CN102645560A - Special measuring clamp for microwave minority carrier lifetime testers - Google Patents
Special measuring clamp for microwave minority carrier lifetime testers Download PDFInfo
- Publication number
- CN102645560A CN102645560A CN2012100890396A CN201210089039A CN102645560A CN 102645560 A CN102645560 A CN 102645560A CN 2012100890396 A CN2012100890396 A CN 2012100890396A CN 201210089039 A CN201210089039 A CN 201210089039A CN 102645560 A CN102645560 A CN 102645560A
- Authority
- CN
- China
- Prior art keywords
- microwave
- minority carrier
- carrier lifetime
- waveguide bend
- anchor clamps
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a special measuring clamp for microwave minority carrier lifetime testers, which comprises a section of 90-degree bent waveguide, one end of the bent waveguide is a microwave reflectometer connecting end, the other end of the bent waveguide is an open end, the open end is provided with a test reference surface for measured materials, and the test reference surface is provided with a choking slot; and the wall of the bent part of the bent waveguide is provided with a small hole, a laser emitter is arranged in the small hole, and the emitting direction of the laser transmitter points to the open end of the bent waveguide. By using the clamp disclosed by the invention, the minority carrier lifetime of a material can be measured through measuring the changes of microwave impedance of surface conductivity of the semiconductor material before and after laser radiation; and the clamp is simple in structure and easy to use.
Description
Technical field
The present invention relates to a kind of microwave minority carrier lifetime tester annex, relate in particular to a kind of microwave minority carrier lifetime tester special measurement anchor clamps.
Background technology
At present, though can record the minority carrier lifetime of material through measuring the variation of semiconductor material surface conductivity laser radiation front and back microwave impedance.But, owing to there are not a kind of anchor clamps of special use, cause the whole testing device complex structure, use inconvenience.
Summary of the invention
The purpose of this invention is to provide a kind of microwave minority carrier lifetime tester special measurement anchor clamps simple in structure, easy to use.
The objective of the invention is to realize through following technical scheme:
Microwave minority carrier lifetime tester special measurement anchor clamps of the present invention; Comprise one section 90 ° waveguide bend, an end of said waveguide bend is the microwave reflectometer link, and the other end is an openend; Said openend is provided with the test reference face of measured material, and said test reference face is provided with choke groove;
The wall of said waveguide bend corner is provided with aperture, and said aperture is equipped with generating laser, and the transmit direction of said generating laser points to the openend of said waveguide bend.
Technical scheme by the invention described above provides can be found out; Microwave minority carrier lifetime tester special measurement anchor clamps provided by the invention; Owing to comprise one section 90 ° waveguide bend, an end of waveguide bend is the microwave reflectometer link, and the other end is an openend; Openend is provided with the test reference face of measured material, and the test reference face is provided with choke groove; The wall of waveguide bend corner is provided with aperture, and aperture is equipped with generating laser, and the transmit direction of generating laser points to the openend of waveguide bend.Can record the minority carrier lifetime of material through measuring the variation of semiconductor material surface conductivity laser radiation front and back microwave impedance, simple in structure, easy to use.
Description of drawings
The structural representation of the microwave minority carrier lifetime tester special measurement anchor clamps that Fig. 1 provides for the embodiment of the invention;
Fig. 2 is the application syndeton synoptic diagram of special-purpose measured material in the embodiment of the invention.
Among the figure: 1,90 ° waveguide bend, 2, the test reference face, 3, choke groove, 4, the microwave reflectometer link, 5, aperture, 6, generating laser.
Embodiment
To combine accompanying drawing that the embodiment of the invention is done to describe in detail further below.
Microwave minority carrier lifetime tester special measurement anchor clamps of the present invention, its preferable embodiment is:
Comprise one section 90 ° waveguide bend, an end of said waveguide bend is the microwave reflectometer link, and the other end is an openend, and said openend is provided with the test reference face of measured material, and said test reference face is provided with choke groove;
The wall of said waveguide bend corner is provided with aperture, and said aperture is equipped with generating laser, and the transmit direction of said generating laser points to the openend of said waveguide bend.
The central axes of the launching centre line of said generating laser and the openend of said waveguide bend.
Said aperture constitutes one section by circular waveguide.
Said 90 ° waveguide bend can be E face waveguide bend or H face waveguide bend.
Said microwave reflectometer comprises microwave source, and said microwave source is connected with said waveguide bend through directional devices.The output terminal of said directional devices can be connected with oscillograph and/or computing machine through wave detector.
Microwave minority carrier lifetime tester special measurement anchor clamps of the present invention are the test reference face with the waveguide openings end, can record the minority carrier lifetime of material through measuring the variation of semiconductor material surface conductivity laser radiation front and back microwave impedance.
Specific embodiment:
As shown in Figure 1, measured material is one section 90 ° a waveguide bend (the curved or H face waveguide bend of E face), and a termination microwave reflectometer, an end are the openend that has choke groove, and measured material places openend (being the test reference face).Choke groove guarantees measured material surface and test end face good electrical contact.
In the aperture of corner inwall in the test lead waveguide, generating laser is housed, realize laser (pulse or continuous wave) irradiation to being terminated at test lead surface semiconductor material.To employed microwave frequency, aperture is equivalent to one section by circular waveguide, can not cause microwave leakage and and laser instrument between coupling.
As shown in Figure 2, microwave reflectometer comprises microwave source, directional devices etc., and directional devices is connected respectively with wave detector with special measurement anchor clamps of the present invention (or claiming sensor).Detection output can connect oscillograph, reads minority carrier lifetime according to wave form varies before and after the laser radiation; Also can connect computing machine and obtain minority carrier lifetime through data acquisition and processing (DAP).
Special measurement anchor clamps of the present invention can be contained each frequency range of all rectangular waveguides.
The above; Be merely the preferable embodiment of the present invention, but protection scope of the present invention is not limited thereto, any technician who is familiar with the present technique field is in the technical scope that the present invention discloses; The variation that can expect easily or replacement all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (6)
1. microwave minority carrier lifetime tester special measurement anchor clamps; It is characterized in that; Comprise one section 90 ° waveguide bend, an end of said waveguide bend is the microwave reflectometer link, and the other end is an openend; Said openend is provided with the test reference face of measured material, and said test reference face is provided with choke groove;
The wall of said waveguide bend corner is provided with aperture, and said aperture is equipped with generating laser, and the transmit direction of said generating laser points to the openend of said waveguide bend.
2. microwave minority carrier lifetime tester special measurement anchor clamps according to claim 1 is characterized in that the central axes of the launching centre line of said generating laser and the openend of said waveguide bend.
3. microwave minority carrier lifetime tester special measurement anchor clamps according to claim 2 is characterized in that, said aperture constitutes one section by circular waveguide.
4. according to claim 1,2 or 3 described microwave minority carrier lifetime tester special measurement anchor clamps, it is characterized in that said microwave reflectometer comprises microwave source, said microwave source is connected with said waveguide bend through directional devices.
5. microwave minority carrier lifetime tester special measurement anchor clamps according to claim 4 is characterized in that, the output terminal of said directional devices is connected with oscillograph and/or computing machine through wave detector.
6. according to claim 1,2 or 3 described microwave minority carrier lifetime tester special measurement anchor clamps, it is characterized in that said 90 ° waveguide bend is E face waveguide bend or H face waveguide bend.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100890396A CN102645560A (en) | 2012-03-29 | 2012-03-29 | Special measuring clamp for microwave minority carrier lifetime testers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100890396A CN102645560A (en) | 2012-03-29 | 2012-03-29 | Special measuring clamp for microwave minority carrier lifetime testers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102645560A true CN102645560A (en) | 2012-08-22 |
Family
ID=46658509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012100890396A Pending CN102645560A (en) | 2012-03-29 | 2012-03-29 | Special measuring clamp for microwave minority carrier lifetime testers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102645560A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86101518A (en) * | 1986-07-25 | 1987-02-11 | 复旦大学 | A kind of device with measuring minority carrier's life of semiconductor material with microwave without touch |
| JPH0627048A (en) * | 1992-05-14 | 1994-02-04 | Kobe Steel Ltd | Lifetime measuring apparatus for minority carrier in semiconductor wafer |
| JPH10125752A (en) * | 1996-10-22 | 1998-05-15 | Kobe Steel Ltd | Apparatus for measuring lifetime of minority carrier |
| CN1271093A (en) * | 1998-03-27 | 2000-10-25 | 西门子公司 | Non-destructive measuring method for minotiry carrier diffusion length and life of semiconductor device |
| CN1540735A (en) * | 2003-10-30 | 2004-10-27 | 上海交通大学 | Analyser for analyzing minority carrier lifetime of solar battery |
| CN202562961U (en) * | 2012-03-29 | 2012-11-28 | 北京大华无线电仪器厂 | Testing clamp special for microwave minority carrier life tester |
-
2012
- 2012-03-29 CN CN2012100890396A patent/CN102645560A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86101518A (en) * | 1986-07-25 | 1987-02-11 | 复旦大学 | A kind of device with measuring minority carrier's life of semiconductor material with microwave without touch |
| JPH0627048A (en) * | 1992-05-14 | 1994-02-04 | Kobe Steel Ltd | Lifetime measuring apparatus for minority carrier in semiconductor wafer |
| JPH10125752A (en) * | 1996-10-22 | 1998-05-15 | Kobe Steel Ltd | Apparatus for measuring lifetime of minority carrier |
| CN1271093A (en) * | 1998-03-27 | 2000-10-25 | 西门子公司 | Non-destructive measuring method for minotiry carrier diffusion length and life of semiconductor device |
| CN1540735A (en) * | 2003-10-30 | 2004-10-27 | 上海交通大学 | Analyser for analyzing minority carrier lifetime of solar battery |
| CN202562961U (en) * | 2012-03-29 | 2012-11-28 | 北京大华无线电仪器厂 | Testing clamp special for microwave minority carrier life tester |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7782262B2 (en) | Device for controlling the specific absorption rate of mass-produced radiant objects | |
| ATE548660T1 (en) | MEASURING TIP FOR HF MEASUREMENT | |
| CN105891617B (en) | A kind of ultrasonic transducer performance test apparatus | |
| CN208350944U (en) | The test macro of Millimeter Wave Pulsed power amplifier chip | |
| CN203705493U (en) | Oscilloscope probe for testing ripple waves | |
| CN105717432B (en) | partial discharge positioning device and method | |
| CN202057705U (en) | Photoelectric converter applied on electric energy meter calibration device and provided with photo-conduction tube | |
| CN202562961U (en) | Testing clamp special for microwave minority carrier life tester | |
| CN102645560A (en) | Special measuring clamp for microwave minority carrier lifetime testers | |
| CN109696570B (en) | Device and method for detecting microcosmic electric property of friction interface | |
| US9081036B2 (en) | Adjustable measurement device | |
| CN204679531U (en) | A kind of sheet capacitor high-frequency parameter test fixture | |
| CN108801487B (en) | Metal test piece temperature measuring device and system | |
| CN211348445U (en) | Electric field abnormity detection equipment for data center power supply and precision equipment | |
| CN204334591U (en) | A kind of calibration test system and device | |
| CN103698585B (en) | Multi-range optical current sensor | |
| CN211236037U (en) | Electric field detection device | |
| CN208621655U (en) | Micro-strip device test fixture | |
| CN206832861U (en) | Test probe and printed circuit board test fixture | |
| CN202975071U (en) | Wireless active probe of oscilloscope | |
| CN101819236A (en) | Method for testing antenna gain by using GTEM cell | |
| CN202133705U (en) | Multifunctional patrol rod used in patrol | |
| CN103698597B (en) | A kind of high-power microwave power detector | |
| EP1777529A3 (en) | Electric signal connecting device and probe assembly using the same | |
| CN102621235A (en) | Transmission-type method for measuring sensitivity of acoustic emission sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120822 |