CN202631459U - High-precision X-ray microscope scanning sample platform with metering rotating shaft - Google Patents
High-precision X-ray microscope scanning sample platform with metering rotating shaft Download PDFInfo
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- CN202631459U CN202631459U CN 201220287205 CN201220287205U CN202631459U CN 202631459 U CN202631459 U CN 202631459U CN 201220287205 CN201220287205 CN 201220287205 CN 201220287205 U CN201220287205 U CN 201220287205U CN 202631459 U CN202631459 U CN 202631459U
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Abstract
The utility model discloses a high-precision X-ray microscope scanning sample platform with a metering rotating shaft. A scanning rotating platform (2) is arranged on a fixing base (1), and a drive device of the scanning rotating platform (2) is arranged outside the fixing base (1). The drive device is used for driving the scanning rotating platform (2) to rotate, and a three-dimensional positioning platform (6) is fixedly arranged on the upper portion of the scanning rotating platform (2). A sensor installation seat (3) is arranged on the outer side of the fixing seat (1). A Z-direction jumping error measurement sensor (4), an X-direction jumping error measurement sensor (8), a first swing error measurement sensor (5), a second swing measurement sensor (7), and a third swing error measurement sensor (9) are respectively arranged on the sensor installation seat (3). According to measurement errors of sensors, people can adopt a driving amendment control method to proceed with error amending for the scanning rotating platform (2), and also can adopt a mathematical algorithm method to proceed with amending for jumping errors during the process of three-dimensional images reconstruction so as to reduce or remove the problem that scanning images lack fidelity. The problem of lacking fidelity is caused by position error precision of a rotating shaft of the rotating platform.
Description
Technical field
The utility model belongs to the microscopic CT scanning technical field of imaging, particularly a kind of high precision x ray microscope scanning samples platform with metering rotating shaft.
Background technology
Micro-in recent years CT technology comes into one's own in scientific research and industrial circle day by day, and its application has contained a plurality of fields such as new material, semiconductor/microelectronics, oil/mining/geology, archaeology/historical relic, biology/medical treatment, life science, food inspection, space technology, military project/national defence.Therefore, product has the enormous and latent market scale.
Because the characteristics that penetrate of x ray make the measurement of complex parts inner structure become possibility.Just remedied the inadequate natural endowment that traditional fine measuring instruments such as three coordinate measuring machine can only be measured external dimensions.
Fig. 1 is an x ray scanning imaging schematic diagram.Get into imaging system after the x ray that x-ray source sends penetrates sample, can obtain scan image after handling through imaging system.In the reality,, in scanning process,, make that above-mentioned requirements is difficult to satisfy, cause the reconstruct of image error or distortion to occur often owing to the beating and swing of rotating shaft because the precision of scanning samples platform limits.Thereby whether the positional precision of the rotating shaft of sample stage exists distortion to play crucial effects to the imaging after scanning.The trueness error of CT scan sample stage is mainly produced in its processing and assembling process by key components and parts; Cause sample observation center in scanning process diameter run-out, axial runout and axis swing to occur; The site error of turntable rotary course shaft will cause the skew of sample position, and then cause image error.The precision of universal scan sample stage generally is difficult to satisfy the demand of high-resolution imaging, makes to have certain distortion between scanning result and the scanned object practical structures, therefore need measure and revise with stagger beating of scan table rotating shaft.Sample stage rotating shaft position error can be divided into five components, promptly along x, y, three directions of z beat and around the swing of x axle and z axle.Existing scanning samples platform is not considered the influence of these five errors to image reconstruction, causes having certain distortion between scanning result and the scanned object practical structures.
The utility model content
The fundamental purpose of the utility model provides and a kind ofly can reduce or eliminate the high precision x ray microscope scanning samples platform with metering rotating shaft that is caused scanner distorsion by the positional precision error of turntable rotating shaft.
The technical scheme of the utility model is:
A kind of high precision x ray microscope scanning samples platform with metering rotating shaft; Scanning turntable (2) is installed on the firm banking (1); The outside drive unit that scanning turntable (2) is installed of firm banking (1); Driven sweep turntable (2) rotates; Scanning turntable (2) top fixed installation three-dimensional localization platform (6); Firm banking (1) outside sensor installation mount pad (3); Install respectively on the sensor mount pad (3) z to runout error survey sensor (4), x to runout error survey sensor (8), the first stagger survey sensor (5), the second stagger survey sensor (7) and the 3rd stagger survey sensor (9); Z is used for z from the rotating shaft of measuring samples platform to runout error sensor (4) is to runout error radially, and x is used for x from the rotating shaft of measuring samples platform to runout error survey sensor (8) is to runout error radially, and the first stagger survey sensor (5), the second stagger survey sensor (7) and the 3rd stagger survey sensor (9) are used for measuring samples platform rotating shaft axial runout and stagger.
Described high precision x ray microscope scanning samples platform with metering rotating shaft; Said three-dimensional localization platform (6) comprises three platforms that can move freely along x, y, z direction respectively; Z direction platform moves along the guide rail that is fixedly mounted on the scanning turntable (2) during work; X direction platform moves along being fixedly mounted on the guide rail of z on platform, and y direction platform moves along being fixedly mounted on the guide rail of x on platform; Through adjusting the position of three platforms, realize accurate location to three directions of sample scanning position.
Described high precision x ray microscope scanning samples platform with metering rotating shaft; With said scanning turntable (2) center of circle is benchmark; The first stagger survey sensor (5) and 90 ° of second stagger survey sensor (7) angles; The second stagger survey sensor (7) becomes 90 ° with the 3rd stagger survey sensor (9) angle, the first stagger survey sensor (5) and 180 ° of the 3rd stagger survey sensor (9) angles, and specimen holder (10) is fixed on the y direction platform.
According to z to runout error survey sensor 4, x size to runout error survey sensor 8, the first stagger survey sensor 5, the second stagger survey sensor 7 and 9 pairs of scanning turntable 2 rotating shaft measuring error of the 3rd stagger survey sensor; Can adopt the active correction control method that scanning turntable 2 is carried out error correction; Also can adopt mathematical algorithm in the 3-D view restructuring procedure, runout error to be revised, can reduce or eliminate and cause the scanner distorsion problem by the site error precision of turntable rotating shaft.
Description of drawings
Fig. 1 is an x ray microscope scanning imagery schematic diagram;
Fig. 2 is the high precision x ray microscope scanning samples platform front view that the utlity model has the metering rotating shaft;
Fig. 3 is the high precision x ray microscope scanning samples platform vertical view that the utlity model has the metering rotating shaft;
Fig. 4 is the high precision x ray microscope scanning samples platform stereographic map that the utlity model has the metering rotating shaft;
Fig. 5 is the utility model Error Calculation schematic diagram;
1 firm banking; 2 scanning turntables; 3 sensor mount pads; 4z is to the runout error survey sensor; 5 first stagger survey sensors; 6 three-dimensional localization platforms; 7 second stagger survey sensors; 8x is to the runout error survey sensor; 9 the 3rd stagger survey sensors; 10 specimen holders; 11 spherical displacers.
Embodiment
Below in conjunction with specific embodiment, the utility model is elaborated.
Consult Fig. 2～Fig. 4, scanning turntable 2 is installed on the firm banking 1, the firm banking 1 outside drive unit that scanning turntable 2 is installed, but driven sweep turntable 2 rotates.Scanning turntable 2 tops fixed installation three-dimensional localization platform 6; Three-dimensional localization platform 6 comprises three platforms that can move freely along x, y, z direction respectively; Z direction platform can move along the guide rail that is fixedly mounted on the scanning turntable 2 during work; X direction platform can move along being fixedly mounted on the guide rail of z on platform, and y direction platform can move along being fixedly mounted on the guide rail of x on platform.Through adjusting the position of three platforms, can realize accurate location to three directions of sample scanning position.Firm banking 1 outside sensor installation mount pad 3; Install respectively on the sensor mount pad 3 z to runout error survey sensor 4, x to runout error survey sensor 8, the first stagger survey sensor 5, the second stagger survey sensor 7 and the 3rd stagger survey sensor 9; But z to the z of runout error sensor 4 measuring samples platform rotating shafts to runout error radially; But x to the x of runout error survey sensor 8 measuring samples platform rotating shafts to runout error radially; But the first stagger survey sensor 5, the second stagger survey sensor 7 and the 3rd stagger survey sensor 9 measuring samples platform rotating shaft axial runout and staggers; With scanning turntable 2 centers of circle is benchmark; 90 ° of the first stagger survey sensor 5 and the second stagger survey sensor, 7 angles; The second stagger survey sensor 7 becomes 180 ° of 90 ° of first stagger survey sensor 5 and the 3rd stagger survey sensor 9 angles with the 3rd stagger survey sensor 9 angles, specimen holder 10 is fixed on the y direction platform.
The first stagger survey sensor 5, the second stagger survey sensor 7 and the 3rd stagger survey sensor 9 are installed in directly over the sample stage respectively; Axial error runout error and swing to sample stage are measured; Adopt the variation of the position coordinates of three points on above-mentioned three sensors difference measuring samples platform; Come axial runout (y to translation) error and stagger (inclination of the sample stage) size of the rotating shaft of calculation sample platform according to the variation of these three some position coordinateses; For example: if the y of the sample stage that these three error measures go out is consistent to coordinate size, then the interpret sample platform only taken place y to axial translation, do not have swing and take place; When measuring not of uniform size the causing of y coordinate of three points; Certain inclination has taken place in the interpret sample platform, and the angle [alpha] of inclination and β can come out through the y coordinate Calculation of these three points, adopts such transducer arrangements could accurately calculate the sample stage error change.
Sample stage when work, can realize rotatablely moving of sample through the drive unit that control is installed in the scanning samples platform 2 in firm banking 1 outside; The x of three-dimensional localization platform 6, y, z three degrees of freedom of movement can adopt the mode of independent control to carry out the independent adjusting of each degree of freedom.
Timing signal is placed on specimen holder 10 tops with the spherical displacer 11 of standard, and the spherical displacer 11 of standard is scanned, and measures the site error of spherical displacer 11 in scanning process through projected image, releases the funtcional relationship between sensor output and the turntable error.When the actual measurement sample, utilize this functional relation,, obtain the site error of actual sample according to reading of sensor.
Consult Fig. 5, in the sample stage course of work, z and x obtain the run-out error size of scanning turntable 2 rotating shafts through the beat size of measuring z and x direction platform to the error measure sensor.In the scanning process if moving of y direction or swing take place in sample stage, establish be moved or swing appearance after, the position of measurement point is changed to A2, B2, C2 by A1, B1, the C1 of reference field.The coordinate that coordinate of ordering according to A2 and B2 are ordered can be obtained the coordinate that D2 is ordered; The y that D2 point y seat target value is the rotating shaft of scanning samples platform is to runout error; The difference of A2 point and B2 point z coordinate is the z of scanning turntable 2 rotating shafts to runout error; The x that the difference of A2 point and B2 point x coordinate is rotating shaft is to runout error radially; The ratio of the difference of B2 point and A2 point y coordinate and the difference of z coordinate is scanning samples axis stagger α in the yoz plane, and the ratio of the difference of D2 point and C2 point y coordinate and the difference of z coordinate is scanning samples axis stagger β in the yoz plane, can accurately calculate 5 error size of scanning samples platform thus.(A2, B2, C2 are three summits of top sloped triangular shape for A1 among the figure, three summits of bottom triangle during B1, C1 promptly scheme, and D1, D2 are the intersection points of two straight lines and y axle.)
According to z to runout error survey sensor 4, x size to runout error survey sensor 8, the first stagger survey sensor 5, the second stagger survey sensor 7 and 9 pairs of scanning turntable 2 rotating shaft measuring error of the 3rd stagger survey sensor; Can adopt the active correction control method that scanning turntable 2 is carried out error correction; Also can adopt mathematical algorithm in the 3-D view restructuring procedure, runout error to be revised, can reduce or eliminate and cause the scanner distorsion problem by the site error precision of turntable rotating shaft.When carrying out three-dimensionalreconstruction; At first the two-dimensional distortion image that scanning is obtained being carried out mathematical algorithm handles; The error amount of sensor measurement is brought in the two dimensional image algorithm correction formula; Eliminate the skew and the swing of two dimensional image, carry out the three-dimensionalreconstruction of image again, can eliminate the image fault problem that causes by error.
Should be understood that, concerning those of ordinary skills, can improve or conversion, and all these improvement and conversion all should belong to the protection domain of the utility model accompanying claims according to above-mentioned explanation.
Claims (3)
1. one kind has the high precision x ray microscope scanning samples platform that measures rotating shaft; It is characterized in that; Scanning turntable (2) is installed on the firm banking (1); The outside drive unit that scanning turntable (2) is installed of firm banking (1); Driven sweep turntable (2) rotates; Scanning turntable (2) top fixed installation three-dimensional localization platform (6); Firm banking (1) outside sensor installation mount pad (3), install respectively on the sensor mount pad (3) z to runout error survey sensor (4), x to runout error survey sensor (8), the first stagger survey sensor (5), the second stagger survey sensor (7) and the 3rd stagger survey sensor (9), z is used for z from the rotating shaft of measuring samples platform to runout error sensor (4) is to runout error radially; X is used for x from the rotating shaft of measuring samples platform to runout error survey sensor (8) is to runout error radially, and the first stagger survey sensor (5), the second stagger survey sensor (7) and the 3rd stagger survey sensor (9) are used for measuring samples platform rotating shaft axial runout and stagger.
2. the high precision x ray microscope scanning samples platform with metering rotating shaft according to claim 1 is characterized in that said three-dimensional localization platform (6) comprises three platforms that can move freely along x, y, z direction respectively.
3. the high precision x ray microscope scanning samples platform with metering rotating shaft according to claim 1; It is characterized in that; With said scanning turntable (2) center of circle is benchmark; The first stagger survey sensor (5) and 90 ° of second stagger survey sensor (7) angles; The second stagger survey sensor (7) becomes 90 ° with the 3rd stagger survey sensor (9) angle, the first stagger survey sensor (5) and 180 ° of the 3rd stagger survey sensor (9) angles, and specimen holder (10) is fixed on the y direction platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220287205 CN202631459U (en) | 2012-06-18 | 2012-06-18 | High-precision X-ray microscope scanning sample platform with metering rotating shaft |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220287205 CN202631459U (en) | 2012-06-18 | 2012-06-18 | High-precision X-ray microscope scanning sample platform with metering rotating shaft |
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| Publication Number | Publication Date |
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| CN202631459U true CN202631459U (en) | 2012-12-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220287205 Expired - Fee Related CN202631459U (en) | 2012-06-18 | 2012-06-18 | High-precision X-ray microscope scanning sample platform with metering rotating shaft |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102692421A (en) * | 2012-06-18 | 2012-09-26 | 东营市三英精密工程研究中心 | High-precision x-ray microscope sample scanning table with metering rotary shaft |
| US9393089B1 (en) | 2015-10-23 | 2016-07-19 | King Saud University | Stabilizing device for dental crowns |
-
2012
- 2012-06-18 CN CN 201220287205 patent/CN202631459U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102692421A (en) * | 2012-06-18 | 2012-09-26 | 东营市三英精密工程研究中心 | High-precision x-ray microscope sample scanning table with metering rotary shaft |
| CN102692421B (en) * | 2012-06-18 | 2014-07-23 | 天津三英精密仪器有限公司 | High-precision x-ray microscope sample scanning table with metering rotary shaft |
| US9393089B1 (en) | 2015-10-23 | 2016-07-19 | King Saud University | Stabilizing device for dental crowns |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121226 Termination date: 20140618 |
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| EXPY | Termination of patent right or utility model |