CN102668379B - 脉冲激光器射频电源的数字脉宽调制控制 - Google Patents
脉冲激光器射频电源的数字脉宽调制控制 Download PDFInfo
- Publication number
- CN102668379B CN102668379B CN201080046197.2A CN201080046197A CN102668379B CN 102668379 B CN102668379 B CN 102668379B CN 201080046197 A CN201080046197 A CN 201080046197A CN 102668379 B CN102668379 B CN 102668379B
- Authority
- CN
- China
- Prior art keywords
- pulse
- duration
- sequence
- digital
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K7/00—Modulating pulses with a continuously-variable modulating signal
- H03K7/08—Duration or width modulation ; Duty cycle modulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09702—Details of the driver electronics and electric discharge circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25116209P | 2009-10-13 | 2009-10-13 | |
| US61/251,162 | 2009-10-13 | ||
| US12/749,781 | 2010-03-30 | ||
| US12/749,781 US8351480B2 (en) | 2009-10-13 | 2010-03-30 | Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser |
| PCT/US2010/051819 WO2011046804A2 (en) | 2009-10-13 | 2010-10-07 | Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102668379A CN102668379A (zh) | 2012-09-12 |
| CN102668379B true CN102668379B (zh) | 2015-07-22 |
Family
ID=43854818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080046197.2A Active CN102668379B (zh) | 2009-10-13 | 2010-10-07 | 脉冲激光器射频电源的数字脉宽调制控制 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8351480B2 (https=) |
| EP (1) | EP2489124B1 (https=) |
| JP (1) | JP2013507790A (https=) |
| KR (1) | KR20120098688A (https=) |
| CN (1) | CN102668379B (https=) |
| ES (1) | ES2728249T3 (https=) |
| WO (1) | WO2011046804A2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011077493A1 (de) * | 2010-06-23 | 2012-04-26 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Datenübertragung mit variabler Bitlänge |
| US8427212B2 (en) * | 2010-12-20 | 2013-04-23 | Intel Corporation | Pulse width modulated signal generation method and apparatus |
| US8692843B2 (en) * | 2011-03-10 | 2014-04-08 | Biotronik Se & Co. Kg | Method for graphical display and manipulation of program parameters on a clinical programmer for implanted devices and clinical programmer apparatus |
| US8687661B2 (en) * | 2012-04-13 | 2014-04-01 | Coherent, Inc. | Pulsed CO2 laser output-pulse shape and power control |
| CN103326788A (zh) * | 2013-06-26 | 2013-09-25 | 中国人民解放军理工大学 | 一种针对脉冲激光器的高速率数字调制装置和方法 |
| CN103762492B (zh) * | 2013-12-31 | 2016-03-02 | 北京长峰广播通讯设备有限责任公司 | 可适应变阻抗激光器的射频信号调整方法及射频功率源 |
| KR102281469B1 (ko) * | 2017-04-13 | 2021-07-27 | 삼성전기주식회사 | 저전력 기능을 갖는 고주파 다채널 pwm 제어장치 |
| CN115344079B (zh) * | 2022-10-18 | 2023-03-10 | 武汉亚为电子科技有限公司 | 一种脉冲控制设备及其使用方法 |
| CN118472778B (zh) * | 2024-07-15 | 2024-10-08 | 南京晨锐腾晶激光科技有限公司 | 射频二氧化碳激光器的光束反馈控制方法及系统 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5349166A (en) * | 1991-10-31 | 1994-09-20 | Engineering & Research Associates, Inc. | RF generator for plastic tubing sealers |
| CN1262341A (zh) * | 1999-01-23 | 2000-08-09 | 大连理工大学 | 用计算机控制的等离子体源离子渗氮工艺及设备 |
| US20030001686A1 (en) * | 2001-06-27 | 2003-01-02 | Toshiyuki Sekiya | Pulsewidth modulation apparatus, printer, and control method thereof |
| US20040150711A1 (en) * | 2003-01-30 | 2004-08-05 | Cervantes Jose L. | Laser imaging device including a pulse width modulator system |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3624542A (en) | 1968-07-26 | 1971-11-30 | Trw Inc | Control for power output of gas laser |
| US4429392A (en) | 1981-12-21 | 1984-01-31 | Sumitomo Electric Industries, Ltd. | Laser output controlling device |
| US4443877A (en) | 1982-02-01 | 1984-04-17 | United Technologies Corporation | Uniformly excited RF waveguide laser |
| JPS645084A (en) | 1987-06-29 | 1989-01-10 | Mitsubishi Electric Corp | Silent discharge type laser device |
| US4977573A (en) | 1989-03-09 | 1990-12-11 | Questek, Inc. | Excimer laser output control device |
| US5150372A (en) | 1991-09-13 | 1992-09-22 | Hughes Aircraft Company | Frequency sweeping phase-locked-loop synthesizer power supply for CO2 waveguide laser |
| US5509022A (en) * | 1991-09-20 | 1996-04-16 | The University Of Melbourne | Self-tuned mode-locked laser |
| JP3131079B2 (ja) * | 1993-07-09 | 2001-01-31 | 新日本製鐵株式会社 | Qスイッチco2レーザ装置 |
| JP2631080B2 (ja) | 1993-10-05 | 1997-07-16 | 株式会社小松製作所 | レーザ装置の出力制御装置 |
| US5748656A (en) | 1996-01-05 | 1998-05-05 | Cymer, Inc. | Laser having improved beam quality and reduced operating cost |
| JPH09232658A (ja) * | 1996-02-21 | 1997-09-05 | Amada Eng Center:Kk | レーザー電源装置 |
| JPH11233862A (ja) * | 1998-02-09 | 1999-08-27 | Amada Eng Center Co Ltd | レーザ電源制御方法およびレーザ電源 |
| JP3800812B2 (ja) * | 1998-07-10 | 2006-07-26 | 松下電器産業株式会社 | レーザ発振装置 |
| US6181719B1 (en) * | 1998-11-24 | 2001-01-30 | Universal Laser Systems, Inc. | Gas laser RF power source apparatus and method |
| US6184916B1 (en) * | 1999-01-19 | 2001-02-06 | Xerox Corporation | Multiple-pulse, pulse width and position modulation systems and methods |
| US6034978A (en) | 1999-05-12 | 2000-03-07 | Cymer, Inc. | Gas discharge laser with gas temperature control |
| GB0127457D0 (en) | 2001-11-15 | 2002-01-09 | Filtronic Plc | Amplifier efficiency |
| US20040017603A1 (en) | 2002-07-29 | 2004-01-29 | Paul Jay | Optical amplifier controller |
| US7164703B2 (en) | 2003-02-20 | 2007-01-16 | Lambda Physik Ag | Temperature control systems for excimer lasers |
| CN1802791B (zh) | 2003-06-11 | 2010-11-17 | 皇家飞利浦电子股份有限公司 | 高分辨率pwm发生器或数控振荡器 |
| US7061417B2 (en) | 2003-11-26 | 2006-06-13 | Broadcom Advanced Compression Group Llc | Method and system for increased effective resolution in an N-bit digital-to-analog converter |
| US20050271096A1 (en) | 2004-04-12 | 2005-12-08 | Rolland Zeleny | Laser output temperature compensation |
| US7265619B2 (en) | 2005-07-06 | 2007-09-04 | Raytheon Company | Two stage microwave Class E power amplifier |
| US7327300B1 (en) | 2005-08-25 | 2008-02-05 | Stmicroelectronics Pvt. Ltd. | System and method for generating a pulse width modulated signal having variable duty cycle resolution |
| JP4592638B2 (ja) * | 2006-05-02 | 2010-12-01 | 株式会社東芝 | スイッチング電源回路 |
| US7817685B2 (en) * | 2007-01-26 | 2010-10-19 | Electro Scientific Industries, Inc. | Methods and systems for generating pulse trains for material processing |
| US7755452B2 (en) | 2007-02-27 | 2010-07-13 | Coherent, Inc. | Power combiner |
| US7756182B2 (en) | 2007-03-28 | 2010-07-13 | Coherent, Inc. | RF excited CO2 slab laser tube housing and electrodes cooling |
| EP2071682A1 (de) * | 2007-12-13 | 2009-06-17 | Trumpf Laser Marking Systems AG | Verfahren zur Erstpulsoptimierung in gütegeschalteten Festkörperlasern sowie gütegeschalteter Festkörperlaser |
| US7885308B2 (en) * | 2008-05-30 | 2011-02-08 | Coherent, Inc. | Frequency-agile RF-power excitation for driving diffusion-cooled sealed-off, RF-excited gas lasers |
| US8369373B2 (en) * | 2009-10-13 | 2013-02-05 | Coherent, Inc. | Pre-ionization method for CO2 gas-discharge laser |
| US8116346B2 (en) * | 2010-01-22 | 2012-02-14 | Coherent, Inc. | CO2 laser output power control during warm-up |
-
2010
- 2010-03-30 US US12/749,781 patent/US8351480B2/en active Active
- 2010-10-07 JP JP2012534239A patent/JP2013507790A/ja active Pending
- 2010-10-07 EP EP10768132.2A patent/EP2489124B1/en active Active
- 2010-10-07 KR KR1020127012305A patent/KR20120098688A/ko not_active Ceased
- 2010-10-07 WO PCT/US2010/051819 patent/WO2011046804A2/en not_active Ceased
- 2010-10-07 ES ES10768132T patent/ES2728249T3/es active Active
- 2010-10-07 CN CN201080046197.2A patent/CN102668379B/zh active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5349166A (en) * | 1991-10-31 | 1994-09-20 | Engineering & Research Associates, Inc. | RF generator for plastic tubing sealers |
| CN1262341A (zh) * | 1999-01-23 | 2000-08-09 | 大连理工大学 | 用计算机控制的等离子体源离子渗氮工艺及设备 |
| US20030001686A1 (en) * | 2001-06-27 | 2003-01-02 | Toshiyuki Sekiya | Pulsewidth modulation apparatus, printer, and control method thereof |
| US20040150711A1 (en) * | 2003-01-30 | 2004-08-05 | Cervantes Jose L. | Laser imaging device including a pulse width modulator system |
Also Published As
| Publication number | Publication date |
|---|---|
| US8351480B2 (en) | 2013-01-08 |
| JP2013507790A (ja) | 2013-03-04 |
| EP2489124B1 (en) | 2019-04-03 |
| KR20120098688A (ko) | 2012-09-05 |
| ES2728249T3 (es) | 2019-10-23 |
| US20110085575A1 (en) | 2011-04-14 |
| WO2011046804A2 (en) | 2011-04-21 |
| CN102668379A (zh) | 2012-09-12 |
| EP2489124A2 (en) | 2012-08-22 |
| WO2011046804A3 (en) | 2011-07-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |