CN109696570B - Device and method for detecting microcosmic electric property of friction interface - Google Patents
Device and method for detecting microcosmic electric property of friction interface Download PDFInfo
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- CN109696570B CN109696570B CN201711002795.XA CN201711002795A CN109696570B CN 109696570 B CN109696570 B CN 109696570B CN 201711002795 A CN201711002795 A CN 201711002795A CN 109696570 B CN109696570 B CN 109696570B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
Abstract
The invention relates to a detection device for microcosmic electrical property of a friction interface, which comprises a friction member and a detection part, wherein the friction member is used for rubbing the surface of a sample to be detected; the detection component is arranged opposite to the friction member and comprises at least one probe array for detecting the friction surface between the friction member and the sample to be detected. The detection device and the method for the microcosmic electric property of the friction interface can detect without moving a detection part, simultaneously realize multipoint and large-area measurement, and have the advantages of short time and high measurement efficiency in the measurement process.
Description
Technical Field
The invention relates to the technical field of tribology, in particular to a device and a method for detecting the microscopic electrical property of a friction interface.
Background
In the field of microscopic electrical characteristics of a friction interface, the size of a micro-electro-mechanical system is in a micron order, due to a size effect, the size of a device is reduced to the micron order, surface force represented by adhesive force and friction force is increased by about thousand times relative to volume force, a serious friction and abrasion problem is generated, and the electrical characteristics of the interface are further influenced.
In the conventional technology, a single-probe fixed-point measurement mode or a single-probe scanning measurement mode is adopted to measure the spatial distribution of the electrical property in the friction contact area, but the measurement time of the above modes is long, and the measurement efficiency is low.
Disclosure of Invention
Therefore, it is necessary to provide a device and a method for detecting the micro-electrical property of the friction interface with high measurement efficiency, aiming at the problem of low measurement efficiency of the electrical property of the friction contact area.
A device for detecting the microscopic electrical properties of a friction interface, comprising:
the friction member is used for rubbing the surface of the sample to be tested;
and the detection part is arranged opposite to the friction member and comprises at least one probe array and is used for detecting the friction surface between the friction member and the sample to be detected.
In one embodiment, the friction member is coupled to the probe array, and the probe signal output by the probe array includes a microwave signal that can be received by the probe array after being reflected by the friction surface of the friction member.
In one embodiment, the probe array includes a plurality of probe units, each of the probe units has a plurality of probes disposed thereon, and a friction interface where the friction member rubs against the sample to be measured is located within the range of the probe array.
In one embodiment, in the probe array, the distribution density of the probes distributed on the probe units is gradually reduced from the center to the periphery of the probe array.
In one embodiment, the device further comprises a sample supporting sheet for bearing a sample to be tested, and the friction member can be in contact with the sample supporting sheet and can move relatively.
In one embodiment, the sample support sheet is a wave-transparent material, so that the microwaves output by the probe array penetrate through the sample support sheet.
In one embodiment, the friction member and the detection component are respectively arranged on two opposite surfaces of the sample support sheet.
In one embodiment, the device further comprises a control device, wherein the control device is connected with the probe array and is used for acquiring detection signals;
the control device comprises a matrix switch and a network analyzer, wherein one end of the matrix switch is connected with the probe array, and the other end of the matrix switch is connected with the network analyzer.
In one embodiment, the probe unit includes a plurality of probe arrays, the matrix switch is disposed corresponding to the plurality of probe arrays, and the number of the matrix switch corresponds to the number of the probe arrays.
A method for detecting the micro-electric property of a friction interface by using the device for detecting the micro-electric property of a friction interface in any one of the above embodiments, the method comprising:
driving the friction member to move relative to the surface of the sample to be tested for friction;
and detecting the friction surface interface between the friction member and the sample to be detected by using the detection part, and receiving a detection signal fed back by the friction member.
According to the device and the method for detecting the microscopic electrical property of the friction interface, the detection component is arranged and comprises at least one probe array and is used for detecting the electrical property of the friction surface interface of the friction member and the sample to be detected, wherein the friction member and the sample to be detected are arranged opposite to each other. The detection device and the method can realize multi-point and large-area measurement simultaneously, and have the advantages of short time in the measurement process and high measurement efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings of the embodiments can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a detecting device for micro-electrical properties of a friction interface according to an embodiment;
FIG. 2 is an enlarged view of a portion of the probe array of the probing apparatus for micro-electrical properties of the friction interface shown in FIG. 1;
fig. 3 is a partially enlarged view of a probe unit of the probing apparatus for micro-electrical property of the frictional interface shown in fig. 2.
Wherein the content of the first and second substances,
Detecting member 111
Probe array 112
Impedance matcher 125
Detailed Description
In order to facilitate an understanding of the present invention, the device and method for detecting the microscopic electrical properties of a friction interface will be described more fully with reference to the accompanying drawings. The preferred embodiments of the apparatus and method for detecting the microscopic electrical properties of a friction interface are shown in the accompanying drawings. However, the triboelectric interface microscopic electrical detection apparatus and method may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete in the context of an apparatus and method for detecting microscopic electrical properties of a friction interface.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the apparatus and method for detecting triboelectric properties of a friction interface is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1, one embodiment provides a probing apparatus 100 for micro-electrical property of a friction interface, the probing apparatus 100 includes a friction member 102 and a probing member 111. The friction member 102 is used for rubbing the surface of the sample 104 to be measured, and the friction member 102 and the sample 104 to be measured form a friction pair 101; the detection component 111 is disposed opposite to the friction member 102, and the detection component 111 includes at least one probe array 112 for detecting a friction surface between the friction member 102 and the sample 104 to be detected.
By providing the detection member 111, the detection member 111 includes at least one probe array 112 capable of detecting electrical characteristics of the tribometer interface of the friction pair 101 disposed opposite thereto. The arrangement of the probe arrays can realize that the friction interface to be detected can be measured without moving the detection part 111, so that the measurement efficiency can be greatly improved, and the in-situ cooperative observation of the microcosmic electrical property of the friction and friction surface interface can be realized. Wherein, the in-situ observation, i.e. the detecting component 111, can detect the required signal without moving. The detection device 100 has short time consumption in the measurement process and high overall measurement efficiency.
In one embodiment, the detecting member 111 of the detecting device 100 is coupled with the friction pair 101. The coupling, i.e. the detection member 111 and the friction pair 101, are in close fit and interact with each other. The detecting component 111 can transmit a detecting signal to the friction surface interface of the friction pair 101, so as to obtain the feedback microscopic electrical characteristics of the friction surface interface to be detected.
The structure of the detection component 111 coupled with the friction pair 101 in the detection device 100 can perform in-situ measurement on the spatial distribution of the dielectric constant and the conductivity in the contact area in the friction process, and can realize real-time online detection on charges or defects in the friction process.
Specifically, the probe array 112 in the detection component 111 is coupled with the friction member 102, and a detection signal output by the probe array 112 can be received by the probe array 112 after being reflected by the friction surface of the friction member 102. This coupling structure may be a non-contact coupling method, or may be another coupling method as long as the probe array 112 and the friction member 101 can mutually transmit data information.
In a specific embodiment, the probe array 112 of the probing member 111 is non-contact coupled to the friction member 102. The non-contact coupling mode can carry out non-contact measurement on the friction contact area, the non-contact measurement cannot damage the friction contact surface and the friction pair 101 structure, and a lossless high-quality measurement result is obtained.
Furthermore, the device 100 for detecting the micro-electrical property of the friction interface further includes a microwave generator 128, wherein the microwave generator 128 can emit microwaves and output a detection signal through the probe array 112. The probe array 112 receives the microwaves and is well matched to them, ensuring undistorted transmission and reception of the probe signals. The probe array 112 emits microwave detection signals, and utilizes microwave penetrability without contacting a friction pair contact area to detect the electrical characteristics of the friction surface of the friction pair 101 arranged opposite to the probe array, so as to realize nondestructive non-contact measurement of the friction surface interface.
In one embodiment, the friction member 102 is coupled to the probe array 112, and the detection signal output by the probe array 112 includes a microwave signal that can be received by the probe array 112 after being reflected by the friction surface of the friction member 102.
In this embodiment, the measurement data includes the dielectric characteristics such as conductivity and the like of the friction region obtained using the probe signal. Wherein, the dielectric property and the change before and after of the material in the friction area are measured by microwave.
Specifically, the dielectric characteristics of different electromagnetic wave bands are different. The polarization phenomenon that each frequency channel takes place is different, and electric field change cycle is very much longer than relaxation time during the low frequency, can fully carry out various polarization processes, and near static dielectric constant, polarization can not keep up with electric field change during the high frequency, and the loss coefficient increases to the form of heat gives off, mainly takes place electron cloud polarization and ionic polarization to the microwave. For electromagnetic wave signals with frequencies lower than the microwave frequency band, the measurement of the dielectric properties of the system requires the arrangement of electrodes and the good processing of the measurement surface, resulting in low resolution; for electromagnetic wave signals with frequencies higher than the microwave frequency band, including radio frequency and visible light, due to the fact that the frequency is too high, although the resolution is high, the tested sample has almost no polarization, and the measured physical quantity is basically an optical quantity and has no electromagnetic characteristics.
The use of the microwave band has many advantages in that it has a strong penetration effect and its polarization due to frequency effects includes polarization with a short relaxation time, which is common, and is not affected by polarization with a long relaxation time, such as space charge distribution.
In one embodiment, the number of the probe arrays 112 may be one or more, each probe array 112 includes a plurality of probe units 113, each probe unit 113 is provided with a plurality of probes, and a friction interface where the friction member 102 and the sample 104 to be tested rub is located within the range of the probe array 112. The array can simultaneously realize multi-point and large-area measurement, greatly save measurement time and realize high-efficiency measurement.
Specifically, the distance between the probes is preferably selected to be 5 to 10 μm. Finding reasonable probe spacing and density is crucial, and too sparse results in reduced resolution, and too dense results in too strong interference signals between probes to affect the measurement signal. The proper probe density and spacing are selected to well resist electromagnetic interference and shield signals of other probes, so that the stability of the measured signals is ensured.
Further, the size of the probe array 112 is set corresponding to the size of the sample 104 to be measured, that is, the friction interface between the friction member 102 and the sample 104 to be measured is located within the range of the probe array 112, so as to achieve in-situ rapid and accurate measurement of the sample 104 to be measured, and obtain the spatial distribution of the electrical properties of the whole friction contact area. It should be understood that for the probe array 112 to perform in-situ measurement on the sample 104, the size of the probe array 112 is not necessarily the same as the size of the sample 104, and the microwave may be emitted divergently. Therefore, as long as the microwave signals emitted by the probe array 112 can completely cover each part of the sample 104 to be tested, even if the size of the probe array 112 is set corresponding to the size of the sample 104 to be tested, the size of the probe array 112 may be smaller than the size of the sample 104 to be tested, or may be equal to or larger than the size of the sample 104 to be tested. In addition, the displacement of the friction member 102 when it is rubbed with the sample 104 can be within the range covered by the probe array 112.
The in-situ rapid and accurate measurement realizes multipoint and large-area measurement, the measurement time is short, and the measurement efficiency is greatly improved.
When the sample 104 to be measured is large, the number of the probe arrays 112 may be set to plural, whereas when the sample 104 to be measured is small, the number of the probe arrays 112 may be set to one. In addition, the number of probe units 113 on the probe array 112 can be set according to actual conditions.
In one embodiment, as shown in fig. 2, the distribution density of the probes distributed on the probe unit 113 is gradually decreased from the center to the periphery of the probe array 112. The distribution density of the probes may be selected to decrease gradually from the center of the probe array 112 to the periphery, the probe units 113 with a higher distribution density may be selected for detection of important parts, and the probe units 113 with a lower distribution density may be selected for detection of small parts that are not important around the important parts. Thereby saving energy and making the best use of things. The distribution density of the probes on the probe units 113 is gradually reduced from the center to the peripheral edge of the probe array 112, so that the electromagnetic signals at the friction position can be accurately detected by using the detection signals emitted from the probe units 113 at the center.
In one embodiment, the probes are uniformly distributed on the probe unit 113, and the probes on the probe unit 113 can be uniformly distributed, so that the microwave signals emitted by each probe have the same intensity, and the detection of each part of the sample 104 to be detected with the same intensity can be realized.
The high-density microscopic single probe in the probe array 112 can be independently regarded as a near-field probe for measurement, and the resolution can reach the micron level, so that the method has considerable advantages in the fields of subsurface electrical characteristics and defect detection.
In one embodiment, the sample support plate 106 is further included for supporting a sample to be tested, and the friction member 102 can contact and move relative to the sample support plate 106, so that the friction member 102 can rub the sample to be tested distributed on the sample support plate 106. The sample support sheet 106 may be arranged parallel to the probe array 112 or may be otherwise arranged; the sample support sheet 106 may be rectangular, circular, or other shapes as long as the probe array 112 can detect all of the locations of the friction contact areas on the sample support sheet 106.
Further, the sample support plate 106 is made of a wave-transparent material, and the detection signal emitted by the probe array 112 can penetrate through the sample support plate 106 to detect the friction contact area of the friction pair 101. For example, the interface between the friction member 102 and the sample 104 can be detected by penetrating the sample support plate 106 with microwave without contacting the contact area of the friction pair 101.
In one embodiment, the friction member 102 and the detection component 111 are disposed on two opposite surfaces of the sample support plate 106, respectively, i.e. the friction pair 101 can be disposed above the sample support plate 106, and the detection component 111 is disposed below the sample support plate 106; on the contrary, the friction pair 101 is disposed below the sample support sheet 106, and the detection component 111 is disposed above the sample support sheet 106, and similarly, the friction pair 101 and the detection component 111 may also be disposed in the left and right directions of the sample support sheet 106, as long as the detection signal emitted by the probe can detect the friction contact area of the friction pair 101 through the sample support sheet 106, and the in-situ cooperative observation of the friction and the micro-electrical property of the surface interface can be realized.
In one embodiment, the probing apparatus 100 for micro-electrical property of the friction interface further comprises a control device connected to the probe array 112 for controlling the output of the probe array 112 and obtaining the probing signal. The control device comprises a matrix switch 122 and a network analyzer 124, wherein one end of the matrix switch 122 is connected with the probe array 112, and the other end of the matrix switch 122 is connected with the network analyzer 124.
Specifically, the matrix switch 122 may be a solid-state matrix switch, and may also be another form of matrix switch. The matrix switch 122 needs to be well matched with the probe array 112 so that the matrix switch 122 can perform fixed-point control on the probes in the probe array 112, and at the same time, the microwave needs to be well matched with the matrix switch 122 and the probes so as to ensure that the measurement signals are transmitted and received without distortion.
The network analyzer 124 comprises an impedance matcher 125, a photoelectric sensor 126, an amplifier 127 and a microwave generator 128, wherein the impedance matcher 125 is used for changing an impedance value and finding a proper impedance value for circuit matching; the photoelectric sensor 126 is used for converting the received microwave signal into an electric signal and transmitting the electric signal to a subsequent signal processing circuit; the amplifier 127 is used for amplifying the voltage or current of the converted electric signal; the microwave generator 128 transmits microwave signals to the probe array 112 for real-time dynamic measurement of the friction gauge interface.
In one embodiment, the probing member 111 includes a plurality of probe arrays 112, the matrix switches 122 are disposed corresponding to the plurality of probe arrays 112, and the number of the matrix switches 122 corresponds to the number of the probe arrays 112. When probe array 112 is multiple, the number of matrix switches 122 corresponds to the number of probe arrays 112, and a good match between matrix switches 122 and probe arrays 112 is advantageous for fast and precise control of probe arrays 112 by matrix switches 122. And the probe array 112 can perform in-situ measurement of the friction contact area, and only fixed-point control of the probes in the array is performed by using a solid-state matrix switch without moving during measurement of one area.
A method for detecting the micro-electrical property of a friction interface by using any one of the above-mentioned embodiments of the device for detecting the micro-electrical property of a friction interface, the method comprising: driving the friction member to move relative to the surface of the sample to be measured for friction; and detecting the friction surface interface between the friction member and the sample to be detected by using the detection part, and receiving a detection signal fed back by the friction member.
The detection method utilizes the probe array in the detection component to send and receive detection signals, and the detection component can detect all friction meter interfaces without moving, so that the detection method has the advantages of less time consumption and high detection efficiency in the detection process.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, it is possible to make several changes and modifications without departing from the spirit of the present invention, including using other types of electromagnetic wave probe array meter interfaces, which fall within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (9)
1. A device for detecting the microscopic electrical properties of a friction interface, comprising:
the friction member is used for rubbing the surface of the sample to be tested;
the detection component is arranged opposite to the friction member and comprises at least one probe array and is used for detecting the friction surface between the friction member and the sample to be detected;
the friction member is coupled with the probe array, the detection signal output by the probe array comprises a microwave signal, and the microwave signal can be received by the probe array after being reflected by the friction surface of the friction member;
the reflected microwave signals received by the probe array can be used to determine the dielectric properties of the friction region.
2. The device for detecting the micro-electrical property of the friction interface according to claim 1, wherein the probe array comprises a plurality of probe units, each probe unit is provided with a plurality of probes, and the friction interface of the friction member with the sample to be detected is located within the range of the probe array.
3. The triboelectric probe according to claim 2, wherein the distribution density of the probes distributed on the probe units in the probe array gradually decreases from the center to the periphery of the probe array.
4. The apparatus according to claim 1, further comprising a sample support plate for supporting a sample to be tested, wherein the friction member is capable of contacting and moving relative to the sample support plate.
5. The apparatus according to claim 4, wherein the sample support plate is made of a wave-transparent material such that the microwaves output by the probe array penetrate the sample support plate.
6. The apparatus of claim 4, wherein the friction member and the detecting element are disposed on two opposite surfaces of the sample support plate, respectively.
7. The device for detecting the micro-electrical property of the friction interface according to claim 1, further comprising a control device connected to the probe array for acquiring a detection signal;
the control device comprises a matrix switch and a network analyzer, wherein one end of the matrix switch is connected with the probe array, and the other end of the matrix switch is connected with the network analyzer.
8. The apparatus according to claim 7, wherein the probing member comprises a plurality of probe arrays, the matrix switch is disposed corresponding to the plurality of probe arrays, and the number of the matrix switch corresponds to the number of the probe arrays.
9. A method for detecting the micro-electric property of a friction interface by using the device for detecting the micro-electric property of a friction interface according to any one of claims 1 to 8, wherein the method comprises the following steps:
driving the friction member to move relative to the surface of the sample to be tested for friction;
and detecting the friction interface between the friction member and the sample to be detected by using the detection part, and receiving a detection signal fed back by the friction member.
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| CN104964922B (en) * | 2015-06-10 | 2017-12-08 | 南京航空航天大学 | Contact friction force is with contacting electric charge synchronous measuring apparatus and method |
| CN105181501B (en) * | 2015-08-10 | 2018-01-16 | 西南交通大学 | Multiprobe friction and wear test and pattern detection system in situ under a kind of vacuum |
| CN106918723A (en) * | 2017-01-19 | 2017-07-04 | 西南交通大学 | A kind of multiprobe detection method under controlled atmosphere based on AFM |
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