CN102637774A - Mass-production corrosion device of full-automation SE (Selective Emitter) battery and processing method of battery - Google Patents

Mass-production corrosion device of full-automation SE (Selective Emitter) battery and processing method of battery Download PDF

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Publication number
CN102637774A
CN102637774A CN2012101021970A CN201210102197A CN102637774A CN 102637774 A CN102637774 A CN 102637774A CN 2012101021970 A CN2012101021970 A CN 2012101021970A CN 201210102197 A CN201210102197 A CN 201210102197A CN 102637774 A CN102637774 A CN 102637774A
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groove
silicon chip
automatic
temperature
treated silicon
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孙良欣
夏文斌
刘小龙
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JIYANG EQUIPMENT (HAIAN) CO Ltd
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JIYANG EQUIPMENT (HAIAN) CO Ltd
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    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Abstract

The invention discloses a mass-production corrosion device of a full-automation SE (Selective Emitter) battery and the processing method of the SE battery. According to the invention, the device is a full-automation cleaning system controlled by an industrial personal computer; the processing method comprises the steps that a cleaning basket containing workpieces is placed on an automatic charging table; the industrial personal computer controls a mechanical arm to successively convey the workpieces to each station; and Si battery pieces are output from a discharging table after being subjected to technical treatments such as cleaning and acid-alkali corrosion according to procedures. The method has the advantages that after the technical scheme is adopted, the whole temperature and concentration of all the surfaces can be ensured to be uniform when a large quantity of to-be-treated articles are treated; the surface homogeneity of the treated articles is ensured after treatment is finished and the surface precision after etching is improved; the problems of non-uniform concentration and non-uniform temperature are solved and complete spray is achieved during spraying; the non-uniformity of the temperature and the concentration of a viscous flow part is avoided and the pollution of the viscous flow part to the treated articles is reduced; and the cleaness of the treated articles in a tank is ensured. The conversion rate of the battery pieces is improved by treatment through technical tanks such as a pickling tank and an alcohol tank.

Description

A kind of full-automatic SE battery volume production corrosion device and processing method
Technical field
The present invention relates to a kind of full-automatic SE battery volume production corrosion device and processing method, belong to the photovoltaic technology field.
Background technology
At present, making herbs into wool is that silicon chip surface is carried out isotropic etch, forms little ditch, reduces the reflectivity of silicon chip surface, impels the sun to carry out higher order reflection at silicon chip surface, promotes the utilance of light.In the preparation technology of solar energy crystal silicon battery, process for etching is the pith that is related to the light absorption of solar cell surface, also is one of important channel of improving conversion efficiency of solar cell.
In process for etching, sour making herbs into wool treatment facility is very important some, and existing making herbs into wool treatment facility is to be made up of treatment trough (containing inside and outside groove) and circulation holding vessel (treatment fluid is used).But there is following problem:
1: the requirement of the substrate surface of sour making herbs into wool treatment facility is to guarantee in the etching that the surface temperature of object being treated and concentration will be evenly.When handling a large amount of object being treateds, guarantee that all surface whole temperature, concentration reach uniformity and is difficult to accomplish.
2: with a large amount of object being treateds is disposable when putting into treatment trough and handling; By the generation of existing method (structure of groove also only is the overflow that is injected into groove top from trench bottom) even without strong reaction heat; The temperature difference up and down and the concentration difference of substrate also must take place; Be difficult to guarantee the object being treated homogeneity on surface, back that disposes, and how to improve surface accuracy after the etching also be the problem of difficulty very for this reason.
3: for improving concentration and uneven temperature problem, iff significantly increases circular flow, can bring the extreme problem that rises of top liquid level.So not only brought obstacle, do not reached fully problems such as spray (spray below can making such as transfer robot and the gaily decorated basket with handles not in place etc.) below also existing in the spray process to device miniaturization.
Summary of the invention
In order to overcome existing deficiency, the present invention provides a kind of full-automatic SE battery volume production corrosion device and processing method.
The technical problem that the present invention will solve is to the above-mentioned deficiency that exists in the prior art; A kind of full-automatic SE battery volume production corrosion device and processing method are provided; Surface temperature and the concentration that can guarantee object being treated are even; And the surface accuracy after the raising etching, improved the transfer ratio of battery sheet greatly; Solve the problem that background technology exists.
For realizing above purpose, the invention provides a kind of full-automatic SE battery volume production corrosion processing method, contain following steps:
Step 1, automatic charging object being treated silicon chip;
Step 2, object being treated silicon chip get into 2# acid corrosion groove;
Step 3, object being treated silicon chip get into 3# acid corrosion groove;
Step 4, object being treated silicon chip get into the 4#QDR groove;
Step 5, object being treated silicon chip get into the 5# alkaline bath;
Step 6, object being treated silicon chip get into the 6# spray groove;
Step 7, object being treated silicon chip get into the 7# alkaline bath;
Step 8, object being treated silicon chip get into the 8# spray groove;
Step 9, object being treated silicon chip get into the 9# ultrasonic cleaner;
Step 10, object being treated silicon chip get into the 10# ultrasonic cleaner;
Step 11, object being treated silicon chip get into the 11# spray groove;
Step 12, object being treated silicon chip get into 12# and lift groove slowly;
Step 13, object being treated silicon chip get into the 13# automatic blanking;
The alkali cleaning soup Automatic Cycle and the bubbling of etching tank in the above-mentioned steps are guaranteed the even of soup;
To on etching tank, alkali cleaning, the IPA technology groove, sidepiece designing and arranging air pipe line, keep device interior operational environment cleaning, prevent cross pollution.
Also contain following steps:
Parameter detecting such as liquid level, temperature step;
Liquid level: the liquid level of the liquid level of the liquid level fluid infusion case of cell body and heating cabinet controlled constantly play a protective role.
Temperature: the temperature of the temperature of the temperature fluid infusion case of cell body and heating cabinet controlled constantly play a protective role;
Automatically, manual operation switch process;
Manual step: can be to every each valve, pump, motor, heater starts separately, to the manual vertical and horizontal arrival optional position of manipulator.
Automatic step: to each cell body automatic liquid supply, temperature is regulated automatically, and liquid level is regulated automatically, and manipulator transports the gaily decorated basket automatically between cell body, and manipulator arrives each groove station time slot lid and will open automatically, leaves the time slot lid and will close automatically.
Step is set in time, temperature, the digitlization of conveyance speed;
Can carry out reasonability to the speed of service of time, temperature and manipulator and set, to reach the requirement of production technology.
Equipment is carried out omnibearing safeguard protection step, and manipulator is anxious to stop, system suddenly stops, manipulator high-low limit, left and right sides limit switch setting up procedure.
To the manual operating procedure of equipment, to set picture through button according to piping diagram equipment is ready to complete supervision, the various functions of each cell body are kept watch on, and comprise liquid level; Behaviour is covered state, the manipulator state that puts in place, the start and stop of pump and valve; The start and stop of heater, alarm indication, alarm logging.
Full-automatic SE battery volume production corrosion device comprises: automatic charging device or automatic blanking device, slowly lift groove 1, first spray groove 2, first ultrasonic cleaner 3, second ultrasonic cleaner 4, second spray groove 5, first alkaline bath 6, the 3rd spray groove 7, second alkaline bath 8, QDR groove 9, the first acid corrosion groove 10, the second acid corrosion groove 11, automatic charging device or automatic blanking device successively sequence arrangement be connected.
Advantage of the present invention is to adopt after the above-mentioned technical scheme, when handling a large amount of object being treateds, can guarantee that all surface whole temperature, concentration reach uniformity; Guarantee the object being treated homogeneity on back surface that disposes, and improve the surface accuracy after the etching; Improve concentration and uneven temperature problem, and reach spray fully in the spray process; Can avoid causing temperature, the density unevenness of viscous flow part even, thereby reduce of the pollution of viscous flow part particle object being treated; Guarantee the cleannes of object being treated in the groove.
Description of drawings
When combining accompanying drawing to consider; Through with reference to following detailed, can more completely understand the present invention better and learn wherein many attendant advantages easily, but accompanying drawing described herein is used to provide further understanding of the present invention; Constitute a part of the present invention; Illustrative examples of the present invention and explanation thereof are used to explain the present invention, do not constitute improper qualification of the present invention, like figure wherein:
Fig. 1 looks sketch map for structure master of the present invention;
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
Embodiment
Obviously, many modifications and the variation made based on aim of the present invention of those skilled in the art belongs to protection scope of the present invention.
Embodiment 1: as shown in Figure 1,
The full-automatic SE battery of a kind of full-automatic SE battery volume production corrosion device and processing method volume production corrosion device can be guaranteed that the surface temperature of object being treated and concentration are even, and improve the surface accuracy after the etching, has improved the transfer ratio of battery sheet greatly; Solve the problem that background technology exists.
A kind of full-automatic SE battery volume production corrosion device, automatic charging device or automatic blanking device connection lift groove slowly, lift groove slowly and connect first spray groove; First spray groove connects first ultrasonic cleaner and connects; First ultrasonic cleaner connects the connection of second ultrasonic cleaner, second ultrasonic cleaner connects second spray groove and connects, and second spray groove connects first alkaline bath and connects, and first alkaline bath connects the 3rd spray groove and connects; The 3rd spray groove connects second alkaline bath and connects; Second alkaline bath connects the QDR groove and connects, and the QDR groove connects the first acid corrosion groove and connects, and the first acid corrosion groove connects the second acid corrosion groove; The second acid corrosion groove connects automatic charging device or automatic blanking device, said apparatus successively sequence arrangement be connected.
1) etching tank, alkali washing process groove Automatic Cycle and bubbling function are guaranteed the even of soup;
2) on etching tank, alkali cleaning, the IPA technology groove, sidepiece designing and arranging air pipe line, keep device interior operational environment cleaning, prevent cross pollution;
3) application of QDR technology has guaranteed isolation effect and the high-cleanness, high of cleaning between the dipper;
4) laterally moving with vertical promotion of mechanical arm all adopted the import servo motor, closed-loop control, and accurate positioning, reliability is high; Adopt round guide structure and linear block transmission, mechanical arm lifting unit and cantilever portion all coat with PP, guarantee the mechanical arm life-span; The geometrical curve acceleration and deceleration motion impacts for a short time, and motion steadily;
5) multiplex's database of planting can supply the user to use and stores;
6) multiple protectives such as the independent emergency stop switch of manipulator, system's emergency stop switch and the automatic overload protection of manipulator motor are guaranteed operator's safety.
Full-automatic SE battery volume production corrosion device, comprise automatic charging device or automatic blanking device, slowly lift groove 1, first spray groove 2, first ultrasonic cleaner 3, second ultrasonic cleaner 4, second spray groove 5, first alkaline bath 6, the 3rd spray groove 7, second alkaline bath 8, QDR groove 9, the first acid corrosion groove 10, the second acid corrosion groove 11, automatic charging device or automatic blanking device successively sequence arrangement be connected.
The soup Automatic Cycle of etching tank, alkali washing process groove and bubbling function are guaranteed the even of soup;
On etching tank, alkali cleaning, the IPA technology groove, sidepiece designing and arranging air pipe line, keep device interior operational environment cleaning, prevent cross pollution;
The application of QDR technology has guaranteed isolation effect and the high-cleanness, high of cleaning between the dipper;
The import servo motor is all adopted in laterally moving with vertical promotion of mechanical arm, closed-loop control, and accurate positioning, reliability is high; Adopt round guide structure and linear block transmission, mechanical arm lifting unit and cantilever portion all coat with PP, guarantee the mechanical arm life-span; The geometrical curve acceleration and deceleration motion impacts for a short time, and motion steadily;
Multiplex's database of planting can supply the user to use and stores;
Multiple protectives such as the independent emergency stop switch of manipulator, system's emergency stop switch and the automatic overload protection of manipulator motor are guaranteed operator's safety.
This cleaning machine is the automatic washing system by industrial computer control.The operator need only be positioned over the automatic charging platform with the cleaning basket that workpiece is housed; Successively workpiece is transported to each station by industrial computer control manipulator again; According to the program of prior input Si battery sheet is cleaned, after the PROCESS FOR TREATMENT such as acid, caustic corrosion processing, exports from blanking bench.
1) technical parameter
A) contour size of the unit(s): LxWxH=12106x4096x2416mm;
B) handle silicon chip: 125*125*0.16mm/156*156*0.16mm;
C) production capacity: 3000 slices/hour (156*156*0.16mm);
200 every batch/batches;
D) beat: 4min;
E) film magazine: 50 film magazine 4 baskets/batch; (according to the customer demand customization)
100 film magazine 2 baskets/batch; (according to the customer demand customization)
F) handle maximum weight: 40Kg;
Equipment is formed:
Compositions such as cleaning equipment main body, transfer mechanical arm, exhaust system, automatically controlled and guidance panel, apparatus and process flows to and adopts " left side is entered the right side and gone out " (also can adopt the right side to enter a left side goes out)
A kind of full-automatic SE battery volume production corrosion processing method, the technological process method step:
Carry out 1# automatic charging step, the 2# second acid corrosion groove step, the 3# first acid corrosion groove step, 4#QDR groove step, the 5# second alkaline bath step, 6# the 3rd spray groove step, the 7# first alkaline bath step, the 8# second spray groove step, the 9# second ultrasonic cleaner step, the 10# first ultrasonic cleaner step, the 11# first spray groove step, 12# successively and lift groove step, 13# automatic blanking step slowly.
Figure BDA0000150170400000081
Figure BDA0000150170400000091
1) ultrasonic power is 1.8KW, adjustable power, and frequency is 40KHz; 9#, 10# groove prerinse trench bottom are equipped with ultrasonic unit;
2) artificial dosing, soup is artificial to be added;
3) ultrasonic cleaner heating-up temperature, scavenging period all can be set;
4) equipment and peripheral water supply interface place have hydraulic pressure on-line measurement and warning function;
5) all cell body volumes are not less than 120L;
7) the QDR groove can independently use functions such as overflow, spray, fast row.
The Control Parameter of each several part and step:
1) mechanical arm moves up and down
Lift motor The import servo motor
The kind of drive Ball-screw, linear slide rail
Position probing Built-in encoder, external position probing
Quantity
2 covers
2) mechanical arm laterally moves
Laterally move motor The import servo motor
The kind of drive Synchronous pulley
Guiding Round guide
Position probing Built-in encoder, external position probing
Quantity
2 covers
3) lift slowly
Lift motor The import servo motor
The kind of drive Ball-screw, synchronous pulley
Guiding Linear guides
Position probing Built-in encoder, external position probing
Quantity 1 cover
4) framework
The carbon steel plastic-blasting, import PP wrapper sheet.Divide 2 parts;
5) 1# automatic feed mechanism
The position The 1# station
Material PP
The kind of drive The chain transmission
Drive motor The import motor
Position probing Optoelectronic switch
Quantity 1 cover
6) the 2# second acid corrosion groove 11, the 3# first acid corrosion groove 10
Figure BDA0000150170400000111
7) the 4#QDR rinse bath 9
8) 5# second alkaline bath 8,7# first alkaline bath 6
9) 6# the 3rd spray groove 7,8# second spray groove 5,11# first spray groove 2
Figure BDA0000150170400000132
10) 9# second ultrasonic cleaner 4,10# first ultrasonic cleaner 3
Figure BDA0000150170400000133
13) 12# lifts groove 1 slowly
14) 13# automatic blanking mechanism
The position The 13# station
Material PP
The kind of drive The chain transmission
Drive motor The import motor
Transmit transition Transitional region length is undetermined
Position probing Optoelectronic switch
The composition of automatically controlled part:
1) industrial computer;
17 cun touch displays;
Network interface;
2GB RAM, 160G hard disk, the above CPU of 2G, trace ball, keyboard.
2) to liquid level, the isoparametric detection of temperature;
Liquid level: the liquid level of the liquid level of the liquid level fluid infusion case of cell body and heating cabinet controlled constantly play a protective role.
Temperature: the temperature of the temperature of the temperature fluid infusion case of cell body and heating cabinet controlled constantly play a protective role;
3) manual operation translation function automatically;
Manually: can be to every each valve, pump, motor, heater starts separately, to the manual vertical and horizontal arrival optional position of manipulator.
Automatically: to each cell body automatic liquid supply, temperature is regulated automatically, and liquid level is regulated automatically, and manipulator transports the gaily decorated basket automatically between cell body, and manipulator arrives each groove station time slot lid and will open automatically, leaves the time slot lid and will close automatically.
4) time, temperature, the digitlization of conveyance speed are set;
Can carry out reasonability to the speed of service of time, temperature and manipulator and set, to reach the requirement of production technology.
5) production capacity statistics;
Can calculate the production quantity of every day.
6) emergency stop switch;
Equipment is had omnibearing safeguard protection, have manipulator suddenly to stop, system is anxious to stop manipulator high-low limit left and right sides limit switch.
7) equipment running status shows:
Temperature control instrument is the needed temperature of display device constantly.
Touch-screen: have equipment manually to move button, set picture according to piping diagram equipment is ready to complete supervision, the various functions of each cell body are kept watch on, and comprise liquid level; Behaviour is covered state, the manipulator state that puts in place, the start and stop of pump and valve; The start and stop of heater, alarm indication, alarm logging.
Interface setting: various parameter settings, administrative staff, technologist, operating personnel's interface etc.
8) other Control Parameter: compressed air: pressure: 0.5-0.7MPa, 500NL/min; Interface caliber 1/2 ";
Nitrogen pressure: 0.5-0.7MPa, 200NL/min, interface caliber 1/2 ";
DI water: pressure 3-5kg/cm 2, resistivity>=16M Ω;
Flow 6m 3/ hr; (excess flow is pressed 6L/min, and the QDR flow is pressed 10L/min and calculated)
Air draft discharge capacity: 150m 3/ min.
As stated, embodiments of the invention have been carried out explanation at length, but as long as not breaking away from inventive point of the present invention and effect in fact can have a lot of distortion, this will be readily apparent to persons skilled in the art.Therefore, such variation also all is included within protection scope of the present invention.

Claims (3)

1. full-automatic SE battery volume production corrosion device and processing method is characterized in that containing following steps:
Step 1, automatic charging object being treated silicon chip;
Step 2, object being treated silicon chip get into 2# acid corrosion groove;
Step 3, object being treated silicon chip get into 3# acid corrosion groove;
Step 4, object being treated silicon chip get into the 4#QDR groove;
Step 5, object being treated silicon chip get into the 5# alkaline bath;
Step 6, object being treated silicon chip get into the 6# spray groove;
Step 7, object being treated silicon chip get into the 7# alkaline bath;
Step 8, object being treated silicon chip get into the 8# spray groove;
Step 9, object being treated silicon chip get into the 9# ultrasonic cleaner;
Step 10, object being treated silicon chip get into the 10# ultrasonic cleaner;
Step 11, object being treated silicon chip get into the 11# spray groove;
Step 12, object being treated silicon chip get into 12# and lift groove slowly;
Step 13, object being treated silicon chip get into the 13# automatic blanking;
The alkali cleaning soup Automatic Cycle and the bubbling of etching tank in the above-mentioned steps are guaranteed the even of soup;
To on etching tank, alkali cleaning, the IPA technology groove, sidepiece designing and arranging air pipe line, keep device interior operational environment cleaning, prevent cross pollution.
2. a kind of full-automatic SE battery volume production corrosion processing method according to claim 1 is characterized in that also containing following steps:
Parameter detecting such as liquid level, temperature step;
Liquid level: the liquid level of the liquid level of the liquid level fluid infusion case of cell body and heating cabinet controlled constantly play a protective role;
Temperature: the temperature of the temperature of the temperature fluid infusion case of cell body and heating cabinet controlled constantly play a protective role;
Automatically, manual operation switch process;
Manual step: can be to every each valve, pump, motor, heater starts separately, to the manual vertical and horizontal arrival optional position of manipulator;
Automatic step: to each cell body automatic liquid supply, temperature is regulated automatically, and liquid level is regulated automatically, and manipulator transports the gaily decorated basket automatically between cell body, and manipulator arrives each groove station time slot lid and will open automatically, leaves the time slot lid and will close automatically;
Step is set in time, temperature, the digitlization of conveyance speed;
Can carry out reasonability to the speed of service of time, temperature and manipulator and set, to reach the requirement of production technology;
Equipment is carried out omnibearing safeguard protection step, and manipulator is anxious to stop, system suddenly stops, manipulator high-low limit, left and right sides limit switch setting up procedure;
To the manual operating procedure of equipment, to set picture through button according to piping diagram equipment is ready to complete supervision, the various functions of each cell body are kept watch on, and comprise liquid level; Behaviour is covered state, the manipulator state that puts in place, the start and stop of pump and valve; The start and stop of heater, alarm indication, alarm logging.
3. full-automatic SE battery volume production corrosion device, it is characterized in that automatic charging device or automatic blanking device, slowly lift groove, first spray groove, first ultrasonic cleaner, second ultrasonic cleaner, second spray groove, first alkaline bath, the 3rd spray groove, second alkaline bath, QDR groove, the first acid corrosion groove, the second acid corrosion groove, automatic charging device or automatic blanking device successively sequence arrangement be connected.
CN2012101021970A 2012-04-01 2012-04-01 Mass-production corrosion device of full-automation SE (Selective Emitter) battery and processing method of battery Pending CN102637774A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104347456A (en) * 2014-09-15 2015-02-11 南通皋鑫电子股份有限公司 Chemical treatment device for high-voltage silicon rectifier stack die
CN106206381A (en) * 2016-08-30 2016-12-07 苏州聚晶科技有限公司 A kind of monocrystalline etching cleaning machine and process thereof

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CN101719530A (en) * 2009-08-31 2010-06-02 上海科伟达超声波科技有限公司 Polysilicon solar battery slice etching device
CN102275233A (en) * 2011-09-06 2011-12-14 太仓协鑫光伏科技有限公司 Method for cutting 170-micrometer silicon wafers
CN202616273U (en) * 2012-04-01 2012-12-19 吉阳设备(海安)有限公司 Full-automation SE-battery mass-production corrosion device

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CN101719530A (en) * 2009-08-31 2010-06-02 上海科伟达超声波科技有限公司 Polysilicon solar battery slice etching device
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104347456A (en) * 2014-09-15 2015-02-11 南通皋鑫电子股份有限公司 Chemical treatment device for high-voltage silicon rectifier stack die
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Application publication date: 20120815