CN102645529A - 一种基于声光调制的微悬臂梁阵列生化传感方法及装置 - Google Patents
一种基于声光调制的微悬臂梁阵列生化传感方法及装置 Download PDFInfo
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103234961A (zh) * | 2013-04-16 | 2013-08-07 | 中国电子科技集团公司第三十八研究所 | 一种微悬臂梁阵列生化传感装置及其生化检测方法 |
CN103822651A (zh) * | 2014-03-03 | 2014-05-28 | 安徽理工大学 | 基于平面镜反射的微悬臂梁阵列传感器的微悬臂梁偏转检测系统及检测方法 |
CN103837472A (zh) * | 2014-03-03 | 2014-06-04 | 安徽理工大学 | 基于多角度平面透射镜的微悬臂梁阵列传感器的微悬臂梁偏转扫描系统及扫描方法 |
CN103869062A (zh) * | 2012-12-18 | 2014-06-18 | 中国科学技术大学 | 基于压电扫描的微悬臂梁阵列生化传感装置及方法 |
CN103868889A (zh) * | 2012-12-18 | 2014-06-18 | 中国科学技术大学 | 基于微镜扫描的微悬臂梁阵列生化传感装置及方法 |
CN106595786A (zh) * | 2016-12-22 | 2017-04-26 | 西安交通大学 | 一种阵列悬臂梁膜结构硅微流量传感器芯片 |
CN106970245A (zh) * | 2017-05-18 | 2017-07-21 | 安徽理工大学 | 一种新型微悬臂梁阵列循环扫描系统 |
CN112325805A (zh) * | 2020-11-02 | 2021-02-05 | 珠海市运泰利自动化设备有限公司 | 一种入射点非转动原点psd角度检测标定方法 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103869062A (zh) * | 2012-12-18 | 2014-06-18 | 中国科学技术大学 | 基于压电扫描的微悬臂梁阵列生化传感装置及方法 |
CN103868889A (zh) * | 2012-12-18 | 2014-06-18 | 中国科学技术大学 | 基于微镜扫描的微悬臂梁阵列生化传感装置及方法 |
CN103234961A (zh) * | 2013-04-16 | 2013-08-07 | 中国电子科技集团公司第三十八研究所 | 一种微悬臂梁阵列生化传感装置及其生化检测方法 |
CN103822651A (zh) * | 2014-03-03 | 2014-05-28 | 安徽理工大学 | 基于平面镜反射的微悬臂梁阵列传感器的微悬臂梁偏转检测系统及检测方法 |
CN103837472A (zh) * | 2014-03-03 | 2014-06-04 | 安徽理工大学 | 基于多角度平面透射镜的微悬臂梁阵列传感器的微悬臂梁偏转扫描系统及扫描方法 |
CN106595786A (zh) * | 2016-12-22 | 2017-04-26 | 西安交通大学 | 一种阵列悬臂梁膜结构硅微流量传感器芯片 |
CN106595786B (zh) * | 2016-12-22 | 2019-06-14 | 西安交通大学 | 一种阵列悬臂梁膜结构硅微流量传感器芯片 |
CN106970245A (zh) * | 2017-05-18 | 2017-07-21 | 安徽理工大学 | 一种新型微悬臂梁阵列循环扫描系统 |
CN112325805A (zh) * | 2020-11-02 | 2021-02-05 | 珠海市运泰利自动化设备有限公司 | 一种入射点非转动原点psd角度检测标定方法 |
CN112325805B (zh) * | 2020-11-02 | 2022-03-29 | 珠海市运泰利自动化设备有限公司 | 一种入射点非转动原点psd角度检测标定方法 |
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