CN102626828A - Method and device for producing micro micro pits with high efficiency based on laser shock waves - Google Patents

Method and device for producing micro micro pits with high efficiency based on laser shock waves Download PDF

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Publication number
CN102626828A
CN102626828A CN2012101251192A CN201210125119A CN102626828A CN 102626828 A CN102626828 A CN 102626828A CN 2012101251192 A CN2012101251192 A CN 2012101251192A CN 201210125119 A CN201210125119 A CN 201210125119A CN 102626828 A CN102626828 A CN 102626828A
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laser
wire netting
absorbed layer
micro
layer
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戴峰泽
张永康
鲁金忠
张磊
王庆伟
任旭东
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Jiangsu University
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Jiangsu University
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Abstract

The invention provides a method and a device for producing micro micro pits with high efficiency based on laser shock waves. high energy pulse lasers permeate microporous group of a micrometer scale metal net after being focused by lens and form a plurality of micrometer scale laser beams due to blocking effect of metal wires; the multiple laser beams continue permeating a confinement layer and irradiate on a surface of an absorbing layer; the absorbing layer absorbs laser energy to generate a plasma explosion forming high intensity shock waves; the confinement layer is used for prolonging maintenance time of the plasma explosion to improve peak pressure of the shock waves and prolong maintenance time of the shock waves; under the action of strong shock waves formed in the fine laser beams, the surface of a workpiece is subjected to plastic deformation and forms micro micro pits.

Description

A kind of efficient nick hole manufacturing approach and device based on laser blast wave
Method and device field
The present invention relates to the little manufacturing of metal material surface field, be meant a kind of efficient nick hole manufacturing approach and device particularly based on laser blast wave.
Background method and device
Through in the nick hole of boats and ships and submarine navigation device surface making micro-meter scale, be the effective way that reduces ship resistance; In the nick hole that surface of friction pair is made micro-meter scale, can be used for the wear debris that produces in storing lubricating oil and the friction process, improve the anti-wear performance of friction pair greatly; Simultaneously, the making in nick hole also is one of the research direction in fields such as MEMS (MEMS), biological method and device.
At present, the method and the device that prepare nick hole in the metal surface mainly contain Mechanical Method, electrochemical process, electron beam processing method and laser ablation method etc.Mechanical Method exists cutter to make the shortcoming complicated, that working (machining) efficiency is low; There is complex process in electrochemical process, is prone to the shortcoming of contaminated environment; There is the low shortcoming of working (machining) efficiency in the electron beam processing method.Patent 201010221857.8 has proposed a kind of aluminium surface micro pit preparation method, also exists complex process, the shortcoming that working (machining) efficiency is low; The integrality of laser ablation method meeting deface, the fuel factor that laser ablation produces can cause the variation of material microstructure and form the residual tension layer on the surface that its pit surface roughness is high; Document [Y.B. Guo; R. Caslaru; Fabrication and characterization of micro dent arrays produced by laser shock peening on titanium Ti – 6Al – 4V surfaces; Journal of Materials Processing Technology 211 (2011) 729 – 736] utilize laser blast wave stress effect in the Ti-6Al-4V surface preparation diameter be 200 μ m, the degree of depth is the nick hole of 1 μ m.Nick that this method makes hole, its smooth surface, and can form one deck residual compressive stress layer on the top layer, can effectively improve the fatigue life on surface.But its shortcoming also clearly, and the focal spot radius that the radius in nick hole forms after by the laser beam line focus is confirmed, and laser-impact can only form a nick hole, its inefficiency each time.
Summary of the invention
The present invention is directed to the deficiency of above method and device, a kind of efficient nick hole manufacturing approach and device based on laser blast wave is provided.After high energy pulse laser focused on through lens, the micropore crowd who passes the micro-meter scale of wire netting was owing to wiryly block effect; Form the laser beam of multi beam micro-meter scale; The fine laser beam of multi beam continues to see through restraint layer, and irradiation is on the absorbed layer surface, and absorbed layer absorbs the blast of laser energy generation plasma and forms high-intensity shock wave (up to several GPa); The effect of restraint layer is holding time to improve shock wave peak pressure and the duration that prolongs shock wave of prolongation plasma blast; Surface of the work produces plastic deformation under the powerful shock wave effect that fine laser beam forms, form the nick hole.The present invention includes laser instrument, condenser lens, chucking appliance system, rubber sheet gasket, wire netting, cushion block, flowing water layer, absorbed layer, workpiece, workbench and control system.
Described laser instrument is a high energy pulse laser, and the focal position spot diameter is greater than 3mm, and this moment, hot spot laser power density was not less than 1GW/CM 2
Described condenser lens is a long-focus lens, and its focal length can make the fine laser beam that passes wire netting be similar to parallel laser beam greater than 1m.
Described rubber sheet gasket can be realized the reliable grip to wire netting.
Described wire netting can be various nets with minute aperture, for example mesh grid, etching net; Its material is less to the absorptivity of laser, and the aperture is chosen on demand, and can stand repeatedly laser irradiation; After varying aperture surpasses its aperture 1/10, must in time change.
Described cushion block; It is positioned over the wire netting below, so that wire netting keeps certain distance with the absorbed layer surface, makes wire netting be positioned at flowing water laminar surface top; Its distance is greater than 1mm, to prevent that wire netting from receiving because the distortion that the powerful shock wave of the effect of contraction of water generation causes.Simultaneously in order farthest to reduce laser beam dispersing after through aperture, this distance must be less than 2.5mm,
The material of described absorbed layer for laser energy is had the higher absorption rate, its thickness be greater than 150 μ m,, can stand the laser irradiation more than 5 times and do not break, to realize repeatedly impact same position; Simultaneously also in order to make full use of the energy of the shock wave that laser produces, its thickness must be less than 250 μ m.
Described absorbed layer is a flowing water, and conveniently to process continuously, its thickness is about 1mm ~ 2mm.
Described workbench can be realized X, the two-axle interlocking of Y direction through the control system.To realize processing to whole work surface.
Beneficial effect of the present invention is following:
1,, can obtain the nick hole in different apertures through changing the aperture of wire netting.
2, produce the nick hole among the present invention and do not have heat effect, therefore can not cause because the ill effect that fuel factor produces workpiece surface.
3, the nick of the present invention processing hole, its top layer is a compressive stress layer, can effectively improve workpiece fatigue life.
4, can repeatedly impact at same position, obtain the micropore crowd of high aspect ratio.
5, this method can realize automation, and production efficiency is high, and used critical component is with low cost, can realize producing in enormous quantities, on the laser instrument that adopts in the present invention, can obtain about 48 cm 2The working (machining) efficiency of/min.
Description of drawings
Fig. 1: based on the efficient nick hole manufacturing approach and the device sketch map of laser blast wave;
Fig. 2: the large tracts of land pit optical photograph that goes out in pure titanium surface preparation with this method;
Fig. 3: the light micrograph in single nick hole;
1 comprises among the figure, 1 laser instrument, 2 condenser lenses, 3 chucking appliance systems, 4 rubber sheet gaskets, 5 wire nettings, 6 cushion blocks, 7 restraint layers, 8 absorbed layers, 9 workpiece, 10 workbench, 11 control systems.
The specific embodiment
Shown in figure one; Efficient nick hole manufacturing approach and device based on laser blast wave comprise: laser instrument 1, condenser lens 2, chucking appliance system 3, rubber sheet gasket 4, wire netting 5, cushion block 6, restraint layer 7, absorbed layer 8, workpiece 9, workbench 10 and control system 11.Workpiece 9 carries out the surface finish polishing, uses acetone then, and is placed on the chucking appliance system 3; Absorbed layer 8 is covered workpiece 9 surfaces; Cushion block 6 is placed on absorbed layer 8 surfaces, is distributed in both sides; Wire netting 5 is flattened, and with wire netting 5 edges cover on cushion block 6; Rubber sheet gasket 4 is pressed in wire netting 5 edges, and rubber sheet gasket 4 is right against cushion block 6; Chucking appliance system 3 clamps rubber sheet gaskets 4, and all parts are fixed on the chucking appliance system 3, and wire netting 5 keeps smooth when guaranteeing to clamp; Chucking appliance system 3 is fixed on the workbench 10; Restraint layer 7 is imported, and cover absorbed layer 8 surfaces.
The operation principle of patent of the present invention is: after the pulse laser that laser instrument 1 sends focuses on through condenser lens 2; Near the laser beam 1a that focus, forms passes the micropore crowd of wire netting 5 micro-meter scales; Owing to wiryly block effect, form the laser beam 1b of multi beam micro-meter scale, the fine laser beam 1b of multi beam continues to see through restraint layer 7; Irradiation is on absorbed layer 8 surfaces; Absorbed layer 8 absorbs laser energies and produces the plasmas blast and form high-intensity shock wave, and restraint layer 7 is used for prolonging holding time to improve shock wave peak pressure and the duration that prolongs shock wave of plasma blast, and workpiece 9 surfaces are under the powerful shock wave effect that fine laser beam 1b forms; Produce plastic deformation, form the nick hole.Its grid hole of used wire netting is a square in this method, yet its marginal portion of pit that obtains is to approach circle, and this is because after laser blast wave sees through absorbed layer, and dispersing to a certain degree arranged.

Claims (8)

1. cheat manufacturing installation based on the efficient nick of laser blast wave; It is characterized in that, comprise laser instrument (1), condenser lens (2), chucking appliance system (3), rubber sheet gasket (4), wire netting (5), cushion block (6), restraint layer (7), absorbed layer (8), workpiece (9), workbench (10) and control system (11); Laser instrument (1) is right against condenser lens (2); Up place absorbed layer (8), cushion block (6) successively on workpiece (9) surface, wire netting (5) and rubber sheet gasket (4), and integral installation is in chucking appliance system (3) lining; Chucking appliance system (3) is being fixed on the workbench (10); Workbench (10) links to each other with control system (11); Restraint layer (7) covers on the absorbed layer (8).
2. implement the method for the described efficient nick hole manufacturing installation based on laser blast wave of claim 1, it is characterized in that concrete steps are following:
A, workpiece (9) carry out the surface finish polishing, use acetone then, and are placed on the chucking appliance system (3);
B, absorbed layer (8) is covered workpiece (9) surface;
C, cushion block (6) is placed on absorbed layer (8) surface, is distributed in both sides;
D, wire netting (5) is flattened, and with wire netting (5) edges cover on cushion block (6);
E, rubber sheet gasket (4) is pressed in wire netting (5) edge, rubber sheet gasket (4) is right against cushion block (6);
F, chucking appliance system (3) clamp rubber sheet gasket (4), and all parts are fixed on the chucking appliance system (3), and wire netting (5) keeps smooth when guaranteeing to clamp;
G, chucking appliance system (3) is fixed on the workbench (10);
H, be that 1mm-2mm left and right sides water constraint layer (7) flows into and cover absorbed layer (8) surface with thickness;
After the pulse laser that I, laser instrument (1) send focuses on through condenser lens (2); Near the laser beam that focus, forms (1a) passes the micropore crowd of wire netting (5) micro-meter scale; Owing to wiryly block effect, form the laser beam (1b) of multi beam micro-meter scale, the fine laser beam of multi beam (1b) continues to see through restraint layer (7); Irradiation is on absorbed layer (8) surface; Absorbed layer (8) absorbs laser energy and produces the plasma blast and form shock wave, and restraint layer (7) is used for prolonging holding time improving shock wave peak pressure and the duration that prolongs shock wave of plasma blast, and workpiece (9) surface is under the shock wave effect that the laser beam (1b) of micro-meter scale forms; Produce plastic deformation, form the nick hole.
3. the described method of cheating manufacturing installation based on the efficient nick of laser blast wave of enforcement claim 1 according to claim 2; It is characterized in that described wire netting is mesh grid or etching net, its material is less to the absorptivity of laser; The aperture is chosen on demand; And can stand laser irradiation, after varying aperture surpasses its aperture 1/10, must in time change.
4. the method for the described efficient nick hole manufacturing installation based on laser blast wave of enforcement claim 1 according to claim 2 is characterized in that described cushion block (6) is positioned over the wire netting below, and its thickness is 1 ~ 2.5mm.
5. the method for the described efficient nick hole manufacturing installation based on laser blast wave of enforcement claim 1 according to claim 2 is characterized in that described laser instrument is a high energy pulse laser, and pulsewidth is 5ns-30ns; The focal position spot diameter is greater than 3mm, and this moment, hot spot laser power density was not less than 1GW/CM 2
6. the method for the described efficient nick hole manufacturing installation based on laser blast wave of enforcement claim 1 according to claim 2 is characterized in that described condenser lens is a long-focus lens, and its focal length is greater than 1m.
7. the described method of cheating manufacturing installation based on the efficient nick of laser blast wave of enforcement claim 1 according to claim 2; It is characterized in that, described absorbed layer, its material is aluminium foil or polyester tape; Thickness is greater than 150 μ m;, can stand the laser irradiation more than 3 times, its thickness must be less than 250 μ m.
8. the method for the described efficient nick hole manufacturing installation based on laser blast wave of enforcement claim 1 according to claim 2 is characterized in that described workbench is through the realization X of control system, the two-axle interlocking of Y direction.
CN2012101251192A 2012-04-26 2012-04-26 Method and device for producing micro micro pits with high efficiency based on laser shock waves Pending CN102626828A (en)

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Cited By (17)

* Cited by examiner, † Cited by third party
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CN103057117A (en) * 2012-12-28 2013-04-24 江苏大学 Method for improving laser transmission welding connection strength
CN103143836A (en) * 2013-03-14 2013-06-12 江苏大学 Laser shock treatment device taking flowable liquid as energy absorption layer
CN103801822A (en) * 2013-12-23 2014-05-21 江苏大学 Laser compound treatment method and device of perforated plate bushings
CN104044017A (en) * 2014-06-06 2014-09-17 江苏大学 Polishing method and device based on laser shock wave
CN104148808A (en) * 2014-07-15 2014-11-19 沈阳工业大学 Laser processing method and device for improving abrasion resistance of aluminum-alloy engine piston
CN104175001A (en) * 2014-08-26 2014-12-03 江苏大学 Laser micro-pit array making device and method
CN104308361A (en) * 2014-09-01 2015-01-28 江苏大学 Laser shock device and laser shock method for manufacturing morphology of surface micro-protrusions
CN104668772A (en) * 2013-11-26 2015-06-03 现代自动车株式会社 Device and method for adhering different kinds of materials
CN104842068A (en) * 2015-04-09 2015-08-19 江苏大学 Method for manufacturing micro-convex points on metal surface
CN104308361B (en) * 2014-09-01 2017-01-04 江苏大学 A kind of laser-impact manufactures the apparatus and method of surface microprotrusion pattern
CN110640302A (en) * 2019-09-26 2020-01-03 东华大学 Micro-texture preparation method based on laser composite process
CN111403290A (en) * 2020-03-31 2020-07-10 武汉大学 Method for reducing channel length of field effect transistor by laser shock
WO2020215596A1 (en) * 2019-04-26 2020-10-29 中国科学院宁波材料技术与工程研究所 Laser shock strengthening method and system
CN111944989A (en) * 2020-09-04 2020-11-17 武汉大学 Method for rapidly selecting area laser reinforcement
CN112692304A (en) * 2020-12-14 2021-04-23 武汉大学 Laser composite additive manufacturing method based on pulse laser control of molten pool flow
CN113106238A (en) * 2021-03-09 2021-07-13 武汉大学 Method for manufacturing alternating regular three-dimensional gradient nano structure
CN113547203A (en) * 2021-08-11 2021-10-26 山东大学 Material processing device and method based on linkage of water guide pipe and constraint mechanism

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CN100999038A (en) * 2006-12-22 2007-07-18 江苏大学 Method and device of laser impact sheet metal mouldless shaping based on liquid crystal mask
CN101590569A (en) * 2009-06-12 2009-12-02 江苏大学 A kind of method and apparatus of compositely preparing surface-layer biomimetic structure by laser
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JP3775250B2 (en) * 2001-07-12 2006-05-17 セイコーエプソン株式会社 Laser processing method and laser processing apparatus
JP2003340577A (en) * 2002-05-24 2003-12-02 Nippon Sharyo Seizo Kaisha Ltd Laser processing apparatus
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CN100999038A (en) * 2006-12-22 2007-07-18 江苏大学 Method and device of laser impact sheet metal mouldless shaping based on liquid crystal mask
CN101590569A (en) * 2009-06-12 2009-12-02 江苏大学 A kind of method and apparatus of compositely preparing surface-layer biomimetic structure by laser
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Cited By (26)

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Publication number Priority date Publication date Assignee Title
CN103057117A (en) * 2012-12-28 2013-04-24 江苏大学 Method for improving laser transmission welding connection strength
CN103143836B (en) * 2013-03-14 2015-11-18 江苏大学 Take flowable liquids as the laser shock treatment device of energy-absorbing layer
CN103143836A (en) * 2013-03-14 2013-06-12 江苏大学 Laser shock treatment device taking flowable liquid as energy absorption layer
CN104668772A (en) * 2013-11-26 2015-06-03 现代自动车株式会社 Device and method for adhering different kinds of materials
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CN103801822A (en) * 2013-12-23 2014-05-21 江苏大学 Laser compound treatment method and device of perforated plate bushings
CN103801822B (en) * 2013-12-23 2016-03-02 江苏大学 A kind of method of laser multiple processing of porous plate lining
CN104044017A (en) * 2014-06-06 2014-09-17 江苏大学 Polishing method and device based on laser shock wave
CN104044017B (en) * 2014-06-06 2016-07-13 江苏大学 A kind of finishing method based on laser blast wave
CN104148808A (en) * 2014-07-15 2014-11-19 沈阳工业大学 Laser processing method and device for improving abrasion resistance of aluminum-alloy engine piston
CN104148808B (en) * 2014-07-15 2016-07-06 沈阳工业大学 Improve laser processing method and the device of aluminium alloy engine piston abrasion-proof
CN104175001A (en) * 2014-08-26 2014-12-03 江苏大学 Laser micro-pit array making device and method
CN104175001B (en) * 2014-08-26 2016-04-27 江苏大学 A kind of micro-pit array manufacturing installation of laser and method
CN104308361A (en) * 2014-09-01 2015-01-28 江苏大学 Laser shock device and laser shock method for manufacturing morphology of surface micro-protrusions
CN104308361B (en) * 2014-09-01 2017-01-04 江苏大学 A kind of laser-impact manufactures the apparatus and method of surface microprotrusion pattern
CN104842068B (en) * 2015-04-09 2016-08-24 江苏大学 A kind of method manufacturing micro convex point in metal surface
CN104842068A (en) * 2015-04-09 2015-08-19 江苏大学 Method for manufacturing micro-convex points on metal surface
WO2020215596A1 (en) * 2019-04-26 2020-10-29 中国科学院宁波材料技术与工程研究所 Laser shock strengthening method and system
CN110640302A (en) * 2019-09-26 2020-01-03 东华大学 Micro-texture preparation method based on laser composite process
CN111403290A (en) * 2020-03-31 2020-07-10 武汉大学 Method for reducing channel length of field effect transistor by laser shock
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CN112692304A (en) * 2020-12-14 2021-04-23 武汉大学 Laser composite additive manufacturing method based on pulse laser control of molten pool flow
CN112692304B (en) * 2020-12-14 2022-01-14 武汉大学 Laser composite additive manufacturing method based on pulse laser control of molten pool flow
CN113106238A (en) * 2021-03-09 2021-07-13 武汉大学 Method for manufacturing alternating regular three-dimensional gradient nano structure
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Application publication date: 20120808