CN102653074A - Method for polishing glass plate - Google Patents
Method for polishing glass plate Download PDFInfo
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- CN102653074A CN102653074A CN2012100522360A CN201210052236A CN102653074A CN 102653074 A CN102653074 A CN 102653074A CN 2012100522360 A CN2012100522360 A CN 2012100522360A CN 201210052236 A CN201210052236 A CN 201210052236A CN 102653074 A CN102653074 A CN 102653074A
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- Prior art keywords
- glass plate
- milling tool
- glass
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- ripple
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
- B24B7/245—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass discontinuous
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/007—Cleaning of grinding wheels
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention relates to a method for polishing a glass plate. The method is characterized in that, a glass plate manufactured by making molten glass flow to a molten tin bath, and with the thickness below than 0.7 mm, one-side length greater than 1000mm, and Young modulus above 65 GPa is used as the glass plate of a polishing object, a non-polished surface of the glass plate is kept by a glass keeping part, and a polishing tool is used to polish corrugation with a height below 0.3 [mu]m on the polishing surface of the glass plate to reduce the height to below 0.05 [mu]m, and therefore, the glass substrate used for a flat-panel display is manufactured.
Description
Technical field
The present invention relates to the Ginding process of glass plate.
Background technology
Patent documentation 1,2 etc. discloses and has adopted through making melten glass flow into the manufacturing installation of the glass plate of the float glass process of making glass plate on the molten tin bath.And, it is also known in the past the glass plate that adopts the float glass process manufacturing ground to form FPD such as LCD or plasma scope (Flat Panel Display: flat-panel monitor) with the lapping device of glass substrate.
The glass plate that adopts float glass process to make have small concavo-convex or ripple (in the spacing of 3～30mm degree, maximum height is the ripple of 0.3 μ m degree) on its surface, and this small concavo-convex or ripple is the reason that causes anamorphose or form and aspect inequality property.Therefore, need small concavo-convex or ripple be removed through grinding.
Disclosed lapping device in the patent documentation 3; On the milling tool that is installed on milling tool maintenance platform; The glass plate that butt is kept by the glass holding member, and make milling tool keep platform and glass holding member relatively to move, the small concavo-convex or ripple of glass plate is removed.
The prior art document
Patent documentation
Patent documentation 1: the spy of Japan opens the 2008-239370 communique
Patent documentation 2: the spy of Japan opens the 2009-46366 communique
No. 2007/020859 communique of patent documentation 3:WO
Summary of the invention
The problem that invention solves
Prior art fully discloses following Ginding process as yet: will adopt the glass plate of float glass process manufacturing, promptly the surface exist the glass plate of small concavo-convex or ripple to grind to form to be suitable for as nothing in the image be out of shape or the FPD of form and aspect inequality property with the glass plate of glass substrate.
In view of this present invention makes, and its purpose is to provide the Ginding process of glass plate, the glass plate that adopts the float glass process manufacturing is ground to form be suitable for the glass plate with glass substrate as FPD.
The present invention to achieve these goals; A kind of Ginding process of glass plate is provided; With through making melten glass flow into the glass plate of making on the molten tin bath, and thickness is below the 0.7mm, 1 edge lengths is that 1000mm is above, Young's modulus is that the above glass plate of 65GPa is for grinding the glass plate of object
Keep the non-abradant surface of above-mentioned glass plate through the glass holding member, the ripple that grinds below the height 0.3 μ m that exists on the abradant surface of this glass plate through milling tool is reduced to below the 0.05 μ m this ripple, thereby makes the glass for flat panel display substrate.
The glass plate that adopts float glass process to make; And as FPD use that glass substrate uses, thickness as below the 0.7mm, 1 edge lengths as more than the 1000mm, Young's modulus is the glass plate more than the 65GPa, in the spacing of 3～30mm degree, has ripple of maximum height 0.3 μ m degree on its surface (abradant surface).Therefore, in the present invention, utilize the ripple below the height 0.3 μ m that exists on the abradant surface of milling tool to glass plate to grind, the maximum height of this ripple is reduced to below the 0.05 μ m.Thus, can make and be suitable for as not producing the distortion or the FPD of form and aspect inequality property glass plate in the image with glass substrate.
Above-mentioned milling tool of the present invention, preferred A hardness is more than 20, D hardness is below 99, thickness is 1.0～2.5mm, thickness distribution is ± 0.05mm in.
According to the present invention, stipulate hardness, thickness, the thickness distribution of milling tool as stated, be suitable for the glass plate with glass substrate more thereby can the glass plate that adopt the float glass process manufacturing be ground to form as FPD.
Above-mentioned glass holding member of the present invention, the preferred compressed rate is 10～70%, modulus of elasticity in comperssion is 70～98, A hardness is 2～20, thickness is 0.3～2.0mm, thickness distribution is ± 0.05mm in.
According to the present invention, stipulate compression ratio, modulus of elasticity in comperssion, hardness, thickness, the thickness distribution of glass holding member as stated, be suitable for the glass plate with glass substrate more thereby can the glass plate that adopt the float glass process manufacturing be ground to form as FPD.
Above-mentioned glass holding member of the present invention preferably is installed on glass via seal and keeps platform, and the maximum cross-section height of the percent ripple curve when this glass keeps the evaluation length of platform to be 30mm is below the 20 μ m.
According to the present invention; Stipulate that as stated glass keeps the maximum cross-section height of the percent ripple curve of platform; Thereby therefore the ripple that can exist on the non-abradant surface of heat absorbing glass plate well through the glass holding member can grind to form the glass plate that adopts the float glass process manufacturing and be suitable for the glass plate with glass substrate as FPD more.
Above-mentioned milling tool of the present invention preferably is installed on milling tool via seal and keeps platform, and the maximum cross-section height of the cross section curve when this milling tool keeps the evaluation length of platform to be 30mm is below the 100 μ m.
According to the present invention; Stipulate that as stated milling tool keeps the maximum cross-section height of the cross section curve of platform; Therefore thereby the ripple that can suppress the surface of milling tool can grind to form the glass plate that adopts the float glass process manufacturing and is suitable for the glass plate with glass substrate as FPD more.
Above-mentioned milling tool of the present invention is preferably pushed with respect to above-mentioned glass plate with certain load, and the deviation of this load is below 10% of average load.
According to the present invention, stipulate the load of milling tool as stated with respect to glass plate, be suitable for the glass plate with glass substrate thereby can the glass plate that adopt the float glass process manufacturing be ground to form as FPD.
Above-mentioned milling tool of the present invention preferably in when finishing, makes finishing with emery wheel be connected to above-mentioned milling tool with the framework that surrounds the no grainding capacity that this finishing disposes with the mode of emery wheel and repair.
According to the present invention, will repair with emery wheel and framework and press on milling tool through the pressure of regulation, utilization is repaired and with emery wheel grinding is carried out on the surface of milling tool.At this moment, above-mentioned pressure concentrates on and is positioned at the framework of finishing with the periphery of emery wheel, and framework does not have grinding capacity, and a part of surface of the milling tool that therefore contacts with framework can be by grinding.That is, can only carry out grinding with emery wheel to the surface of milling tool through the finishing of evenly exerting pressure.Thus, the whole surface of milling tool is utilized the finishing of finishing with emery wheel by grinding flatly thereby can improve.
The invention effect
Through the Ginding process of glass plate of the present invention, can the glass plate that adopt the float glass process manufacturing be ground to form and be suitable for the glass plate with glass substrate as FPD.
Description of drawings
Fig. 1 is the stereogram of the unitary construction of the lapping device of the milling tool of the suitable embodiment of the present invention of expression.
Fig. 2 is the side view of lapping device shown in Figure 1.
Fig. 3 is the sketch map of the existing employing finishing of expression with the method for trimming of the milling tool of emery wheel.
Fig. 4 is the vertical view of the milling tool that adopts method for trimming shown in Figure 3 and repair.
Fig. 5 adopts the sketch map of the finishing of embodiment of the present invention with the method for trimming of emery wheel for expression.
Fig. 6 is the vertical view of the milling tool that adopts method for trimming shown in Figure 5 and repair.
Fig. 7 utilizes the side view of finishing with the method for trimming of the milling tool of (operating) water nozzle for expression.
Label declaration
G: glass plate; 10: lapping device; 12: grinding head; 14: platform; 16: the glass holding member; 18: seal; 20: glass keeps platform; 22: canvas; 23: air chamber; 24: rotating shaft; 26: milling tool; 28: seal; 30: milling tool keeps platform; 40: emery wheel is used in finishing; 42: framework; 44: (operating) water nozzle; 46: spray-hole; 48: rinse water
The specific embodiment
Followingly be elaborated with reference to the preferred implementation of accompanying drawing to the Ginding process of glass plate of the present invention.
Fig. 1 is the stereogram of the integral body formation of the lapping device 10 of the Ginding process of the glass plate of the suitable embodiment of the present invention of expression.Fig. 2 is the side view of lapping device 10 shown in Figure 1.
And the assay method of above-mentioned ripple is the method for JIS B0031:1982 and JIS B0601:1982 record.And making above-mentioned ripple is the hardness decision according to milling tool of amount of grinding required below the 0.05 μ m.The hardness of milling tool is high more, then can reduce ripple with few more amount of grinding.
Lapping device 10 is made up of grinding head 12 and platform 14.Grinding head 12 has: keep the non-abradant surface of glass plate G glass holding member 16, the maintenance platform 20 of glass holding member 16 is installed and the canvas 22 that glass keeps platform 20 is installed via seal 18.On canvas 22, be fixed with rotating shaft 24, rotating shaft 24 is with its axle center P
1For thereby the center rotation makes grinding head 12 rotations, and rotating shaft 24 is with hollow shaft P
2For thereby the center revolution makes grinding head 12 revolution.
And, in the air chamber 23 of canvas 22, supply with compressed air via the rotating shaft 24 of hollow, this compressed-air actuated pressure keeps platform 20, seal 18 and glass holding member 16 to be delivered to glass plate G via glass.
Above-mentioned platform 14 has: milling tool 26, the milling tool that milling tool 26 is installed via seal 28 keep platform 30.Seal 28 is soft and can improves the seal of the resin system (for example polyurethane system) of absorption retentivity.
Therefore, the lapping device 10 of this embodiment utilizes above-mentioned compressed-air actuated pressure that the abradant surface of glass plate G is pressed on milling tool 26, and through making grinding head 12 rotations, revolution, and the abradant surface of glass plate G is ground.
When the A of milling tool 26 hardness less than 20, then can't reduce the ripple of glass plate G, the D hardness of milling tool 26 surpasses 99 and then causes glass plate G to break easily.And, when the not enough 1.0mm of the thickness of milling tool 26, then can't carry out groove processing to milling tool 26.Particularly can't carry out groove and add man-hour, can cause the abrasive particle skewness and in the processing of glass plate G, have problems for large-area milling tool 26.Relative therewith, when the thickness of milling tool 26 surpasses 2.5mm, then can cause the deflection of milling tool 26 to increase and the processing quality of reduction glass plate G.And the thickness distribution of milling tool 26 is (maximum ga(u)ge)-(minimum thickness) of removing on the zone of groove processing part.This thickness distribution surpasses ± and during 0.05mm, then can cause pressure distribution to increase and reduce the processing quality of glass plate.
Stipulate hardness, thickness, the thickness distribution of milling tool 26 so as stated, be suitable for the glass plate with glass substrate more as FPD thereby can the glass plate G that adopt the float glass process manufacturing be ground to form.
On the other hand; After the application inventor makes great efforts research; The result finds, for the ripple that makes the glass plate after the grinding is below the 0.05 μ m, except the A hardness of managing milling tool 26 as stated; Also manage compression ratio, modulus of elasticity in comperssion, A hardness, thickness and the distribution of glass holding member 16, can be more effective.
For example, cross when low when the A of glass holding member 16 hardness, then the durability of glass holding member 16 reduces, and can't reuse glass holding member 16.And, under the situation that the A of glass holding member 16 hardness appropriateness reduces, the ripple that glass holding member 16 exists on can the non-abradant surface of heat absorbing glass plate G, the ripple that therefore can utilize milling tool 26 to exist on the abradant surface of abrading glass plate G well.Relative therewith; When the A of glass holding member 16 hardness is too high; Keep glass plate G with glass holding member 16 under the state of the ripple that then can exist on can't non-abradant surface, utilize the abradant surface of 26 couples of glass plate G of milling tool to grind through glass holding member 16 heat absorbing glass plate G.Therefore, with glass plate G when glass holding member 16 takes off, resilience takes place in glass plate G, consequently the residual ripple that surpasses 0.05 μ m on the abradant surface of glass plate G sometimes.
And, when the thickness distribution ratio ± 0.05mm of glass holding member 16 is big, can produce the problem that ripple can't evenly be removed sometimes because the resiliency of glass holding member 16 produce inequality in the face of glass plate G.
In order to address the above problem, glass holding member 16 preferred compressed rates (according to JIS L1021-6:2007 annex 1) are 10～70%, and (according to JIS L1021-6:2007 annex 1, wherein, initial load is 100gf/cm to modulus of elasticity in comperssion
2, final load is 1120gf/cm
2) be 70～98, A hardness is 2～20, thickness is 0.3～2.0mm, thickness distribution is ± 0.05mm in.
Compression ratio representes to follow the resiliency of initial glass plate G, the parameter of the recovery degree when modulus of elasticity in comperssion is reused for expression.
And in this embodiment, glass holding member 16 is preferably polyurathamc system, but also can suitably select the parts of normally used material to use.
And when glass plate G attenuation, the managing special of glass holding member 16 need dwindle range of management.For example, the glass holding member 16 when thickness of slab is the glass plate G below the 0.5mm, the preferred compressed rate is 10～70%, modulus of elasticity in comperssion is 70～98, A hardness is 2～20, thickness is 0.5～1.5mm, thickness distribution is ± 0.05mm in.And, the glass holding member 16 when thickness of slab is the glass plate G below the 0.3mm, the preferred compressed rate is 10～70%, modulus of elasticity in comperssion is 70～98, A hardness is 2～20, thickness is 0.7～1.2mm, thickness distribution is ± 0.05mm in.
Stipulate compression ratio, modulus of elasticity in comperssion, A hardness, thickness, the thickness distribution of glass holding member 16 as stated, be suitable for the glass plate with glass substrate more as FPD thereby can the glass plate G that adopt the float glass process manufacturing be ground to form.
On the other hand; Distinguished the following situation that exists: even glass holding member 16 is managed; Keep at glass under the situation of maximum cross-section excessive height of percent ripple curve of platform 20; The ripple that also can't exist on the non-abradant surface of heat absorbing glass plate G well through glass holding member 16 can't be ground to the ripple of the abradant surface of glass plate G below the 0.05 μ m.
In order to address the above problem, the surface that preferably keeps platform 20 for the glass that glass holding member 16 is installed via seal 18, the maximum cross-section height of the percent ripple curve when making evaluation length be 30mm is below the 20 μ m.
Stipulate that as stated glass keeps the maximum cross-section height of the percent ripple curve of platform 20; Thereby therefore the ripple that can exist on the non-abradant surface of heat absorbing glass plate G well through glass holding member 16 can grind to form the glass plate that adopts the float glass process manufacturing and be suitable for the glass plate with glass substrate as FPD more.
And distinguish; Even milling tool 26 is managed; Keep at milling tool also can producing bigger ripple under the situation of maximum cross-section excessive height of cross section curve of platform 30, can't the ripple of the abradant surface of glass plate G be ground to below the 0.05 μ m on the surface of milling tool 26.
In order to address the above problem, the surface that preferably keeps platform 30 for the milling tool that milling tool 26 is installed via seal 28, the maximum cross-section height of the cross section curve when making evaluation length be 30mm is below the 100 μ m.
Stipulate that as stated milling tool keeps the maximum cross-section height of the cross section curve of platform 30; Therefore thereby the ripple that can suppress the surface of milling tool 26 can grind to form the glass plate that adopts the float glass process manufacturing and is suitable for the glass plate with glass substrate as FPD more.
In addition, the maximum cross-section height of percent ripple curve is recorded in JIS B0601:2001.The maximum cross-section height of percent ripple curve adopts the Sha Fukaomu (trade name: サ one Off コ system) " 1400-D64 " of Tokyo Seimitsu Co., Ltd's system to measure with the condition determination of measured length 30mm, λ C=0.8mm.
And the deviation of the load that the abradant surface of glass plate G is pushed with respect to milling tool 26 is preferably below 10% of average load.
Stipulate the load of milling tool 26 as stated, be suitable for the glass plate with glass substrate more as FPD thereby can the glass plate G that adopt the float glass process manufacturing be ground to form with respect to glass plate G.And,, can adopt " BIG-MAT " or " HUGE-MAT " of system large tracts of land pressure-distribution measurement system of Ni Ta (ニ Star タ) Co., Ltd. as load Determination of distribution means.
As stated; Lapping device 10 according to this embodiment; With the glass plate G that adopts the float glass process manufacturing and thickness be below the 0.7mm, 1 edge lengths is more than the 1000mm, Young's modulus is that glass plate G more than the 65GPa grinds object, utilizes glass holding member 16 to keep the non-abradant surface of glass plate G, utilizing the height that exists on the abradant surface of milling tool 26 abrading glass plate G is the ripple below the 0.3 μ m; Thereby it is reduced to below the 0.05 μ m, makes the glass for flat panel display substrate.Thus, the maximum height that can make the ripple that exists on the abradant surface is below the 0.05 μ m, and can not produce the glass plate G with glass substrate as FPD that is suitable for of distortion or form and aspect inequality property in the image.
One example of grinding specification below is shown.
Grinding pressure: 2kPa～25kPa
Ground slurry: keep the slurry supply hole of platform to supply with the cerium oxide aqueous solution from milling tool
Milling tool: flexibel polyurethane making herbs into wool upper leather shape and surface have groove (separation 4.5mm, groove width 1.5mm, the groove depth 1～1.5mm) that flows through slurry
The thickness of glass plate: 0.2mm～0.7mm
The shape of glass plate: 1 limit surpasses the rectangular glass of 1000mm
The non-abradant surface of glass plate: be close to maintenance with the glass holding member
More than for grinding an example of specification.
In addition, in the lapping device 10 of this embodiment,, utilize the finishing that contains diamond abrasive grain termly grinding to be carried out on the surface of milling tool 26, implement finishing with emery wheel in order to keep the grinding rate of glass plate G.
In the past, shown in the sketch map of Fig. 3, will be installed on glass holding member 16 with emery wheel 40 with glass plate G approximate same size and for tabular finishing.And, through the air pressure of compressed and supplied air in the air chamber 23 of canvas shown in Figure 1 22, the finishing of Fig. 3 is pressed on milling tool 26 with emery wheel 40, grinding is carried out on the surface of milling tool 26.At this moment, finishing is carried out grinding to the surface of milling tool 26 simultaneously with the grinding rotation through the action of grinding head 12, the revolution likewise of emery wheel 40 with glass plate G.
When utilizing existing finishing to carry out grinding with emery wheel 40, above-mentioned air pressure can take place concentrate on the phenomenon of repairing with the marginal portion 40A of emery wheel 40.Therefore, a part of 26A on the surface of the milling tool 26 that contacts with marginal portion 40A receives grinding more than other part 26B, the unfavorable condition that therefore existence can't be smooth with the surperficial integral grinding of milling tool 26.And the surperficial 26A of an above-mentioned part that contacts with marginal portion 40A is because finishing with rotation, the revolution of emery wheel 40, presents ring-type on the surface like the milling tool that vertical view is shown in 26 of Fig. 4.
In order to prevent this unfavorable condition; In the lapping device 10 of this embodiment; In when finishing, as shown in Figure 5, will there be diamond abrasive grain and the framework 42 of rectangle that do not have a grinding capacity is installed on glass holding member 16 to surround finishing with the mode of emery wheel 40 shown in the vertical view of Fig. 6.And, through the air pressure of compressed and supplied air in the air chamber 23 of canvas 22, will repair with emery wheel 40 and framework 42 and press on milling tool 26, utilize finishing to carry out grinding (finishing) with the surface of 40 pairs of milling tools 26 of emery wheel.
At this moment, above-mentioned air pressure concentrates on and is positioned at the framework 42 of finishing with the periphery of emery wheel 40, and framework 42 does not have grinding capacity, so the part that contacts with framework 42 of milling tool 26 can be by grinding.That is, only carry out grinding with the surface of 40 pairs of milling tools 26 of emery wheel through the finishing that air pressure evenly is provided.Thus, can the surperficial integral grinding of milling tool 26 is smooth, utilize the finishing of finishing thereby can improve with emery wheel 40.
Preferred in addition, not only when the finishing of milling tool 26, use framework 42, also when the grinding of glass plate G, use framework 42.Thus, can when the grinding of glass plate G, prevent that air pressure from concentrating on the edge of glass plate G, thereby the edge grinding that can prevent glass plate G is too much.As the material of framework 42, can the illustration stainless steel, the material of no grainding capacity such as iron, aluminium, polyethylene, polyurethane.
And, in the lapping device 10 of embodiment,, termly the surface of milling tool 26 is washed, thereby is implemented to be attached to the finishing that the residues such as cerium oxide in the lapping liquid on surface of milling tool 26 are removed in order to keep the grinding rate of glass plate G.
Existing water washing device disposes spray-hole and uses (operating) water nozzle towards the finishing of downside above milling tool 26.From the above-mentioned spray-hole of this (operating) water nozzle with rinse water to spraying with the surperficial vertical direction of milling tool 26, and milling tool 26 and (operating) water nozzle are relatively moved in the horizontal direction implement the finishing of milling tool 26.
But, in existing cleaning device, there is following problem, promptly can't efficiently the above-mentioned residue on the surface that is attached to milling tool 26 be removed, and can't efficiently the residue of removing be flushed to outside the system of milling tool 26.
In order to prevent this problem, in the lapping device 10 of this embodiment, finishing is tilted with (operating) water nozzle 44, will be set at acute angle from the spray angle θ of the rinse water 48 of spray-hole 46 injections.And, (operating) water nozzle 44 and milling tool 26 are relatively moved back and forth in the horizontal direction, thereby the residue that will be attached to the surface of milling tool 26 is removed.
Thus, the pressure of residue through the rinse water 48 of tilt spraying that is attached to the surface of milling tool 26 is excavated, and therefore can remove efficiently.And the residue of removing is flushed to outside the system of milling tool 26 through the rinse water 48 that tilts to spray efficiently.Thus, can improve the finishing that utilizes (operating) water nozzle 166.
And the spray angle θ of rinse water 48 is preferably 10～45 degree from the viewpoint of the flush efficiency that excavates efficient and residue of residue, more preferably 30 degree.And, can reduce the efficient of removing of residue if the impulsive force during rinse water 48 impact grinding instruments 26 is more weak, if higher then possibly damage milling tool 26, therefore be preferably 5～50kPa.In addition, if milling tool 26 is slow then can reduce the dressing efficiency of milling tool 26 with the relative velocity of (operating) water nozzle 44,, therefore be preferably 3～20m/min if very fast then can reduce the efficient of removing of residue.
The specific embodiment of above reference at length is illustrated the present invention, but under the premise without departing from the spirit and scope of the present invention, can carry out various changes or correction, and this is conspicuous to those skilled in the art.
The Japanese patent application 2011-044250 that the application proposed based on March 1st, 2011, and be incorporated herein its content as reference.
Claims (7)
1. the Ginding process of a glass plate, with thickness be below the 0.7mm, 1 edge lengths is more than the 1000mm, Young's modulus is that glass plate more than the 65GPa is the glass plate that grinds object,
Keep the non-abradant surface of above-mentioned glass plate through the glass holding member, grinding the height that exists on the abradant surface of this glass plate through milling tool is that ripple below the 0.3 μ m is reduced to below the 0.05 μ m this ripple.
2. the Ginding process of glass plate according to claim 1, wherein,
The A hardness of above-mentioned milling tool is more than 20, and D hardness is below 99, and thickness is 1.0～2.5mm, thickness distribution is ± 0.05mm in.
3. the Ginding process of glass plate according to claim 1 and 2, wherein,
The compression ratio of above-mentioned glass holding member is 10～70%, and modulus of elasticity in comperssion is 70～98, and A hardness is 2～20, and thickness is 0.3～2.0mm, thickness distribution is ± 0.05mm in.
4. according to the Ginding process of each described glass plate in the claim 1～3, wherein,
Above-mentioned glass holding member is installed on glass via seal and keeps platform, and the maximum cross-section height of the percent ripple curve when this glass keeps the evaluation length of platform to be 30mm is below the 20 μ m.
5. according to the Ginding process of each described glass plate in the claim 1～4, wherein,
Above-mentioned milling tool is installed on milling tool via seal and keeps platform, and the maximum cross-section height of the cross section curve when this milling tool keeps the evaluation length of platform to be 30mm is below the 100 μ m.
6. according to the Ginding process of each described glass plate in the claim 1～5, wherein,
Above-mentioned milling tool is pushed with respect to above-mentioned glass plate with certain load, and the deviation of this load is below 10% of average load.
7. according to the Ginding process of each described glass plate in the claim 1～6, wherein,
Above-mentioned milling tool is in when finishing, makes finishing with emery wheel be connected to above-mentioned milling tool with the framework that surrounds the no grainding capacity that this finishing disposes with the mode of emery wheel and repair.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-044250 | 2011-03-01 | ||
| JP2011044250A JP2012179680A (en) | 2011-03-01 | 2011-03-01 | Method for polishing glass plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102653074A true CN102653074A (en) | 2012-09-05 |
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ID=46728886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100522360A Pending CN102653074A (en) | 2011-03-01 | 2012-03-01 | Method for polishing glass plate |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2012179680A (en) |
| KR (1) | KR20120099594A (en) |
| CN (1) | CN102653074A (en) |
| TW (1) | TW201238712A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107207312A (en) * | 2015-01-21 | 2017-09-26 | 旭硝子株式会社 | Manufacture method, plate glass, the manufacture method of laminated glass of plate glass |
| CN109476529A (en) * | 2016-07-28 | 2019-03-15 | Ａｇｃ株式会社 | Optical glass and optical component |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206736103U (en) * | 2015-06-09 | 2017-12-12 | 旭硝子株式会社 | Glass light guide plate |
| JP6299784B2 (en) * | 2016-02-17 | 2018-03-28 | 旭硝子株式会社 | Glass plate and method for producing glass plate |
| KR101881379B1 (en) * | 2016-11-28 | 2018-08-24 | 에스케이실트론 주식회사 | An apparatus for cleaning a grinding surface plate |
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| JP4219718B2 (en) * | 2003-03-28 | 2009-02-04 | Ｈｏｙａ株式会社 | Manufacturing method of glass substrate for EUV mask blanks and manufacturing method of EUV mask blanks |
| KR101097074B1 (en) * | 2005-08-19 | 2011-12-22 | 아사히 가라스 가부시키가이샤 | Substrate polishing apparatus and substrate polishing method |
| JP2008188710A (en) * | 2007-02-05 | 2008-08-21 | Furukawa Electric Co Ltd:The | Manufacturing method of glass substrate |
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| US1731663A (en) * | 1927-05-07 | 1929-10-15 | Hartford Empire Co | Method and apparatus for grinding and polishing plate glass |
| CA2405766A1 (en) * | 2000-04-28 | 2001-11-08 | 3M Innovative Properties Company | Method of cleaning glass |
| US20030181144A1 (en) * | 2000-04-28 | 2003-09-25 | 3M Innovative Properties Company | Abrasive article and methods for grinding glass |
| CN1874872A (en) * | 2003-10-27 | 2006-12-06 | 康宁股份有限公司 | Apparatus and method for grinding and/or polishing an edge of a glass sheet |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107207312A (en) * | 2015-01-21 | 2017-09-26 | 旭硝子株式会社 | Manufacture method, plate glass, the manufacture method of laminated glass of plate glass |
| US10633277B2 (en) | 2015-01-21 | 2020-04-28 | AGC Inc. | Plate glass production method, plate glass, and laminated glass production method |
| CN107207312B (en) * | 2015-01-21 | 2020-11-03 | Ａｇｃ株式会社 | Method for producing sheet glass, and method for producing laminated glass |
| US11180405B2 (en) | 2015-01-21 | 2021-11-23 | AGC Inc. | Plate glass production method, plate glass, and laminated glass production method |
| CN109476529A (en) * | 2016-07-28 | 2019-03-15 | Ａｇｃ株式会社 | Optical glass and optical component |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201238712A (en) | 2012-10-01 |
| KR20120099594A (en) | 2012-09-11 |
| JP2012179680A (en) | 2012-09-20 |
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Application publication date: 20120905 |