CN102660761A - Solar cell film plating equipment and film plating method - Google Patents

Solar cell film plating equipment and film plating method Download PDF

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Publication number
CN102660761A
CN102660761A CN2012101480539A CN201210148053A CN102660761A CN 102660761 A CN102660761 A CN 102660761A CN 2012101480539 A CN2012101480539 A CN 2012101480539A CN 201210148053 A CN201210148053 A CN 201210148053A CN 102660761 A CN102660761 A CN 102660761A
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China
Prior art keywords
solar cell
plated
electroplate liquid
filming equipment
sensitive surface
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CN2012101480539A
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Chinese (zh)
Inventor
陈丽萍
钱洪强
葛剑
朱海东
杨健
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Wuxi Suntech Power Co Ltd
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Wuxi Suntech Power Co Ltd
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Priority to CN2012101480539A priority Critical patent/CN102660761A/en
Publication of CN102660761A publication Critical patent/CN102660761A/en
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Abstract

The invention provides solar cell film plating equipment and a film plating method thereof. In the prior art, a solar cell can be transferred to electroplate liquid for electroplating by using an externally connected electroplating power supply or through a simple rolling wheel, so that the problems of high probability of damage to the solar cell and poor film plating quality exist. The solar cell film plating equipment provided by the invention comprises a film plating slot, a to-be-plated solar cell transmission module, and a film plating light source, wherein the transmission module is provided with a plurality of upper rolling wheel and a lower rolling wheel which are arranged in a matched manner and transfer the solar cell to be plated in an identical linear velocity, the solar cell to be plated forms an electroplating loop with electroplating liquid through an upper rolling wheel, the solar cell to be plated is transferred into the film plating slot horizontally through the to-be-plated solar cell transmission module and is partly submerged into the electroplating liquid, the film plating light source irradiates the light receiving surface of the to-be-plated solar cell and generate photoproduction electrical energy thereon, and the to-be-plated area of the to-be-plated solar cell is plated through the photoproduction electrical energy. In the invention, the reliability and the efficiency of the film plating are improved, the scrap rate in solar cell film plating is lowered, and that the externally connected electroplating power supply is required can be avoided.

Description

A kind of solar cell filming equipment and film coating method thereof
Technical field
The present invention relates to solar cell and make field, particularly a kind of solar cell filming equipment and film coating method thereof.
Background technology
Make the field at solar cell, metallization process is very important crucial processing procedure, and it directly forms the electrode of drawing electric energy that solar cell produces and the efficient of solar cell is had bigger influence.During existing large-scale solar cell is made; Usually can adopt screen printing mode to realize the metallization process of solar cell; But the formed grid line depth-width ratio of silk screen printing is lower; Thereby cause the solar cell sensitive surface bigger, cause the series resistance of solar cell bigger in addition by the grid line dead area.Plating can effectively reduce the shading of grid line and effectively reduce the resistance of grid line and the series resistance of solar cell.
A kind of technology is that solar cell is connected on the electroplating clamp and the negative electrode of electroplating power supply is connected on the solar cell to be plated in the prior art; Place it in the electroplating solution the low problem that can't satisfy the needs of large-scale industrial production and have anchor clamps easy damaged solar cell of this kind technology electroplating efficiency afterwards.
For realizing electroplating the application of formation electrode in the extensive manufacturing of solar cell; Usually can adopt the running roller transmission manner that solar cell is transferred to electroplates in the electroplate liquid; Solar cell was accomplished most process step and was formed PN junction, antireflective film, back of the body field (or back of the body knot) and back electrode this moment, and had removed the antireflective film in solar cell sensitive surface top electrode zone.On sensitive surface top electrode zone, form inculating crystal layer and copper through electroplating, or inculating crystal layer and silver, or electrode structures such as inculating crystal layer and copper and silver.
But when adopting the running roller mode that solar cell is transferred to electroplate liquid and carries out electroplating processes; Solar cell may depart from that throughput direction fluctuates or move left and right, needs this moment to adopt the supporting running roller that comprises upper roll wheel and lower roll wheel to solar cell is transferred in the electroplate liquid.But along with solar cell with the continuous attenuate of silicon wafer thickness (having reached below the 200 μ m), to supporting running roller particularly the requirement of upper roll wheel increase with regard to corresponding, fragmentation rate was very high when the rod wheels caused solar cell to electroplate with the supporting running roller of spline structure easily up and down.
In addition; In the prior art negative electrode of electroplating power supply being connected usually can be through connecting other annexes on the solar cell to be plated on the running roller of transmission solar cell to be plated; Can cause the running roller complex structure; Moreover can not make full use of its advantage of solar cell, thereby cause the waste of the energy as battery.
The patent No. is 200710188267.8 denominations of invention provide a kind of electrochemical depositing solar cell metallic electrode for the Chinese patent of a " a kind of method of electrochemical depositing solar cell metallic electrode " method; It carries out illumination through the sensitive surface to solar cell; Thereby produce the luminous energy electric energy, with said photoproduction electric energy as electroplating power supply.Being specially the first surface of containing negative electrode with solar cell contacts with electrolyte solution; And the anode of solar cell is connected with solid metal; And the main light receiving surface of solar cell carried out illumination; Metals ion in the said electrolyte solution is accepted the cathode surface that generates metal behind the electronics that said solar cell cathode surface produces and be deposited on said solar cell, and said solid metal is to generate metals ion and dissolve in electrolyte solution after the anode of said solar cell provides electronics simultaneously.This patented process can solve owing to metal deposition in the problem that anode causes battery efficiency that short circuit causes to descend, avoided of the damage of any Electropolating hangers simultaneously to solar cell, can avoid in addition must external electroplating power supply.But above-mentioned patent does not provide and realizes the galvanized any device of this photoinduction.
Therefore; How to provide a kind of solar cell filming equipment and film coating method thereof to electroplate the short circuit of avoiding poor plating to cause to adopt photoinduction; And avoid must external electroplating power supply and reduce the plating fragmentation rate of solar cell, has become the technical problem that industry needs to be resolved hurrily.
Summary of the invention
The objective of the invention is to provide a kind of solar cell filming equipment and film coating method thereof, can improve the safety of plated film, reduce the fragmentation rate of solar cell plated film, and avoid must external electroplating power supply through said filming equipment and film coating method thereof.
For realizing above-mentioned purpose; The present invention provides a kind of solar cell filming equipment; Be used for plated film on the zone to be plated of the sensitive surface of solar cell to be plated; Comprise: the plated film groove, be used to hold electroplate liquid, be provided with in the said electroplate liquid a plurality of be used on zone to be plated plated film and with the anodal metal anode that is connected of solar cell to be plated; Said solar cell to be plated has silicon substrate, be formed on PN junction on the silicon substrate, be positioned at the antireflective film on the solar cell sensitive surface and be arranged on the back electrode on the shady face, and said antireflective film covers and removes extra-regional sensitive surface to be plated; Solar cell transport module to be plated; Level is laid in the plated film groove and is used to transmit the solar cell to be plated that sensitive surface is provided with down; Comprise a plurality of supporting settings and transmit the upper roll wheel and the lower roll wheel of solar cell to be plated with same line speed, said upper roll wheel is electrically connected between the back electrode and electroplate liquid of solar cell to be plated; And the plated film light source, being used to shine the sensitive surface of solar cell to be plated and on solar cell to be plated, producing the photoproduction electric energy, said solar cell to be plated is through said photoproduction electric energy plated film on its zone to be plated.
In a preferred embodiment, said plated film light source is arranged on the outer bottom of plated film groove, comprises a plurality of series connection and/or the photodiode that is connected in parallel, and said plated film trench bottom is a light-transmitting materials, and said metal anode and said photodiode are staggered arranges.
In further preferred embodiment, the material of said plated film trench bottom is transparent polyethylene, transparent pvdf or transparent tetrafluoroethylene.
In a preferred embodiment; Said plated film light source is arranged in the plated film groove and comprises the string of light that many groups are set up in parallel; Said string of light and said metal anode be staggered arranges or is arranged on the metal anode, and said string of light comprises a plurality of photodiodes that are connected in series and is coated on the transparency protected shell that a plurality of photodiodes are used to isolate electroplate liquid outward.
In further preferred embodiment, the material of said transparency protected shell is a silica glass.
In a preferred embodiment; The sensitive surface of said solar cell to be plated and shady face are respectively the negative pole and the positive pole of solar cell; The silicon substrate of said solar cell to be plated is the P type, is formed with N type doped region and itself and silicon substrate on the said sensitive surface and forms PN junction, and said antireflective film covers said N type doped region; Be formed with back of the body field on the said shady face, said back electrode electrically connects with back of the body field.
In a preferred embodiment; The sensitive surface of said solar cell to be plated and shady face are respectively the negative pole and the positive pole of solar cell; The silicon substrate of said solar cell to be plated is the N type, is formed with P type doped region and itself and silicon substrate on the said shady face and forms PN junction, is formed with the heavily doped district of N type on the said sensitive surface; Said antireflective film covers the heavily doped district of said N type, and said back electrode and P type doped region electrically connect.
In a preferred embodiment; The zone to be plated of said solar cell sensitive surface to be plated is its electrode region; Said metal anode is inculating crystal layer metal, first electrode metal or second electrode metal; The plating of said first electrode metal is located on the inculating crystal layer metal, and said second electrode metal plating is located on the inculating crystal layer metal or on first electrode metal.
In further preferred embodiment, said inculating crystal layer metal is a nickel, and corresponding electroplate liquid comprises water soluble nickel salt, boric acid and wetting agent; The said first electrode metal material is a copper, and corresponding electroplate liquid comprises water-soluble mantoquita, sulfuric acid, leveling agent and brightening agent; The said second electrode metal material is a silver, and corresponding electroplate liquid comprises water soluble silver salt, nitric acid and brightening agent.
In a preferred embodiment, said solar cell filming equipment also comprises reservoir, and said reservoir and plating tank are through pipe connection, and said pipeline is provided with pumping, and the electroplate liquid in the said reservoir is urged to the plated film groove through pumping.
In a preferred embodiment, said upper roll wheel comprises main shaft and around the elastic conduction spare that is arranged on the main shaft, said elastic conduction spare contacts with the back electrode of solar cell to be plated.
In further preferred embodiment, said elastic conduction spare is electrically connected to electroplate liquid through connecting lead, and said metal anode is electrically connected on the said connection lead.
In further preferred embodiment, said elastic conduction spare is a metal spring, and said metal spring has contact part that contacts with solar cell back electrode to be plated and the connection section that does not contact with solar cell to be plated.
In further preferred embodiment, said metal spring is a fusiform, the middle part and the both sides of the corresponding spindle of said contact part and connection section.
In further preferred embodiment, said metal spring is a fence shape, the protruding and depression of the corresponding fence of said contact part and connection section.
In further preferred embodiment, be connected with additional power supply on the said elastic conduction spare, said additional power supply is connected to control the coating speed of its sensitive surface with solar cell series connection to be plated.
The present invention also provides a kind of solar cell film coating method that carries out through above-mentioned solar cell filming equipment, and this method may further comprise the steps: a, solar cell to be plated is provided; B, in the plated film groove, inject electroplate liquid to preset liquid level, said preset liquid level is submerged in the electroplate liquid solar cell horizontal transport to be plated to plating tank rear section; C, solar cell sensitive surface to be plated is placed on the solar cell transport module to be plated and through its horizontal transport to plated film groove down; D, said solar cell to be plated produce the photoproduction electric energy through its sensitive surface of plated film light source irradiation; E, said solar cell to be plated through the photoproduction electric energy at its regional plated film to be plated.
In a preferred embodiment, said solar cell to be plated is in electroplate liquid the time, and the sensitive surface of solar cell to be plated and back electrode electrically connect with electroplate liquid respectively, and solar cell to be plated forms the plating loop with electroplate liquid.
Compare with in the prior art solar cell being arranged on the anchor clamps and placing it in the electroplate liquid; Solar cell filming equipment of the present invention comprises a plurality of supporting settings and transmits the upper roll wheel and the lower roll wheel of solar cell to be plated with same line speed; The back electrode of said upper roll wheel and solar cell to be plated and electroplate liquid electrically connect, thereby have improved manufacturing efficient.
With must compare by external electroplating power supply in the prior art; Solar cell filming equipment of the present invention comprises the plated film light source; Level and part are immersed in the electroplate liquid and through the plated film light source and produce the photoproduction electric energy above that on the solar cell to be plated, form electrode through said photoproduction electric energy at solar cell sensitive surface plated film.Upward metal is electroplated in the zone that the present invention has avoided electrically connecting with solar cell back electrode to be plated, has improved galvanized safety, has simplified technology and equipment, effectively reduces cost.
Description of drawings
Fig. 1 is the composition structural representation of solar cell filming equipment first embodiment of the present invention;
Fig. 2 is the composition structural representation of plated film light source among first embodiment in the solar cell filming equipment of the present invention;
Fig. 3 is the composition structural representation of upper roll wheel among solar cell filming equipment first embodiment of the present invention;
Fig. 4 is the composition structural representation of solar cell filming equipment second embodiment of the present invention;
Fig. 5 is the composition structural representation of plated film light source among solar cell filming equipment second embodiment of the present invention;
Fig. 6 is the schema of solar cell film coating method of the present invention.
Specific embodiments
Specify the object of the invention and effect below in conjunction with specific embodiment and accompanying drawing.
Referring to Fig. 1, it has shown the composition structural representation of first embodiment of solar cell filming equipment of the present invention, and said solar cell filming equipment comprises plated film groove 1, metal anode 2, solar cell transport module to be plated 3, reservoir 4 and plated film light source 5.It is plated film on the electrode region that said solar cell filming equipment is used in the zone to be plated of the sensitive surface of solar cell 6 to be plated.The sensitive surface of said solar cell to be plated 6 and shady face are respectively the negative pole and the positive pole of solar cell.
In the present embodiment; Said solar cell to be plated 6 is a P type substrate battery, has P type silicon substrate, PN junction, antireflective film, aluminium back of the body field and back electrode, is formed with N type doped region and itself and silicon substrate on the said sensitive surface and forms PN junction; Said antireflective film covers the said extra-regional N type doped region to be plated that removes; Said zone to be plated is an electrode region, and the said aluminium back of the body is staggered to form on shady face with back electrode, and said back electrode material is aerdentalloy and itself and the field electric connection of the aluminium back of the body.
In other embodiment of the present invention; Said solar cell to be plated 6 is a N type substrate battery; Have N type silicon substrate, PN junction, antireflective film, back of the body knot and back electrode; Be formed with P type doped region (for example aluminium doped region) and itself and silicon substrate on the said shady face and form PN junction (aluminium back of the body knot), be formed with the heavily doped district of N type (for example phosphorus heavily doped region) on the said sensitive surface, said antireflective film covers the said heavily doped district of extra-regional N type to be plated that removes; Said zone to be plated is an electrode region, and said back electrode material is that aluminium or aerdentalloy and itself and aluminium back of the body knot electrically connect.
The detailed structure of each member of solar cell filming equipment below will be detailed.
Plated film groove 1 is used to hold electroplate liquid and supplies solar cell 6 to be plated plated film therein, and said metal anode 2 is arranged in the plated film groove 1 and electrically connects with the positive electrode of solar cell 6 to be plated, and it can be plating tank 1 and replenishes the plated metal ion.Said metal anode 2 is inculating crystal layer metal, first electrode metal or second electrode metal, and the plating of said first electrode metal is located on the inculating crystal layer metal, and said second electrode metal plating is located on the inculating crystal layer metal or on first electrode metal.Said inculating crystal layer metal is a nickel, and corresponding electroplate liquid comprises that water soluble nickel salt (can be single nickel salt or nickelous chloride etc.), boric acid and wetting agent etc. can improve the additive of coating speed or quality; The said first electrode metal material is a copper, and corresponding electroplate liquid comprises that water-soluble mantoquita (can be copper sulfate etc.), sulfuric acid, leveling agent and brightening agent etc. can improve the additive of coating speed or quality; The said second electrode metal material is a silver, and corresponding electroplate liquid comprises that water soluble silver salt (can be Silver Nitrate etc.), nitric acid and brightening agent etc. can improve the additive of coating speed or quality.
Said solar cell transport module 3 levels to be plated are laid in the plated film groove 1, can lay through realizing its level in plated film groove 1 on the cell wall that is vertically set on plated film groove 1.Said solar cell transport module 3 to be plated is used to transmit the solar cell to be plated 6 that sensitive surface is provided with down; Upper roll wheel 30 and lower roll wheel 32 that it comprises a plurality of supporting settings and transmits solar cell 6 to be plated with same line speed, said upper roll wheel 30 is electrically connected between the back electrode and electroplate liquid of solar cell 6 to be plated.In conjunction with referring to Fig. 3, said upper roll wheel 30 comprises main shaft 300 and around the elastic conduction spare 302 that is arranged on the main shaft 300, said elastic conduction spare 302 contacts with the back electrode of solar cell 6 to be plated, and said elastic conduction spare 302 can be metal spring or elastic wheel etc.
Referring to Fig. 3; In the present embodiment, said elastic conduction spare 302 is a metal spring, and said metal spring is a fence shape; It has contact part A that contacts with solar cell 6 back electrodes to be plated and the connection section B that does not contact with solar cell 6 to be plated; Protruding and the depression of the corresponding fence of said contact part A and connection section B, said contact part A contacts with the aluminium back of the body field of solar cell 6 to be plated, and said connection section B and back electrode zone are relatively.
In other embodiment of the present invention, said metal spring can be fusiform, the middle part and the both sides of the contact part of solar cell back electrode contact said and to be plated and the corresponding spindle of connection section difference that does not contact with solar cell to be plated.
Said reservoir 4 passes through pipe connection 40 with plating tank 1, and said pipeline is provided with pumping 42, and the electroplate liquid in the said reservoir 4 is urged to plated film groove 1 through pumping 42.
Plated film light source 5 is used to shine the sensitive surface of solar cell 6 to be plated and on solar cell 6 to be plated, produces the photoproduction electric energy, and said solar cell 6 to be plated is through said photoproduction electric energy plated film on its zone to be plated.
Referring to Fig. 2; In conjunction with participating in Fig. 1; In the present embodiment; Said plated film light source 5 is arranged in the plated film groove 1 and comprises the string of lights 50 that many groups are set up in parallel, and said string of light 50 can be arranged or is arranged on the metal anode 2 with said metal anode 2 is staggered, and said string of light 50 comprises a plurality of photodiodes that are connected in series 500 and is coated on a plurality of photodiodes 500 outer transparency protected shells 502 that are used to isolate electroplate liquid.Said a plurality of photodiode that is connected in series 500 is connected on the power supply P, and the intensity of illumination of said photodiode 500 irradiations solar cell 6 to be plated can make and produce about 600 millivolts photovoltage on the solar cell.The material of said transparency protected shell 502 is a silica glass.Said string of light 50 cools off through electroplate liquid.
Referring to Fig. 4; In conjunction with referring to Fig. 5; Fig. 4 has shown the composition structural representation of second embodiment of solar cell filming equipment of the present invention; Said solar cell filming equipment comprises plated film groove 1, metal anode 2, solar cell transport module to be plated 3, reservoir 4 and plated film light source 5 ', and obverse is identical among plated film groove 1 in the present embodiment, metal anode 2, solar cell transport module to be plated 3, reservoir 4 and first embodiment.Plated film light source 5 ' in the present embodiment is different with the plated film light source 5 of first embodiment, below in conjunction with Fig. 4 and Fig. 5 the plated film light source 5 ' in the present embodiment is detailed.
Plated film light source 5 ' is arranged on the outer bottom of plated film groove 1; Comprise a plurality of series connection and/or the photodiode 50 ' that is connected in parallel and the base 52 ' that holds photodiode 50 ' is set; Said photodiode 50 ' and said metal anode 2 staggered arranging to reduce the shading of metal anode 2; 50 ' the several series connection earlier of said a plurality of photodiode are one group, and then carry out parallel connection to every group, and groups that all parallel connections are good are unified again to be connected in parallel on the power supply P.Said base 52 ' is gone up respective leds 50 ' and is provided with a plurality of grooves (not shown); Said photodiode 50 ' is arranged in the groove; Have cooling duct (not shown) in the said pedestal 52 ', be connected with quench liquid in the cooling duct and come photodiode 50 ' is cooled off.The bottom of said plated film groove 1 is a light-transmitting materials, for example is transparent polyethylene (PE), transparent pvdf (PVDF) or transparent polytetrafluoroethylene (PTFE) etc.
What need explanation is; Can be connected with additional power supply on the elastic conduction spare 302 of said upper roll wheel 30; Said additional power supply and solar cell to be plated 6 are connected in series and solar cell 6 to be plated are supplied power to control the coating speed of solar cell 6 sensitive surfaces to be plated; For example increase voltage on the solar cell 6 to be plated increasing its coating speed, or the voltage that reduces on the solar cell 6 to be plated reduces its coating speed.
Referring to Fig. 6; The present invention also provides the solar cell film coating method that carries out through Fig. 1 or solar cell filming equipment shown in Figure 4; This method is at first carried out step S60, and solar cell to be plated is provided, and said solar cell to be plated is identical with the solar battery structure to be plated described in solar cell filming equipment first embodiment of the present invention; Promptly be P type battery; The zone to be plated of said solar cell sensitive surface to be plated is its electrode region, and said zone to be plated is not covered by antireflective film and correspondence offers groove, can be formed with selective emitter in the said groove.
Then continue step S61; In the plated film groove, inject electroplate liquid to preset liquid level; Said preset liquid level is submerged in the electroplate liquid solar cell horizontal transport to be plated to plating tank rear section, and the effective constituent in the said electroplate liquid is corresponding with metal anode, when said metal anode is the inculating crystal layer metallic nickel; Electroplate liquid comprises that water soluble nickel salt, boric acid and wetting agent etc. can improve the additive of coating speed or quality, and said water soluble nickel salt can be single nickel salt or nickelous chloride etc.; When said metal anode was the first electrode metal copper, corresponding electroplate liquid comprised that water-soluble mantoquita, sulfuric acid, leveling agent and brightening agent etc. can improve the additive of coating speed or quality, and said water-soluble mantoquita can be copper sulfate etc.; When said metal anode was second electrode metal silver, corresponding electroplate liquid comprised that water soluble silver salt, nitric acid and brightening agent etc. can improve the additive of coating speed or quality, and said water soluble silver salt can be Silver Nitrate etc.
Then continue step S62, solar cell sensitive surface to be plated is placed on the solar cell transport module to be plated and through its horizontal transport to plated film groove, said solar cell to be plated partly is submerged in the electroplate liquid down.Said solar cell to be plated is in electroplate liquid the time; The sensitive surface of solar cell to be plated is submerged in the electroplate liquid fully; And expose outside the electroplate liquid at its back side, and the sensitive surface of solar cell to be plated and back electrode electrically connect with electroplate liquid respectively, and solar cell to be plated and electroplate liquid form electroplates the loop.
Then continue step S63, said solar cell to be plated produces the photoproduction electric energy through its sensitive surface of plated film light source irradiation, and said plated film light source forms open circuit voltage at solar cell to be plated and is about 600 millivolts photoproduction electric energy.
Then continue step S64, said solar cell to be plated through the photoproduction electric energy at its regional plated film to be plated.
In sum; Solar cell filming equipment of the present invention comprises plated film groove 1, solar cell transport module 2 to be plated and plated film light source 5; Solar cell 6 to be plated transmits solar cell 6 to be plated through a plurality of supporting settings and with same line speed upper roll wheel 30 and lower roll wheel 32 horizontal transport are to plated film groove 1; Said solar cell to be plated 6 is electroplated the loop through upper roll wheel 30 and electroplate liquid formation, and said solar cell 6 parts to be plated are immersed in the electroplate liquid and are producing the photoproduction electric energy and electroplating the formation electrode on the zone to be plated at its sensitive surface by this on it under the irradiation of plated film light source 5.The present invention has improved the safety and the efficient of plated film, reduces the fragmentation rate of solar cell plated film, and avoids necessary external electroplating power supply.

Claims (18)

1. solar cell filming equipment is used for plated film on the zone to be plated of the sensitive surface of solar cell to be plated, it is characterized in that, comprising:
The plated film groove; Be used to hold electroplate liquid; Be provided with in the said electroplate liquid a plurality of be used on zone to be plated plated film and with the anodal metal anode that is connected of solar cell to be plated; Said solar cell to be plated has silicon substrate, be formed on PN junction on the silicon substrate, be positioned at the antireflective film on the solar cell sensitive surface and be arranged on the back electrode on the shady face, and said antireflective film covers and removes extra-regional sensitive surface to be plated;
Solar cell transport module to be plated; Level is laid in the plated film groove and is used to transmit the solar cell to be plated that sensitive surface is provided with down; Comprise a plurality of supporting settings and transmit the upper roll wheel and the lower roll wheel of solar cell to be plated with same line speed, said upper roll wheel is electrically connected between the back electrode and electroplate liquid of solar cell to be plated; And
The plated film light source is used to shine the sensitive surface of solar cell to be plated and on solar cell to be plated, produces the photoproduction electric energy, and said solar cell to be plated is through said photoproduction electric energy plated film on its zone to be plated.
2. solar cell filming equipment according to claim 1; It is characterized in that; Said plated film light source is arranged on the outer bottom of plated film groove; Comprise a plurality of series connection and/or the photodiode that is connected in parallel, said plated film trench bottom is a light-transmitting materials, and said metal anode and said photodiode are staggered arranges.
3. solar cell filming equipment according to claim 2 is characterized in that, the material of said plated film trench bottom is transparent polyethylene, transparent pvdf or transparent tetrafluoroethylene.
4. solar cell filming equipment according to claim 1; It is characterized in that; Said plated film light source is arranged in the plated film groove and comprises the string of light that many groups are set up in parallel; Said string of light and said metal anode be staggered arranges or is arranged on the metal anode, and said string of light comprises a plurality of photodiodes that are connected in series and is coated on the transparency protected shell that a plurality of photodiodes are used to isolate electroplate liquid outward.
5. solar cell filming equipment according to claim 4 is characterized in that, the material of said transparency protected shell is a silica glass.
6. solar cell filming equipment according to claim 1; It is characterized in that the sensitive surface of said solar cell to be plated and shady face are respectively the negative pole and the positive pole of solar cell, the silicon substrate of said solar cell to be plated is the P type; Be formed with N type doped region and itself and silicon substrate on the said sensitive surface and form PN junction; Said antireflective film covers said N type doped region, is formed with back of the body field on the said shady face, and said back electrode electrically connects with back of the body field.
7. solar cell filming equipment according to claim 1; It is characterized in that the sensitive surface of said solar cell to be plated and shady face are respectively the negative pole and the positive pole of solar cell, the silicon substrate of said solar cell to be plated is the N type; Be formed with P type doped region and itself and silicon substrate on the said shady face and form PN junction; Be formed with the heavily doped district of N type on the said sensitive surface, said antireflective film covers the heavily doped district of said N type, and said back electrode and P type doped region electrically connect.
8. solar cell filming equipment according to claim 1; It is characterized in that; The zone to be plated of said solar cell sensitive surface to be plated is its electrode region; Said metal anode is inculating crystal layer metal, first electrode metal or second electrode metal, and the plating of said first electrode metal is located on the inculating crystal layer metal, and said second electrode metal plating is located on the inculating crystal layer metal or on first electrode metal.
9. solar cell filming equipment according to claim 8 is characterized in that, said inculating crystal layer metal is a nickel, and corresponding electroplate liquid comprises water soluble nickel salt, boric acid and wetting agent; The said first electrode metal material is a copper, and corresponding electroplate liquid comprises water-soluble mantoquita, sulfuric acid, leveling agent and brightening agent; The said second electrode metal material is a silver, and corresponding electroplate liquid comprises water soluble silver salt, nitric acid and brightening agent.
10. solar cell filming equipment according to claim 1; It is characterized in that said solar cell filming equipment also comprises reservoir, said reservoir and plating tank pass through pipe connection; Said pipeline is provided with pumping, and the electroplate liquid in the said reservoir is urged to the plated film groove through pumping.
11. solar cell filming equipment according to claim 1 is characterized in that, said upper roll wheel comprises main shaft and around the elastic conduction spare that is arranged on the main shaft, said elastic conduction spare contacts with the back electrode of solar cell to be plated.
12. solar cell filming equipment according to claim 11 is characterized in that, said elastic conduction spare is electrically connected to electroplate liquid through connecting lead, and said metal anode is electrically connected on the said connection lead.
13. solar cell filming equipment according to claim 11 is characterized in that said elastic conduction spare is a metal spring, said metal spring has contact part that contacts with solar cell back electrode to be plated and the connection section that does not contact with solar cell to be plated.
14. solar cell filming equipment according to claim 13 is characterized in that, said metal spring is a fusiform, the middle part and the both sides of the corresponding spindle of said contact part and connection section.
15. solar cell filming equipment according to claim 13 is characterized in that, said metal spring is a fence shape, the protruding and depression of the corresponding fence of said contact part and connection section.
16. solar cell filming equipment according to claim 11 is characterized in that, is connected with additional power supply on the said elastic conduction spare, said additional power supply is connected to control the coating speed of its sensitive surface with solar cell series connection to be plated.
17. a solar cell film coating method that carries out through each described solar cell filming equipment of claim 1 to 16 is characterized in that this method may further comprise the steps: a, solar cell to be plated is provided; B, in the plated film groove, inject electroplate liquid to preset liquid level, said preset liquid level is submerged in the electroplate liquid solar cell horizontal transport to be plated to plating tank rear section; C, solar cell sensitive surface to be plated is placed on the solar cell transport module to be plated and through its horizontal transport to plated film groove down; D, said solar cell to be plated produce the photoproduction electric energy through its sensitive surface of plated film light source irradiation; E, said solar cell to be plated through the photoproduction electric energy at its regional plated film to be plated.
18. solar cell film coating method according to claim 17; It is characterized in that; Said solar cell to be plated is in electroplate liquid the time, and the sensitive surface of solar cell to be plated and back electrode electrically connect with electroplate liquid respectively, and solar cell to be plated forms the plating loop with electroplate liquid.
CN2012101480539A 2012-05-11 2012-05-11 Solar cell film plating equipment and film plating method Pending CN102660761A (en)

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CN2012101480539A CN102660761A (en) 2012-05-11 2012-05-11 Solar cell film plating equipment and film plating method

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Cited By (11)

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CN103422142A (en) * 2013-09-03 2013-12-04 竞陆电子(昆山)有限公司 Improved structure of horizontal plating line conveying mechanism
CN104178787A (en) * 2013-05-26 2014-12-03 无锡尚德太阳能电力有限公司 Solar battery coating equipment and coating method
CN105442013A (en) * 2015-12-16 2016-03-30 黄权波 Metal anodic oxidation device adopting horizontal transfer mode
CN105543923A (en) * 2015-12-25 2016-05-04 苏州易益新能源科技有限公司 Method and device for horizontal electroplating
CN106103812A (en) * 2014-09-16 2016-11-09 互进电镀科技有限公司 Photoinduction plating and forward bias is used to plate the solar cell substrate electroplanting device of the two
CN106531817A (en) * 2015-09-08 2017-03-22 英属开曼群岛商精曜有限公司 Semiconductor element and manufacturing method thereof
CN108074998A (en) * 2017-12-22 2018-05-25 广东爱旭科技股份有限公司 Tubular type PERC double-side solar cells and preparation method thereof and special electroplating device
CN108660500A (en) * 2018-06-22 2018-10-16 苏州太阳井新能源有限公司 A kind of method and its device of horizontal electrochemical deposition of metal
CN110112262A (en) * 2019-06-13 2019-08-09 通威太阳能(合肥)有限公司 Roller capable of improving RENA texturing roller print
TWI711725B (en) * 2019-12-19 2020-12-01 捷得寶科技股份有限公司 Electroplating equipment for solar cells
CN114335257A (en) * 2022-03-11 2022-04-12 浙江爱旭太阳能科技有限公司 Preparation method of solar cell, solar cell module and power generation system

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104178787A (en) * 2013-05-26 2014-12-03 无锡尚德太阳能电力有限公司 Solar battery coating equipment and coating method
CN103422142B (en) * 2013-09-03 2016-08-17 竞陆电子(昆山)有限公司 The structure-improved of horizontal plating line conveying mechanism
CN103422142A (en) * 2013-09-03 2013-12-04 竞陆电子(昆山)有限公司 Improved structure of horizontal plating line conveying mechanism
CN106103812A (en) * 2014-09-16 2016-11-09 互进电镀科技有限公司 Photoinduction plating and forward bias is used to plate the solar cell substrate electroplanting device of the two
CN106103812B (en) * 2014-09-16 2017-09-29 互进电镀科技有限公司 The solar cell substrate electroplanting device of the two is plated using photoinduction plating and forward bias
CN106531817A (en) * 2015-09-08 2017-03-22 英属开曼群岛商精曜有限公司 Semiconductor element and manufacturing method thereof
CN105442013A (en) * 2015-12-16 2016-03-30 黄权波 Metal anodic oxidation device adopting horizontal transfer mode
CN105543923B (en) * 2015-12-25 2019-11-19 苏州易益新能源科技有限公司 A kind of horizontal electric plating method and equipment
CN105543923A (en) * 2015-12-25 2016-05-04 苏州易益新能源科技有限公司 Method and device for horizontal electroplating
CN108074998A (en) * 2017-12-22 2018-05-25 广东爱旭科技股份有限公司 Tubular type PERC double-side solar cells and preparation method thereof and special electroplating device
CN108660500A (en) * 2018-06-22 2018-10-16 苏州太阳井新能源有限公司 A kind of method and its device of horizontal electrochemical deposition of metal
CN108660500B (en) * 2018-06-22 2023-09-29 苏州太阳井新能源有限公司 Method and device for horizontal electrochemical deposition of metal
CN110112262A (en) * 2019-06-13 2019-08-09 通威太阳能(合肥)有限公司 Roller capable of improving RENA texturing roller print
CN110112262B (en) * 2019-06-13 2023-12-29 通威太阳能(安徽)有限公司 Roller capable of improving RENA texturing roller print
TWI711725B (en) * 2019-12-19 2020-12-01 捷得寶科技股份有限公司 Electroplating equipment for solar cells
CN114335257A (en) * 2022-03-11 2022-04-12 浙江爱旭太阳能科技有限公司 Preparation method of solar cell, solar cell module and power generation system

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Application publication date: 20120912