CN102601522B - Method for assisting supercritical fluid in micromachining of high polymer materials through femtosecond laser - Google Patents
Method for assisting supercritical fluid in micromachining of high polymer materials through femtosecond laser Download PDFInfo
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- CN102601522B CN102601522B CN201210090526.4A CN201210090526A CN102601522B CN 102601522 B CN102601522 B CN 102601522B CN 201210090526 A CN201210090526 A CN 201210090526A CN 102601522 B CN102601522 B CN 102601522B
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Abstract
The invention belongs to material micromachining, and provides a method for improving laser machining precision. The technical scheme includes that the method for assisting supercritical fluid in micromachining of high polymer materials through femtosecond laser includes the steps: (1) selecting one type of liquid which is non-corrosive to machined materials at normal temperature and under normal pressure, can realize a supercritical state, transmits the used laser and is filled in a container with a laser transmission window; (2) fixing the materials to be machined at the bottom of the container and soaking the materials in the supercritical fluid; and (3) adjusting a laser path to focus the laser on the surfaces of the materials to be machined after penetrating through the window of the container, namely on an interface of the materials and the liquid. When laser energy at a laser focus reaches or exceeds supercritical fluid multi-photon absorption threshold value, the laser reaches a focus of a critical point to generate decomposition reaction, and needed micromachining shapes or structures are formed on the surfaces of the materials along with movement of the laser focus. The method is mainly applied to material micromachining.
Description
Technical field
The invention belongs to material micro-processing technology.Specifically, relate to the auxiliary supercritical fluid of femtosecond laser and carry out macromolecular material micro-processing method.
Background technology
The problem that how to improve micro-machining accuracy more and more causes people's interest, has proposed various micro-processing methods.Wherein laser processing technology is a kind of representative method.The ablation threshold of ultra-short pulse laser is very accurate, therefore, the energy of laser is controlled at and just in time equals or a little more than ablation threshold, only produce ablation higher than the part of ablation threshold, can carry out the submicron fabrication lower than diffraction limit.But Laser Processing utilizes material absorbing laser power generation heat to process, in process, the material of processing district can dissolve, even explosive boiling, this,, at formation heat affected area, the edge of processing district and consolidated structure again, has limited the further raising of Laser Processing quality.
Summary of the invention
The present invention is intended to solution and overcomes the deficiencies in the prior art, the object of the present invention is to provide a kind of method that improves Laser Processing precision.For achieving the above object, the technical scheme that the present invention takes is that the auxiliary supercritical fluid of femtosecond laser carries out macromolecular material micro-processing method, comprises the following steps:
(1) select a kind ofly at normal temperatures and pressures rapidoprint is not had corrosive and can realize the liquid of above-critical state, liquid is to laser-light transparent used, and liquid is full of in the container with optical transmission window;
(2) material to be processed is fixed on to container bottom, is immersed in supercritical fluid;
(3) regulate laser optical path, make laser see through window of container and focus on material surface to be processed, be on the interface of material and liquid, in the time that the laser energy at laser spot place meets or exceeds supercritical fluid Multiphoton Absorbtion threshold value, reach the focus place of critical point, there is decomposition reaction, along with the movement of laser spot, on material surface, produce the micro-machining shape/structure needing.
Adopting near infrared band, pulse width is that 10-500 femtosecond, repetition rate are that 0.1-100MHz, the power femtosecond laser amplifier that is 1-100W is as lasing light emitter, making laser is that 0.1-1.0 object lens focus on material surface to be processed by numerical aperture, regulate laser energy to make on liquid and material interface to be processed, only have the most close focus center place just can reach Multiphoton Absorbtion threshold value, form supercritical fluid, there is solubilizing reaction, realize the processing of macromolecular material micro-nano.
Liquid is the one in water, hydrogen peroxide, methyl alcohol, carbon dioxide.
Technical characterstic of the present invention and effect:
Compared with independent employing laser processing, can reduce heat affected area and solidified structure again, improve machining accuracy.
Accompanying drawing explanation
Fig. 1 is laser intensity scatter chart.
Fig. 2 is the device schematic diagram that the present invention adopts.
In figure: 1 is that Multiphoton Absorbtion threshold value light intensity, 2 is that spot diameter, 3 is that the containers, 7 that laser intensity distribution curve, 4 is top band optical transmission window for femtosecond laser light beam, 5 for object lens, 6 are that material sample, 8 is that supercritical liq, 9 is micro-processing district.
The specific embodiment
The material such as methyl alcohol, water has the Some features of gas and liquid concurrently under high temperature, high pressure conditions, both can accelerate chemical reaction as gas, also other materials of easy dissolving as the liquid, and at this moment they become supercritical fluid.Research shows, the temperature and pressure at laser spot place is far above the critical point of supercritical fluid.Therefore, can utilize this characteristic, material to be processed is placed in supercritical fluid, make Laser Focusing in material surface position to be processed, regulate laser power to make laser spot place supercritical fluid reach above-critical state, dissolve/remove the material at focus place, reach micro-machined object, meanwhile, because the material surface of other positions does not reach/higher than the critical point of supercritical fluid, and maintains the original state.By the scanning of laser spot, just can realize the machining shape of design in advance.Reach and reduce the heat affected area, edge of laser processing zone and the target of consolidated structure again.
The present invention includes following steps:
1. select one (rapidoprint be there is no to corrosive) at normal temperatures and pressures can realize the liquid of above-critical state (for example, water or hydrogen peroxide), and, require laser-light transparent used, install in the container with optical transmission window.
2. material to be processed is fixed on to this container bottom, is immersed in supercritical fluid.
3. laser being seen through to window of container focuses on material surface (interface of material and liquid), in the time that laser energy meets or exceeds supercritical fluid Multiphoton Absorbtion threshold value, there is decomposition reaction in (reaching the region of critical state), along with the movement of laser spot, in material base, produce the micro-machining shape/structure needing.
One embodiment of the present of invention below:
Embodiment 1. is take lucite as raw material.First lucite substrate is fixed at the end of container, then, pours supercritical fluid into container, be filled to optical transmission window.Secondly, adopting near infrared band, pulse width is that 10-500 femtosecond, repetition rate are the femtosecond laser amplifier that 0.1-100MHz, power are 1-100W, making laser is that 0.1-1.0 object lens focus on material (substrate) surface by numerical aperture, regulate laser energy to make (on liquid and material base interface) only have the most close focus center place just can reach Multiphoton Absorbtion threshold value, form supercritical fluid, there is solubilizing reaction, realize the processing of macromolecular material micro-nano.
Supercritical fluid is any in water, hydrogen peroxide, methyl alcohol, carbon dioxide, can obtain good effect.
Claims (2)
1. the auxiliary supercritical fluid of femtosecond laser carries out a macromolecular material micro-processing method, it is characterized in that, comprises the following steps:
(1) select a kind ofly at normal temperatures and pressures rapidoprint is not had corrosive and can realize the liquid of above-critical state, liquid is to laser-light transparent used, and liquid is full of in the container with optical transmission window;
(2) material to be processed is fixed on to container bottom, is immersed in supercritical fluid;
(3) regulate laser optical path, make laser see through window of container and focus on material surface to be processed, be on the interface of material and liquid, in the time that the laser energy at laser spot place meets or exceeds supercritical fluid Multiphoton Absorbtion threshold value, reach the focus place of critical point, there is decomposition reaction, along with the movement of laser spot, on material surface, produce the micro-machining shape/structure needing;
Wherein, adopting near infrared band, pulse width is that 10-500 femtosecond, repetition rate are that 0.1-100MHz, the power femtosecond laser amplifier that is 1-100W is as lasing light emitter, making laser is that 0.1-1.0 object lens focus on material surface to be processed by numerical aperture, regulate laser energy to make on liquid and material interface to be processed, only have the most close focus center place just can reach Multiphoton Absorbtion threshold value, form supercritical fluid, solubilizing reaction occurs, realize the processing of macromolecular material micro/nano level.
2. the auxiliary supercritical fluid of femtosecond laser as claimed in claim 1 carries out macromolecular material micro-processing method, it is characterized in that, liquid is the one in water, hydrogen peroxide, methyl alcohol, carbon dioxide.
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| CN201210090526.4A CN102601522B (en) | 2012-03-30 | 2012-03-30 | Method for assisting supercritical fluid in micromachining of high polymer materials through femtosecond laser |
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| CN201210090526.4A CN102601522B (en) | 2012-03-30 | 2012-03-30 | Method for assisting supercritical fluid in micromachining of high polymer materials through femtosecond laser |
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| CN102601522B true CN102601522B (en) | 2014-05-28 |
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| CN103418848B (en) * | 2013-07-31 | 2015-07-15 | 宁波工程学院 | Cutting technology with micromachining achieved with particulate knife |
| CN103531360B (en) * | 2013-10-08 | 2017-01-25 | 天津大学 | Sintering method for nanoscale semiconductor porous electrode material on flexible substrate |
| CN104923919B (en) * | 2015-06-09 | 2017-03-29 | 江苏大学 | In the method that liquid film transparent material interface prepares loop configuration or dimpling lens |
| CN105254914B (en) * | 2015-11-20 | 2018-10-02 | 天津大学 | A method of improving transparent organism medical macromolecular materials surface hydrophilicity |
| CN106112283B (en) * | 2016-06-24 | 2017-12-26 | 天津大学 | A kind of method for improving laser assisted supercritical fluid processing of high molecular material speed |
| CN109967896A (en) * | 2019-03-27 | 2019-07-05 | 上海理工大学 | The hyperfine cutter device of short-pulse laser induced ultrasonic water flow plasma and method |
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| CN1994653A (en) * | 2006-12-29 | 2007-07-11 | 北京工业大学 | Method for reducing horizontal affection area caused by quasi-molecule laser etching |
| CN201389713Y (en) * | 2009-01-16 | 2010-01-27 | 深圳市木森科技有限公司 | Laser processing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1994653A (en) * | 2006-12-29 | 2007-07-11 | 北京工业大学 | Method for reducing horizontal affection area caused by quasi-molecule laser etching |
| CN201389713Y (en) * | 2009-01-16 | 2010-01-27 | 深圳市木森科技有限公司 | Laser processing device |
Non-Patent Citations (4)
| Title |
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| "飞秒激光在材料微加工中的应用";贾威等;《量子电子学报》;20040430;第21卷(第2期);第194-201页 * |
| 朱佳斌等.飞秒激光与水相互作用的现象与研究进展.《激光与光电子学进展》.2003,第40卷(第11期),第1-4页. |
| 贾威等."飞秒激光在材料微加工中的应用".《量子电子学报》.2004,第21卷(第2期),第194-201页. |
| 飞秒激光与水相互作用的现象与研究进展;朱佳斌等;《激光与光电子学进展》;20031130;第40卷(第11期);第1-4页 * |
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