CN105865348A - Displacement measurement correction device and method - Google Patents
Displacement measurement correction device and method Download PDFInfo
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- CN105865348A CN105865348A CN201610317866.4A CN201610317866A CN105865348A CN 105865348 A CN105865348 A CN 105865348A CN 201610317866 A CN201610317866 A CN 201610317866A CN 105865348 A CN105865348 A CN 105865348A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a displacement measurement correction device and method, and belongs to the technical field of measurement. The method comprises the steps that displacement measurement is conducted through a grating displacement sensor, first displacement information is transmitted to a correction unit through an electric control unit, the correction unit acquires error compensation information according to the first displacement information and transmits the error compensation information to a data processing unit to be processed, and then intelligent correction on second displacement information is achieved. Accordingly, the technical effects that the manufacturing and using cost of the grating displacement sensor is effectively reduced while the high precision and the high resolution ratio are guaranteed are achieved.
Description
Technical field
The present invention relates to field of measuring technique, particularly relate to a kind of displacement measurement means for correcting and method.
Background technology
Along with the development of technology, many industrial circles are more and more higher with the requirement of process unit to accurate measurement, receive
The high-resolution of meter level, high precision position shift measurement technology have become as the elder generation that modern industrial technology continues to stride forward
Lead and basis.
What in above-mentioned high-resolution and high precision position shift measurement technology, displacement transducer used is more and more.For
The use of displacement transducer, in theory, as long as the segmentation multiple of subsequent conditioning circuit is obtained with higher point
Resolution.But the increase segmenting multiple in actual applications also can increase error while improving resolution ratio.Specifically
For, as a example by grating displacement sensor, sensor exports the sinusoidal letter that three tunnels phase difference in theory is 120 degree
Number, but actually cannot ensure that the phase difference of three road signals is strictly 120 degree, also cannot ensure signal amplitude phase
Deng.So when segmenting multiple and increasing, its relative error also can increase, it is difficult to realizes sensor accuracy further
Raising.
Further, in order to realize high-resolution and high-precision displacement measurement simultaneously, displacement transducer is producing
Must carry out strict debuging and correcting using the measurement equipment of higher precision as reference during using, this makes
Resolution, the high-precision displacement transducer manufacturing cost and use cost of securing satisfactory grades is the highest, limits high precision displacement and passes
The application scope of sensor.
Summary of the invention
The embodiment of the present invention, by providing a kind of displacement measurement means for correcting and method, solves position in prior art
Displacement sensor, when meeting high-resolution, high precision position shift measurement requirement, needs higher displacement transducer manufacture
With the problem of installation accuracy standard, effectively reduce the manufacturing cost and use cost of displacement transducer.
Embodiments provide a kind of displacement measurement means for correcting, it is characterised in that described device includes:
Grating displacement sensor, described grating displacement sensor is used for carrying out displacement measurement；ECU, described automatically controlled
Unit is for obtaining the first displacement information measured by described grating displacement sensor；Correction unit, described correction
Unit is used for obtaining described first displacement information, and obtains error compensation information according to described first displacement information；
Data processing unit, described data processing unit is for obtaining the second displacement information from grating displacement sensor
With described error compensation information, and survey according to described second displacement information and described error compensation information realization displacement
The correction of amount.
Further, described grating displacement sensor also includes: scale grating；Sensor reading head, described biography
Sensor read head is for obtaining the displacement measurement information of relative motion between described scale grating.
Further, described device also includes: described correction unit is used for obtaining described sensor reading head to institute
State the repeatedly gamut metrical information of scale grating, and use Average Quasi according to described repeatedly gamut metrical information
The method closed obtains system motion trajectory error compensated information；Described data processing unit obtains described system motion
Trajectory error compensated information also carries out difference correction to the second displacement information, it is achieved the school of system motion trajectory error
Just.
Further, described device also includes: described correction unit is used for obtaining described sensor reading head to institute
State the repeatedly gamut metrical information of scale grating, and use frequency spectrum to divide according to described repeatedly gamut metrical information
The method of analysis obtains periodic error frequency；And survey according to described periodic error frequency and described repeatedly gamut
The precision information matching of amount information obtains periodic error calibration curve；Described data processing unit obtains described week
Phase property error correction curve, and according to described periodic error calibration curve and the second displacement information realization system week
The correction of phase property error.
Further, described device also includes: described ECU obtains the offset deviation of institute's displacement sensors
Data；Described correction unit obtains drift error correction data according to described offset deviation data；At described data
Second displacement information is modified realizing system drift error by reason unit according to described drift error correction data
Correction.
The embodiment of the present invention further provides a kind of displacement correction method, and described method includes: obtain grating position
First displacement information of displacement sensor；Error compensation information is obtained according to described first displacement information；According to described
Error compensation information and the correction of the second displacement information realization displacement measurement.
Further, described method is particularly as follows: obtain sensor reading head and survey the repeatedly gamut of scale grating
Amount information；The method of average fit is used to obtain system motion track by mistake according to described repeatedly gamut metrical information
Difference compensated information；According to described system motion trajectory error compensated information, the second displacement information is carried out difference school
Just, it is achieved the correction of system motion trajectory error.
Further, described method is particularly as follows: obtain described sensor reading head to described scale grating repeatedly
Gamut metrical information, uses the method for spectrum analysis to obtain periodically according to described repeatedly gamut metrical information
Error frequency；According to described periodic error frequency and the precision information matching of described repeatedly gamut metrical information
Obtain periodic error calibration curve；According to described periodic error calibration curve and the second displacement information realization system
The correction of system periodic error.
Further, described method is particularly as follows: obtain the offset deviation data of institute's displacement sensors；According to institute
Rheme is moved deviation data and is obtained drift error correction data；According to described drift error correction data to the second displacement
Information is modified realizing the correction of system drift error.
Further, described offset deviation data are described sensor because temperature or STRESS VARIATION or scale become
Shape and the offset deviation data that cause.
The one or more technical schemes provided in the embodiment of the present invention, at least have the following technical effect that or excellent
Point:
1. the present invention carries out displacement measurement by grating displacement sensor, and the first displacement is believed by ECU
Breath sends correction unit to, and correction unit obtains error compensation information according to described first displacement information,
And after data processing unit processes, obtain displacement correction information, and then realize for the second displacement letter
The intelligence correction of breath, and then reached to ensure high accuracy, effectively reduce grating position while high-resolution
The technique effect of displacement sensor manufacturing cost and use cost.
2. the embodiment of the present invention obtains system by the method that repeatedly gamut metrical information uses average fit
Movement locus error compensation information, and and then realize the correction of system motion trajectory error, solve survey
The problem of amount system motion trajectory error, decreases the system motion trajectory error shadow to measurement apparatus
Ring, while furthermore achieved that guarantee high accuracy, high-resolution, effectively reduce grating displacement sensor
The technique effect of manufacturing cost and use cost.
3. the embodiment of the present invention obtains the cycle by the method that repeatedly gamut metrical information uses spectrum analysis
Property error frequency, and according to described periodic error frequency and the essence of described repeatedly omnidistance measurement information
Degree information matching obtains periodic error calibration curve, and real according to described periodic error calibration curve
The correction of existing system periodic error, the problem solving measurement system periodic error, decrease survey
The impact on measurement apparatus of the amount system periodic error, furthermore achieved that guarantee high accuracy, high-resolution
The technique effect of grating displacement sensor manufacturing cost and use cost is effectively reduced while rate.
4. the embodiment of the present invention is by obtaining the offset deviation data of displacement transducer, and according to offset deviation data
Acquisition drift error correction data, and then realize the correction of system drift error, solve measurement system
The problem of drift error, decreases the measurement system drift error impact on measurement apparatus, real further
Effectively reduce grating displacement sensor manufacture and use into while having showed guarantee high accuracy, high-resolution
This technique effect.
5. the embodiment of the present invention provides displacement measurement means for correcting and method reduce the installation requirement of sensor,
Provide cost savings, and be applicable to multiple displacement measuring equipment, have wide range of applications.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, in describing below
Accompanying drawing is only embodiments of the invention, for those of ordinary skill in the art, is not paying creative labor
On the premise of Dong, it is also possible to obtain other accompanying drawing according to the accompanying drawing provided.
Fig. 1 is the structural representation of a kind of displacement measurement means for correcting in the embodiment of the present invention；
Fig. 2 is the schematic flow sheet of a kind of displacement measurement bearing calibration in the embodiment of the present invention；
Fig. 3 is the schematic flow sheet of another displacement measurement bearing calibration in the embodiment of the present invention；
Fig. 4 is the schematic diagram that grating displacement sensor does not carries out the original precision test result of any correction；
Fig. 5 is the signal of the grating displacement sensor accuracy test result after using the correction of system motion trajectory error
Figure；
Fig. 6 is the schematic flow sheet of another displacement measurement bearing calibration in the embodiment of the present invention；
Fig. 7 is that the periodicity simulated based on the periodic error frequency in initial data and original precision data is missed
The schematic diagram of difference calibration curve；
Fig. 8 is that the precision using periodic error calibration curve to obtain after system is carried out periodic error correction is surveyed
The schematic diagram of test result；
Fig. 9 is the schematic flow sheet of a kind of displacement measurement bearing calibration in the embodiment of the present invention.
Detailed description of the invention
For making the purpose of the embodiment of the present invention, technical scheme and advantage clearer, real below in conjunction with the present invention
Execute the accompanying drawing in example, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that institute
The embodiment described is a part of embodiment of the present invention rather than whole embodiments.Based on the reality in the present invention
Execute example, the every other enforcement that those of ordinary skill in the art are obtained under not making creative work premise
Example, broadly falls into the scope of protection of the invention.
[embodiment one]
As described in Figure 1, embodiments providing a kind of displacement measurement means for correcting, this device is used for realizing
The intelligence correction of displacement measurement, improves the precision of displacement measurement.Wherein, described device includes:
Grating displacement sensor 1, described grating displacement sensor 1 is used for carrying out displacement measurement；
Specifically, described grating displacement sensor 1 also includes: scale grating 11 and sensor reading head 12,
Described sensor reading head 12 is for obtaining the displacement measurement letter of relative motion between described scale grating 11
Breath.
ECU 2, described ECU 2 is for obtaining first measured by described grating displacement sensor 1
Displacement information；
Specifically, ECU 2 one aspect is for obtaining from first measured by grating displacement sensor 1
Displacement information, on the other hand, ECU 2 is additionally operable to be controlled described grating displacement sensor 1, real
The action of existing grating displacement sensor 1.
Correction unit 3, described correction unit 3 is used for obtaining described first displacement information, and according to described first
Displacement information obtains error compensation information；
Specifically, during correction unit 3 carries out measurement is calculated and determined based on the first displacement information, error is mended
Repay information.Correction unit 3 also has memory storage and self-learning function simultaneously, can mend based on error repeatedly
The information of repaying carries out oneself's calculating, it is achieved the correction intelligence of unit 3, automatic error compensation information calculate, and then
Realize automatic, intelligent follow-up measurement process is corrected and is diagnosed.
Further, in order to realize correcting the intelligence of unit 3, automation, can be in the way of using logical operation
Determined.Using which kind of logical operation to belong to common technology means for those skilled in the art, the present invention is real
Execute example not to be specifically described.
Such as, correct unit 3 increasing along with number of corrections, logic fortune can be carried out based on multi-group data information
The mode calculating the correction data drawing optimum is processed.Meanwhile, and over time with the accumulation of data, correction
Data are got back suboptimization again.
Data processing unit 4, described data processing unit 4 is used for obtaining described second displacement information and described mistake
Difference compensated information, and according to described second displacement information and described error compensation information realization to described second displacement
The correction of information.
Specifically, data processing unit 4 obtains position by above-mentioned second displacement information and error compensation information
Shift correction information, and by after the output of displacement correction information, it is achieved for the displacement correction of this device, it is achieved that protect
The technology effect of grating displacement sensor 1 manufacturing cost and use cost is effectively reduced while card high accuracy, high-resolution
Really.
Further, described displacement correction information can be sent to again correct unit 3 by data processing unit 4,
After correction unit 3 obtains described displacement correction information, obtain triple motion information further, and according to the 3rd
Shifting information and described displacement correction information acquisition second shift correction information, so can realize the two of correction data
Suboptimization, reaches the purpose of adjustment.
Further, this device can also include memory cell (not shown), and memory cell can be with sum
Connect according to processing unit 4 or correction unit 3, be used for storing data processing unit 4 or correction unit 3 produces
Raw data.
Further, this device can also include comparing unit (not shown), comparing unit and described school
Positive unit 3 connects, and in described comparing unit, storage has threshold data, when obtaining described displacement in correction unit 3
When deviation data deviation threshold data is more, starting and report to the police, to remind user to note, working sensor state is
No normally.
Further, this device can also include displacement transducer model detector unit (not shown), should
Detector unit can connect with data processing unit 4, for the model of detecting position displacement sensor, and relationship type
Number it is sent to data processing unit 4, the data processing unit 4 and then standard of data can be judged according to type information
Really property or control information is further corrected.
[embodiment two]
As in figure 2 it is shown, the embodiment of the present invention additionally provides a kind of displacement measurement bearing calibration, described method includes:
Step 110: obtain the first displacement information of grating displacement sensor；
Step 120: obtain error compensation information according to described first displacement information；
Step 130: according to described error compensation information and the correction of the second displacement information realization displacement measurement.
It should be strongly noted that the core of this programme is to obtain error compensation information according to the first displacement information,
Then the correction to completing displacement measurement after the second displacement compensation for information of the error compensation information is utilized, it is achieved
Embodiment of the present invention purpose.Wherein, the first displacement information may be considered basic data, and according to basic data
Determine corrected parameter, then during concrete measurement subsequently, by corrected parameter to the second displacement information,
The most current measurement data is modified, it is achieved the purpose of the embodiment of the present invention.
Above-mentioned bearing calibration and means for correcting are the embodiments of corresponding relation, and the embodiment of means for correcting has been entered
Go expansion, the most do not do too much elaboration.
[embodiment three]
A kind of displacement measurement means for correcting provided for the embodiment of the present invention and method are in concrete use scene
In be primarily present following three kinds of source of errors:
1. measure system motion trajectory error；
2. measure system periodic error；
3. measure system drift error.
In order to preferably realize effectively reducing while ensureing high accuracy, high-resolution grating displacement sensor manufacture
With the technique effect of use cost, the embodiment of the present invention also provides for the technical scheme of above-mentioned three kinds of errors, specifically interior
Hold as follows:
One, the correction of system motion trajectory error is measured
The correction measuring system motion trajectory error is to read relative to grating displacement sensor due to scale grating
The correction that the systemic alignment error of several, deformation error etc. are carried out.
In order to solve system motion trajectory error, a kind of displacement measurement means for correcting that the embodiment of the present invention provides,
Wherein, described device also includes:
Described correction unit 3 is for obtaining the most complete to described scale grating 11 of described sensor reading head 12
Range metrical information, and use the method for average fit to obtain system fortune according to described repeatedly gamut metrical information
Dynamic trajectory error compensated information；
Described data processing unit 4 obtains described system motion trajectory error compensated information and to the second displacement information
Carry out difference correction, it is achieved the correction of system motion trajectory error.
It should be noted that the method for average fit is the conventional techniques means of those skilled in the art, this area
Technical staff can know how to obtain system motion rail by the method for average fit by the description of the present application
Mark error compensation information.
As it is shown on figure 3, in order to correct system motion trajectory error, a kind of displacement that the embodiment of the present invention provides is surveyed
Amount bearing calibration, the method includes:
Step 210: obtain the sensor reading head 12 repeatedly gamut metrical information to scale grating 11；
Step 220: use the method for average fit to obtain system motion according to described repeatedly gamut metrical information
Trajectory error compensated information；
Step 230: the second displacement information is carried out difference school according to described system motion trajectory error compensated information
Just, it is achieved the correction of system motion trajectory error.
Specifically, in follow-up measurement, use above-mentioned control information that raw measurement data is compensated,
Realize the correction of system motion trajectory error.
From technique effect, as shown in Figure 4 and Figure 5.Wherein, Fig. 4 is that grating displacement sensor does not enters
The original precision test result of any correction of row；Fig. 5 is the grating position after using the correction of system motion trajectory error
Displacement sensor accuracy test result.Be can be seen that through system motion track by the contrast of above-mentioned Fig. 4 and Fig. 5
After error correction, precision measure effect is greatly improved.
Two, the correction of system periodic error is measured
The correction of measurement system periodic error is to the optical element contraposition within grating displacement sensor 1 by mistake
The correction that the displacement measurement periodic error that the reasons such as difference, structural parameters change produce is carried out.
In order to solve measurement system periodic error, a kind of displacement measurement correction dress that the embodiment of the present invention provides
Putting, wherein, described device also includes:
Described correction unit 3 is for obtaining the most complete to described scale grating 11 of described sensor reading head 12
Range metrical information, and use the method for spectrum analysis to obtain periodically according to described repeatedly gamut metrical information
Error frequency；And intend according to the precision information of described periodic error frequency and described repeatedly gamut metrical information
Close and obtain periodic error calibration curve；
Described data processing unit 4 obtains described periodic error calibration curve, and according to described periodic error
Calibration curve and the correction of the second displacement information realization system periodic error.
It should be noted that the method for spectrum analysis is the conventional techniques means of those skilled in the art, this area
Technical staff can know how to obtain periodic error by the method for spectrum analysis by the description of the present application
Calibration curve.
As shown in Figure 6, in order to correct system periodic error, embodiments provide a kind of displacement measurement
Bearing calibration, the method includes:
Step 310: obtain described sensor reading head 12 and the repeatedly gamut of described scale grating 11 is measured
Information；
Step 320: use the method for spectrum analysis to obtain the most by mistake according to described repeatedly gamut metrical information
Difference frequency；
Step 330: according to described periodic error frequency and the original precision of described repeatedly gamut metrical information
Data matching obtains periodic error calibration curve；
Step 340: after described periodic error calibration curve input data processing unit 4, data process
Unit 4 is according to described periodic error calibration curve and the school of the second displacement information realization system periodic error
Just.
Further, during follow-up measurement, after initial data is carried out noise processed, use and described week
The method of phase property checking information difference realizes the correction of system periodic error.
As it is shown in fig. 7, Fig. 7 is that correction unit is based on the periodic error frequency in initial data and original precision
The periodic error calibration curve that data simulate.As shown in Figure 8, Fig. 8 is for using periodically calibration curve pair
The accuracy test result that system obtains after carrying out periodic error correction.Can be seen by the contrast of Fig. 4 and Fig. 8
Going out, after system periodic error corrects, accuracy test result has had the biggest improvement.
Three, the correction of system drift error is measured
The correction measuring system drift error is because temperature, STRESS VARIATION, scale become to grating displacement sensor 1
The correction that the offset deviation that the reasons such as shape cause is carried out.
In order to solve to measure system drift error, embodiments provide a kind of displacement measurement means for correcting,
Wherein, described device also includes:
Described ECU 2 obtains the offset deviation data of institute's displacement sensors 1；
Described correction unit 3 obtains drift error correction data according to described offset deviation data；
Described data processing unit 4 is modified reality according to described drift error correction data to the second displacement information
The correction of existing system drift error.
As it is shown in figure 9, in order to correct system drift error, the embodiment of the present invention additionally provides a kind of displacement measurement
Bearing calibration, the method includes:
Step 410: obtained the offset deviation data of institute's displacement sensors 1 by described ECU 2；
Step 420: described correction unit 3 obtains drift error correction data according to described offset deviation data；
Step 430: described data processing unit 4 according to described drift error correction data to the second displacement information
It is modified realizing the correction of system drift error.
Owing to grating displacement sensor 1 in use produces because of reasons such as temperature, STRESS VARIATION, scale deformation
Raw offset deviation, so after the installation of described grating displacement sensor 1, it is possible to start corresponding measurement
System drift error corrects, and offset deviation data described in cumulative record, and provides basis number for follow-up correction
According to.Certainly, the drift error correction of above-mentioned measurement system can give at different time points according to actual needs
Start, the most do not do concrete restriction.
The one or more technical schemes provided in the embodiment of the present invention, at least have the following technical effect that or excellent
Point:
1. the present invention carries out displacement measurement by grating displacement sensor, and the first displacement is believed by ECU
Breath sends correction unit to, and correction unit obtains error compensation information according to described first displacement information,
And after data processing unit processes, obtain displacement correction information, and then realize for the second displacement letter
The intelligence correction of breath, and then reached to ensure high accuracy, effectively reduce grating position while high-resolution
The technique effect of displacement sensor manufacturing cost and use cost.
2. the embodiment of the present invention obtains system by the method that repeatedly gamut metrical information uses average fit
Movement locus error compensation information, and and then realize the correction of system motion trajectory error, solve survey
The problem of amount system motion trajectory error, decreases the system motion trajectory error shadow to measurement apparatus
Ring, while furthermore achieved that guarantee high accuracy, high-resolution, effectively reduce grating displacement sensor
The technique effect of manufacturing cost and use cost.
3. the embodiment of the present invention obtains the cycle by the method that repeatedly gamut metrical information uses spectrum analysis
Property error frequency, and according to described periodic error frequency and the essence of described repeatedly omnidistance measurement information
Degree information matching obtains periodic error calibration curve, and real according to described periodic error calibration curve
The correction of existing system periodic error, the problem solving measurement system periodic error, decrease survey
The impact on measurement apparatus of the amount system periodic error, furthermore achieved that guarantee high accuracy, high-resolution
The technique effect of grating displacement sensor manufacturing cost and use cost is effectively reduced while rate.
4. the embodiment of the present invention is by obtaining the offset deviation data of displacement transducer, and according to offset deviation data
Acquisition drift error correction data, and then realize the correction of system drift error, solve measurement system
The problem of drift error, decreases the measurement system drift error impact on measurement apparatus, real further
Effectively reduce grating displacement sensor manufacture and use into while having showed guarantee high accuracy, high-resolution
This technique effect.
5. the embodiment of the present invention provides displacement measurement means for correcting and method reduce the installation requirement of sensor,
Provide cost savings, and be applicable to multiple displacement measuring equipment, have wide range of applications.
Although preferred embodiments of the present invention have been described, but those skilled in the art once know substantially
Creative concept, then can make other change and amendment to these embodiments.So, claims are anticipated
It is intended to be construed to include preferred embodiment and fall into all changes and the amendment of the scope of the invention.
Obviously, those skilled in the art can carry out various change and modification without deviating from the present invention to the present invention
Spirit and scope.So, if the present invention these amendment and modification belong to the claims in the present invention and etc.
Within the scope of technology, then the present invention is also intended to comprise these change and modification.
Claims (10)
1. a displacement measurement means for correcting, it is characterised in that described device includes:
Grating displacement sensor, described grating displacement sensor is used for carrying out displacement measurement；
ECU, described ECU is for obtaining the first displacement measured by described grating displacement sensor
Information；
Correction unit, described correction unit is used for obtaining described first displacement information, and according to described first
Move information acquisition error compensation information；
Data processing unit, described data processing unit is for obtaining the second from grating displacement sensor
Shifting information and described error compensation information, and real according to described second displacement information and described error compensation information
The now correction to described second displacement information.
2. displacement measurement means for correcting as claimed in claim 1, it is characterised in that described pattern displacement passes
Sensor also includes:
Scale grating；
Sensor reading head, described sensor reading head is for obtaining relative motion between described scale grating
Displacement measurement information.
3. displacement measurement means for correcting as claimed in claim 2, it is characterised in that described device also includes:
Described correction unit is for obtaining the described sensor reading head repeatedly gamut to described scale grating
Metrical information, and use the method for average fit to obtain system motion according to described repeatedly gamut metrical information
Trajectory error compensated information；
Described data processing unit obtains described system motion trajectory error compensated information and to the second displacement letter
Breath carries out difference correction, it is achieved the correction of system motion trajectory error.
4. displacement measurement means for correcting as claimed in claim 2, it is characterised in that described device also includes:
Described correction unit is for obtaining the described sensor reading head repeatedly gamut to described scale grating
Metrical information, and use the method for spectrum analysis to obtain the most by mistake according to described repeatedly gamut metrical information
Difference frequency；And intend according to the precision information of described periodic error frequency and described repeatedly gamut metrical information
Close and obtain periodic error calibration curve；
Described data processing unit obtains described periodic error calibration curve, and according to described periodic error
Calibration curve and the correction of the second displacement information realization system periodic error.
5. displacement measurement means for correcting as claimed in claim 2, it is characterised in that described device also includes:
Described ECU obtains the offset deviation data of institute's displacement sensors；
Described correction unit obtains drift error correction data according to described offset deviation data；
Second displacement information is modified by described data processing unit according to described drift error correction data
Realize the correction of system drift error.
6. a displacement measurement bearing calibration, it is characterised in that described method includes:
Obtain the first displacement information of grating displacement sensor；
Error compensation information is obtained according to described first displacement information；
According to described error compensation information and the correction of the second displacement information realization displacement measurement.
7. method as claimed in claim 6, it is characterised in that described method particularly as follows:
Obtain the sensor reading head repeatedly gamut metrical information to scale grating；
The method of average fit is used to obtain system motion track by mistake according to described repeatedly gamut metrical information
Difference compensated information；
According to described system motion trajectory error compensated information, the second displacement information is carried out difference correction, it is achieved
The correction of system motion trajectory error.
8. method as claimed in claim 6, it is characterised in that described method particularly as follows:
Obtain the described sensor reading head repeatedly gamut metrical information to described scale grating,
The method using spectrum analysis according to described repeatedly gamut metrical information obtains periodic error frequency；
Precision information matching according to described periodic error frequency and described repeatedly gamut metrical information obtains
Obtain periodic error calibration curve；
According to described periodic error calibration curve and the school of the second displacement information realization system periodic error
Just.
9. method as claimed in claim 6, it is characterised in that described method particularly as follows:
Obtain the offset deviation data of institute's displacement sensors；
Drift error correction data is obtained according to described offset deviation data；
It is modified realizing system drift error to the second displacement information according to described drift error correction data
Correction.
10. method as claimed in claim 9, it is characterised in that described offset deviation data are described sensing
The offset deviation data that device deforms because of temperature or STRESS VARIATION or scale and causes.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107576270A (en) * | 2017-09-04 | 2018-01-12 | 上海理工大学 | A kind of means for correcting of mechanical displacement error |
| CN114485370A (en) * | 2022-03-04 | 2022-05-13 | 湖南远程电子有限公司 | Displacement sensor temperature drift correction method and device and storage medium |
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| CN114485370A (en) * | 2022-03-04 | 2022-05-13 | 湖南远程电子有限公司 | Displacement sensor temperature drift correction method and device and storage medium |
| CN114485370B (en) * | 2022-03-04 | 2024-01-30 | 湖南远程电子有限公司 | Temperature drift correction method and device for displacement sensor and storage medium |
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Application publication date: 20160817 |