CN102607429A - Method for measuring grating line displacement and measurement device - Google Patents
Method for measuring grating line displacement and measurement device Download PDFInfo
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- CN102607429A CN102607429A CN2012100886422A CN201210088642A CN102607429A CN 102607429 A CN102607429 A CN 102607429A CN 2012100886422 A CN2012100886422 A CN 2012100886422A CN 201210088642 A CN201210088642 A CN 201210088642A CN 102607429 A CN102607429 A CN 102607429A
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Abstract
The invention relates to a method for measuring grating line displacement and a measurement device. The method comprises the following steps: firstly, a scanning unit moves relatively to a scale grating at an set interval in the measurement direction, when the scanning unit moves to a measurement position, a signal processing unit can calculate an original position measurement value, and a laser length-measurement interferometer can obtain a precise position measurement value, so as to obtain measurement error data; and then, grating line scribing error data of the scale grating can be obtained based on an error fitting curve and can be solidified in a position error data storage unit. When in actual measurement, a position error correction unit of the grating line displacement measurement device is used for correcting the original position measurement value calculated by the signal processing unit by adopting the grating line scribing error data in the error data storage unit, so as to obtain a position measurement correction value. According to the method and the measurement device, the grating line scribing error data is used for correcting each original position measurement value obtained by the grating line displacement measurement device, therefore the measurement precision of the grating line displacement measurement device is improved.
Description
Technical field
The present invention relates to a kind of optical grid line displacement measuring method and measurement mechanism.
Background technology
The optical grid line displacement measurement mechanism along with science and technology development, proposes requirements at the higher level to measuring accuracy because the high characteristics of its measuring accuracy are applied to various fields, and therefore, improve measuring accuracy is the direction that people lay siege to always.
The optical grid line displacement measurement mechanism that uses at present comprises: scale grating, scanning element, signal processing unit.Scanning element and scale grating are individually fixed in the movable part of testee and not on the movable member, scanning element can be moved on direction of measurement with respect to the scale grating; Be carved with the coded word of representing positional information on the scale grating measuring direction, the scale grating is as the benchmark of position measurement; Scanning element comprises luminescence unit and light signal receiving element; The directional light that luminescence unit produces with the coded word projection on the scale grating in the light signal receiving element; The light signal receiving element is accomplished the opto-electronic conversion of coded word; Signal processing unit extracts and handles the coded signal that the light signal receiving element forms, and calculates the position of mobile member original measurement value based on coded signal; Original measurement value is exported with digital form through the position data output unit.
The measuring error form of expression of optical grid line displacement measurement mechanism has two kinds: sum of errors total length error in the cycle.Error in the so-called cycle; Promptly be the error in the pitch of increment type grating, influence in the cycle there to be main error: the fluctuation of the collimation of light signal, photo-electric conversion element performance, optical grating pair gap change, the burr of grating line, bending, defective such as damaged and weak diffraction etc.Be measuring accuracy in the raising cycle, often take following measure: cosine and sine signal is carried out interpolation subdividing, the compensation of the phase compensation of cosine and sine signal, DC level drift, method through optics or electronics are filtered higher hamonic wave to improve signal sine property, to improve the collimation of light source etc.Influencing the total length main error is: when the scale grating is made at the coding grid line, because the caused grid line site error in length range of technological reason.In order to reduce this total length error, people's expectation achieves the goal through the delineation technological level of improving the scale grating, but since technological level to improve that required cost is high, difficulty is big etc. former thereby be difficult to realize.
Summary of the invention
The technical matters that the present invention will solve provides a kind of optical grid line displacement measuring method that can improve total length measurement range measuring accuracy.
In order to solve the problems of the technologies described above, optical grid line displacement measuring method of the present invention comprises the steps:
1) scanning element and scale grating are individually fixed in the movable part of testee and not on the movable member, scanning element can move with respect to the scale grating on direction of measurement;
2) scanning element moves to set at interval on direction of measurement with respect to the scale grating; Whenever move to a measuring position; Signal processing unit extracts and handles the coded signal of the light signal receiving element formation of scanning element, and calculates position of mobile member original measurement value N based on coded signal
i(i=0,1,2......n, n are the size of measurement data amount in scale grating length range); Simultaneously, utilize laser length measurement interferometer synchro measure, obtain the accurate measured value N of position of mobile member
i' (i=0,1,2......n, n are the size of measurement data amount in scale grating length range);
3) signal processing unit and the measurement result of laser length measurement interferometer in length range are compared one by one, obtained measuring error data Δ N
i=N
i-N
i', thereby form the measuring error tables of data;
4) carry out Error Curve Fitting based on the measuring error data that form, obtain the error variation track;
5) based on the error matched curve, obtaining with the highest resolution of encoded position signal after segmentation of scale grating is the grid line delineation error information Δ N at interval
j(j=0,1,2......m, the data volume size of m representative in scale grating length range) generate grid line delineation error information table, and data solidified in the position error data storage unit in will showing;
6) during the displacement of actual measurement movable part, the site error amending unit utilizes the grid line delineation error information Δ N in the error information storage unit according to relational expression (1)
jThe position of mobile member original measurement value N that signal processing unit is calculated
jRevise, obtain position of mobile member and measure modified value N
j';
N
j′＝N
j+ΔN
j (1)
。
The scale grating when the grid line of encoding is made, can form the grid line site error as the position reference parts in the optical grid line displacement measurement mechanism in length range, this grid line site error belongs to inherent error or systematic error.The present invention utilizes the optical grid line displacement measurement mechanism of prior art to obtain a plurality of positions original measurement value of movable part in the length range; Utilize laser length measurement interferometer synchro measure to obtain the accurate measured value of position of mobile member corresponding in the length range simultaneously; Thereby obtain the grid line delineation error information in length range, set up grid line delineation error information table.During actual measurement, utilize grid line delineation error information to carry out error correction, thereby improved the measuring accuracy of optical grid line displacement measurement mechanism each position original measurement value that the optical grid line displacement measurement mechanism obtains.
Another technical matters that the present invention will solve provides the high optical grid line displacement measurement mechanism of a kind of length range measuring accuracy.
In order to solve the problems of the technologies described above, optical grid line displacement measurement mechanism of the present invention comprises scale grating, scanning element, signal processing unit, position error data storage unit, site error amending unit; Said scanning element and scale grating are individually fixed in the movable part of testee and not on the movable member, scanning element can be moved on direction of measurement with respect to the scale grating; Scanning element comprises luminescence unit and light signal receiving element; The directional light that luminescence unit produces with the coded word projection on the scale grating in the light signal receiving element; The light signal receiving element is accomplished the opto-electronic conversion of coded word; Signal processing unit extracts and handles the coded signal that the light signal receiving element forms, and calculates position of mobile member original measurement value N based on coded signal
jThe site error amending unit is according to relational expression (1), and the grid line that utilizes the position error data storage unit to deposit is delineated error information to position of mobile member original measurement value N
jRevise, obtain position of mobile member and measure modified value N
j'; Position measurement modified value N
j' export with digital form through the position data output unit;
N
j′＝N
j+ΔN
j (1)
Δ N wherein
jBe grid line delineation error information, j=0,1,2......m, the data volume size of m representative in scale grating length range).
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is done further explain.
Fig. 1 realizes obtaining in the optical grid line displacement measuring method of the present invention the used apparatus structure synoptic diagram of grid line delineation error information.
Fig. 2 is the error information result that the position original measurement value of position measurements and the optical grid line displacement measurement mechanism of laser length measurement interferometer subtracts each other.
Fig. 3 is the data and curves of error information after match of Fig. 2.
Fig. 4 is the structural representation of optical grid line displacement measurement mechanism of the present invention.
Fig. 5 is that the measurement result and the laser length measurement interferometer measurement result of optical grid line displacement measurement mechanism of the present invention compares the graph of errors of back in length range.
Embodiment
As shown in Figure 1, realize obtaining in the optical grid line displacement measuring method of the present invention the used device of grid line delineation error information and comprise scale grating 1, scanning element 2, signal processing unit 3, laser length measurement interferometer 7 and computing machine 8.
If the effective travel of optical grid line displacement measurement mechanism is L=1m, resolution is ζ=0.1 μ m, and reference position is N
0=0 μ m, the grid line cycle of scale grating 1 is 20 μ m.As example, optical grid line displacement measuring method of the present invention is made detailed description below.
Optical grid line displacement measuring method of the present invention comprises concrete following step:
1) scanning element 2 and scale grating 1 are individually fixed on the movable part of testee and the movable member (not shown) not, scanning element 2 can be mobile on direction of measurement x with respect to scale grating 1;
2) scanning element 2 with respect to scale grating 1 on direction of measurement x with N
0Point is reference position, serves as to measure at interval with the 10mm step pitch, whenever moves to a measuring position, and signal processing unit 3 extracts and handle the coded signal that light signal receiving element 2_2 forms, and calculates the position original measurement value N of movable part based on coded signal
i(i=0,1,2......100); Simultaneously, utilize laser length measurement interferometer 7 synchro measures, obtain the accurate measured value N in position of movable part
i' (i=0,1,2......100);
3) utilize MATLAB software in the computing machine 8, signal processing unit 3 and the measurement result of laser length measurement interferometer 7 in length range are compared one by one, obtain measuring error data Δ N
i=N
i-N
i', as shown in Figure 2, thus the measuring error tables of data formed;
4) utilize MATLAB software in the computing machine 8, carry out Error Curve Fitting, obtain the error variation track based on the measuring error data that form, as shown in Figure 3;
5) utilize MATLAB software in the computing machine 8, based on the error matched curve, the grid line that obtains the highest resolution 0.1 μ m of encoded position signal after segmentation with the scale grating and be is interval delineated error information Δ N
j(j=0,1,2......m), generate grid line delineation error information table, data volume expands to 10100000, and data are solidified in position error data storage unit 4 in will showing;
6) during the displacement of actual measurement movable part, site error amending unit 5 utilizes the grid line delineation error information Δ N in the error information storage unit 4 according to relational expression (1)
jThe position original measurement value N of the movable part that signal processing unit 3 is calculated
jRevise, obtain the position measurement modified value N of movable part
j';
N
j′＝N
j+ΔN
j (1)
。
As shown in Figure 4, optical grid line displacement measurement mechanism of the present invention comprises: scale grating 1, scanning element 2, signal processing unit 3, position error data storage unit 4 and site error amending unit 5.Said scanning element 2 and scale grating 1 are individually fixed in the movable part of testee and not on the movable member (not shown), scanning element 2 can be with respect to scale grating 1 along moving on the x direction of measurement.On scale grating 1, be carved with the coded word of representing positional information, scale grating 1 is the position measurement benchmark of scanning element 2.Scanning element 2 comprises: luminescence unit 2_1 and light signal receiving element 2_2; The primary element of luminescence unit 2_1 is a LED; Light signal receiving element 2_2 is a photodiode arrangement; The directional light that luminescence unit 2_1 produces with the coded word projection on the scale grating 1 in light signal receiving element 2_2; Light signal receiving element 2_2 accomplishes the opto-electronic conversion of coded word, and signal processing unit 3 extracts and handle the coded signal that light signal receiving element 2_2 forms, and calculates the position original measurement value N of movable part based on coded signal
jPosition error data storage unit 4 is being deposited grid line delineation error information Δ N
j(j=0,1,2......m, the data volume size of m representative in scale grating length range); The error information Δ N that site error amending unit 5 utilizes in the position error data storage unit 4 of mating with original measurement value Nj
j, to position original measurement value N
jRevise, thus the position measurement modified value N of acquisition movable part
j'=N
j+ Δ N
j, the position measurement modified value of movable part is delivered to follow-up electronic equipment by position data output unit 6.
Described error information storage unit 4 can adopt EEPROM or FLASH device, and site error amending unit 5 and signal processing unit 3 can adopt device programmings such as DSP or FPGA to realize.Position data output unit 7 is a data output interface device.
Utilize optical grid line displacement measurement mechanism of the present invention that the movable part of testee is measured, and then, obtain the graph of errors in scale grating length range with the test of comparing of laser length measurement interferometer, as shown in Figure 5.As can be seen from Figure 5, error is brought up to revised 6 μ m from revising 16 preceding μ m.
The invention is not restricted to above-mentioned embodiment, optical grid line displacement measuring method step 2) in what set can be uniformly-spaced also can be the interval of not waiting; Position of mobile member accurately measured be not limited to adopt the laser length measurement interferometer, can also adopt the optical grid line displacement measurement mechanism precision high instrument of other measuring accuracy, for example based on the optical grid line displacement measurement mechanism of double grating than prior art.Step 3), 4), 5) can also adopt softwares such as other DAS such as VC, VB, Origin to realize.All any modifications of within spirit of the present invention and principle, being done, be equal to replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (2)
1. an optical grid line displacement measuring method is characterized in that comprising the steps:
1) scanning element (2) and scale grating (1) are individually fixed in the movable part of testee and not on the movable member, scanning element (2) can move with respect to scale grating (1) on direction of measurement;
2) scanning element (2) moves to set at interval on direction of measurement with respect to scale grating (1); Whenever move to a measuring position; Signal processing unit (3) extracts and handles the coded signal of light signal receiving element (2_2) formation of scanning element (2), and calculates position of mobile member original measurement value N based on coded signal
i, i=0 wherein, 1,2......n, n are the size of measurement data amount in scale grating length range; Simultaneously, utilize laser length measurement interferometer (7) synchro measure, obtain the accurate measured value N of position of mobile member
i', i=0 wherein, 1,2......n, n are the size of measurement data amount in scale grating length range;
3) signal processing unit (3) and the measurement result of laser length measurement interferometer (7) in length range are compared one by one, obtained measuring error data Δ N
i=N
i-N
i', thereby form the measuring error tables of data;
4) carry out Error Curve Fitting based on the measuring error data that form, obtain the error variation track;
5) based on the error matched curve, obtaining with the highest resolution of encoded position signal after segmentation of scale grating (1) is the grid line delineation error information Δ N at interval
jJ=0 wherein, 1,2......m, the data volume size of m representative in scale grating length range generate grid line delineation error information table, and data solidified in position error data storage unit (4) in will showing;
6) during the displacement of actual measurement movable part, site error amending unit (5) utilizes the grid line delineation error information Δ N in the error information storage unit (4) according to relational expression (1)
jThe position of mobile member original measurement value N that signal processing unit (3) is calculated
jRevise, obtain position of mobile member and measure modified value N
j';
N
j′＝N
j+ΔN
j (1)
。
2. an optical grid line displacement measurement mechanism comprises scale grating (1), scanning element (2), signal processing unit (3); Scanning element (2) and scale grating (1) are individually fixed in the movable part of testee and not on the movable member, scanning element (2) can be moved on direction of measurement with respect to scale grating (1); Scanning element (2) comprises luminescence unit (2_1) and light signal receiving element (2_2); The directional light that luminescence unit (2_1) produces with the coded word projection on the scale grating (1) in light signal receiving element (2_2); Light signal receiving element (2_2) is accomplished the opto-electronic conversion of coded word; Signal processing unit (3) extracts and handles the coded signal that light signal receiving element (2_2) forms, and calculates position of mobile member original measurement value N based on coded signal
jIt is characterized in that also comprising position error data storage unit (4), site error amending unit (5); Site error amending unit (5) is according to relational expression (1), and the grid line that utilizes position error data storage unit (4) to deposit is delineated error information to position of mobile member original measurement value N
jRevise, obtain position of mobile member and measure modified value N
j'; Position measurement modified value N
j' export with digital form through position data output unit (6);
N
j′＝N
j+ΔN
j (1)
Δ N wherein
jBe grid line delineation error information, j=0,1,2......m, the data volume size of m representative in scale grating (1) length range.
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|---|---|---|---|
| CN2012100886422A CN102607429A (en) | 2012-03-30 | 2012-03-30 | Method for measuring grating line displacement and measurement device |
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| CN2012100886422A CN102607429A (en) | 2012-03-30 | 2012-03-30 | Method for measuring grating line displacement and measurement device |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102879012A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院云南天文台 | Astronomical theodolite azimuth code disc score correction method |
| CN104048608A (en) * | 2013-03-11 | 2014-09-17 | 中国原子能科学研究院 | Device for measuring thermal displacement of pipeline |
| CN104237987A (en) * | 2014-08-27 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Grating groove bending automatic control and correcting method |
| CN105865348A (en) * | 2016-05-13 | 2016-08-17 | 中国科学院微电子研究所 | Displacement measurement correction device and method |
| CN104237987B (en) * | 2014-08-27 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of grating line bending automatically controls bearing calibration |
| CN106289058A (en) * | 2016-08-18 | 2017-01-04 | 广东工业大学 | The method that a kind of grating scale location assignment accuracy compensates |
| CN107167083A (en) * | 2017-07-04 | 2017-09-15 | 吉林大学珠海学院 | The error compensation system and method for a kind of grating scale |
| CN107449467A (en) * | 2017-08-29 | 2017-12-08 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on flexible material and thermistor material |
| CN110148873A (en) * | 2019-05-16 | 2019-08-20 | 常州金信诺凤市通信设备有限公司 | Automatic stripping system and its working method with grating measuring and counting |
| CN110398202A (en) * | 2019-08-13 | 2019-11-01 | 华侨大学 | Displacement measuring device and its displacement measurement method based on light field grid |
| CN113340215A (en) * | 2021-06-04 | 2021-09-03 | 工极智能科技（苏州）有限公司 | On-line measurement method for inter-plane offset based on parallel constraint |
| CN113465514A (en) * | 2021-06-28 | 2021-10-01 | 中国科学院长春光学精密机械与物理研究所 | Six-dimensional measuring device and method |
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| CN102879012A (en) * | 2012-09-27 | 2013-01-16 | 中国科学院云南天文台 | Astronomical theodolite azimuth code disc score correction method |
| CN102879012B (en) * | 2012-09-27 | 2015-01-14 | 中国科学院云南天文台 | Astronomical theodolite azimuth code disc score correction method |
| CN104048608A (en) * | 2013-03-11 | 2014-09-17 | 中国原子能科学研究院 | Device for measuring thermal displacement of pipeline |
| CN104237987A (en) * | 2014-08-27 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Grating groove bending automatic control and correcting method |
| CN104237987B (en) * | 2014-08-27 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of grating line bending automatically controls bearing calibration |
| CN105865348A (en) * | 2016-05-13 | 2016-08-17 | 中国科学院微电子研究所 | Displacement measurement correction device and method |
| CN106289058B (en) * | 2016-08-18 | 2019-04-23 | 广东工业大学 | A kind of method of grating scale positioning assignment accuracy compensation |
| CN106289058A (en) * | 2016-08-18 | 2017-01-04 | 广东工业大学 | The method that a kind of grating scale location assignment accuracy compensates |
| CN107167083B (en) * | 2017-07-04 | 2023-08-04 | 吉林大学珠海学院 | Error compensation system and method for grating ruler |
| CN107167083A (en) * | 2017-07-04 | 2017-09-15 | 吉林大学珠海学院 | The error compensation system and method for a kind of grating scale |
| CN107449467A (en) * | 2017-08-29 | 2017-12-08 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on flexible material and thermistor material |
| CN107449467B (en) * | 2017-08-29 | 2018-05-15 | 北京中硕众联智能电子科技有限公司 | Artificial skin and its detection method based on flexible material and thermistor material |
| CN110148873A (en) * | 2019-05-16 | 2019-08-20 | 常州金信诺凤市通信设备有限公司 | Automatic stripping system and its working method with grating measuring and counting |
| CN110148873B (en) * | 2019-05-16 | 2023-09-22 | 常州金信诺凤市通信设备有限公司 | Automatic wire stripping system with grating measurement and counting function and working method thereof |
| CN110398202A (en) * | 2019-08-13 | 2019-11-01 | 华侨大学 | Displacement measuring device and its displacement measurement method based on light field grid |
| CN110398202B (en) * | 2019-08-13 | 2024-02-02 | 华侨大学 | Displacement measuring device based on light field grating and displacement measuring method thereof |
| CN113340215A (en) * | 2021-06-04 | 2021-09-03 | 工极智能科技（苏州）有限公司 | On-line measurement method for inter-plane offset based on parallel constraint |
| CN113340215B (en) * | 2021-06-04 | 2022-11-04 | 工极智能科技（苏州）有限公司 | Plane offset on-line measuring method based on parallel constraint |
| CN113465514B (en) * | 2021-06-28 | 2022-08-16 | 中国科学院长春光学精密机械与物理研究所 | Six-dimensional measuring device and method |
| CN113465514A (en) * | 2021-06-28 | 2021-10-01 | 中国科学院长春光学精密机械与物理研究所 | Six-dimensional measuring device and method |
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Application publication date: 20120725 |