CN102645276A - Spectrum sensing equipment, system and method - Google Patents
Spectrum sensing equipment, system and method Download PDFInfo
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- CN102645276A CN102645276A CN2012100339030A CN201210033903A CN102645276A CN 102645276 A CN102645276 A CN 102645276A CN 2012100339030 A CN2012100339030 A CN 2012100339030A CN 201210033903 A CN201210033903 A CN 201210033903A CN 102645276 A CN102645276 A CN 102645276A
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Abstract
The invention discloses spectrum sensing equipment, system and method. The spectrum sensing equipment comprises N receiving optical modules, a fixing element and N spectrum sensing modules. The N receiving optical modules are used for receiving the light which is output by N parts to be tested in a group to be tested, wherein N is an integer which is larger than 1. The fixing element is used for fixing the receiving optical modules, maintains and fixes the relative distances among the receiving optical modules, so that the N parts to be tested are respectively located within the receiving optical scopes of the N receiving optical modules. The N spectrum sensing modules are respectively coupled with the N receiving optical modules, are used for respectively receiving the light which is output by the N parts to be tested through the N receiving optical modules, and separate the light which is output by each part to be tested into a plurality of spectrum components for obtaining a spectrum signal which corresponds to the spectrum components. According to the spectrum sensing equipment, the sensing time of light-emitting diode (LED) crystal grains and numerous light sources can be effectively shortened, and the spectrum sensing equipment is greatly beneficial to capacity improving.
Description
Technical field
The present invention relates to a kind of spectrum sensor device, system and method, relate in particular to a plurality of to be measured the spectrum detection technology of a kind of ability sensing.
Background technology
Traditional light emitting diode (Light Emitting Diode, be called for short LED) make and encapsulated phase in, need be through repeatedly the spectrum and the detection of electrical specification, good with the quality of the LED that guarantees to manufacture, or as the product quality The classification basis.If find that in manufacture process the yield of the LED crystal grain on the entire chip is not high, then entire chip must be scrapped by quilt, perhaps carries out other screenings and uses and find out the particle that may use, in order to avoid waste other costs in follow-up manufacturing process and follow-up encapsulation.If find that the spectral characteristic of LED crystal grain is not good, then this LED crystal grain must be disallowable falls, and perhaps sells with lower price.
Fig. 1 shows the state of the application of traditional integrating sphere.As shown in Figure 1, an integrating sphere 1110 is coupled to a spectrometer 1100.Because the directive property of LED crystal grain is very strong, so in the known technology, the spectral characteristic of mainly utilizing integrating sphere 1110 collocation spectrometers 1100 to come the light source (LED crystal grain) 1120 on the sensing semi-conductor chip 1130.Utilize the mode of laser excitation or energising to make that wherein a LEDs crystal grain 1120 is luminous, the light that is sent gets into integrating sphere 1110 and by homogenising, exports spectrometer 1100 at last to.Yet, the spectral characteristic that this configuration once only can a LED crystal grain of sensing.With four inches chip, the number of the LED crystal grain that grows on it approximately is 8*10
3, the test duration of every spectral characteristic is about 70 milliseconds (ms) on the practice, so all the sensing time of LED crystal grain is 70ms*8*10 on four inches chips of a slice
3=560 seconds, that is time about 10 minutes nearly.
Because the demand of LED is increasingly high, has felt gradually not apply with the main flow manufacturing process of four inches chip production LED at present and used, so among the technology of making LED with 8 inches chips just stepping up to research and develop in countries in the world.Estimation at present cooperates the progress of manufacturing process, and the number of the LED crystal grain of being grown up on 8 inches chips can reach 2*10
5, with the spectrum sensing Time Calculation of 70 milliseconds of every costs, the sensing time of whole LED crystal grain is about 70ms*2*10 on 8 inches chips of a slice as equally
5=14,000 second, that is nearly four hours.Since LED crystal grain from long brilliant, mix electrode, cutting, a plurality of links on the manufacturing process of encapsulation or the like need repeatedly spectrum sensing.Therefore, traditional sensor device and be not suitable for the sensing of following a large amount of LED crystal grain.
Summary of the invention
A purpose of embodiments of the invention provides a kind of spectrum sensor device, system and method that can effectively shorten the sensing time.
Embodiments of the invention provide a kind of spectrum sensor device, comprise that N is received optical module, a retaining element and N spectrum sensing module.Receive N to be measured light of being exported that optical module is used for receiving respectively a group to be measured for N, wherein N is the positive integer greater than 1.Retaining element is used for that these are received optical module to be fixed, and these is received relative distance between optical modules keep fixingly, makes in N to be measured the receipts optical range that drops on N receipts optical module respectively.N spectrum sensing module is coupled to N respectively and receives optical module; Be used for receiving optical module through N respectively and receive N to be measured light of being exported; And each to be measured light of being exported separated into a plurality of spectral components, to obtain a spectral signal corresponding to these spectral components.
In one embodiment, to be measured is light source.In another embodiment, to be measured is LED crystal grain.
Embodiments of the invention more provide a kind of spectrum sensing system, are used for the portion a plurality of to be measured of sensing one group to be measured.The spectrum sensing system comprises lights device, a plurality of spectrum sensing module, a stationary installation and a locating device.Lamp device is used to light these portions to be measured, so that these to be measured output light.A plurality of spectrum sensing modules are used for receiving respectively these to be measured light of being exported, and each to be measured light of being exported is separated into a plurality of spectral components, to obtain the spectral signal corresponding to these spectral components.Stationary installation is used for these spectrum sensing modules are fixed, and keeps the relative distance between these spectrum sensing modules fixing.Locating device is coupled to stationary installation or group to be measured; Be used to locate these spectrum sensing modules or group to be measured; So that in these to be measured receipts optical range that drops on these spectrum sensing modules respectively, make these spectrum sensing modules can receive these to be measured light of being exported respectively.
Embodiments of the invention provide a kind of spectrum method for sensing again; Comprise: a plurality of first to be measured the relative position of locating a plurality of receipts optical modules and a group to be measured; So that these first to be measured dropped on respectively in these receipts optical ranges of receiving optical modules, wherein these relative distances of receiving between optical modules are kept fixing; Light these first portions to be measured, with output light; And a plurality of spectrum sensing modules receive the light that optical modules receive these first to be measured output through these respectively, to carry out the spectrum sensing.
Based on above-mentioned, can effectively shorten the sensing time of numerous light sources such as LED crystal grain, be one to benefit greatly for the lifting of production capacity.
For letting the foregoing of the present invention can be more obviously understandable, hereinafter is special lifts the number preferred embodiment, and cooperates appended accompanying drawing, elaborates as follows.
Description of drawings
Fig. 1 shows the state of the application of traditional integrating sphere.
Fig. 2 shows the three-dimensional exploded view of the spectrum sensing module that is applied to embodiments of the invention.
Fig. 3 shows the synoptic diagram according to the spectrum sensor device of first embodiment of the invention.
Fig. 4 shows the process flow diagram according to the spectrum method for sensing of first embodiment of the invention.
Fig. 5 A to Fig. 5 D shows four examples receiving optical module respectively.
The operation chart of three examples of the spectrum sensor device of Fig. 6 A to Fig. 6 C demonstration second embodiment of the present invention.
Fig. 7 A shows the synoptic diagram according to the spectrum sensor device of first example of third embodiment of the invention.
Fig. 7 B shows along the sectional view of the line 7B-7B of Fig. 7 A.
The partial enlarged drawing of Fig. 7 C displayed map 7A.
Fig. 7 D shows the synoptic diagram according to the spectrum sensor device of second example of third embodiment of the invention.
Fig. 7 E shows along the sectional view of the line 7E-7E of Fig. 7 D.
Fig. 8 A and Fig. 8 B show the synoptic diagram according to the partial structurtes of the spectrum sensor device of fourth embodiment of the invention.
Fig. 8 C shows the vertical view according to the LED crystal grain of fourth embodiment of the invention.
Fig. 9 shows the synoptic diagram according to the spectrum sensor device of fifth embodiment of the invention.
Figure 10 shows the synoptic diagram according to the spectrum sensing system of seventh embodiment of the invention.
Figure 11 shows the synoptic diagram according to the spectrum sensing system of eighth embodiment of the invention.
The accompanying drawing mark:
AC: receive the light vertebra
NL: normal
OS: light
P, P: pitch
S1: spectral signal
S111～S114: step
SC: spectral components
X, Y, Z: coordinate axis
1,101,200,201A, 201B, 301A, 301B, 401,501,601: spectrum sensor device
10,10M2,10M3,10M4,110,210,310A, 310B, 410,510: receive optical module
10F, 410F, 510F, 610F: retaining element
11: sleeve
1100: spectrometer
11A: light absorbent
12: through hole
13A: holder
13M2: lens
13M3: collimating mirror
13M4: cosine corrector
2,2 ', 2a, 2b, 2c, 102,300,1120: light source/LED crystal grain/portion to be measured
20,420,520: light transmission media/optical fiber
21,421,521: receive light mouth end
22,422,522: the light-emitting window end
23,414,514: core
24,330,350,415,515: clad
25,416: protective seam
26,426: receive the light mouth
3,103,1130: chip/group to be measured
30: the spectrum sensing module
30F: stationary installation
31: body
310: anti-reflecting layer
32: input part
320: substrate
33: diffraction grating
34: sensor
340,370: electrode
35: parasitic light filtering structure
36: the waveguide sheet
360: thin metal layer
380: active layers
40: driving mechanism
4A, 4B: section
50: probe groups
51,52: probe
517: distance piece
55: lamp device
60: power supply unit
610,1110: integrating sphere
701,801: the spectrum sensing system
770: locating device
Embodiment
First embodiment
Fig. 2 shows the three-dimensional exploded view of the spectrum sensing module that is applied to embodiments of the invention.Fig. 3 shows the synoptic diagram according to the spectrum sensor device of first embodiment of the invention.Like Fig. 2 and shown in Figure 3, the spectrum sensor device 1 of embodiments of the invention comprises that receiving optical module 10, a retaining element 10F, a N light transmission media 20, a N spectrum sensing module 30 and for N lights device 55.
Receive optical module 10 for N and can be used to distinctly receive the light OS that light source 2 is exported at every turn, wherein N is the positive integer greater than 1, and in first example of present embodiment, N equals 8.In addition, in present embodiment, a plurality of light sources 2 are to be that example is explained with the LED crystal grain on the led chip 3, and wherein led chip 3 is defined as group to be measured, and LED crystal grain 2 and 2 ' be defined as portion to be measured.In present embodiment, LED crystal grain must cooperate each to receive optical module 10 and luminous, just lets luminous the getting final product of LED crystal grain of receiving optical module 10 sensing of wanting; Other are not that the LED crystal grain of receiving optical module 10 sensing of wanting does not need luminous.Can avoid the luminous interference that causes of the LED crystal grain of vicinity thus, influence sensing result.
The mode of lighting LED crystal grain has a variety of; Can utilize and receive optical module 10 all-in-one-piece probes and come once to light a lot of LED crystal grain; Also can utilize and receive optical module 10 independently probe come once to light a lot of LED crystal grain, also can utilize laser light to excite the shinny mode of LED crystal grain to light a plurality of LED crystal grain.The device of these bright light source lamp device 55 of can being known as, the allocation position of lamp device 55 below has more detailed explanation corresponding to the allocation position of light source 2.
In present embodiment, be that adopting with receiving the independently a plurality of probe groups of optical module 10 is that example is explained, wherein contact the negative electrode and the anode of the LED crystal grain of correspondence with at least two probes of each probe groups, think the energising of LED crystal grain and make LED crystal grain luminous.Therefore, once can light a lot of LED crystal grain.The quantity of the probe of single probe groups once can contact a lot of LED crystal grain greater than 2, with a plurality of LED crystal grain of a plurality of probe contact chips, and controls probe through controller (not illustrating) and whether switches on to the LED crystal grain of in batches lighting correspondence.Therefore, the every running fix of these probes once can be carried out the detection procedure of a plurality of LED crystal grain in batches.So just do not need traveling probe always, the effect of lifting is also arranged for sensed speed.The enforcement kenel of probe groups has explanation further in the 4th embodiment.
Retaining element 10F is used for that these are received optical module 10 to be fixed, and these is received relative distance between optical modules 10 keep fixingly, and N LED crystal grain 2 is dropped on respectively in the receipts optical range of N receipts optical module 10.Thus, by behind the location relative to each other, each receives the light that optical module 10 can receive that corresponding LED crystal grain is exported at retaining element 10F and led chip 3.
N light transmission media 20 is connected to N respectively and receives optical module 10.Each light transmission media 20 can be that optical fiber or other can transmit the media of light, is to explain as an example with optical fiber in present embodiment.Light transmission media 20 has two ends, and wherein an end is to be coupled to the receipts light mouth end 21 of receiving optical module 10, and the other end is the light-emitting window end 22 that is coupled to spectrum sensing module 30.Light transmission media 20 has pliability, and when receipts optical module 10 was moved, light transmission media 20 can be pulled mobile, and spectrum sensing module 30 can't be moved.Thus, can save the energy and the cost of mobility spectrum sensing module 30.In addition; Because light transmission media 20 has pliability, the pattern that spectrum sensing module 30 is arranged in can be to be same as to receive the pattern that optical module 10 is arranged in, or is different from the pattern that receipts optical module 10 is arranged in; Look closely spatial configuration and design requirement and determine, do not do special qualification in this.In the present embodiment, be that to be arranged in identical pattern be that example is explained to receive optical module 10 and spectrum sensing module 30.
N spectrum sensing module 30 is coupled to N through N light transmission media 20 respectively and receives optical module 10, is used for receiving N the light OS that light source 2 is exported through N light transmission media 20 and N receipts optical module 10 respectively.Then, 30 pairs of light of spectrum sensing module are made the program of parsing, and the light OS that distinctly light source 2 is exported becomes a plurality of spectral components SC according to the wavelength size separation, to obtain the spectral signal S1 corresponding to these spectral components SC.The light OS that each light source 2 is exported is after being converted into spectral signal S1 respectively; Just can be transferred to computer or independently in the analytic system (not shown); Analytic system is judged, to let the analytic system decision whether reject light source 2, confirm its quality grade or make other decisions according to the detection that spectral signal S1 carries out light source characteristic.
Decline type spectrometer or other various conventional spectrometers of microchip all can be used for being used as spectrum sensing module 30.In the present embodiment, be to be that example is explained with the microchip type spectrometer that declines.
Please refer again to Fig. 2, each spectrum sensing module 30 comprises a body 31, an input part 32, a diffraction grating 33 and a sensor 34.Input part 32 is disposed in the body 31, and is coupled to the light-emitting window end 22 (referring to Fig. 3) of light transmission media 20 and receives optical module 10, to receive one to be measured light OS that is exported.Diffraction grating 33 is disposed in the body 31, and the light OS that is used for that above-mentioned light source is exported separates into these spectral components SC.Sensor 34 is disposed in the body 31, is used for these spectral components of sensing SC to obtain spectral signal S1.In addition, each spectrum sensing module 30 more comprises a jagged parasitic light filtering structure 35 and a upper and lower waveguide sheet 36.Parasitic light filtering structure 35 is used for the filtering parasitic light, avoids parasitic light to arrive diffraction grating 33 and sensor 34.Waveguide sheet 36 is used to avoid light loss, light can between two waveguide sheets 36, be reflected advance.In present embodiment, the diffraction structure of diffraction grating 33 is to be formed through the semiconductor etching manufacturing process by semiconductor material.But it only is a kind of selection embodiment.In other embodiment, the diffraction structure of diffraction grating 33 can form through ionic reaction etching, Laser Processing, I.B.M., electron beam processing, X-ray etching, ejection formation, impression or electroforming manufacturing process.
As shown in Figure 3, spectrum sensor device 1 more comprises a driving mechanism 40.Driving mechanism 40 couples retaining element 10F and these and receives optical module 10, can be used for moving these and receives optical modules 10, makes spectrum sensor device 1 a plurality of to be measured (LED crystal grain) 2 on the sensing led chip 3 in batches.In present embodiment, driving mechanism 40 is to be used as example explanation with robotic arm, can carry out that step-by-step movement moves or continuity moves, but it only is a kind of selection embodiment.The direction that these receipts optical modules 10 of driving mechanism 40 drivings move comprises horizontal direction (X, Y direction) and vertical direction (Z direction).Moving of horizontal direction can make 10 gradation of receipts optical module aim at N LED crystal grain 2 of different groups.Moving of vertical direction can be adjusted the distance of receiving optical module 10 and LED crystal grain 2, can in single receipts optical module 10, transmit to allow the light that single LED crystal grain 2 is exported, and avoids the light of other light sources in single receipts optical module 10, to transmit.
In other embodiment, driving mechanism 40 also can be coupled to led chip 3, is used for driving LED chip 3 and moves, and makes led chip 3 and receives the effect that optical module 10 relatively moves to replace the mode that drive fixing element 10F moves, can reach equally.
Therefore, in first example of first embodiment, this spectrum sensor device 1 can come sensing M LED crystal grain 2 through repeatedly moving and repeatedly measuring, and M is the positive integer more than or equal to N.Receive optical module 10 for N and be arranged in a figure, present embodiment is that example describes with the rectilinear figure, but it only is a kind of selection embodiment.Chip 3 comprise N the one LED crystal grain 2 and N the 2nd LED crystal grain 2 ', N LED crystal grain 2 and N the 2nd LED crystal grain 2 ' be arranged in respectively figure same as described above.These receipts optical modules 10 of driving mechanism 40 drivings move and make N the receipts optical range of receiving optical module 10 respectively to being positioned at a N LED crystal grain 2, obtain first spectral signal to carry out one first spectrum sensing.Then, driving mechanism 40 drive these receive optical modules 10 move make N the receipts optical range of receiving optical module 10 respectively to be positioned at individual the 2nd LED crystal grain 2 of N ', obtain second spectral signal to carry out one second spectrum sensing.
In detection process, driving mechanism 40 moves along the Z axle and receives optical module 10 arrival certain height, moves along the XY plane then and receives optical module 10 to aim at LED crystal grain 2, then can carry out detection procedure.The central point distance (pitch) to each other of supposing adjacent two LED crystal grain to be measured (2,2 ') is P for the distance (pitch) between p, adjacent two central points of receiving 10 of optical modules.Adjacent two pitch P that receive optical module 10 can equal L*p, and wherein L is the positive integer more than or equal to 1.L equals 2 in present embodiment, so P=2p.In a section 4A, driving mechanism 40 in N spectrum sensing module 30 accomplish once sensing understand later on a driving N distance that receipts optical module 10 moves equal these LED crystal grain 2 and 2 ' pitch P.Behind L sensing of completion, driving mechanism 40 continuation driving receipts optical modules 10 skip to another section 4B and carry out sensing in that the 10 quilt drivings (L-1) of receipts optical module are inferior.The benefit of the design pitch microminiaturization too that is to receive optical module 10 like this, but still can come sensing to have the LED crystal grain 2 of small pitch with the mode of stage.
Fig. 4 shows the process flow diagram according to the spectrum method for sensing of first embodiment of the invention.As shown in Figure 4, the spectrum method for sensing of present embodiment may further comprise the steps S111 to S114.
In step S111, locate a plurality of first to be measured 2 relative position of a plurality of receipts optical modules 10 and a group 3 to be measured, so that these first to be measured 2 is dropped on respectively in these receipts optical ranges of receiving optical module 10.In step S112, light these first to be measured 2, with output light.Then, in step S113, a plurality of spectrum sensing modules 30 are received the light that optical module 10 receives these first to be measured 2 output through these respectively, to carry out the spectrum sensing.
After the first time of above-mentioned step S111 to S113, the spectrum detection procedure was accomplished, can judge whether that all to be measured is finished by sensing in step S114.If then finish the method.If not, then jump to step S111, to the test section execution in step S111 to S113 that does not detect as yet, up to all to be measured finished by sensing till.Note that in other embodiments step S114 also can adjust according to circumstances, for example also can detect to be measured of different groups in regular turn according to an intended flow.
Hold above-mentioned, when also have to be measured not to be detected, can return step S111, move these receive optical module 10 contrapositions to not examined a plurality of second to be measured 2 ', so that these second to be measured 2 ' drop on respectively in these receipts optical ranges of receiving optical modules 10.In step S112, light these second to be measured 2 ', with output light.In step S113, these spectrum sensing modules 30 are received the light that optical module 10 receives these second to be measured 2 ' output through these respectively, to carry out the spectrum sensing.
Therefore, through the mode of sensing in batches, can accomplish all spectrum sensings of to be measured of group 3 to be measured.
Fig. 5 A to Fig. 5 D shows four examples receiving optical module respectively.Shown in Fig. 5 A, to receive optical module 10 and comprise a sleeve 11, an end of sleeve 11 is coupled to the receipts light mouth end 21 of light transmission media 20, and the other end of sleeve 11 is a free end.Sleeve 11 has a through hole 12, and wherein the light OS that exported of LED crystal grain 2 can get into via through hole 12 and receive in the optical modules 10.In first example, light transmission media 20 comprises an optical fiber, and the diameter of the core of optical fiber (core) 23 approximately is 600 microns, and the diameter of LED crystal grain 2 approximately is 200 microns.In first example of Fig. 5 A, what be centered around core 23 peripheries is clad (c1adding) 24, and the refractive index of clad 24 is less than the refractive index of core 23.Protective seam 25 coats this clad 24, is used to provide the effect of protection.In addition, in case of necessity can be in the inwall coating light absorbent 11A of sleeve 11, among the light or the inwall reflection entering light transmission media 20 of other parasitic lights with near other LED crystal grain 2 avoiding via sleeve 11.The advantage of the example of Fig. 5 A is that employed material simplifies, and helps to reduce cost.
Shown in second example of Fig. 5 B, receive the receipts optical module 10 that optical module 10M2 is similar to Fig. 5 A, difference is to receive optical module 10M2 and more comprises a lens 13M2.Lens 13M2 is disposed in the through hole 12 of sleeve 11, is used for the light OS that LED crystal grain 2 is exported is focused to the receipts light mouth 26 of light transmission media 20 or receives near the center of light mouth 26.Thus, can carry out receipts light, avoiding light loss, or reduce the influence of directive property to measuring of LED crystal grain 2 than wide-angle.The pattern of lens 13M2 and ornaments position are not subject to the content of accompanying drawing especially.The advantage of second example of Fig. 5 B is to use lens 13M2 to focus on, and helps to improve to receive light quantity, can utilize lens 13M2 to intercept dust again and get in the through hole 12.
Shown in the 3rd example of Fig. 5 C, receive the receipts optical module 10 that optical module 10M3 is similar to Fig. 5 A, difference is to receive optical module 10M3 and more comprises a collimating mirror 13M3 who is fixed among the holder 13A, and holder 13A is installed in the sleeve 11.Perhaps, in another example, holder 13A can be one-body molded with sleeve 11.So, the light OS that is exported by LED crystal grain 2 is through after the collimating mirror 13M3, can become parallel in fact light and enters into core 23 transmission of optical fiber.In this example, the diameter of through hole 12 is designed to approximate the diameter of core 23.The advantage of the 3rd example of Fig. 5 C is to use collimating mirror 13M3 to produce directional light, helps to improve to receive light quantity, can effectively shorten the length of receiving optical module 10 again.
Shown in Fig. 5 D, the receipts optical module 10M4 of the 4th example is similar to the receipts optical module 10 of Fig. 5 A, and difference is to receive optical module 10M4 and more comprises a cosine corrector (Cosine corrector) 13M4 in the through hole 12 that is disposed at sleeve 11.Cosine corrector 13M4 is the diffuser (Diffuser) of a kind of lambert of having (Lambertian) diffusion property, can improve the problem that there are nearmis in receipts optical module 10M4 and LED crystal grain 2.
More particularly; That the receipts optical module 10M4 of the 4th example adopts is penetration cosine corrector 13M4; No matter light source 2 is left position or location right at Fig. 5 D, cosine corrector 13M4 has the zone of being got to by light OS can enter among the light transmission media 20 with the mode scattering of Lambertian source.Thus, the effect of the light that light transmission media 20 is received all is similarly, so the receipts optical module 10M4 of the 4th example has bigger tolerance for bit errors, has reduced the required cost of paying of contraposition.Particularly, with the oversized of cosine corrector, can tolerate bigger bit errors.
Though it should be noted that above-mentioned to be measured be can be luminous with itself LED crystal grain be that example is explained, it only is a kind of selection embodiment.In other embodiments, art technology person can come other portions to be measured of sensing according to its demand application embodiments of the invention.For example, in other embodiment, to be measured can be the element that itself can't be luminous, but can reflect or the element of transmitted ray, for example is reflective, penetration or the demonstration picture element of partly wearing inverse LCD device; It also can be the sample of marshalling; For example blood sample, cell sample, urine specimen; Chemical reagent sample, water quality sample etc. all are applicable to embodiments of the invention so long as arrange and pass through the element that can export light after lamp device 55 is lighted with predetermined pattern.Be noted that to different application, lamp device 55 can adopt dissimilar lamp devices according to its demand, for example also can adopt the light emitting source with specific band.In in the case; Lamp device 55 output beams are to dropping on interior these to be measured 2 of N receipts optical range of receiving optical module 10 respectively; So that the light of these to be measured 2 output spectrum sensing module 30 required sensing, be reflected light for example, penetrate light or other mixed lights.
Second embodiment
In first embodiment, the LED crystal grain that comes sensing to be arranged in two-dimensional pattern with the spectrum sensor device of one dimension also is feasible, and it only is a kind of selection embodiment.In other embodiments, art technology person can be according to its demand and will receive optical module and line up two-dimensional pattern, and for example square or other figures etc. come sensing to be arranged in the LED crystal grain of two-dimensional pattern.For instance, the operation chart of three examples of the spectrum sensor device of Fig. 6 A to Fig. 6 C demonstration second embodiment of the present invention.Shown in Fig. 6 A; The spectrum sensor device 101 of first example of second embodiment can also be used for M*K LED crystal grain 102 on the semi-conductor chip 103 that sensing is arranged in two-dimensional pattern; Receiving optical module 110 for N*Q can be moving along X axle and y-axis shift in regular turn, and wherein K and Q are the positive integers greater than 1.In this example; Receive the pattern that optical module 110 is lined up a 3*4 for 12, each receives optical module 110 can aim at a LED crystal grain 102 just, earlier through receiving optical module 110 after the sensing of the LED crystal grain 102 on the X-direction is accomplished in the translation of X axle successively; On Y direction, move to the LED crystal grain 102 of next column again; Next column LED crystal grain 102 is carried out sensing, and repeat so, be i.e. the characteristic of all LED crystal grain 102 of sensing in regular turn along X axle and the translation of Y axle.This can understand by haveing the knack of this art easily easily, so omit its detailed description in this.But need special instruction person to be suitable for too, as long as simply be regarded as the action of above-mentioned N*Q receipts optical modules 110 " in the LED crystal grain 102 that moves to next column on the Y direction " N the action that receipts optical module 10 " skips to another section 4B and proceeds sensing " in the embodiment of Fig. 3 for the sensing of the one dimension spectrum sensor device among the embodiment of Fig. 3 for the M*K that is arranged in two-dimensional pattern LED crystal grain 102.
The spectrum sensor device of second embodiment, but through repeatedly moving and repeatedly measuring also sensing and be arranged in the LED crystal grain of two-dimensional pattern.Its benefit is that with two-dimensional pattern configuration spectrum sensor device, the number that can increase the spectrum sensor device shortens the sensing time to be measured kenel of foundation group to be measured adaptively.
Second example of two-dimensional pattern also can be shown in Fig. 6 B in design alternative; Use two groups spectrum sensor device 201A and receipts optical module 210A and the 210B of 201B to carry out sensing simultaneously respectively from diverse location; Every group of spectrum sensor device 201A/201B has 4 to receive optical module 210A/210B among the embodiment of Fig. 6 B; Its moving direction is the same, and its sequential that moves (timing) can be also can each organize independent separately synchronously.The benefit of design is and can shortens the sensing time through the number that increases the spectrum sensor device like this.It should be noted that the spectrum sensor device that in other examples, also can use more than three groups or three groups, to shorten the sensing time.
In the 3rd example of Fig. 6 C; Use receipts optical module 310A and the 310B of two groups of spectrum sensor device 301A and 301B to carry out sensing simultaneously respectively from diverse location; Receiving optical module 310A is different with the moving direction of 310B, and its sequential that moves can be also can each organize independent separately synchronously.The benefit of design is and can shortens the sensing time through the number that increases the spectrum sensor device like this.Spectrum method for sensing that it should be noted that above-mentioned first embodiment is equally applicable to second embodiment.
Though in second embodiment; The X that receives optical module is identical with Y distance between axles, but in other embodiment, the X that receives optical module also can be different each other with Y distance between axles; The X distance between axles of receipts optical module also can not necessarily will be kept fixing, receives the Y distance between axles of optical module and also not necessarily will keep fixing.
The 3rd embodiment
In first embodiment, though the receipts optical module that uses is and the module of fiber splices that it only is a kind of selection embodiment.In other embodiments, art technology person can to utilize the end of optical fiber to be used as according to its demand be to receive the light that optical module comes sensing LED crystal grain.For instance, Fig. 7 A demonstration is according to the synoptic diagram of the spectrum sensor device of first example of third embodiment of the invention.Fig. 7 B shows along the sectional view of the line 7B-7B of Fig. 7 A.The partial enlarged drawing of Fig. 7 C displayed map 7A.About receiving the design of optical module; Through meticulous making; Also can utilize the characteristic of the receipts light vertebra (acceptance cone) of optical fiber that the receipts light mouth end of many optical fiber is fixed together; And directly aim at LED crystal grain with the receipts light mouth of each optical fiber and receive light, and do not need extra sleeve lens or collimating mirror.Shown in Fig. 7 A to Fig. 7 C; The spectrum sensor device 401 of first example of the 3rd embodiment is similar to first embodiment; Difference is that the receipts light mouth end 421 with all light transmission media 420 (comprising optical fiber in present embodiment) is fixed together and forms a plurality of receipts optical modules 410, and directly aims at LED crystal grain 2 with the receipts light mouth 426 of each optical fiber 420 and receive light.This optical fiber 420 has a core 414, a clad 415 and a protective seam 416 that surrounds clad 415 that surrounds core 414.For light can be transmitted in core 414, the refractive index of core 414 must just can cause total reflection greater than the refractive index of clad 415.The angle of the receipts light vertebra of each optical fiber 420 for example is 24 degree.Through retaining element 410F the receipts light mouth end 421 of all optical fiber 420 is fixed together, makes and respectively receive light mouth end 421 and be arranged in corresponding receipts optical module 410.The material of retaining element 410F is a plastic cement for example, can adopt the mode of ejection formation that optical fiber 420 is fixed together once, lets the rigidity of receiving optical module improve simultaneously, and then lets robotic arm can catch the receipts optical module to move accurately.The advantage of first example of second embodiment is to use optical fiber to be used as the receipts optical module, and relative first embodiment can simplified manufacturing technique, reduces cost.
Further analyze, in Fig. 7 C, middle core 414 is aimed at a LED crystal grain 2b.In in the case, LED crystal grain 2b is a portion to be measured.Being positioned at the light source of receiving light vertebra AC the inside all can carry out total reflection in core 414 and finally output among the spectrum sensing module 30.Be positioned at the light source of receiving light vertebra AC outside and then can get into clad 415, can't return core 414 from core 414 refractions, thereby can't be from light-emitting window end 422 outputs of optical fiber.Therefore, have only the light of a LED crystal grain 2b to carry out total reflection, and the light of adjacent LED crystal grain 2a and 2c also can't carry out total reflection in core 414 in core 414.Thus, according to the configuration of the characteristic of the receipts light vertebra of optical fiber and light emitting diode, cooperate adjustment to receive the distance of optical module 410 and LED crystal grain, can carry out sensing work.It should be noted that from the configuration of Fig. 7 C and can find out, receive optical module 410 and also allow the error range of certain degree, as long as make the receipts optical range of receiving light vertebra AC can contain LED crystal grain 2b but do not contain adjacent LED crystal grain 2a and 2c with the contraposition of LED crystal grain.In this example, because the light of adjacent LED crystal grain 2a and 2c can not disturb the light of LED crystal grain 2b, so can adopt the lamp device of once lighting all LED crystal grain according to deviser's demand.
In first example of the 3rd embodiment, though the receipts optical module that uses is the optical fiber with protective seam, it only is a kind of selection embodiment.In other examples, art technology person can utilize the optical fiber with protective seam to come as receiving the light of optical module with sensing LED crystal grain according to its demand.For instance, Fig. 7 D demonstration is according to the synoptic diagram of the spectrum sensor device of second example of third embodiment of the invention.Fig. 7 E shows along the sectional view of the line 7E-7E of Fig. 7 D.Shown in Fig. 7 D and Fig. 7 E, the optical fiber 520 of spectrum sensor device 501 comprises core 514 and clad 515.The light-emitting window end 522 of optical fiber 520 is connected to spectrum sensing module 30, receives the combination that optical module 510 comprises the receipts light mouth end 521 of distance piece 517 and optical fiber 520.Distance piece 517 is fixed together the receipts light mouth end 521 of all optical fiber 520.Therefore, distance piece 517 belongs to the fixed mechanism that adds except optical fiber 520.The optical fiber 520 of second example be different from first example optical fiber 420 be that optical fiber 520 only has core 514 and clad 515, but does not have protective seam, and optical fiber 420 matcoveredns 416.Therefore, the optical fiber 520 of Fig. 7 D seems to get carefully than the optical fiber 420 of Fig. 7 A.At last, add a retaining element 510F in the outside of distance piece 517, be used for that these are received optical module and fix.The material of retaining element 510F is a metal, can let the rigidity of receiving optical module more improve, and then lets robotic arm can catch the receipts optical module to move more accurately, reaches the effect of embodiments of the invention.
According to two examples of the 3rd embodiment, be how to be fixed no matter can learn optical fiber, receive light as long as be enough to the receipts light mouth end of each optical fiber fixed so that receives light mouth aligning LED crystal grain.At this moment, the receipts light mouth end of each optical fiber promptly forms the receipts optical module that has same function with the receipts optical module of Fig. 5 A to Fig. 5 D.
The 4th embodiment
In first to the 3rd embodiment, be that example describes though receive optical module to have simple receipts light function, wherein the whether luminous of light source can be controlled through another module (not shown), and it only is three kinds and selects embodiment.In other embodiments, art technology person can add other functions according to its demand.For instance, can lamp device be integrated in the spectrum sensor device, Fig. 8 A and Fig. 8 B show the synoptic diagram according to the partial structurtes of the spectrum sensor device of fourth embodiment of the invention.Fig. 8 C shows the vertical view according to the LED crystal grain of fourth embodiment of the invention.Shown in Fig. 8 A, the 4th embodiment is similar to the example of Fig. 5 C of first embodiment, and difference is that the lamp device 55 of spectrum sensor device 200 comprises a plurality of probe groups 50 (for clarity sake, only drawing out a probe groups 50) and a power supply unit 60.Probe groups 50 must can touch light source, so the allocation position of probe groups 50 must be corresponding to the configured light sources position, just the relative distance between these probe groups 50 is kept fixingly, lights program with execution.Each probe groups 50 comprises two probes 51 and 52.Two probes 51 and 52 are fixed on to be received in the optical module 10, but it only is a kind of selection embodiment, as long as probe 51 and 52 can be supplied power to light source.Probe 51 and 52 contacts the negative electrode 340 and anode 370 of one of them light source (being LED crystal grain for example) 300 respectively.Power supply unit 60 provides power supply to light source 300 through these probe groups 50 that contact these light sources respectively, makes light source 300 output light to put bright light source 300 respectively.The benefit of present embodiment is also make not accomplished or encapsulation and can't pulling out before the power supply lead-in wire at light source; Still can provide power supply to reach the function of luminous sensing to light source 300 through probe groups 50; Make that the application of embodiments of the invention is wider, and can carry out the characteristic of the light source under the various voltage statuss through the voltage of adjustment power supply unit 60.
Shown in Fig. 8 B, be used as the example of light source 300 with light emitting diode and explain.Light emitting diode 300 comprises that an anti-reflecting layer 310, a substrate 320, a N type clad 330, one first electrode (negative electrode) 340, a P type clad 350, a thin metal layer 360, one second 370 and one at electrode (anode) are arranged at the active layers 380 between N type clad 330 and the P type clad 350.When first electrode 340 was contacted with 52 by probe 51 respectively with second electrode 370 and switches on, active layers 380 can emit beam.Probe 51 and 52 has elasticity and touches characteristic of electrode, to avoid loose contact or to damage electrode.
Shown in Fig. 8 C, first electrode 340 and second electrode 370 of present embodiment are designed to have two kinds of different patterns respectively.Probe 52/51 can contact electrode 340/370 the allowable error of regional extent big, can reduce the influence of manufacturing tolerance.
Owing to a plurality of crystal grain of LED are to grow up on chip according to preset pattern, before cutting process, the distance of a plurality of intergranules can be controlled accurately, so can adopt the technology of the embodiment of the invention to carry out sensing.But after cutting process, LED crystal grain can be subjected to displacement.If can Be Controlled get finely in the position of each the LED crystal grain after the cutting, also can adopt the technology of the embodiment of the invention to carry out sensing certainly.Perhaps, each the LED crystal grain after the cutting can be placed on the base plate for packaging according to preset pattern, can certainly the position control of each LED crystal grain be got finely, equally also can adopt the technology of the embodiment of the invention to carry out sensing.
The 5th embodiment
In first embodiment, be that example describes though receive optical module with telescopic receipts optical module, it only is a kind of selection embodiment.In other embodiments, art technology person can use integrating sphere to be used as the receipts optical module according to its demand.For instance, Fig. 9 shows the synoptic diagram according to the spectrum sensor device of fifth embodiment of the invention.As shown in Figure 9, the receipts optical module of the spectrum sensor device 601 of present embodiment comprises a plurality of integrating spheres 610 and a retaining element 610F.Retaining element 610F fixes these integrating spheres 610, and keeps the relative distance between these integrating spheres 610 fixing.
In present embodiment, be that driving mechanism 40 is coupled to chip 3, be used for that moving chip 3 positions and in batches sensing use, this type of drive also is equally applicable to other embodiment.Single integrating sphere 610 covers the wherein a plurality of light sources 2 on the chip 3 simultaneously, is used to make the receipts optical range of receiving optical module once can contain a plurality of light sources 2.The number that is integrated the light source 2 that ball 610 covers depends on the size of integrating sphere and the size and the spacing of light source 2, does not do special restriction in this.For instance, on 8 inches chips, can use a plurality of one inch integrating spheres, utilize optical fiber 20 to be coupled to spectrum sensing module 30 integrating sphere 610, still can reach the effect that is similar to first embodiment.It should be noted that one of them that be integrated a plurality of light sources 2 that ball 610 covers can be lighted, and other are not lighted.Because the relatively moving and locate comparatively consuming timely of integrating sphere 610 and chip 3, the program required time of some bright light source is shorter, so can move chip 3 one time, lights in batches and is integrated the different light source 2 that ball 610 covers, and saves the more sensing time.
The 6th embodiment
In the 4th embodiment, though being example with the probe, lamp device describes, it only is a kind of selection embodiment.In other embodiments, art technology person can adopt other lamp devices according to its demand.For instance, the lamp device that the 6th embodiment uses comprises a kind of laser lamp device, is used to export laser beam to these LED crystal grain that drop on respectively in these receipts optical ranges of receiving optical module, makes these LED crystal grain output light through light activated mode.Even if laser light is taken in the spectrum sensing apparatus, also can distinguish the light that laser light and LED crystal grain are exported easily through spectral analysis, so laser light can't influence the spectrum sensing of LED crystal grain.
The 7th embodiment
In first embodiment, though the spectrum sensing module is that example describes to carry out detection procedure through optical fiber and receipts optical module, it only is a kind of selection embodiment.In other embodiments, art technology person can change according to its demand.For instance, Figure 10 shows the synoptic diagram according to the spectrum sensing system of seventh embodiment of the invention.Shown in figure 10, spectrum sensing system 701 comprises that a locating device 770, lights device 55, a plurality of spectrum sensing module 30 and a stationary installation 30F.Stationary installation 30F is used for these spectrum sensing modules 30 are fixed, and keeps the relative distance between these spectrum sensing modules 30 fixing.The locating device 770 that is coupled to chip 3 is six locating devices for example, can move and positioning chip 3 along six axles.The mobile of six axles is to reach through the translation along three axles to reach around the rotation of three axles.It should be noted that and in other embodiment, also can use three, four, five locating devices.Lamp device 55 is used to light the light source 2 on the chip 3.The effect of spectrum sensing module 30 as previously mentioned.Therefore, locating device 770 moves and positioning chip 3 along a plurality of axles, so that these light sources 2 drop on respectively in the receipts optical range of these spectrum sensing modules 30, makes these spectrum sensing modules 30 receive the light that these light sources 2 are exported respectively.The use that the advantage of present embodiment is to omit optical fiber and receives optical module reduces the sensing cost.
The 8th embodiment
In the 7th embodiment, though locating device with through moving and positioning chip is that example describes, it only is a kind of selection embodiment.In other embodiments, art technology person can change according to its demand.For instance, Figure 11 shows the synoptic diagram according to the spectrum sensing system of eighth embodiment of the invention.Shown in figure 11, the spectrum sensing system 801 of present embodiment comprises lights device 55, a plurality of spectrum sensing module 30, a locating device 770 and a stationary installation 30F.Lamp device 55 is used to light a plurality of light sources 2 on the chip 3.The effect of spectrum sensing module 30 as previously mentioned.The locating device 770 that is coupled to stationary installation 30F is used for moving and these spectrum sensing modules 30 of location along a plurality of axles; So that these light sources 2 drop on respectively in the receipts optical range of these spectrum sensing modules 30, make these spectrum sensing modules 30 can receive the light that these light sources 2 are exported respectively.The use that the advantage of present embodiment is to omit optical fiber and receives optical module reduces the sensing cost, more can reduce the infringement that moving chip causes.
Through spectrum sensor device, the system and method for embodiments of the invention, can effectively shorten the sensing time of numerous light sources such as LED crystal grain, be one to benefit greatly for the lifting of production capacity.With the sensing of above-mentioned 8 inches chips, if N equals 8, the then required sensing time is 14000/8=1750 second, and the whole time shortens into 1/8.Embodiments of the invention take to receive than wide-angle the mode of light, even utilize lens, collimating mirror and cosine corrector that ray-collecting is arrived optical fiber, can shorten the sensing time, and reach good sensing effect.In addition, utilize probe groups to come and make light source luminescent, can let the application of spectrum sensor device of embodiments of the invention wider light source energising.
The specific embodiment that in the detailed description of preferred embodiment, is proposed only is used for convenient explanation technology contents of the present invention; But not with narrow sense of the present invention be limited to the foregoing description; In the situation that does not exceed spirit of the present invention and following claim; The many variations of being done is implemented, and all belongs to scope of the present invention.
Claims (14)
1. a spectrum sensor device is characterized in that, described spectrum sensor device comprises:
Receive optical module for N, be used for receiving respectively N to be measured light of being exported of a group to be measured, wherein N is the positive integer greater than 1;
One retaining element is used for described a plurality of receipts optical modules are fixed, and the relative distance between described a plurality of receipts optical modules is kept fixing, and said N to be measured is dropped on respectively in the receipts optical range of said N receipts optical module; And
N spectrum sensing module; Be coupled to said N respectively and receive optical module; Be used for receiving optical module through said N respectively and receive said N to be measured light of being exported; And each said to be measured light of being exported separated into a plurality of spectral components, to obtain a spectral signal corresponding to described a plurality of spectral components.
2. like claim 1 a described spectrum sensor device, it is characterized in that described spectrum sensor device more comprises:
N light transmission media received optical module with said N respectively and is coupled to said N receipts optical module.
3. spectrum sensor device as claimed in claim 2 is characterized in that, each said receipts optical module comprises:
One sleeve is coupled to said light transmission media, and has a through hole, and wherein said to be measured the light of being exported can get in the said receipts optical module via said through hole.
4. spectrum sensor device as claimed in claim 3 is characterized in that, each said receipts optical module more comprises a condenser lens, a collimating mirror or a cosine corrector that is installed in the said through hole.
5. spectrum sensor device as claimed in claim 2; It is characterized in that; Each said light transmission media comprises an optical fiber; One of each said optical fiber is received light mouth end and is arranged in corresponding each said receipts optical module, and said retaining element is fixed together described a plurality of receipts light mouth ends of described a plurality of optical fiber.
6. spectrum sensor device as claimed in claim 1 is characterized in that, described spectrum sensor device more comprises:
One driving mechanism is coupled to said retaining element or said group to be measured, is used to drive described a plurality of receipts optical module or said group to be measured and moves.
7. spectrum sensor device as claimed in claim 6; It is characterized in that; Said N receipts optical module is arranged in a figure, and said group to be measured comprises N first to be measured and N second portion to be measured, and said N first to be measured and said N second to be measured is arranged in said figure respectively; Described a plurality of receipts optical modules of said drive mechanism or said group to be measured move and make said N the receipts optical range of receiving optical module respectively to being positioned at said N first portion to be measured, to carry out one first spectrum sensing; Described a plurality of receipts optical modules of said drive mechanism or said group to be measured move and make said N the receipts optical range of receiving optical module respectively to being positioned at said N second portion to be measured, to carry out one second spectrum sensing.
8. spectrum sensor device as claimed in claim 1 is characterized in that, each said spectrum sensing module comprises:
One body;
One input part is disposed in the said body, and is coupled to said receipts optical module, to receive said to be measured the light of being exported;
One diffraction grating is disposed in the said body, is used for said to be measured the light of being exported is separated into described a plurality of spectral components; And
One sensor is disposed in the said body, is used for the described a plurality of spectral components of sensing to obtain said spectral signal.
9. spectrum sensor device as claimed in claim 1 is characterized in that, described spectrum sensor device more comprises:
N probe groups is used for contacting respectively said N portion to be measured, and the relative distance between the wherein said N probe groups is kept fixing; And
One power supply unit is coupled to a said N probe groups, and being used for provides power supply to said N portion to be measured respectively through a said N probe groups, to light said N portion to be measured respectively.
10. spectrum sensor device as claimed in claim 1 is characterized in that, described spectrum sensor device more comprises:
One lights device, is used for output beam to dropping on said N the interior described a plurality of portions to be measured of receipts optical range of receiving optical module respectively, so that described a plurality of to be measured output light.
11. spectrum sensor device as claimed in claim 1 is characterized in that, said receipts optical module comprises an integrating sphere, is used to make the receipts optical range of said receipts optical module once can contain the portion a plurality of to be measured of said group to be measured.
12. a spectrum sensing system is used for the portion a plurality of to be measured of sensing one group to be measured, it is characterized in that said spectrum sensing system comprises:
One lights device, is used to light described a plurality of portion to be measured, so that described a plurality of to be measured output light;
A plurality of spectrum sensing modules are used for receiving respectively described a plurality of to be measured light of being exported, and each said to be measured light of being exported is separated into a plurality of spectral components, to obtain the spectral signal corresponding to described a plurality of spectral components;
One stationary installation is used for described a plurality of spectrum sensing modules are fixed, and keeps the relative distance between described a plurality of spectrum sensing modules fixing; And
One location device; Be coupled to said stationary installation or said group to be measured; Be used to locate described a plurality of spectrum sensing module or said group to be measured; So that in described a plurality of to be measured receipts optical range that drops on described a plurality of spectrum sensing modules respectively, make described a plurality of spectrum sensing module can receive described a plurality of to be measured light of being exported respectively.
13. a spectrum method for sensing is characterized in that, described spectrum method for sensing comprises:
Locate a plurality of first to be measured relative position of a plurality of receipts optical modules and a group to be measured; So that in described a plurality of first to be measured receipts optical range that drops on described a plurality of receipts optical modules respectively, the relative distance between wherein said a plurality of receipts optical modules is kept fixing;
Light described a plurality of first portion to be measured, with output light; And
A plurality of spectrum sensing modules receive the light of described a plurality of first to be measured output respectively through described a plurality of receipts optical modules, to carry out the spectrum sensing.
14. spectrum method for sensing as claimed in claim 13 is characterized in that, described spectrum method for sensing more comprises:
Locate a plurality of second to be measured relative position of described a plurality of receipts optical modules and said group to be measured; So that in described a plurality of second to be measured receipts optical range that drops on described a plurality of receipts optical modules respectively, wherein said a plurality of second to be measured is different from described a plurality of first portion to be measured;
Light described a plurality of second portion to be measured, with output light; And
Described a plurality of spectrum sensing module receives the light of described a plurality of second to be measured output respectively through described a plurality of receipts optical modules, to carry out the spectrum sensing.
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| CN2012100339030A CN102645276A (en) | 2011-02-16 | 2012-02-15 | Spectrum sensing equipment, system and method |
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| CNPCT/CN2011/071034 | 2011-02-16 | ||
| PCT/CN2011/071034 WO2012109789A1 (en) | 2011-02-16 | 2011-02-16 | Array-type spectrum detecting device |
| CN2012100339030A CN102645276A (en) | 2011-02-16 | 2012-02-15 | Spectrum sensing equipment, system and method |
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Application publication date: 20120822 |