CN214798169U - Equipment for measuring light-emitting characteristics of laser - Google Patents
Equipment for measuring light-emitting characteristics of laser Download PDFInfo
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- CN214798169U CN214798169U CN202120362752.8U CN202120362752U CN214798169U CN 214798169 U CN214798169 U CN 214798169U CN 202120362752 U CN202120362752 U CN 202120362752U CN 214798169 U CN214798169 U CN 214798169U
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- 238000012360 testing method Methods 0.000 claims abstract description 66
- 238000006073 displacement reaction Methods 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 description 29
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
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Abstract
The utility model discloses a device for measuring the light-emitting characteristic of a laser, which comprises a test board, a displacement component, a carrier, a holophote and a light-emitting characteristic test module; the displacement assembly is movably arranged on the test board, the carrier is installed on the displacement assembly and used for collecting the light-emitting characteristic test module of the laser to be tested and located above the test board, the plurality of holophotes are installed on the carrier, the carrier is provided with a plurality of groove positions for containing the laser to be tested, and the holophotes for reflecting the laser of the laser to be tested are located on one side of the groove positions. The utility model discloses can realize the laser instrument of equidirectional light-emitting, one set of test equipment of sharing realizes compatibly.
Description
Technical Field
The utility model relates to a technical field of laser instrument test refers in particular to an equipment of measuring laser instrument light-emitting characteristic.
Background
The main parameter index of the characteristic test of the semiconductor laser is the measurement of the light emitting characteristic, and a plurality of important parameters such as light emitting power, oblique efficiency, threshold current and the like can be tested. At present, semiconductor lasers are mainly classified into surface (vertical) emitting semiconductor lasers and edge (horizontal) emitting semiconductor lasers according to the light emitting direction relative to the structure of the semiconductor lasers, and different testing devices are required to be aligned to carry out respective testing due to the fact that the light emitting directions of the two semiconductor lasers are different. There is no suitable light-emitting characteristic test device that can satisfy the compatibility of the surface-emitting and edge-emitting semiconductor lasers at the same time, and therefore, the present inventors have made further studies thereon.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that an equipment for measuring laser instrument light-emitting characteristic is provided, realizes the laser instrument of not equidirectional light-emitting, one set of test equipment of sharing realizes compatibly.
In order to solve the technical problem, the technical solution of the utility model is that:
an apparatus for measuring the light-emitting characteristic of a laser comprises a test board, a displacement component, a carrier, a holophote and a light-emitting characteristic test module; the displacement assembly is movably arranged on the test board, the carrier is installed on the displacement assembly and used for collecting the light-emitting characteristic test module of the laser to be tested and located above the test board, the plurality of holophotes are installed on the carrier, the carrier is provided with a plurality of groove positions for containing the laser to be tested, and the holophotes for reflecting the laser of the laser to be tested are located on one side of the groove positions.
Further, one total reflection mirror corresponds to one slot position.
Furthermore, a plurality of slot positions are arranged in an array mode in the transverse direction and the longitudinal direction, and one total reflection mirror corresponds to a row of slot positions in the transverse direction or a row of slot positions in the longitudinal direction.
Further, still include first adjusting part, the first adjusting part that is used for adjusting treating laser instrument angle and/or position is installed in the trench, and first adjusting part is connected with the laser instrument that awaits measuring.
And the second adjusting component is used for adjusting the angle and/or the position of the total reflector and is connected with the total reflector, and the second adjusting component is arranged on the carrier.
Furthermore, the light emitting characteristic testing module is a light detector or an integrating sphere.
Furthermore, the included angle between the reflecting surface of the total reflector and the horizontal direction of the carrier is 45 degrees.
Further, the device also comprises a moving mechanism, and the light-emitting characteristic testing module is installed on the moving mechanism.
Because the light-emitting direction of surface emission semiconductor laser and limit emission semiconductor laser is inconsistent, requires the relative position of light-emitting characteristic test module and carrier to change, the utility model discloses an add the holophote on the carrier, deflect 90 with the light-emitting direction of limit emission semiconductor laser, keep unanimous with the light-emitting direction of surface emission semiconductor laser to need not to change other designs or adopt extra test equipment to test, can realize detecting the compatibility of surface emission semiconductor laser and limit emission semiconductor laser simultaneously.
Drawings
FIG. 1 is a schematic diagram of an edge-emitting semiconductor laser according to the present invention during testing;
FIG. 2 is a schematic diagram of the surface emitting semiconductor laser of the present invention during testing;
FIG. 3 is a schematic diagram of a first position of the holophote of the present invention on the carrier;
fig. 4 is a schematic diagram of a second position of the holophote of the present invention on the carrier.
Description of the reference symbols
The holophote 4 emits light to the laser 6 to be tested from the light characteristic testing module 5.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It should be noted that, if the terms "upper", "lower", "inner", "outer" and other orientations or positional relationships are used in the drawings, or the orientations or positional relationships that are usually placed when the product of this application is used, the description is only for convenience, and the present invention is not limited thereto. The technical features mentioned in the embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
The utility model discloses an equipment of measurement laser instrument light-emitting characteristic, as shown in fig. 2 and fig. 3, for the utility model discloses a preferred embodiment, including testboard 1, displacement subassembly 2, carrier 3, holophote 4 and light-emitting characteristic test module 5.
Displacement subassembly 2 slides and sets up on testboard 1, and carrier 3 is installed on displacement subassembly 2, and displacement subassembly 2 drives carrier 3 and removes on testboard 1. The displacement assembly 2 (not shown in detail in the drawings) may be a conventional moving structure, for example, the displacement assembly 2 may be composed of a driving mechanism, a control mechanism, a pulley and a slide rail, the pulley is mounted on the carrier 3, the slide rail is mounted on the test platform 1, and after being powered on, the driving mechanism drives the pulley to move in the slide rail according to an instruction of the control mechanism, so that the carrier 3 moves on the test platform 1. The displacement component 2 can also be a bump and a groove, the bump is arranged at the bottom of the carrier 3, the groove is arranged on the test board, and the bump moves in the groove, so that the carrier 3 is driven to move on the test board 1. Of course, other component structures such as a servo motor and a screw rod can be adopted, and various displacement modes can be realized, which are not described herein.
The light emitting characteristic testing module 5 is located above the testing platform 1, and is used for collecting laser emitted by the laser 6 to be tested, so as to test optical characteristics.
A plurality of holophotes 4 are installed on a carrier 3, the carrier 3 is provided with a plurality of groove positions 31, a laser 6 to be tested is placed at the groove positions 31, the holophotes 4 are positioned at one sides of the groove positions 31, when the laser 6 to be tested (particularly an edge-emitting semiconductor laser) emits laser, the laser just strikes the holophotes 4 and can be reflected, the light emitting direction of the edge-emitting semiconductor laser is deflected by 90 degrees, and the light emitting direction of the edge-emitting semiconductor laser is kept consistent with that of a surface-emitting semiconductor laser.
Further, as shown in fig. 3, one total reflection mirror 4 corresponds to one slot 31. Thus, one total reflection mirror 4 can be adjusted for one single slot 31, and the operation is flexible.
Further, as shown in fig. 4, a plurality of slots 31 are arranged in an array in the transverse direction and the longitudinal direction, one total reflection mirror 4 corresponds to all slots 31 in one row in the transverse direction, or one total reflection mirror 4 corresponds to all slots 31 in one row in the longitudinal direction, so that batch testing is more convenient and faster.
Further, the laser device testing device further comprises a first adjusting component (not shown in the figure), the first adjusting component is installed in the slot position 31, the laser device 6 to be tested is located above the first adjusting component and connected with the first adjusting component, the angle of the laser device 6 to be tested is adjusted through the first adjusting component, or the angle and the position of the laser device 6 to be tested are adjusted through the first adjusting component.
Further, the device also comprises a second adjusting component (not shown in the figure), the second adjusting component is installed on the carrier 3, the second adjusting component is connected with the total reflection mirror 4, the angle of the total reflection mirror 4 is adjusted through the second adjusting component, or the angle and the position of the total reflection mirror 4 are adjusted through the second adjusting component.
First regulating assembly and second regulating assembly are prior art, for example, can constitute by the multiunit adjustment sheet to the horizontal direction is the X axle, and vertical direction is the Y axle, and the direction on perpendicular to X axle and Y axle place plane is the Z axle, and first adjustment sheet can follow Y axle translation, and the Z axle translation can be followed to the second adjustment sheet, and the third adjustment sheet can be around Y axle rotation, and the fourth adjustment sheet can be around Z axle rotation. The angles and the positions of the laser 6 to be measured are adjusted in multiple directions by controlling the first adjusting component, and the angles and the positions of the total reflection mirrors 4 are adjusted in multiple directions by the second adjusting component. Of course, other implementation manners are also possible as long as the requirements for adjusting the angle or the position of the laser 6 to be measured and the total reflection mirror 4 can be met, which are not described herein again. A person skilled in the art can combine the included angle between the reflecting surface of the full-reflection mirror 4 and the horizontal direction of the carrier 3 and the light-emitting direction of the laser 6 to be measured according to the requirement in actual measurement, and select the adjusted angle or position, so that the light-emitting of the laser 6 to be measured can be vertically incident into the test module 5.
Further, the light-emitting characteristic testing module 5 is a photodetector or an integrating sphere, and can detect parameters such as light-emitting power, skew efficiency, threshold current and the like of the laser.
Further, the included angle between the reflecting surface of the total reflection mirror 4 and the horizontal direction of the carrier 3 is 45 degrees, so that the angle of light reflection can be deflected by 90 degrees.
Further, the testing device further comprises a moving mechanism (not shown), and the light-emitting characteristic testing module 5 is mounted on the moving mechanism. Because of the driving of the moving mechanism, the light-emitting characteristic testing module 5 can move and can move to the position of the laser 6 to be tested for testing, and various displacement modes are realized, which are not described herein. Therefore, the utility model discloses not only can also carry out the test of single laser instrument 6 that awaits measuring, also can realize batch test through the mode that removes carrier 3 or light-emitting characteristic test module 5.
Use the utility model discloses during the test, put the semiconductor laser (chip) that awaits measuring on test carrier 3, the chip that here indicates is not the bare core, indicates the packaging form of COC (chip on carrier) or COS (chip on subassembly) to make things convenient for the routing test, press from both sides and get, lay etc. operations. The chips are powered up through the source meter, then the chips at different positions are moved to the lower part of the light emitting characteristic testing module 5 through the displacement component 2, so that all emergent light of the laser 6 to be tested is received by the light emitting characteristic testing module 5, and the optical characteristic is tested.
Since the light emitting directions of the surface emitting semiconductor laser and the edge emitting semiconductor laser are not consistent, the relative positions of the light emitting characteristic testing module 5 and the testing carrier 3 need to be changed. A45-degree total reflection mirror 4 is arranged at each chip slot position 31 on the test carrier 3, and the total reflection effect with the reflectivity of more than 99.9 percent is met by plating a specific material and a specific structure on the surface of the 45-degree mirror 4.
For the surface emitting semiconductor laser, the surface emitting semiconductor laser is directly placed in the groove position 31, faces upwards, and emits laser to the light emitting characteristic testing module 5, so that the light emitting characteristic can be directly tested through the light emitting characteristic testing module 5.
For the side-emitting semiconductor laser, the side-emitting semiconductor laser is horizontally placed in the slot position 31, and horizontally emitted laser is vertically emitted through the arranged 45-degree total reflection mirror 4 (namely, the light-emitting direction of the side-emitting semiconductor laser is deflected by 90 degrees), and is reflected to the light-emitting characteristic testing module 5 above, so that the light-emitting characteristic can be directly tested through the light-emitting characteristic testing module 5.
The utility model discloses make limit emission semiconductor laser keep and the light-emitting direction of surface emission semiconductor laser unanimous to need not to change other designs or adopt extra test equipment to test, realize the compatibility of two kinds of lasers.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the technical scope of the present invention, so that all changes and modifications made according to the claims and the specification of the present invention should fall within the scope covered by the present invention.
Claims (8)
1. An apparatus for measuring light emission characteristics of a laser, comprising: the device comprises a test board, a displacement component, a carrier, a total reflection mirror and a light-emitting characteristic test module; the displacement assembly is movably arranged on the test board, the carrier is installed on the displacement assembly and used for collecting the light-emitting characteristic test module of the laser to be tested and located above the test board, the plurality of holophotes are installed on the carrier, the carrier is provided with a plurality of groove positions for containing the laser to be tested, and the holophotes for reflecting the laser of the laser to be tested are located on one side of the groove positions.
2. The apparatus of claim 1, wherein: one total reflection mirror corresponds to one slot position.
3. The apparatus of claim 1, wherein: a plurality of groove positions are arranged in an array mode in the transverse direction and the longitudinal direction, and one holophote corresponds to a row of groove positions in the transverse direction or a row of groove positions in the longitudinal direction.
4. The apparatus of claim 1, wherein: the laser device comprises a slot, and is characterized by further comprising a first adjusting component, wherein the first adjusting component is used for adjusting the angle and/or the position of the laser device to be tested and is installed in the slot, and the first adjusting component is connected with the laser device to be tested.
5. The apparatus of claim 1, wherein: the device also comprises a second adjusting component, wherein the second adjusting component is used for adjusting the angle and/or the position of the total reflector and is connected with the total reflector, and the second adjusting component is arranged on the carrier.
6. The apparatus of claim 1, wherein: the light emitting characteristic testing module is a light detector or an integrating sphere.
7. The apparatus of claim 1, wherein: the included angle between the reflecting surface of the total reflector and the horizontal direction of the carrier is 45 degrees.
8. The apparatus of claim 1, wherein: the light-emitting characteristic testing module is arranged on the moving mechanism.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202120362752.8U CN214798169U (en) | 2021-02-08 | 2021-02-08 | Equipment for measuring light-emitting characteristics of laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202120362752.8U CN214798169U (en) | 2021-02-08 | 2021-02-08 | Equipment for measuring light-emitting characteristics of laser |
Publications (1)
Publication Number | Publication Date |
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CN214798169U true CN214798169U (en) | 2021-11-19 |
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CN202120362752.8U Active CN214798169U (en) | 2021-02-08 | 2021-02-08 | Equipment for measuring light-emitting characteristics of laser |
Country Status (1)
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CN (1) | CN214798169U (en) |
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2021
- 2021-02-08 CN CN202120362752.8U patent/CN214798169U/en active Active
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Effective date of registration: 20231201 Address after: No. 2, Lianshan Industrial Zone, Gushan Village, Shijing Town, Nan'an City, Quanzhou City, Fujian Province, 362343 Patentee after: Quanzhou San'an Optical Communication Technology Co.,Ltd. Address before: 361100 No. 753-799, Min'an Avenue, Hongtang Town, Tong'an District, Xiamen City, Fujian Province Patentee before: XIAMEN SANAN INTEGRATED CIRCUIT Co.,Ltd. |