CN207873385U - A kind of laser process equipment for parallel processing - Google Patents
A kind of laser process equipment for parallel processing Download PDFInfo
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- CN207873385U CN207873385U CN201721849625.0U CN201721849625U CN207873385U CN 207873385 U CN207873385 U CN 207873385U CN 201721849625 U CN201721849625 U CN 201721849625U CN 207873385 U CN207873385 U CN 207873385U
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- laser
- galvanometer
- lens
- parallel processing
- process equipment
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Abstract
The utility model discloses a kind of laser process equipments for parallel processing, include laser, expand device, galvanometer and the lens of the multiple beam output being sequentially arranged, further include the control mechanism for controlling laser and galvanometer;The expand device, galvanometer and lens are arranged in a one-to-one correspondence with each light beam that multi-beam laser device generates.Laser sends out multi-beam laser, between each output beam independently of one another, the parameter of each output beam can be respectively set, independently of one another, each light beam passes through expand device corresponding with each light beam successively, galvanometer and lens, product surface is irradiated to be laser machined, galvanometer can arrange pattern to be processed by subregion the characteristics of graphics processing, the process equipment can generate a plurality of parallel laser machining beams simultaneously, parallel processing can be carried out to workpiece to be processed, material suitable for large format is cut, cutting, drilling or mark operation, improve the efficiency of laser processing, large-area laser process operation can be met.
Description
Technical field
The utility model belongs to technical field of laser processing, relates in particular to a kind of laser processing for parallel processing
Equipment.
Background technology
Laser processing technology is a kind of characteristic using laser beam and matter interaction, to material (metal is nonmetallic)
It cut, welded, is surface-treated, being punched and the processing technology of micro Process etc., as a kind of advanced manufacturing technology
It is widely applied in the national economy key areas such as automobile, electronic apparatus, aviation, metallurgy, machine-building, improves product
Quality, the degree of automation are a kind of processing technologys pollution-free, consumptive material is few.
Laser processing reaches very high energy density after lens focus using the energy of laser in focus, forms light
Fuel factor is to be processed material.Laser process equipment is the key that traditional manufacture skill is transformed using laser processing technology
One of art equipment generally comprises laser, light-conducting system, control system and detecting system.
Typical laser generally produces the high cone focused beams of energy density at present, causes by high-density laser photon
Or the photochemically reactive process of control, but the hot spot that this laser beam is formed in material surface to be processed is small, processing effect
Rate is relatively low, cannot meet the laser processing of large format material.
Utility model content
For this purpose, the technical problem to be solved by the utility model is to the cone focused beams processing that conventional laser generates
Efficiency is low, is unsuitable for handling large format material, to propose that a kind of laser processing for parallel processing high in machining efficiency is set
It is standby.
In order to solve the above technical problems, the technical solution of the utility model is:
The utility model provides a kind of laser process equipment for parallel processing comprising the multiple beam being sequentially arranged swashs
Light device, expand device, galvanometer and lens further include the control mechanism for controlling laser and galvanometer;The expand device is shaken
Mirror and lens are arranged in a one-to-one correspondence with each light beam that multi-beam laser device generates.
Preferably, further including beam splitting arrangement, the beam splitting arrangement is set between the expand device and the galvanometer.
Preferably, being additionally provided with collimator apparatus between the beam splitting arrangement and the galvanometer.
Preferably, further including the processing platform for carrying and moving workpiece to be processed, the processing platform is set to
The light emission side of the lens.
Preferably, the beam splitting arrangement is diffraction optical element or beam dividing lens.
Preferably, the collimator apparatus is collimator.
Preferably, the beam dividing lens are the combination of diffraction grating beam splitter and convex lens.
Preferably, the multi-beam laser device is multichannel solid state laser.
The above-mentioned technical proposal of the utility model has the following advantages compared with prior art:
(1) laser process equipment described in the utility model for parallel processing, including the multiple beam being sequentially arranged are defeated
Laser, expand device, galvanometer and the lens gone out further include the control mechanism for controlling laser and galvanometer;It is described to expand
Device, galvanometer and lens are arranged in a one-to-one correspondence with each light beam that multi-beam laser device generates.Laser sends out multi-beam laser, respectively
Between a output beam independently of one another, the parameter of each output beam can be respectively set, and independently of one another, each light beam passes through successively
Expand device corresponding with each light beam, galvanometer and lens are crossed, product surface is irradiated to and is laser machined, galvanometer can be by manuscript
The characteristics of shape, subregion arranged that pattern to be processed, the process equipment can generate a plurality of parallel laser machining beams, can treat simultaneously
Workpieces processing carries out parallel processing, is suitable for the material cutting for large format, cutting, drilling or mark operation, improves sharp
The efficiency of light processing, can meet large-area laser process operation.
(2) laser process equipment described in the utility model for parallel processing, further includes beam splitting arrangement, the beam splitting
Device is set between expand device and galvanometer, and cooperation beam splitting arrangement can be processed the more multiple beam of acquisition, further
Improve laser processing efficiency.
Description of the drawings
In order to make the content of the utility model be more likely to be clearly understood, below according to the specific implementation of the utility model
Example and in conjunction with attached drawing, the utility model is described in further detail, wherein
Fig. 1 is the structural schematic diagram of the laser process equipment for parallel processing described in the utility model embodiment 1;
Fig. 2 is the structural schematic diagram of the laser process equipment for parallel processing described in the utility model embodiment 2.
Reference numeral is expressed as in figure:1- multi-beam laser devices;2- expand devices;3- galvanometers;4- lens;5- processing is flat
Platform;6- control mechanisms;7- beam splitting arrangements;8- collimator apparatus;9- elements to be processed.
The utility model can be implemented with many different forms, should not be construed as limited to embodiment set forth herein,
On the contrary, providing these embodiments so that the disclosure is thorough and complete, and the design of the utility model is fully conveyed to this
Field technology personnel, the utility model will be defined by the claims.In the accompanying drawings, for clarity, each device can be exaggerated
Size and relative size.In addition, term " comprising ", " having " and their any deformation, it is intended that covering is non-exclusive
Include.
Specific implementation mode
Embodiment
The present embodiment provides a kind of laser process equipments for parallel processing comprising the mostly light being sequentially arranged along light path
The light emission side of beam laser 1, expand device 2, galvanometer 3 and lens 4, the lens 4 is provided with for carrying and in the directions X-Y band
The processing platform 5 that dynamic element 9 to be processed moves, further includes the control mechanism 6 for controlling multi-beam laser device 1 and galvanometer 3, institute
It is computer to state control mechanism 6, and the multi-beam laser device 1 is multichannel solid state laser, is swashed as shown, it can generate multichannel
Light light beam, multiple laser optical paths that the expand device 2 is generated with laser are arranged in a one-to-one correspondence, right after each expand device 2
Galvanometer 3 should be set, lens 4 are correspondingly arranged on after each galvanometer 3.
Wherein, the expand device 2 is beam expanding lens, and the laser beam for being generated to multi-beam laser device 1 expands
Processing.Galvanometer 3 is made of X-Y probes, electric drive amplifier and optical reflecting lens, in the control that control mechanism 6 provides
The deflection of light beam is controlled under signal driving in X-Y plane.The lens 4 are condenser lens, for after 3 deflection of galvanometer processing
Laser beam be focused, the laser beam after focusing is directly irradiated to the workpiece to be processed on processing platform 5, carries out laser
Processing.
Further include collimator apparatus 8 to improve the degree of collimation of laser, the collimator apparatus 8, which is set to, described expands dress
It sets between 2 and galvanometer 3, the collimator apparatus 8 is collimator.
The laser process equipment for parallel processing described in the present embodiment, process equipment can generate multi-stripe laser simultaneously and add
Work light beam can be applied to material cutting, cutting, drilling or the mark operation of large format, improve the efficiency of laser processing, can expire
Sufficient large-area laser process operation.
Embodiment 2
The present embodiment provides a kind of laser process equipments for parallel processing comprising the mostly light being sequentially arranged along light path
The light emission side of beam laser 1, expand device 2, galvanometer 3 and lens 4, the lens 4 is provided with for carrying and in the directions X-Y band
The processing platform 5 that dynamic element 9 to be processed moves, further includes the control mechanism 6 for controlling multi-beam laser device 1 and galvanometer 3, institute
It is computer to state control mechanism 6, and the multi-beam laser device 1 is multichannel solid state laser, can generate multi-path laser light beam.It is described
Multiple laser optical paths that expand device 2 is generated with laser are arranged in a one-to-one correspondence, and galvanometer 3 is correspondingly arranged after each expand device 2,
It is correspondingly arranged on lens 4 after each galvanometer 3.
Wherein, the expand device 2 is beam expanding lens, and the laser beam for being generated to multi-beam laser device 1 expands
Processing.Galvanometer 3 is made of X-Y probes, electric drive amplifier and optical reflecting lens, in the control that control mechanism 6 provides
The deflection of light beam is controlled under signal driving in X-Y plane.The lens 4 are condenser lens, for after 3 deflection of galvanometer processing
Laser beam be focused, the laser beam after focusing is directly irradiated to the workpiece to be processed on processing platform 5, carries out laser
Processing.
Further, further include beam splitting arrangement 7, the beam splitting arrangement 7 is set between the expand device 2 and galvanometer 3,
The beam splitting arrangement 7 be diffraction optical element (DOE) or beam dividing lens, the beam dividing lens be diffraction grating beam dividing lens with it is convex
The combination of lens, the convex lens are set to after diffraction grating beam dividing lens.
In order to improve the degree of collimation of laser, collimator apparatus 8 is additionally provided between the beam splitting arrangement 7 and galvanometer 3, it is described
Collimator apparatus 8 is collimator.
The laser process equipment for parallel processing described in the present embodiment, process equipment can generate multi-stripe laser simultaneously and add
Work light beam can be applied to material cutting, cutting, drilling or the mark operation of large format, improve the efficiency of laser processing, can expire
Sufficient large-area laser process operation.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
Among the protection domain that variation is created still in the utility model.
Claims (8)
1. a kind of laser process equipment for parallel processing, which is characterized in that the multiple beam including being sequentially arranged exported swashs
Light device, expand device, galvanometer and lens further include the control mechanism for controlling laser and galvanometer;The expand device is shaken
Mirror and lens are arranged in a one-to-one correspondence with each light beam that multi-beam laser device generates.
2. the laser process equipment according to claim 1 for parallel processing, which is characterized in that further include beam splitting dress
It sets, the beam splitting arrangement is set between the expand device and the galvanometer.
3. the laser process equipment according to claim 2 for parallel processing, which is characterized in that the beam splitting arrangement with
It is additionally provided with collimator apparatus between the galvanometer.
4. the laser process equipment according to claim 3 for parallel processing, which is characterized in that further include for carrying
With the processing platform of mobile workpiece to be processed, the processing platform is set to the light emission side of the lens.
5. the laser process equipment according to claim 4 for parallel processing, which is characterized in that the beam splitting arrangement is
Diffraction optical element or beam dividing lens.
6. the laser process equipment according to claim 5 for parallel processing, which is characterized in that the collimator apparatus is
Collimator.
7. the laser process equipment according to claim 6 for parallel processing, which is characterized in that the beam dividing lens are
The combination of diffraction grating beam splitter and convex lens.
8. the laser process equipment according to claim 7 for parallel processing, which is characterized in that the multi-beam laser
Device is multichannel solid state laser.
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CN201721849625.0U CN207873385U (en) | 2017-12-26 | 2017-12-26 | A kind of laser process equipment for parallel processing |
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CN201721849625.0U CN207873385U (en) | 2017-12-26 | 2017-12-26 | A kind of laser process equipment for parallel processing |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107876968A (en) * | 2017-12-26 | 2018-04-06 | 英诺激光科技股份有限公司 | A kind of laser process equipment for parallel processing |
CN109894741A (en) * | 2019-03-19 | 2019-06-18 | 苏州麦尔科唯激光机器人有限公司 | A kind of multi-path laser surface processing equipment |
CN113579468A (en) * | 2021-07-28 | 2021-11-02 | 杭州爱新凯科技有限公司 | Linear array type laser 3D printing device and method |
CN114029572A (en) * | 2020-12-09 | 2022-02-11 | 武汉帝尔激光科技股份有限公司 | Welding method and welding device for solar cell |
-
2017
- 2017-12-26 CN CN201721849625.0U patent/CN207873385U/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107876968A (en) * | 2017-12-26 | 2018-04-06 | 英诺激光科技股份有限公司 | A kind of laser process equipment for parallel processing |
CN109894741A (en) * | 2019-03-19 | 2019-06-18 | 苏州麦尔科唯激光机器人有限公司 | A kind of multi-path laser surface processing equipment |
CN114029572A (en) * | 2020-12-09 | 2022-02-11 | 武汉帝尔激光科技股份有限公司 | Welding method and welding device for solar cell |
CN113579468A (en) * | 2021-07-28 | 2021-11-02 | 杭州爱新凯科技有限公司 | Linear array type laser 3D printing device and method |
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