CN102560339A - 镀膜件及其制备方法 - Google Patents
镀膜件及其制备方法 Download PDFInfo
- Publication number
- CN102560339A CN102560339A CN2010105849789A CN201010584978A CN102560339A CN 102560339 A CN102560339 A CN 102560339A CN 2010105849789 A CN2010105849789 A CN 2010105849789A CN 201010584978 A CN201010584978 A CN 201010584978A CN 102560339 A CN102560339 A CN 102560339A
- Authority
- CN
- China
- Prior art keywords
- hard layer
- sputter
- plated film
- metallic matrix
- chromium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
- Y10T428/12576—Boride, carbide or nitride component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Abstract
Description
Claims (11)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010584978.9A CN102560339B (zh) | 2010-12-13 | 2010-12-13 | 镀膜件及其制备方法 |
US13/169,701 US8592031B2 (en) | 2010-12-13 | 2011-06-27 | Coated article and method for making the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010584978.9A CN102560339B (zh) | 2010-12-13 | 2010-12-13 | 镀膜件及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102560339A true CN102560339A (zh) | 2012-07-11 |
CN102560339B CN102560339B (zh) | 2015-10-14 |
Family
ID=46199687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010584978.9A Active CN102560339B (zh) | 2010-12-13 | 2010-12-13 | 镀膜件及其制备方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8592031B2 (zh) |
CN (1) | CN102560339B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108385059A (zh) * | 2018-01-17 | 2018-08-10 | 维达力实业(深圳)有限公司 | 高亮硬质装饰膜及其制作方法和应用 |
CN110760841A (zh) * | 2019-11-29 | 2020-02-07 | 南昌大学 | 一种铝合金表面非晶纳米晶涂层的制备方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016145533A1 (en) * | 2015-03-17 | 2016-09-22 | Magna International Inc. | Non-metallic coating for steel substrates and method for forming the same |
US11098403B2 (en) * | 2017-02-07 | 2021-08-24 | City University Of Hong Kong | High entropy alloy thin film coating and method for preparing the same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005186184A (ja) * | 2003-12-25 | 2005-07-14 | Ion Engineering Research Institute Corp | ドライ加工用工具 |
CN1978190A (zh) * | 2006-11-29 | 2007-06-13 | 吉林大学 | 一种纳米多层膜材料及提高多层膜结构高温稳定性的方法 |
CN101367286A (zh) * | 2008-04-27 | 2009-02-18 | 宁波工程学院 | 一种高硬度低摩擦系数纳米多层调幅结构镀层及其制备方法 |
CN101910083A (zh) * | 2007-12-27 | 2010-12-08 | 旭硝子株式会社 | 热线反射玻璃及热线反射玻璃的制造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3417907B2 (ja) * | 2000-07-13 | 2003-06-16 | 日立ツール株式会社 | 多層皮膜被覆工具 |
JP2002266697A (ja) * | 2001-03-08 | 2002-09-18 | Ion Engineering Research Institute Corp | 摺動部材およびその製造方法 |
JP3766003B2 (ja) * | 2001-07-13 | 2006-04-12 | 日立ツール株式会社 | 被覆切削工具 |
JP4038448B2 (ja) * | 2003-03-25 | 2008-01-23 | 株式会社神戸製鋼所 | 硬質皮膜 |
-
2010
- 2010-12-13 CN CN201010584978.9A patent/CN102560339B/zh active Active
-
2011
- 2011-06-27 US US13/169,701 patent/US8592031B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005186184A (ja) * | 2003-12-25 | 2005-07-14 | Ion Engineering Research Institute Corp | ドライ加工用工具 |
CN1978190A (zh) * | 2006-11-29 | 2007-06-13 | 吉林大学 | 一种纳米多层膜材料及提高多层膜结构高温稳定性的方法 |
CN101910083A (zh) * | 2007-12-27 | 2010-12-08 | 旭硝子株式会社 | 热线反射玻璃及热线反射玻璃的制造方法 |
CN101367286A (zh) * | 2008-04-27 | 2009-02-18 | 宁波工程学院 | 一种高硬度低摩擦系数纳米多层调幅结构镀层及其制备方法 |
Non-Patent Citations (2)
Title |
---|
E.MARTINEZ,ET. AL.,: "Mechanical properties of nanocomposite and multilayered Cr–Si–N sputtered thin films", 《SURFACE AND COATINGS TECHNOLOGY》 * |
H.Y. LEE: "The synthesis of CrSiN film deposited using magnetron sputtering system", 《SURFACE & COATINGS TECHNOLOGY》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108385059A (zh) * | 2018-01-17 | 2018-08-10 | 维达力实业(深圳)有限公司 | 高亮硬质装饰膜及其制作方法和应用 |
CN110760841A (zh) * | 2019-11-29 | 2020-02-07 | 南昌大学 | 一种铝合金表面非晶纳米晶涂层的制备方法 |
CN110760841B (zh) * | 2019-11-29 | 2021-11-16 | 南昌大学 | 一种铝合金表面非晶纳米晶涂层的制备方法 |
Also Published As
Publication number | Publication date |
---|---|
US8592031B2 (en) | 2013-11-26 |
CN102560339B (zh) | 2015-10-14 |
US20120148866A1 (en) | 2012-06-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191226 Address after: No.11, Weisan Road, Nongfa District, Chang'an Town, Haining City, Jiaxing City, Zhejiang Province Patentee after: Haining hi tech Zone Science and Innovation Center Co., Ltd Address before: 518109, No. two, No. tenth, East Ring Road, Pine Industrial Zone, Longhua Town, Baoan District Town, Shenzhen, Shenzhen, Guangdong, Guangdong 2, China Co-patentee before: Hon Hai Precision Industry Co., Ltd. Patentee before: Hongfujin Precision Industry (Shenzhen) Co., Ltd. |