CN102554466A - 具有多棱镜的激光材料加工装置 - Google Patents

具有多棱镜的激光材料加工装置 Download PDF

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Publication number
CN102554466A
CN102554466A CN2011103781343A CN201110378134A CN102554466A CN 102554466 A CN102554466 A CN 102554466A CN 2011103781343 A CN2011103781343 A CN 2011103781343A CN 201110378134 A CN201110378134 A CN 201110378134A CN 102554466 A CN102554466 A CN 102554466A
Authority
CN
China
Prior art keywords
focus
optical splitter
laser beam
mirror section
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011103781343A
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English (en)
Chinese (zh)
Inventor
M·胡翁克
J·米勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Laser und Systemtechnik GmbH
Original Assignee
Trumpf Laser und Systemtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser und Systemtechnik GmbH filed Critical Trumpf Laser und Systemtechnik GmbH
Publication of CN102554466A publication Critical patent/CN102554466A/zh
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0676Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
CN2011103781343A 2010-11-11 2011-11-11 具有多棱镜的激光材料加工装置 Pending CN102554466A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202010009009.1 2010-11-11
DE202010009009U DE202010009009U1 (de) 2010-11-11 2010-11-11 Vorrichtung zur Lasermaterialbearbeitung mit einem Polygonspiegel

Publications (1)

Publication Number Publication Date
CN102554466A true CN102554466A (zh) 2012-07-11

Family

ID=43571374

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011103781343A Pending CN102554466A (zh) 2010-11-11 2011-11-11 具有多棱镜的激光材料加工装置

Country Status (2)

Country Link
CN (1) CN102554466A (de)
DE (1) DE202010009009U1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103831529A (zh) * 2012-11-20 2014-06-04 三星显示有限公司 激光加工设备
CN108311792A (zh) * 2017-01-17 2018-07-24 宝山钢铁股份有限公司 带钢表面激光刻痕装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3138636A1 (de) * 2015-09-03 2017-03-08 Haas Food Equipment GmbH Anordnung zur reinigung von backoberflächen

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099830A (en) * 1976-12-15 1978-07-11 A. J. Bingley Limited Optical systems including polygonal mirrors rotatable about two axes
US5060668A (en) * 1984-05-16 1991-10-29 B. A. T. Cigaretten-Fabriken Gmbh Device for the production of at least two adjacent rows of perforations in cigarettes and/or filter-lining paper or filter-wrapping paper
CN1601325A (zh) * 2003-09-25 2005-03-30 希尔蒂股份公司 分光器
CN1820888A (zh) * 2006-03-24 2006-08-23 华中科技大学 一种医药用薄型材料的激光在线打孔的方法和装置
CN201152907Y (zh) * 2007-12-06 2008-11-19 武汉华工激光工程有限责任公司 一种激光双点焊分光方法中的聚焦镜
CN101666620A (zh) * 2009-09-27 2010-03-10 合肥工业大学 多光源并行共焦显微探测系统

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099830A (en) * 1976-12-15 1978-07-11 A. J. Bingley Limited Optical systems including polygonal mirrors rotatable about two axes
US5060668A (en) * 1984-05-16 1991-10-29 B. A. T. Cigaretten-Fabriken Gmbh Device for the production of at least two adjacent rows of perforations in cigarettes and/or filter-lining paper or filter-wrapping paper
CN1601325A (zh) * 2003-09-25 2005-03-30 希尔蒂股份公司 分光器
CN1820888A (zh) * 2006-03-24 2006-08-23 华中科技大学 一种医药用薄型材料的激光在线打孔的方法和装置
CN201152907Y (zh) * 2007-12-06 2008-11-19 武汉华工激光工程有限责任公司 一种激光双点焊分光方法中的聚焦镜
CN101666620A (zh) * 2009-09-27 2010-03-10 合肥工业大学 多光源并行共焦显微探测系统

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103831529A (zh) * 2012-11-20 2014-06-04 三星显示有限公司 激光加工设备
US9643280B2 (en) 2012-11-20 2017-05-09 Samsung Display Co., Ltd. Laser processing apparatus
CN108311792A (zh) * 2017-01-17 2018-07-24 宝山钢铁股份有限公司 带钢表面激光刻痕装置

Also Published As

Publication number Publication date
DE202010009009U1 (de) 2011-02-10

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SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20120711