CN102681046A - Method for preparing large-area NOA73 curved-surface micro lens array - Google Patents
Method for preparing large-area NOA73 curved-surface micro lens array Download PDFInfo
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- CN102681046A CN102681046A CN2012101531329A CN201210153132A CN102681046A CN 102681046 A CN102681046 A CN 102681046A CN 2012101531329 A CN2012101531329 A CN 2012101531329A CN 201210153132 A CN201210153132 A CN 201210153132A CN 102681046 A CN102681046 A CN 102681046A
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Abstract
The invention relates to a method for preparing a large-area NOA73 curved-surface micro lens array, and aims to solve the problems that the conventional micro lens array is manufactured complicatedly, the light transmittance is low, and the practicability is low because an optical fiber is inserted inconveniently. The method comprises the following steps of: preparing a polydimethylsiloxane (PDMS) negative model with a concave lens structure; preparing a PDMS die with a semicylindircal concave groove; coating a layer of PDMS liquid at the bottom of the PDMS negative model and in the semicylindrical concave groove of the PDMS die, heating and solidifying to adhere the PDMS negative model and the PDMS die, and thus obtaining a PDMS curved-surface concave lens negative model; preparing an NOA73 thin film; and uncovering the NOA73 thin film with an NOA73 solid film from the concave lens structure of the PDMS curved-surface concave lens negative model, and thus obtaining the NOA73 curved-surface micro lens array. The preparation method is low in cost and favorable for batch production, and the lens array is easy to manufacture; and the method can be widely applied to fields such as integrated imaging, optical beam shaping and optical fiber coupling.
Description
Technical field
The present invention relates to the preparation method of surface micro lens array, be specially a kind of preparation method of large tracts of land NOA73 surface micro lens array.
Background technology
Lenticule and microlens array are widely used in fields such as integration imaging, beam shaping, optical fiber couplings as one of important devices of micro-optical systems.Wherein particularly important to the research of microlens array material, great majority are selected quartz glass, SU-8 glue, PDMS polymkeric substance etc. for use now, and complicacy made by quartz glass and cost is high.The Liu Hao of Central China University of Science and Technology proposed the bionic compound eyes structural research based on microlens array in paper in 2008; Obtain the planar microlens array of optical axis with conventional hot melt technology perpendicular to substrate; Turn over mould and on the negative photoresist of SU-8, impress through PDMS again; Producing diameter 50um and the integrated planar microlens array of brilliant vertebra through the method for the negative photoresist self-focusing exposure of SU-8 at last, is SU-8 glue but this array is planar array and material, and the visual field is little, light transmission is poor; The patent No. that Shanghai Communications University proposes is artificial compound eye lens of a kind of controllable curvature of 201010154340.1 and preparation method thereof; Directly make planar microlens array with the PDMS polymkeric substance; Through the curved surface camera lens its microlens array is pressed into curved surface and curvature-adjustable again, the visual field is big, but does not have brilliant vertebra and the bottom surface is that optical fiber is inconvenient to insert in the plane; Thereby cause optical fiber and to detect poor practicability with the corresponding one by one direct light signal of microlens array.
Summary of the invention
The present invention provides a kind of preparation method of large tracts of land NOA73 surface micro lens array in order to solve existing microlens array making complicacy, light transmission difference and to be inconvenient to insert the problem that optical fiber causes poor practicability.
The present invention adopts following technical scheme to realize: the preparation method of a kind of large tracts of land NOA73 (NOA73 is a kind of ultra-violet curing optical cement that U.S. Norland Products Inc. produces) surface micro lens array comprises the steps:
(1), have the preparation of PDMS (polydimethylsiloxane dimethyl silicone polymer) negative norm of concavees lens structure:
Step 1: getting shading light part is the mask plate of the roundlet of 100um for several diameters, and several roundlets are distributed in the great circle scope that diameter is 1cm, wherein: the spacing of adjacent roundlet is that the 10um and the adjacent three roundlet centers of circle link together and are equilateral triangle;
Step 2: cut-off directly is that 4 inches circular substrate carries out surface preparation (surface preparation is to well known to a person skilled in the art technology, alcohol commonly used and deionized water ultrasonic cleaning ten minutes) back and on 180 ℃ of baking platforms, dries by the fire 30min (moisture of removal surface attachment) and reduce to room temperature again; After being coated with the AZ4620 positive photoresist that a layer thickness is 20um on the circular substrate, be placed on 80
0Baking dropped to room temperature in 60 minutes again on the C drip pan; Circular substrate and mask plate were put into the litho machine uv-exposure 30 seconds together, take out circular substrate be placed on developed 140 seconds in the developer solution after (photoresist on this moment circular substrate only stay with mask plate on the identical several cylinders body of shading light part shape) obtain the cylindrical-shaped structure on the circular substrate; Be placed on 80 after drying up the circular substrate taking-up with nitrogen then
0Post bake dropped to room temperature in 30 minutes again on the C drip pan;
Step 3: circular substrate is placed on 140
0On the C drip pan hot melt after 45 minutes the cylindrical-shaped structure on the circular substrate become the dimpling lens arrangement, cooling back curing molding;
Step 4: get PDMS liquid and vacuumize and water on the dimpling lens arrangement of circular substrate after removing bubble, vacuumize once more and remove behind the bubble 80
0Heating made the PDMS liquid curing in 2 hours in the C baking oven, took the solid-state mould of PDMS off, thereby accomplished once to the PDMS reverse mould of dimpling lens arrangement, promptly obtained having the PDMS negative norm of concavees lens structure;
(2), have the preparation of the PDMS mould of semi-cylindrical groove:
Step 1: cut-off is the circular die of 6.5cm directly, and being fixed with diameter on the circular die is that 1.3cm, length are 2cm and the axis semi-cylindrical structure parallel with circular die;
Step 2: circular die is put into double dish and made the semi-cylindrical structure up; Double cylindrical-shaped structure carries out the PDMS pour mask described in first step step 4, promptly obtains having the PDMS mould of semi-cylindrical groove;
(3), the preparation of PDMS curved surface concavees lens negative norm: being heating and curing after in the semi-cylindrical groove of the bottom surface of the PDMS negative norm that has the concavees lens structure and the PDMS mould that has the semi-cylindrical groove, all being coated with one deck PDMS liquid is bonded together, and promptly obtains PDMS curved surface concavees lens negative norm;
(4), the preparation of NOA73 film: getting a block length is that 4cm, width are the square glass sheet of 2cm, and clean back evenly is coated with one deck NOA73 liquid at the upper surface of square glass sheet; The square glass sheet that will have NOA73 liquid is placed under the litho machine ultraviolet lamp, and uv-exposure is the NOA73 liquid curing after 60 seconds, takes the NOA73 solid film off, promptly obtains the NOA73 film;
(5), get the groove that the curved surface concavees lens structure of NOA73 liquid filling PDMS curved surface concavees lens negative norm forms, the NOA73 film be placed on the NOA73 liquid and with NOA73 liquid be squeezed into and the curved die that has the PDMS negative norm opposite shape of concavees lens structure; PDMS curved surface concavees lens negative norm is placed under the litho machine ultraviolet lamp; Uv-exposure after 60 seconds NOA73 liquid curing and making solidify NOA73 solid film that has the curved surface convex lens structures and the NOA73 film that the back forms and be bonded together; Take the NOA73 film that has the NOA73 solid film off from the concavees lens structure of PDMS curved surface concavees lens negative norm, promptly obtain NOA73 curved surface dimpling lens arra.
During use; Corresponding each dimpling lens all connect the optical fiber of diameter less than 100um on the NOA73 film of the NOA73 surface micro lens array that the present invention is made; The output terminal of optical fiber all is placed in camera or the video camera after bonding with area image sensor; At this moment NOA73 surface micro lens array just is equivalent to a camera lens with micro-dimension, big visual field; Can thereby complete the focusing on the area image sensor of stereo-picture be converted into electric signal with optical image information, stereo-picture be shown on display device through digital processing circuit.
Preparation method of the present invention combines bionics and micromachining technology, selects the NOA73 material with good optical property for use, and its light transmission can reach 100%; The surface micro lens array that makes is two-sided all to be curved surface; Integrate with optical fiber the light signal that obtains in each bionical ommatidium (each the dimpling lens on the NOA73 surface micro lens array all are equivalent to an insect ommatidium) is transmitted through optical fiber thereby be easy to insert optical fiber, be convenient to the collection and the processing of sensor devices such as CCD; Cost is low, making is simple, be easy to batch process; Solved existing surface micro lens array and made complicacy, light transmission difference and be inconvenient to insert the problem that optical fiber causes poor practicability, can be adaptable across fields such as integration imaging, beam shaping, optical fiber couplings.
Description of drawings
Fig. 1 is the structural representation of step 1 in the first step of the present invention.
Fig. 2 is the structural representation of step 2 in the first step of the present invention.
Fig. 3 is the A-A cut-open view of Fig. 2.
Fig. 4 is the structural representation of step 3 in the first step of the present invention.
Fig. 5 is the structural representation of step 4 in the first step of the present invention.
Fig. 6 is the structural representation of step 1 in second step of the present invention.
Fig. 7 is the B-B cut-open view of Fig. 6.
Fig. 8 is the structural representation of step 2 in second step of the present invention.
Fig. 9 is the present invention's structural representation in the 3rd step.
Figure 10 is the present invention's structural representation in the 4th step.
Figure 11 is the structural representation of the NOA73 surface micro lens array that makes of the present invention.
Among the figure: the 1-roundlet; The 2-mask plate; The 3-circular substrate; The 4-cylindrical-shaped structure; 5-dimpling lens arrangement; 6-has the PDMS negative norm of concavees lens structure; The 7-circular die; 8-semi-cylindrical structure; 9-has the PDMS mould of semi-cylindrical groove; 10-NOA73 solid film; 11-square glass sheet; The 12-NOA73 film; The 13-groove.
Embodiment
A kind of large-area preparation method of NOA73 surface micro lens array comprises the steps:
(1), have the preparation of the PDMS negative norm 6 of concavees lens structure:
Step 1: getting shading light part is the mask plate 2 of the roundlet 1 of 100um for several diameters, and several roundlets 1 are distributed in the great circle scope that diameter is 1cm, wherein: the spacing of adjacent roundlet is that the 10um and the adjacent three roundlet centers of circle link together and are equilateral triangle;
Step 2: cut-off directly is that 4 inches circular substrate 3 carries out after the surface preparation that baking 30min reduces to room temperature again on 180 ℃ of baking platforms; After being coated with the AZ4620 positive photoresist that a layer thickness is 20um on the circular substrate 3, be placed on 80
0Baking dropped to room temperature in 60 minutes again on the C drip pan; Circular substrate 3 and mask plate 2 were put into the litho machine uv-exposure 30 seconds together, and taking-up circular substrate 3 obtains the cylindrical-shaped structure 4 on the circular substrate 3 after being placed on and developing 140 seconds in the developer solution; Be placed on 80 after drying up circular substrate 3 taking-ups with nitrogen then
0Post bake dropped to room temperature in 30 minutes again on the C drip pan;
Step 3: circular substrate 3 is placed on 140
0On the C drip pan hot melt after 45 minutes the cylindrical-shaped structure on the circular substrate 34 become dimpling lens arrangement 5, cooling back curing molding;
Step 4: get PDMS liquid and vacuumize and water on the dimpling lens arrangement 5 of circular substrate 3 after removing bubble, vacuumize once more and remove behind the bubble 80
0Heating made the PDMS liquid curing in 2 hours in the C baking oven, took the solid-state mould of PDMS off, thereby accomplished once to the PDMS reverse mould of dimpling lens arrangement 5, promptly obtained having the PDMS negative norm 6 of concavees lens structure;
(2), have the preparation of the PDMS mould 9 of semi-cylindrical groove:
Step 1: cut-off directly is the circular die 7 of 6.5cm, is fixed with diameter on the circular die 7 and is 1.3cm, length and be the parallel semi-cylindrical structure 8 of 2cm and axis and circular die 7;
Step 2: circular die 7 is put into double dish and made semi-cylindrical structure 8 up; Double cylindrical-shaped structure 8 carries out the PDMS pour mask described in first step step 4, promptly obtains having the PDMS mould 9 of semi-cylindrical groove;
(3), the preparation of PDMS curved surface concavees lens negative norm: being heating and curing after in the semi-cylindrical groove of the bottom surface of the PDMS negative norm 6 that has the concavees lens structure and the PDMS mould 9 that has the semi-cylindrical groove, all being coated with one deck PDMS liquid is bonded together, and promptly obtains PDMS curved surface concavees lens negative norm;
(4), the preparation of NOA73 film 12: getting a block length is that 4cm, width are the square glass sheet 11 of 2cm, and clean back evenly is coated with one deck NOA73 liquid at the upper surface of square glass sheet 11; The square glass sheet 11 that will have NOA73 liquid is placed under the litho machine ultraviolet lamp, and uv-exposure is the NOA73 liquid curing after 60 seconds, takes the NOA73 solid film off, promptly obtains NOA73 film 12;
(5), get the groove 13 that the curved surface concavees lens structure of NOA73 liquid filling PDMS curved surface concavees lens negative norm forms, NOA73 film 12 be placed on the NOA73 liquid and with NOA73 liquid be squeezed into and the curved die that has PDMS negative norm 6 opposite shape of concavees lens structure; PDMS curved surface concavees lens negative norm is placed under the litho machine ultraviolet lamp; Uv-exposure after 60 seconds NOA73 liquid curing and making solidify the NOA73 solid film that has the curved surface convex lens structures 10 that the back forms and be bonded together with NOA73 film 12; Take the NOA73 film 12 that has NOA73 solid film 10 off from the concavees lens structure of PDMS curved surface concavees lens negative norm, promptly obtain NOA73 curved surface dimpling lens arra.
During practical implementation, the body diameter of selected semi-cylindrical structure mold can change as required, thereby obtains the NOA73 surface micro lens array of different curvature; On circular substrate, changeing after 10 seconds 1000 rev/mins with 400 rev/mins of sol evenning machines during resist coating changeed 20 seconds.
Claims (1)
1. the preparation method of a large tracts of land NOA73 surface micro lens array is characterized in that: comprise the steps:
(1), have the preparation of the PDMS negative norm (6) of concavees lens structure:
Step 1: getting shading light part is the mask plate (2) of the roundlet (1) of 100um for several diameters; Several roundlets (1) are distributed in the great circle scope that diameter is 1cm, wherein: the spacing of adjacent roundlet is that the 10um and the adjacent three roundlet centers of circle link together and are equilateral triangle;
Step 2: cut-off directly is that 4 inches circular substrate (3) carries out after the surface preparation that baking 30min reduces to room temperature again on 180 ℃ of baking platforms; After being coated with the AZ4620 positive photoresist that a layer thickness is 20um on the circular substrate (3), be placed on 80
0Baking dropped to room temperature in 60 minutes again on the C drip pan; Circular substrate (3) and mask plate (2) were put into the litho machine uv-exposure 30 seconds together, and taking-up circular substrate (3) obtains the cylindrical-shaped structure (4) on the circular substrate (3) after being placed on and developing 140 seconds in the developer solution; Be placed on 80 after drying up circular substrate (3) taking-up with nitrogen then
0Post bake dropped to room temperature in 30 minutes again on the C drip pan;
Step 3: circular substrate (3) is placed on 140
0On the C drip pan hot melt after 45 minutes the cylindrical-shaped structure (4) on the circular substrate (3) become dimpling lens arrangement (5), cooling back curing molding;
Step 4: get PDMS liquid and vacuumize and water on the dimpling lens arrangement (5) of circular substrate (3) after removing bubble, vacuumize once more and remove behind the bubble 80
0Heating made the PDMS liquid curing in 2 hours in the C baking oven, took the solid-state mould of PDMS off, thereby accomplished once to the PDMS reverse mould of dimpling lens arrangement (5), promptly obtained having the PDMS negative norm (6) of concavees lens structure;
(2), have the preparation of the PDMS mould (9) of semi-cylindrical groove:
Step 1: cut-off directly is the circular die (7) of 6.5cm, and being fixed with diameter on the circular die (7) is that 1.3cm, length are 2cm and the axis semi-cylindrical structure (8) parallel with circular die (7);
Step 2: circular die (7) is put into double dish and made semi-cylindrical structure (8) up; Double cylindrical-shaped structure (8) carries out the PDMS pour mask described in first step step 4, promptly obtains having the PDMS mould (9) of semi-cylindrical groove;
(3), the preparation of PDMS curved surface concavees lens negative norm: being heating and curing after in the semi-cylindrical groove of the bottom surface of the PDMS negative norm (6) that has the concavees lens structure and the PDMS mould (9) that has the semi-cylindrical groove, all being coated with one deck PDMS liquid is bonded together, and promptly obtains PDMS curved surface concavees lens negative norm;
(4), the preparation of NOA73 film (12): getting a block length is that 4cm, width are the square glass sheet (11) of 2cm, and clean back evenly is coated with one deck NOA73 liquid at the upper surface of square glass sheet (11); The square glass sheet (11) that will have NOA73 liquid is placed under the litho machine ultraviolet lamp, and uv-exposure is the NOA73 liquid curing after 60 seconds, takes the NOA73 solid film off, promptly obtains NOA73 film (12);
(5), get the groove (13) that the curved surface concavees lens structure of NOA73 liquid filling PDMS curved surface concavees lens negative norm forms, NOA73 film (12) be placed on the NOA73 liquid and with NOA73 liquid be squeezed into and the curved die that has PDMS negative norm (6) opposite shape of concavees lens structure; PDMS curved surface concavees lens negative norm is placed under the litho machine ultraviolet lamp; Uv-exposure after 60 seconds NOA73 liquid curing and making solidify NOA73 solid film (10) that has the curved surface convex lens structures and the NOA73 film (12) that the back forms and be bonded together; Take the NOA73 film (12) that has NOA73 solid film (10) off from the concavees lens structure of PDMS curved surface concavees lens negative norm, promptly obtain NOA73 curved surface dimpling lens arra.
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