail of z on platform, and y direction platform can move along being fixedly mounted on the guide rail of x on platform; Through adjusting the position of three platforms, can realize accurate location to three directions of sample scanning position.
Described scanning samples platform, said three-dimensional localization platform (6) adopts bridge architecture, and the y direction moves mainly and in the hollow of scanning turntable (2), moves, and has reduced the height of scanning samples platform.
Measurement data according to radial error survey sensor and axial error and stagger survey sensor; Can adopt the active correction control method that the scanning turntable is carried out error correction, also can adopt mathematical algorithm in the 3-D view restructuring procedure, runout error to be revised.
Description of drawings
Fig. 1 is an x ray microscope scanning imagery schematic diagram;
Fig. 2 is a metering type high precision x ray microscope scanning samples platform structural front view of the present invention;
Fig. 3 is a metering type high precision x ray microscope scanning samples platform structure vertical view of the present invention;
Fig. 4 is a metering type high precision x ray microscope scanning samples structure platform stereographic map of the present invention;
Fig. 5 is an Error Calculation schematic diagram of the present invention.
1 base; 2 scanning turntables; 3 sensor mount pads; 4 run-out error survey sensors; 5 axial runout sum of errors stagger survey sensor groups; 6 three-dimensional localization platforms; 7 spherical displacers; 8 specimen holders.
Embodiment
Below in conjunction with specific embodiment, the present invention is elaborated.
Consult Fig. 2～Fig. 4, scanning turntable 2 is installed on the firm banking 1, scanning turntable 2 tops fixed installation three-dimensional localization platform 6, and the three-dimensional localization platform comprises three platforms that can move freely along x, y, z direction respectively.Z direction platform can move along the guide rail that is fixedly mounted on the scanning turntable 2 during work, and x direction platform can move along being fixedly mounted on the guide rail of z on platform, and y direction platform can move along being fixedly mounted on the guide rail of x on platform.Through adjusting the position of three platforms, can realize accurate location to three directions of sample scanning position.Firm banking 1 outside sensor installation mount pad 3 is installed run-out error survey sensor 4 and axial runout sum of errors stagger survey sensor group 5 respectively on the sensor mount pad 3, specimen holder 8 is fixed on the y direction platform.
Before the scanning, sample can be adjusted in x, y, z three degree of freedom direction through three-dimensional localization platform 6, realizes the accurate location of sample.During scanning samples, can realize rotatablely moving of sample through the scanning turntable 2 that control is installed on the firm banking 1.
Timing signal is placed on specimen holder 8 tops with the spherical displacer 7 of standard, and the spherical displacer 7 of standard is scanned, and measures the site error of spherical displacer 7 in scanning process through projected image, releases each sensor output and the funtcional relationship that scans between turntable 2 errors.When the actual measurement sample, utilize this functional relation,, obtain the site error of actual sample according to reading of each sensor.
Consult Fig. 5, axial runout sum of errors stagger survey sensor group 5 comprises two each and every one sensors, and these two sensors are symmetrically distributed along the symcenter of firm banking 1.The mean value of two sensor output values is axial (y direction of principal axis among the figure) runout error of the scanning turntable 2 that records; The difference of two sensor output values is the stagger of scanning turntable 2.In the course of work, run-out error survey sensor 4 obtains the run-out error of scanning turntable 2 through the beat size of measuring z direction platform.Axial runout sum of errors stagger survey sensor group 5 is placed in scanning samples platform two ends respectively along the z direction; In the scanning process if scan turntable 2 moving of y directions or swing take place; The sample stage position moves to the A2-B2 plane by reference field A1-B1 if be moved or when swinging; Then A2 point and B2 point are the z direction runout error of rotating shaft along the changes in coordinates of z direction; The average of y direction coordinate is the axial runout error of sample stage rotating shaft y direction, and the difference of y direction coordinate is the stagger θ of rotating shaft.
If rotating shaft generation diameter run-out, axial runout and the swing of scanning turntable 2 in the scanning process; There are certain skew or swing between the inner practical structures of two-dimensional imaging image that then obtains behind the scanning imagery and scanning samples; If adopt these two dimensional images that have skew or swing to carry out three-dimensionalreconstruction, must there be distortion in the 3-D view that then generates.The present invention is according to the measuring error of run-out error survey sensor and axial runout sum of errors stagger survey sensor group 5; Can adopt the active correction control method that scanning turntable 2 is carried out error correction; Also can adopt mathematical algorithm in the 3-D view restructuring procedure, runout error to be revised, can reduce or eliminate and cause the scanner distorsion problem by the site error precision of turntable rotating shaft.
If scanning turntable 2 rotating shaft generation diameter run-outs in the scanning process; Then run-out error survey sensor 4 can be measured the size of this error; This error amount is fed back in the controller; Controller control three-dimensional localization platform 6 moves to the runout error reverse direction, and the size of moving displacement equates with runout error, can eliminate the influence of error to image;
If sample stage rotating shaft generation diameter run-out in the scanning process, axial runout and swing, then run-out error survey sensor 4 and axial runout sum of errors stagger survey sensor group 5 can be measured the size of error in real time.If there is error to exist in the scanning process, after then scanning process was accomplished, the image of acquisition was the distortion two dimensional image with image shift or swing; When carrying out three-dimensionalreconstruction; At first the two-dimensional distortion image that scanning is obtained is carried out mathematical algorithm and handle, the error amount of sensor measurement is brought in the two dimensional image algorithm correction formula, eliminate the skew and the swing of two dimensional image; Carry out the three-dimensionalreconstruction of image again, can eliminate the image fault problem that causes by error.
Should be understood that, concerning those of ordinary skills, can improve or conversion, and all these improvement and conversion all should belong to the protection domain of accompanying claims of the present invention according to above-mentioned explanation.

Claims (3)

1. metering type high precision x ray microscope scanning samples platform; It is characterized in that; Scanning turntable (2) is installed on the firm banking (1); Scanning turntable (2) provides by the required rotation sweep motion of scanning samples, scanning turntable (2) top fixed installation three-dimensional localization platform (6), firm banking (1) outside sensor installation mount pad (3); Run-out error survey sensor (4) and axial runout sum of errors stagger survey sensor group (5) are installed respectively on the sensor mount pad (3), and specimen holder (8) is fixed on the y direction platform; Axial runout sum of errors stagger survey sensor group (5) comprises two each and every one sensors, and said two sensors are symmetrically distributed along the symcenter of firm banking (1); The mean value of said two sensor output values is the axial runout error of the scanning turntable (2) that records; The difference of said two sensor output values is the stagger of scanning turntable (2); Run-out error survey sensor (4) is used for measuring scanning process and scans the run-out error that turntable (2) rotating shaft generation diameter run-out causes; According to said axial runout error, said stagger, said run-out error, eliminate the image fault that causes by error.
2. scanning samples platform according to claim 1 is characterized in that, said three-dimensional localization platform (6) comprises three platforms that can move freely along x, y, z direction respectively; Z direction platform can move along the guide rail that is fixedly mounted on the scanning turntable (2), and x direction platform can move along being fixedly mounted on the guide rail of z on platform, and y direction platform can move along being fixedly mounted on the guide rail of x on platform; Through adjusting the position of three platforms, can realize accurate location to three directions of sample scanning position.
3. scanning samples platform according to claim 1 and 2 is characterized in that, three-dimensional localization platform (6) adopts bridge architecture, and the y direction moves mainly and in the hollow of scanning turntable (2), moves, and has reduced the height of scanning samples platform.
CN201210201001.3A 2012-06-18 2012-06-18 Metering type high-precision x-ray microscope sample scanning table Active CN102692422B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759681A (en) * 2014-01-10 2014-04-30 天津大学 Microscopic CT motion error correction method for rotating shaft
CN104597062A (en) * 2015-02-02 2015-05-06 天津三英精密仪器有限公司 Cylindrical beam large visual field X-ray computed tomography (CT) imaging system
CN106248056A (en) * 2016-08-18 2016-12-21 中国科学院嘉兴微电子仪器与设备工程中心 A kind of multiple light courcess scanning detection method
CN106352836A (en) * 2016-08-31 2017-01-25 无锡信欧光电科技有限公司 Precise rotary displacement stage

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354215A (en) * 2003-05-29 2004-12-16 Ihi Aerospace Co Ltd Radiographic nondestructive test equipment
CN1883390A (en) * 2005-06-23 2006-12-27 Ge医疗系统环球技术有限公司 X-ray CT system
CN201328816Y (en) * 2008-12-26 2009-10-21 苏州和君科技发展有限公司 Imaging device based on cone beam reconstruction and with four-degree of freedom object stage
CN101813642A (en) * 2009-12-31 2010-08-25 苏州和君科技发展有限公司 Microscopy CT imaging device with three-free degree motion control and correcting method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354215A (en) * 2003-05-29 2004-12-16 Ihi Aerospace Co Ltd Radiographic nondestructive test equipment
CN1883390A (en) * 2005-06-23 2006-12-27 Ge医疗系统环球技术有限公司 X-ray CT system
CN201328816Y (en) * 2008-12-26 2009-10-21 苏州和君科技发展有限公司 Imaging device based on cone beam reconstruction and with four-degree of freedom object stage
CN101813642A (en) * 2009-12-31 2010-08-25 苏州和君科技发展有限公司 Microscopy CT imaging device with three-free degree motion control and correcting method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103759681A (en) * 2014-01-10 2014-04-30 天津大学 Microscopic CT motion error correction method for rotating shaft
CN103759681B (en) * 2014-01-10 2016-05-11 天津大学 The bearing calibration of micro-CT rotating shaft kinematic error
CN104597062A (en) * 2015-02-02 2015-05-06 天津三英精密仪器有限公司 Cylindrical beam large visual field X-ray computed tomography (CT) imaging system
CN106248056A (en) * 2016-08-18 2016-12-21 中国科学院嘉兴微电子仪器与设备工程中心 A kind of multiple light courcess scanning detection method
CN106352836A (en) * 2016-08-31 2017-01-25 无锡信欧光电科技有限公司 Precise rotary displacement stage

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