CN101813642A - Microscopy CT imaging device with three-free degree motion control and correcting method thereof - Google Patents
Microscopy CT imaging device with three-free degree motion control and correcting method thereof Download PDFInfo
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- CN101813642A CN101813642A CN200910113648A CN200910113648A CN101813642A CN 101813642 A CN101813642 A CN 101813642A CN 200910113648 A CN200910113648 A CN 200910113648A CN 200910113648 A CN200910113648 A CN 200910113648A CN 101813642 A CN101813642 A CN 101813642A
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Abstract
The invention provides a microscopy CT imaging device with three-free degree motion control and a correcting method thereof. The microscopy CT imaging device comprises an X-ray source (1) and an X-ray source detector (2), wherein a material-carrying table (3) is arranged between the X-ray source (1) and the X-ray source detector (2). The device is characterized in that the material-carrying table is externally provided with a driving device for driving the material-carrying table to move along the horizontal direction, the vertical direction and the rotation direction. The device solves the problems of serious shake, large error and low precision when the common microscopy CT mechanical device moves; leads the three-free degree direction motion to be more stable, the speed to be more even, and the precision degree to be higher; has better radiation shield effect; solves the problem of the heat dissipation of the X-ray source and the X-ray source detector; solves the problem that the X-ray source, the X-ray source detector and a material-rotating center are positioned at one line; and lays good foundations for the subsequent image acquisition and image reconstruction.
Description
Technical field
The invention belongs to micro-X ray computer tomography technology field, particularly a kind of Three Degree Of Freedom control system of microscopy CT imaging device.
Background technology
The seventies in 20th century occurred X computer on line fault imaging (x-ray computedtomography, x-ray CT or CT), it is the product that the computer technology of developing by leaps and bounds modern age and X ray examination technology combine.The Hounsfield of Britain EMI company studied the successfully first title portion CT scan machine in 1971, first whole body CT machine of U.S. Ledkey design in 1975 comes out, it is with the X wire harness human body to be scanned, obtain information, machine is handled and is obtained reconstructed image as calculated, thereby significantly enlarged the examination scope of human body, improved the recall rate and the accurate rate of diagnosis of pathology.This diagnostic value height, no pain, no wound, non-hazardous diagnostic method are important breakthroughs in the radiodiagnosis field.
But the spatial resolution of Medical CT can only reach millimeter or submillimeter level level at present, though can satisfy the needs of naked eyes macroscopic view pathological changes diagnosis, there is bigger gap in the diagnosis of learning with nothing wound micro-imaging.Particularly some little tumour (its size is at the micron even the sub-micron order of magnitude) is difficult to observation with present medical image technology and obtains, but these little tumours often has very big danger.Therefore people expect that urgently resolution reaches the appearance of the medical imaging device of micron even submicron order.
Make a general survey of the development of CT technology, the increase of the multi-layer spiral CT detector number of plies helps gathering wider volume information and improves picking rate, but because the restriction of process conditions, the increase of the CT detector number of plies exists sizable bottleneck, and the further raising of spatial resolution is suffered restraints.The Micro CT (being also referred to as micro-CT, little focus CT) that adopts pencil-beam to rebuild has brought new opportunity for the raising of CT resolution.
What the fan-shaped X wire harness (Fan Beam) that generally adopts with Clinical CT was different is that Micro CT adopts taper X wire harness (Cone Beam).Adopt pencil-beam not only can obtain real isotropic volume images, improve spatial resolution, improve the ray utilization factor, and when gathering identical 3D rendering speed far away faster than fladellum CT.Fan-shaped CT compares with tradition, and Micro CT can not only improve sweep velocity, reaches the effect of dynamic imaging; And Cone-Beam CT can also reduce X-radiation dosage, and Cone-Beam CT is once throwed the exit dose that dosage only is equivalent to the 1/30-1/40 of traditional fan-shaped CT, is equivalent to the result of tens scannings of fan beam CT around the data volume of object one week scanning.
Micro CT has adopted the little focus X-ray ray tube different with common Clinical CT, and resolution is only second to the level of synchronous acceleration X line imaging equipment up to several microns, has good " micro-" effect.The size of a cell, average out to 10 μ m-50 μ m; And the size of organelle is about 0.2 μ m-1 μ m.So micro-CT just " can see the CT of tissue and cell image ".Yet the problem that its high resolving power is but brought is that the volume of scanning samples is very little, has only several centimetres.
Summary of the invention
Fundamental purpose of the present invention has been to provide a kind of microscopy CT imaging device with three-degree-of-freedom motion control, solve the problem that general micro-CT mechanical hook-up motion jitter is serious, error is big, precision is low, and taken into account the heat dissipation problem of radiation protection and x-ray source and X-ray detector.
In order to solve these problems of the prior art, technical scheme provided by the invention is as follows:
A kind of microscopy CT imaging device with three-degree-of-freedom motion control comprises x-ray source, X-ray detector; Between described x-ray source, X-ray detector objective table is set, it is characterized in that described objective table arranged outside driving objective table in the horizontal direction, the drive unit of vertical direction, sense of rotation motion.
Preferably, described equipment also comprises seal box, in the described seal box X-ray detector is set, and forms airtight chamber with x-ray source, objective table; Described objective table rotating shaft center, x-ray source, the same straight line of X-ray detector.
Preferably, described X-ray detector is arranged on the detector adjustable plate in the seal box, described x-ray source, detector adjustable plate respectively with the seal box bolt, and pad is established the adjusting of spring packing ring between detector adjustable plate and seal box, x-ray source and seal box.
Preferably, described objective table lower end is provided with the objective table rotating shaft, described objective table lower end is connected with drive unit, and described drive unit comprises the rotary drive unit that horizontal drive unit that the driving objective table horizontal direction moves, vertical drive units that the driving objective table vertical direction moves and driving objective table rotate to an angle.
Preferably, described horizontal drive unit comprises first drive motor, and the described objective table outside connects horizontal rotating shaft, and described first drive motor is connected driving objective table by horizontal rotating shaft with objective table and moves horizontally.
Preferably, described vertical drive units comprises second drive motor and driven spindle, and described drive shaft is engaged with the vertical rotation axis that is connected with objective table, sheathed synchronous band between the transmission shaft of described second drive motor and driven spindle.
Preferably, described rotary drive unit comprises the 3rd drive motor, and described the 3rd drive motor is a stepper motor, and described stepper motor is connected transmission driving objective table rotating shaft rotation with the objective table rotating shaft that the objective table lower end is provided with.
Preferably, in the described seal box stop means is set, described stop means is arranged on the stroke that objective table carries out horizontal direction, vertical direction and sense of rotation.
Preferably, described drive unit sets up and is installed on system's skeleton, described system arranged outside safe shielding apparatus; Described safe shielding apparatus is the stereotype closed box, the groove milling of described closed box inwall, and on the housing of equipment, offer machine box door.
Another object of the present invention is to provide a kind of claim 1 described calibration steps with microscopy CT imaging device of three-degree-of-freedom motion control, it is characterized in that described method is included in the anti-dazzling screen in objective table fixed cross slit, the step of calibrating by the planimetric position of adjusting x-ray source, X-ray detector or the jerk value of objective table end face when detecting objective table and rotatablely moving, the step of utilizing the jerk value that obtains to calibrate.
Three Degree Of Freedom of the present invention (horizontal direction, vertical direction, sense of rotation) motion is controlled by drive motor, be preferably by monolithic processor controlled stepper motor, be responsible for realizing horizontal direction (+) motion, (-) motion of objective table, be responsible for vertical direction (+) motion, (-) motion, be responsible for rotation continuously (per step is 0.1s at interval, rotates 0.9 degree or 1.8 degree at every turn), single step rotation (arbitrarily angled between the 0-360 degree).When the objective table horizontal rotating shaft moves in the horizontal direction, all need leave certain distance, in case therefore wound x-ray source and X-ray detector are equipped with stop means with x-ray source and X-ray detector.Can software limit, on upper computer software, specify; Can be spacing by sensor, adopt corresponding hall device to realize; More direct be adopt spacing firmly, by increasing by two Luo Gang, in case under the situation of software limit and the spacing inefficacy of Hall, effectively protect radiographic source and detector not to be wounded in two-stage; The objective table rotating shaft also need have stop means between the two ends up and down when vertical direction moves.
X-ray source center, objective table rotating shaft center, X-ray detector center three are on same straight line, when skew takes place at objective table rotating shaft center, can detect the degrees of offset of objective table by the laser calibration method, regulate probe support plate and fixedly the nut of objective table it is in a straight line.The X-ray detector plane should as out of plumb, can be regulated by the back up pad of fixed detector (translation, rotation) perpendicular to the line at x-ray source center and objective table rotating shaft center.
Design and installation has machine box door on the control system shell, and machine box door is accomplished not have X ray with the casing joining place and revealed.Door switch connects the power switch of x-ray source, and only x-ray source could be launched X ray after the machine box door safety shutdown.On the door alarm lamp is installed, bright in meetings such as door do not have to report to the police under safety shutdown or other dangerous situations.The present invention is that 130KV, maximum current are the microfocus X-ray source of 123uA for maximum voltage, at principal direction 1m place, 40cm place in side carries out closed processes with 2mm stereotype shielded box respectively, the groove milling of shielded box inwall, wide 3mm, dark 1.5mm, interval 2m, can protecting on every side, x-ray dose rate reaches in the radiation protection safety standard 0.2uSv/h of national regulation.
Beneficial effect of the present invention
1. use the enlargement factor of device of the present invention, change the spatial resolution of image with this by the position control image of adjusting objective table horizontal direction; By regulating the position of objective table vertical direction, in conjunction with long target object scanning algorithm, x-ray imaging and cross sectional reconstruction that traditional Micro-CT is difficult to accomplish be can realize, scanning and reconstruction also can be realized certain particular location of scanning object to the general objective object; By the control to rotatablely moving, as gathering a projected image after single step rotation 0.9 degree, rotating a circle to obtain the projected image of 400 different angles.
In this device in the horizontal direction (A degree of freedom) and vertical direction (B degree of freedom) stop means is installed, spacingly comprise that software limit, sensor are spacing, hardware limit etc.Software limit is exactly to set the maximal value of the stroke of A and B degree of freedom in the upper computer software control program, can stop the issuable situation to the machine infringement of maloperation on host computer; Sensor is spacing to be to utilize hall device spacing, utilizes the principle of hall device to carry out spacing at the two ends of vertical direction and the two ends installation hall device of horizontal direction respectively; Hardware limit, Luo Gang is installed at the two ends of two ends and vertical direction in the horizontal direction, under the situation that current two kinds of methods all lost efficacy, forces spacing.
3. the casing of this device is equipped with machine box door, and machine box door is accomplished not have X ray with the casing joining place and revealed.Door switch connects the power switch of x-ray source, and only x-ray source could be launched X ray after the machine box door safety shutdown.On the door alarm lamp is installed, bright in meetings such as door do not have to report to the police under safety shutdown or other dangerous situations.The outlet panel is arranged behind the casing, and the power lead of x-ray source, X-ray detector, mechanism system, data line, ground wire plug are listed on the outlet panel, convenient disassembly.
4. X ray not only penetrates from the x-ray source focus in this device, and whole head all has X ray to penetrate, and principal direction is for being the pencil-beam at center with the focus, and its radiation protection is had relatively high expectations.This device is that 130KV, maximum current are the microfocus X-ray source of 123uA for maximum voltage, at principal direction 1m place, 40cm place in side carries out closed processes with 2mm stereotype shielded box respectively, can protecting on every side, x-ray dose rate reaches in the radiation protection safety standard 0.2uSv/h of national regulation.
In sum, present device has been improved traditional technique device that is used for micro-CT imaging, it is the microscopy CT imaging device of the accurate band protective device of novel Three Degree Of Freedom, the motion of three degree of freedom direction is more stable, speed is more even, degree of accuracy is higher, better radiation shield effect is arranged, solved the heat dissipation problem of x-ray source and X-ray detector, solved x-ray source and X-ray detector and object rotation center problem, can provide good assurance for follow-up image acquisition, image reconstruction at a line.
Description of drawings
Below in conjunction with drawings and Examples the present invention is further described:
Fig. 1 is the structural representation of the seal box of the microscopy CT imaging device of the embodiment of the invention with three-degree-of-freedom motion control;
Fig. 2 is that the A-A of Fig. 1 is to synoptic diagram;
Fig. 3 is the cross-sectional view that the embodiment of the invention has the microscopy CT imaging device of three-degree-of-freedom motion control;
Fig. 4 is another cross-sectional view that the embodiment of the invention has the microscopy CT imaging device of three-degree-of-freedom motion control;
Fig. 5 be the microscopy CT imaging device of the embodiment of the invention with three-degree-of-freedom motion control another cross-sectional view.
Wherein, 1 is x-ray source, and 2 is X-ray detector; 3 is objective table;
Embodiment
For the technical scheme of more detailed statement foregoing invention, below enumerate specific embodiment by the inventor and come description effect; It is emphasized that these embodiment are used to the present invention is described and are not limited to limit the scope of the invention.
Comprise
Embodiment such as Fig. 1～shown in Figure 5, the microscopy CT imaging device that this has three-degree-of-freedom motion control comprises x-ray source 1, X-ray detector 2, seal box 5, the seal box that is used to install x-ray source and X-ray detector, system's skeleton, machine box door, safe shielding apparatus, external frame etc.; Described x-ray source 1,2 of X-ray detectors are provided with objective table 3, described objective table arranged outside driving objective table in the horizontal direction, the drive unit of vertical direction, sense of rotation motion.X-ray detector 2 is set in the described seal box, and forms airtight chamber with x-ray source 1, objective table 3; Described objective table 3 rotating shaft centers, x-ray source 1, X-ray detector 2 same straight lines.Described X-ray detector 2 is arranged on the detector adjustable plate 21 in the seal box 5, described x-ray source 1, detector adjustable plate 21 respectively with seal box 5 bolt, and pad is established the spring packing ring and is regulated between detector adjustable plate 21 and seal box 5, x-ray source 1 and seal box.
Objective table 3 lower ends are provided with the objective table rotating shaft, described objective table 3 lower ends are connected with drive unit, and described drive unit comprises the rotary drive unit that horizontal drive unit that the driving objective table horizontal direction moves, vertical drive units that the driving objective table vertical direction moves and driving objective table rotate to an angle.Described horizontal drive unit comprises first drive motor 41, and the described objective table outside connects horizontal rotating shaft 42, and described first drive motor 41 is connected driving objective table by horizontal rotating shaft 42 with objective table and moves horizontally.Described vertical drive units comprises second drive motor 43 and driven spindle 44, and described drive shaft is engaged with the vertical rotation axis 45 that is connected with objective table, 44 sheathed synchronous bands of the transmission shaft of described second drive motor 42 and driven spindle.Described rotary drive unit comprises the 3rd drive motor 46, and described the 3rd drive motor 46 is a stepper motor, and described stepper motor is connected transmission driving objective table rotating shaft rotation with the objective table rotating shaft that the objective table lower end is provided with.
Stop means is set in the seal box, and described stop means is arranged on the stroke that objective table carries out horizontal direction, vertical direction and sense of rotation.Described drive unit sets up and is installed on system's skeleton, described system arranged outside safe shielding apparatus; Described safe shielding apparatus is the stereotype closed box, the groove milling of described closed box inwall, and on the housing of equipment, offer machine box door.
In CT rebuilds, need the accurate projection of sample under different angles.In order to reach this purpose, present embodiment has designed the kinetic control system of Three Degree Of Freedom, comprises drive unit, and drive unit is arranged on system's skeleton, drive unit arranged outside radiation protecting systems.This control desk has three degree of freedom: horizontal direction, vertical direction and rotation.
Horizontal direction (A degree of freedom), the distance between x-ray source and the X detector is 315mm, distance is 265mm between x-ray source and the control system rotating shaft.The horizontal direction stroke is 300mm, and kinematic accuracy is 0.01mm.The motion of objective table rotating shaft between X-ray detector and x-ray source point-blank, and all need leave certain distance with x-ray source and X-ray detector, prevent to wound x-ray source and X-ray detector need have stop means (to comprise software limit-specify on upper computer software; Sensor is spacing-hall device; Spacing firmly-by increasing by two Luo Gang, in case under the situation of software limit and the spacing inefficacy of Hall, effectively protect radiographic source and detector not to be wounded) in two-stage.
Objective table vertical direction (B degree of freedom) stroke is 200mm, and kinematic accuracy is 0.01mm, and the maximum length of allow placing object is 160mm, need have stop means (to comprise software limit-specify on upper computer software up and down between the two ends; Sensor is spacing-hall device; Spacing firmly-by increasing by two Luo Gang) in two-stage.Objective table rotation (C degree of freedom) is rotated with the multiple of 0.9 degree or 0.9 degree, and rotation precision is 0.036 degree.The rotation process shaft should be able to be at the uniform velocity and smooth rotation, and it is controlled to rotate biased error.The objective table rotating shaft can be changed flexibly, adapting to the different objects needs, and changes the back and fits closely, and is loosening, do not influence rotation precision.
X-ray source center, objective table rotating shaft center, X-ray detector center three are on same straight line, and the X-ray detector plane is perpendicular to the line at x-ray source center and objective table rotating shaft center.As out of plumb, can simply adjust.When skew takes place at objective table rotating shaft center, can detect the degrees of offset of objective table by the laser calibration method, regulate probe support plate and fixedly the nut of objective table it is in a straight line.The back up pad of fixed detector should adjustable (comprising on the vertical plane of vertical direction, x-ray source center and the X-ray detector line of centres).
Design and installation machine box door on the kinetic control system shell has switch on the door.The machine box door switch connects the power switch of x-ray source, if door shuts, then x-ray source can be opened, otherwise can not open.Machine box door is controlled by upper computer software, and Men Shangying has lock and alarm lamp.Should there be wire hole the casing back, makes things convenient for power lead, data line and the ground wire of x-ray source, detector, mechanism system.The mounting bracket of X line collimating apparatus and grid is installed between x-ray source and X-ray detector in addition.
Consider the harmfulness of x-ray source to biology, whole kinetic control system is provided with the radiation protection measure, the groove milling of shielded box inwall, and wide 3mm, dark 1.5mm, interval 2mm, the radiation standard of X ray should be no more than 0.2uSR/h according to national safety standard.
Above all directions motion (horizontal direction, vertical direction, sense of rotation) stepper motor is by Single-chip Controlling, be responsible for horizontal direction (+) motion, (-) motion, be responsible for vertical direction (+) motion, (-) motion, be responsible for rotation continuously (per step is 0.1s at interval, rotates 0.9 degree or 1.8 degree at every turn), single step rotation (arbitrarily angled between the 0-360 degree).After requiring motion to put in place feedback signal need be arranged, need return corresponding fault-signal when situation such as being beyond the boundary, driver malfunction, Men Wei are in closed condition, communication format is incorrect as occurring to finish, moving.
X-ray source is a microfocus X-ray source, and adopts the radiographic source of micron order focus size usually, and the focus size of x-ray source is one of factor of decision systems spatial resolution.Adopt the radiographic source of 5 microns sizes of focus in the native system.Whole radiation source module is controlled with the RS232 serial ports by host computer, and the serial ports parameter is set to 38400, N, 8,1.Control indexs such as radiogenic voltage, electric current, power, switch in real time by serial ports.Kinetic control system three degree of freedom direction has three step motor drive, and stepper motor is controlled by single-chip microcomputer, and single-chip microcomputer and host computer are by serial communication, and the serial ports parameter is set to 9600, N, 8,1.
Detector is the high resolution flat detector, and (amorphous Silicon, (Thin FilmTransistor, TFT) array constitutes a-Si) to add thin film transistor (TFT) to coat the amorphous silicon layer of photodiode effect by scintillator or luminescent coating.See through the incident X line behind the subject, the exciting light electric diode produces electric current, thereupon just at the electric capacity upper integral formation store charge of photodiode self.The sub-energy of incident X linear light in the amounts of stored charge of each pixel and the corresponding with it scope is directly proportional with quantity.The electric charge of output is by being converted to the output of 12 position digital signals after the A/D converter.The resolution sizes of institute's images acquired is 1000 * 1000 (H * W).
This kinetic control system is applied in the Micro CT system.Can correct and regulate x-ray source, objective table rotation center, detector center by the following method point-blank.The anti-dazzling screen of the wide cross gap of 0.2mm is installed on movable member, lasing light emitter is installed, adjust CCD and make luminous point in the center at the A point.Mobile movable member is checked CCD imaging figure, luminous point shift position＜0.5mm.After adjusting, lasing light emitter removed change x-ray source, make luminous point in the CCD center.And objective table face runout detection method: check the axial runout of objective table, objective table is done rotation, observes jerk value＜3 μ of μ table.
Three stepper motors are all by Single-chip Controlling, and single-chip microcomputer provides serial ports to be used for communicating by letter with PC.Thereby PC is by the motion of serial ports and single chip communication control step motor, the realization level, vertically, the rotation three degrees of freedom of movement.X-ray source, rotatable stage, X-ray detector assemble up by shown in Figure 1, can adjust the position of X-ray detector by regulating X-ray detector balance plate behind, so that corrected X radiographic source, X-ray detector and objective table rotation center are point-blank.
The present invention takes into full account the application-specific of Micro-CT, designed a cover control system especially, comprise three-degree-of-freedom motion system, seal box (being used to install x-ray source and X-ray detector), system's skeleton, machine box door, safe shielding apparatus, external frame etc., accomplish that imaging is accurate, Installation and Debugging convenient, safety simple to operate.
Above-mentioned example only is explanation technical conceive of the present invention and characteristics, and its purpose is to allow the people that is familiar with this technology can understand content of the present invention and also can implements, and can not limit protection scope of the present invention with this.All equivalent transformations that spirit is done according to the present invention or modification all should be encompassed within protection scope of the present invention.
Claims (10)
1. the microscopy CT imaging device with three-degree-of-freedom motion control comprises x-ray source (1), X-ray detector (2); Between described x-ray source (1), X-ray detector (2) objective table (3) is set, it is characterized in that described objective table arranged outside driving objective table in the horizontal direction, the drive unit of vertical direction, sense of rotation motion.
2. according to the described microscopy CT imaging device of claim 1 with three-degree-of-freedom motion control, it is characterized in that described equipment also comprises seal box (5), X-ray detector (2) is set in the described seal box, and forms airtight chamber with x-ray source (1), objective table (3); Described objective table (3) rotating shaft center, x-ray source (1), the same straight line of X-ray detector (2).
3. according to the described microscopy CT imaging device of claim 2 with three-degree-of-freedom motion control, it is characterized in that described X-ray detector (2) is arranged on the interior detector adjustable plate (21) of seal box (5), described x-ray source (1), detector adjustable plate (21) respectively with seal box (5) bolt, and pad is established the spring packing ring and is regulated between detector adjustable plate (21) and seal box (5), x-ray source (1) and seal box.
4. according to the described microscopy CT imaging device of claim 1 with three-degree-of-freedom motion control, it is characterized in that described objective table (3) lower end is provided with the objective table rotating shaft, described objective table (3) lower end is connected with drive unit, and described drive unit comprises the rotary drive unit that horizontal drive unit that the driving objective table horizontal direction moves, vertical drive units that the driving objective table vertical direction moves and driving objective table rotate to an angle.
5. according to the described microscopy CT imaging device of claim 4 with three-degree-of-freedom motion control, it is characterized in that described horizontal drive unit comprises first drive motor (41), the described objective table outside connects horizontal rotating shaft (42), and described first drive motor (41) is connected driving objective table by horizontal rotating shaft (42) with objective table and moves horizontally.
6. according to the described microscopy CT imaging device of claim 4 with three-degree-of-freedom motion control, it is characterized in that described vertical drive units comprises second drive motor (43) and driven spindle (44), described drive shaft is engaged with the vertical rotation axis (45) that is connected with objective table, sheathed synchronous band between the transmission shaft of described second drive motor (42) and driven spindle (44).
7. according to the described microscopy CT imaging device of claim 4 with three-degree-of-freedom motion control, it is characterized in that described rotary drive unit comprises the 3rd drive motor (46), described the 3rd drive motor is a stepper motor, and described stepper motor is connected transmission driving objective table rotating shaft rotation with the objective table rotating shaft that the objective table lower end is provided with.
8. according to the described microscopy CT imaging device with three-degree-of-freedom motion control of claim 2, it is characterized in that in the described seal box stop means being set, described stop means is arranged on the stroke that objective table carries out horizontal direction, vertical direction and sense of rotation.
9. according to the described microscopy CT imaging device of claim 2, it is characterized in that described drive unit sets up to be installed on system's skeleton (6) described system's arranged outside safe shielding apparatus (7) with three-degree-of-freedom motion control; Described safe shielding apparatus (7) is the stereotype closed box, the groove milling of described closed box inwall, and on the housing of equipment, offer machine box door (8).
10. the described calibration steps of a claim 1 with microscopy CT imaging device of three-degree-of-freedom motion control, it is characterized in that described method is included in the anti-dazzling screen in objective table fixed cross slit, the step of calibrating by the planimetric position of adjusting x-ray source, X-ray detector or the jerk value of objective table end face when detecting objective table and rotatablely moving, the step of utilizing the jerk value that obtains to calibrate.
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