CN102545552B - Matching circuit and large-power pulse power supply using same - Google Patents
Matching circuit and large-power pulse power supply using same Download PDFInfo
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- CN102545552B CN102545552B CN201210044428.7A CN201210044428A CN102545552B CN 102545552 B CN102545552 B CN 102545552B CN 201210044428 A CN201210044428 A CN 201210044428A CN 102545552 B CN102545552 B CN 102545552B
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Abstract
The invention relates to a matching circuit comprising a direct-current power supply module, a signal control module, an isolation voltage transformation module, a switch module and a protection circuit module. Meanwhile, the invention further provides a large-power pulse power supply using the matching circuit, comprising a direct-current power supply module, an inverting module, a high-frequency voltage transformation module, a pulse switch module and the matching circuit. The matching circuit provides a pulse power supply, which is used for being overlapped with a low-voltage large-power pulse power supply or a high-voltage large-power pulse power supply, so that the rising edge of the large-power pulse power supply becomes steep. According to the large-power pulse power supply disclosed by the invention, the input end of the matching circuit is connected with the direct-current power supply module, so as to play the role of a buffering circuit for voltage spike caused by switching off the pulse switch module to reduce impact of electromagnetic interference to a power grid. Furthermore, the output end of the matching circuit is connected between the output end and a load of the pulse switch module, so as to provide the pulse power supply with the steep rising edge to the load.
Description
Technical field
The present invention relates to match circuit, specifically the great power pulse power source of a kind of match circuit and this match circuit of use.
Background technology
A kind of high frequency pulse power supply that is applied to electroplating process that Chinese patent literature CN101667780A proposes, shown in Figure 1, comprise DC bus-bar voltage rectifier, Buck amplitude regulator, two-phase bridge-type inverter, high frequency transformer, hf rectifier and electronic switch, wherein, the DC bus-bar voltage of described DC bus-bar voltage rectifier output is transported to described two-phase bridge-type inverter after described Buck amplitude regulator adjusting amplitude, after regulating duty ratio, described two-phase bridge-type inverter is transported to described high frequency transformer again, then deliver to described hf rectifier, finally deliver to electronic switch by described hf rectifier, the high-frequency electrical pulses source signal that output amplitude and duty ratio are adjustable.Technical scheme in above-mentioned patent documentation provides a kind of high frequency pulse power supply that can regulate voltage magnitude and duty ratio.
In fact, in the time that electronic switch is opened, it is large that its electric current passing through becomes fast, produces very large current transients, makes electronic switch consumed power become large; Electronic switch conducting and Energy Transfer all need the time, and the needed energy Ratios electronic switch of electronic switch conducting is many in the time of stable state, and this slows down the rising edge of the pulse power; The power that the transient switching of electronic switch produces induction reactance, impedance and load makes greatly electric network source voltage drop, affects the stability of electrical network.In the time that electronic switch turn-offs, the voltage at described electronic switch two ends raises fast, produce very large voltage transient, line voltage is fed back, and, there is no load, line voltage is raise, and more than the twice for electronic switch magnitude of voltage when the stable state, very large voltage transient can produce serious humorous wave interference simultaneously, line voltage raises and the stability of serious harmonic wave interference effect electrical network, also affects the normal work of the pulse power.So, in above-mentioned patent documentation, exist pulse power rising edge to relax serious two technical problems of electromagnetic interference.
Summary of the invention
To be solved by this invention is the pulse power slow technical problem that rises in great power pulse power source, a kind of match circuit is provided and uses the great power pulse power source of this match circuit.
For solving the problems of the technologies described above, the technical solution used in the present invention is as follows:
A kind of match circuit, comprising: direct current supply module, comprises the galvanic output of external output; Signal controlling module, comprises square-wave generator, comprises the output of the square-wave pulse signal of exporting preset frequency; Comparing unit, there is two inputs and an output, a described input of described comparing unit is connected with the described output of described square-wave generator, described in another of described comparing unit, input termination the first reference voltage, the described output of described comparing unit is used for exporting control signal; When the level of described square-wave pulse signal is during higher than described the first reference voltage, the described control signal of described comparing unit output is high level; When the level of described square-wave pulse signal is during lower than described the first reference voltage, the described control signal of described comparing unit output is low level; Isolation voltage changing module, front end has two inputs, and rear end has two outputs; The described output of comparing unit described in a described input termination of described isolation voltage changing module, input end grounding described in another of described isolation voltage changing module; Described isolation voltage changing module, for mating the magnitude of voltage of described control signal of described comparing unit output and the magnitude of voltage of the control signal of switch module input, is controlled described switch module and is operated in out or off status; Switch module, front end has an input and a control end, and rear end has an output; The described input of described switch module is connected with the described output of described direct current supply module; The described control end of described switch module is connected with a described output of described isolation voltage changing module; Described in another of the described output of described switch module and described isolation voltage changing module, output is connected, and jointly connects the input of protective circuit module; In the time that the described control signal of the described control end input of described switch module is high level, described switch module conducting; In the time that the described control signal of the described control end input of described switch module is low level, described switch module cut-off; Protective circuit module, not breakdown or burn out for the protection of described switch module, described protective circuit module comprises an input and an output, the described output of described protective circuit is externally exported the pulse power.
In described match circuit, the magnitude of voltage of described the first reference voltage is the 10%-90% of described square-wave pulse signal high level.
In described match circuit, described switch module comprises field-effect transistor, and described field-effect transistor comprises drain electrode, grid and source electrode; Wherein, described drain electrode is as the described input of described switch module, and described grid is as the described control end of described switch module, and described source electrode is as the described output of described switch module.
In described match circuit, described comparing unit comprises the first operational amplifier, and described the first operational amplifier comprises in-phase input end, inverting input and output; The first reference voltage described in the described anti-phase input termination of described the first operational amplifier, the described in-phase input end of described the first operational amplifier connects the described output of described square-wave generator, and the described output of described the first operational amplifier is as the described output of described comparing unit; Between the described output of described square-wave generator and the described in-phase input end of described the first operational amplifier, be also connected with the first resistance, the second resistance, variable resistor, electric capacity and the 3rd diode; The described output of square-wave generator described in one termination of described electric capacity, one end of the first resistance described in another termination of described electric capacity, and be jointly connected with the positive pole of described the 3rd diode; The negative pole of described the 3rd diode is connected with one end of described the second resistance, and jointly connects the described in-phase input end of described the first operational amplifier; The other end ground connection of described the second resistance; The other end of described the first resistance is connected with described variable-resistance one end, described variable-resistance other end ground connection.
In described match circuit, described isolation voltage changing module comprises isolating transformer, described isolating transformer front end has two the described inputs of two inputs as described isolation voltage changing module, and described isolating transformer rear end has two the described outputs of two outputs as described isolation voltage changing module; A described output of described isolating transformer is connected with the described grid of described field-effect transistor by the 3rd resistance, exports the source electrode of field-effect transistor described in termination described in another of described isolating transformer; The described input that described isolating transformer connects described the first operational amplifier is connected described the 3rd resistance described output with described isolating transformer is Same Name of Ends.
In described match circuit, described protective circuit module comprises for the inductance of energy storage, for the first diode of one-way conduction with for the second diode of afterflow, one end of described inductance is connected with the negative pole of described the second diode, as the input of described protective circuit module; The plus earth of described the second diode; The positive pole of the first diode described in another termination of described inductance; The negative pole of described the first diode is as the output of described protective circuit module.
A great power pulse power source that uses described match circuit, comprising: DC power supplier, comprises for exporting galvanic output; Inversion module, comprises an input and an output, and described input is connected with the described output of described DC power supplier, and the described output of described inversion module is used for exporting high frequency pulse power supply; High frequency voltage changing module, for described high frequency pulse power supply is carried out to transformation, rectification and filtering processing, described high frequency voltage changing module comprises an input and an output, described input is connected with the described output of described inversion module, the output output direct current of described high frequency voltage changing module; Pulse switch module, front end has an input and a control end, rear end has an output, described input is connected with the output of described high frequency voltage changing module, the described control end of described pulse switch module is connected with the output of described square-wave generator, the described output of described pulse switch module is connected with load, the output pulse power; In the time that the square-wave pulse signal of described square-wave generator output is high level, described pulse switch module, in conducting state, is exported described direct current; When described square-wave pulse signal is during in trailing edge, described pulse switch module turns to off state by conducting state; In the time that described square-wave pulse signal is low level, described pulse switch module, in off state, is not exported; When described square-wave pulse signal is during in rising edge, described pulse switch module turns to conducting state by off state; Also comprise match circuit, described match circuit comprises: direct current supply module, comprises the galvanic output of external output; Signal controlling module, comprises square-wave generator, comprises the output of the square-wave pulse signal of exporting preset frequency; Comparing unit, there is two inputs and an output, a described input of described comparing unit is connected with the described output of described square-wave generator, described in another of described comparing unit, input termination the first reference voltage, the described output of described comparing unit is used for exporting control signal; When the level of described square-wave pulse signal is during higher than described the first reference voltage, the described control signal of described comparing unit output is high level; When the level of described square-wave pulse signal is during lower than described the first reference voltage, the described control signal of described comparing unit output is low level; Isolation voltage changing module, front end has two inputs, and rear end has two outputs; The described output of comparing unit described in a described input termination of described isolation voltage changing module, input end grounding described in another of described isolation voltage changing module; Described isolation voltage changing module, for mating the magnitude of voltage of described control signal of described comparing unit output and the magnitude of voltage of the control signal of switch module input, is controlled described switch module and is operated in out or off status; Switch module, front end has an input and a control end, and rear end has an output; The described input of described switch module is connected with the described output of described direct current supply module; The described control end of described switch module is connected with a described output of described isolation voltage changing module; Described in another of the described output of described switch module and described isolation voltage changing module, output is connected, and jointly connects the input of protective circuit module; In the time that the described control signal of the described control end input of described switch module is high level, described switch module conducting; In the time that the described control signal of the described control end input of described switch module is low level, described switch module cut-off; Protective circuit module; not breakdown or burn out for the protection of described switch module; described protective circuit module comprises an input and an output; the described output of described protective circuit module is connected between described pulse switch module and described load, with the backward described load supplying of pulse power stack of described pulse switch module output.
In described great power pulse power source, the magnitude of voltage of described the first reference voltage is the 10%-90% of described square-wave pulse signal high level.
In described great power pulse power source, described switch module comprises field-effect transistor, and described field-effect transistor comprises drain electrode, grid and source electrode; Wherein, described drain electrode is as the described input of described switch module, and described grid is as the described control end of described switch module, and described source electrode is as the described output of described switch module.
In described great power pulse power source, described comparing unit comprises the first operational amplifier, and described the first operational amplifier comprises in-phase input end, inverting input and output; The first reference voltage described in the described anti-phase input termination of described the first operational amplifier, the described in-phase input end of described the first operational amplifier connects the described output of described square-wave generator, and the described output of described the first operational amplifier is as the described output of described comparing unit; Between the described output of described square-wave generator and the described in-phase input end of described the first operational amplifier, be also connected with the first resistance, the second resistance, variable resistor, electric capacity and the 3rd diode; The described output of square-wave generator described in one termination of described electric capacity, one end of the first resistance described in another termination of described electric capacity, and be jointly connected with the positive pole of described the 3rd diode; The negative pole of described the 3rd diode is connected with one end of described the second resistance, and jointly connects the described in-phase input end of described the first operational amplifier; The other end ground connection of described the second resistance; The other end of described the first resistance is connected with described variable-resistance one end, described variable-resistance other end ground connection.
In described great power pulse power source, described isolation voltage changing module comprises isolating transformer, described isolating transformer front end has two the described inputs of two inputs as described isolation voltage changing module, and rear end has two the described outputs of two outputs as described isolation voltage changing module; A described output of described isolating transformer is connected with the described grid of described field-effect transistor by the 3rd resistance, exports the source electrode of field-effect transistor described in termination described in another of described isolating transformer; The described input that described isolating transformer connects described the first operational amplifier is connected described the 3rd resistance described output with described isolating transformer is Same Name of Ends.
In described great power pulse power source, described protective circuit module comprises for the inductance of energy storage, for the first diode of one-way conduction with for the second diode of afterflow, one end of described inductance is connected with the negative pole of described the second diode, as the input of described protective circuit module; The plus earth of described the second diode; The positive pole of the first diode described in another termination of described inductance; The negative pole of described the first diode is as the output of described protective circuit module.
Technique scheme of the present invention has the following advantages compared to existing technology:
Match circuit of the present invention provides a kind of pulse power, for superposeing with the low-pressure high-power pulse power or the high-power pulse power, makes the rising edge of the low-pressure high-power pulse power or the high-power pulse power become steep.
Great power pulse power source of the present invention is connected the input of match circuit with described DC power supplier, paired pulses switch module turn-offs the due to voltage spikes causing plays the effect of buffer circuit, reduces the impact of electromagnetic interference to electrical network; The output of described match circuit is connected between the output and load of described pulse switch module, and the pulse power stack of the pulse power of described match circuit output and the output of described pulse switch module, provides rising edge the steep pulse power to load.
Brief description of the drawings
For content of the present invention is more likely to be clearly understood, below according to a particular embodiment of the invention and by reference to the accompanying drawings, the present invention is further detailed explanation, wherein
Fig. 1 is the structural representation of a kind of great power pulse power source embodiment of Chinese patent literature CN101667780A proposition;
Fig. 2 is the structured flowchart of a kind of match circuit of the present invention;
Fig. 3 is the structural representation of match circuit shown in Fig. 2;
Fig. 4 is the structured flowchart that uses the great power pulse power source of match circuit shown in Fig. 2;
Fig. 5 is the structural representation of an embodiment of the protective circuit module of the high-power pulse power;
In figure, Reference numeral is expressed as: 1-direct current supply module; 11-storage battery; 12-the second reference voltage; 13-constant current charge unit; 14-the second operational amplifier; 2-signal controlling module; 21-square-wave generator; 22-comparing unit; 220-the first operational amplifier; 221-the first reference voltage; 222-electric capacity; 223-the first resistance; 224-the 3rd diode; 225-variable resistor; 226-the second resistance; 3-switch module; 31-field-effect transistor; 32-the 3rd resistance; 4-protective circuit module; 41-inductance; 42-the first diode; 43-the second diode; 44-the 4th diode; 45-step-up transformer; 46-the 5th diode; 5-DC power supplier; 6-inversion module; 7-high frequency voltage changing module; 8-pulse switch module; 9-load; 10-isolates voltage changing module; 101-isolating transformer.
Embodiment
Shown in Fig. 2 and Fig. 3, Fig. 2 is the structured flowchart of a kind of match circuit embodiment of the present invention, comprises direct current supply module 1, comprises the galvanic output of external output; Signal controlling module 2, comprising: square-wave generator 21, comprises the output of the square-wave pulse signal of exporting preset frequency; Comparing unit 22, there is two inputs and an output, a described input of described comparing unit 22 is connected with the described output of described square-wave generator 21, described in another of described comparing unit 22, inputting termination magnitude of voltage is the first reference voltage 221 of described square-wave pulse signal high level 10%, and the output of described comparing unit 22 is used for exporting control signal; When the level of described square-wave pulse signal is during higher than described the first reference voltage 221, the described control signal that described comparing unit 22 is exported is high level; When the level of described square-wave pulse signal is during lower than described the first reference voltage 221, the described control signal that described comparing unit 22 is exported is low level; Isolation voltage changing module 10, front end has two inputs, and rear end has two outputs; The described output of comparing unit 22 described in a described input termination of described isolation voltage changing module 10, input end grounding described in another of described isolation voltage changing module 10; The magnitude of voltage of described control signal and the magnitude of voltage of the control signal that switch module 3 is inputted that described isolation voltage changing module 10 is exported for mating described comparing unit 22, control described switch module 3 and be operated in out or off status; Switch module 3, front end has an input and a control end, and rear end has an output; The described input of described switch module 3 is connected with the described output of described direct current supply module 1; The described control end of described switch module 3 is connected with a described output of described isolation voltage changing module 10; Described in another of the described output of described switch module 3 and described isolation voltage changing module 10, output is connected, and jointly connects the input of protective circuit module 4; In the time that the described control signal of the described control end input of described switch module 3 is high level, described switch module 3 conductings; In the time that the described control signal of the described control end input of described switch module 3 is low level, described switch module 3 ends; Protective circuit module 4, not breakdown or burn out for the protection of described switch module 3, described protective circuit module 4 comprises an input and an output, the described output of described protective circuit module 4 is externally exported the pulse power.
Fig. 3 is the structural representation of a kind of match circuit embodiment of the present invention, comprises storage battery 11, for externally exporting direct current; Signal controlling module 2, comprise square-wave generator 21 for exporting square-wave pulse signal and for exporting the first operational amplifier 220 of control signal, described the first operational amplifier 220 has in-phase input end, inverting input and output, described anti-phase input termination voltage is the first reference voltage 221 of described square-wave pulse signal high level 10%, described in-phase input end connects the output of square-wave generator 21, and described output is connected with elementary one end of isolating transformer 101; Between the output of described square-wave generator 21 and the described in-phase input end of described the first operational amplifier 220, be also connected with the first resistance 223, the second resistance 226, variable resistor 225, electric capacity 222 and the 3rd diode 224; The output of square-wave generator 21 described in one termination of described electric capacity 222, one end of the first resistance 223 described in another termination of described electric capacity 222, and be jointly connected with the positive pole of described the 3rd diode 224; The negative pole of described the 3rd diode 224 is connected with one end of described the second resistance 226, and jointly connects the in-phase input end of described the first operational amplifier 220; The other end ground connection of described the second resistance 226; The other end of described the first resistance 223 is connected with one end of described variable resistor 225, the other end ground connection of described variable resistor 225; When the level of described square-wave pulse signal is during higher than described the first reference voltage 221, the control signal that described the first operational amplifier 220 is exported is high level; When the level of described square-wave pulse signal is during lower than described the first reference voltage 221, the control signal that described the first operational amplifier 220 is exported is low level; The output of the first operational amplifier 220 described in an elementary termination of described isolating transformer 101, the other end ground connection that described isolating transformer 101 is elementary; Secondary one end of described isolating transformer 101 connects the grid of field-effect transistor 31 by the 3rd resistance 32, the source electrode of field-effect transistor 31 described in another termination of 101 levels of described isolating transformer; The described input that described isolating transformer 101 connects described the first operational amplifier 220 is Same Name of Ends with the described output that described isolating transformer 101 is connected described the 3rd resistance 32; Field-effect transistor 31, described field-effect transistor 31 comprises drain electrode, grid and source electrode, and wherein, described drain electrode forms the input of described field-effect transistor 31, described grid forms the control end of described field-effect transistor 31, and described source electrode forms the output of described field-effect transistor 31; Described drain electrode is connected with the output of described storage battery 11, described grid is connected by one end of 101 levels of described the 3rd resistance 32 and described isolating transformer, described source electrode is connected with the other end of 101 levels of described isolating transformer, and jointly connects the input of protective circuit module 4; Described isolating transformer 101 mates the magnitude of voltage of described control signal and the magnitude of voltage of the control signal that described field-effect transistor 31 is inputted that described the first operational amplifier 220 is exported, and controls described field-effect transistor 31 and is operated in conducting or cut-off state; In the time that the described control signal of described grid input is high level, described field-effect transistor 31 conductings, in the time that the described control signal of described grid input is low level, described field-effect transistor 31 ends; Protective circuit module 4, comprise for the inductance 41 of energy storage, for the first diode 42 of one-way conduction with for the second diode 43 of current limliting, one end of described inductance 41 is connected with the negative pole of described the second diode 43, as the input of described protective circuit module 4; The plus earth of described the second diode 43; The positive pole of the first diode 42 described in another termination of described inductance 41; The negative pole of described the first diode 42 is as the output of described protective circuit module 4.
Match circuit of the present invention provides a kind of pulse power, for superposeing with the low-pressure high-power pulse power or the high-power pulse power, makes the rising edge of the low-pressure high-power pulse power or the high-power pulse power become steep.
Shown in Figure 4, for the structured flowchart of a kind of low-pressure high-power pulse power that uses match circuit in Fig. 2 of one embodiment of the invention, comprising: DC power supplier 5, comprises for exporting galvanic output, inversion module 6, comprises an input and an output, and described input is connected with described DC power supplier 5 outputs, and the described output of described inversion module 6 is used for exporting high frequency pulse power supply, high frequency voltage changing module 7, comprises an input and an output, and described input is connected with described inversion module 6 outputs, and described high frequency pulse power supply carries out transformation, rectification and filtering processing, the output output direct current of described high frequency voltage changing module 7, pulse switch module 8, front end has an input and a control end, rear end has an output, described input is connected with the output of described high frequency voltage changing module 7, the described control end of described pulse switch module 8 is connected with the output of described square-wave generator 21, the described output of described pulse switch module 8 is connected with load 9, the output pulse power, in the time that described square-wave pulse signal is high level, described pulse switch module 8, in conducting state, is exported described direct current, when described square-wave pulse signal is during in trailing edge, described pulse switch module 8 turns to off state by conducting state, in the time that described square-wave pulse signal is low level, described pulse switch module 8, in off state, is not exported, when described square-wave pulse signal is during in rising edge, described pulse switch module 8 turns to conducting state by off state, match circuit, described match circuit comprises: direct current supply module 1, there is an input and an output, the output of described input termination DC power supplier 5, the drain electrode of field-effect transistor 31 described in the described output termination of described direct current supply module 1, for exporting direct current to described field-effect transistor 31, described direct current supply module 1 comprises constant current charge unit 13, the second operational amplifier 14 and storage battery 11, described constant current charge unit 13 front ends have an input and a control end, rear end has an output, described input is as the input of described direct current supply module 1, the described output of described constant current charge unit 13 is connected with the input of storage battery 11, described the second operational amplifier 14 comprises in-phase input end, inverting input and output, described anti-phase input termination voltage is the second reference voltage 12 of described square-wave pulse signal high level 95%, described in-phase input end connects square-wave generator 21, the output of described the second operational amplifier 14 connect described constant current charge unit 13 for exporting the described control end of control signal, when the level of described square-wave pulse signal is during higher than described the second reference voltage 12, the control signal that described the second operational amplifier 14 is exported is high level, and described constant current charge unit 13, in off position, does not charge to described storage battery 11, when the level of described square-wave pulse signal is during lower than described the second reference voltage 12, the control signal that described the second operational amplifier 14 is exported is low level, and described constant current charge unit 13 is in running order, charges to described storage battery 11, signal controlling module 2, comprise can predefined square-wave pulse signal for output frequency square-wave generator 21 and for exporting the first operational amplifier 220 of control signal, described the first operational amplifier 220 has in-phase input end, inverting input and output, described anti-phase input termination voltage is the first reference voltage 221 of described square-wave pulse signal high level 10%, the described in-phase input end of described the first operational amplifier 220 connects square-wave generator 21, the described output of described the first operational amplifier 220 is connected with elementary one end of described isolating transformer 101, also be connected with the first resistance 223, the second resistance 226, variable resistor 225, electric capacity 222 and the 3rd diode 224 at the output of described square-wave generator 21 and the described in-phase input end of described the first operational amplifier 220, the output of square-wave generator 21 described in one termination of described electric capacity 222, one end of the first resistance 223 described in another termination of described electric capacity 222, and be jointly connected with the positive pole of described the 3rd diode 224, the negative pole of described the 3rd diode 224 is connected with one end of described the second resistance 226, and jointly connects the in-phase input end of described the first operational amplifier 220, the other end ground connection of described the second resistance 226, the other end of described the first resistance 223 is connected with one end of described variable resistor 225, the other end ground connection of described variable resistor 225, when the level of described square-wave pulse signal is during higher than described the first reference voltage 221, the control signal that described the first operational amplifier 220 is exported is high level, when the level of described square-wave pulse signal is during lower than described the first reference voltage 221, the control signal that described the first operational amplifier 220 is exported is low level, the output of the first operational amplifier 220 described in an elementary termination of described isolating transformer 101, the other end ground connection that described isolating transformer 101 is elementary, secondary one end of described isolating transformer 101 connects the grid of field-effect transistor 31 by described the 3rd resistance 32, the source electrode of field-effect transistor 31 described in another termination of 101 levels of described isolating transformer, the described input that described isolating transformer 101 connects described the first operational amplifier 220 is Same Name of Ends with the described output that described isolating transformer 101 is connected described the 3rd resistance 32, field-effect transistor 31, described field-effect transistor 31 has drain electrode, grid and source electrode, and wherein, described drain electrode forms the input of described field-effect transistor 31, described grid forms the control end of described field-effect transistor 31, and described source electrode forms the output of described field-effect transistor 31, described drain electrode is connected with the output of described storage battery 11, described grid is connected by one end of 101 levels of described the 3rd resistance 32 and described isolating transformer, described source electrode is connected with the other end of 101 levels of described isolating transformer, and jointly connects the input of protective circuit module 4, described isolating transformer 101 mates the magnitude of voltage of described control signal and the magnitude of voltage of the control signal that described field-effect transistor 31 is inputted that described the first operational amplifier 220 is exported, and controls described field-effect transistor 31 and is operated in conducting or cut-off state, in the time that the described control signal of described grid input is high level, described field-effect transistor 31 conductings, in the time that the described control signal of described grid input is low level, described field-effect transistor 31 ends, protective circuit module 4, comprise for the inductance 41 of energy storage, for the first diode 42 of one-way conduction with for the second diode 43 of current limliting, one end of described inductance 41 is connected with the negative pole of described the second diode 43, as the input of described protective circuit module 4, jointly connect the source electrode of described field-effect transistor 3, the plus earth of described the second diode 43, the positive pole of the first diode 42 described in another termination of described inductance 41, the negative pole of described the first diode 42 is externally exported the pulse power as the output of described protective circuit module 4.
Great power pulse power source of the present invention is connected the input of match circuit with described DC power supplier 5, the output of match circuit is connected between the output and load 9 of described pulse switch module 8, the pulse power stack that the pulse power of described match circuit output and described pulse switch module 8 are exported, provides rising edge the steep pulse power to load 9.
Described constant current charge unit 13 in the match circuit of great power pulse power source of the present invention is connected with described DC power supplier 5, and paired pulses switch module 8 turn-offs the due to voltage spikes causing plays the effect of buffer circuit, reduces the impact of electromagnetic interference to electrical network.
As a distortion of above-described embodiment, described isolating transformer 101 use photoelectrical couplers and amplifier circuit unit replace, wherein, described photoelectrical coupler comprises an input and an output, described input is connected with the output of described the first operational amplifier 220, the described output of described photoelectrical coupler is connected with the input of described amplifier circuit unit, and the output of described amplifier circuit unit connects the grid of described field-effect transistor 31 by described the 3rd resistance 32; Other same above-described embodiment.Can realize equally object of the present invention, belong to protection scope of the present invention.
As another distortion of above-described embodiment, field-effect transistor 31 in described switch module 3 is replaced by triode, wherein, described triode has base stage, collector and emitter, wherein, described collector electrode is as the input of described triode, and described base stage is as the control end of described triode, and described emitter is as the output of described triode; Described collector electrode is connected with the output of described storage battery 11, described base stage is connected by one end of 101 levels of described the 3rd resistance 32 and described isolating transformer, described emitter is connected with the other end of 101 levels of described isolating transformer, and jointly connects the input of protective circuit module 4; One end of one end that the described isolating transformer 101 that is connected with described the first operational amplifier 220 is elementary and 101 levels of described isolating transformer that are connected with described the 3rd resistance 32 is Same Name of Ends; Other same above-described embodiment.Can realize equally object of the present invention, belong to protection scope of the present invention.
As other embodiments of the invention, the magnitude of voltage of described the first reference voltage 221 is any other numerical value between the 10%-90% of described square-wave pulse signal high level, such as 30%, 50% or 70%, etc.; The steep degree of the pulse power rising edge that those skilled in the art can export is as required selected different numerical value, and numerical value is less, and the rising edge of the described pulse power of great power pulse power source output of the present invention is more steep; Numerical value is larger, and the rising edge of the described pulse power of great power pulse power source output of the present invention is more slow, still among protection scope of the present invention.
Above-described embodiment can be superposed to example with the low-pressure high-power pulse power with the pulse power of match circuit output; The pulse power of the described match circuit output in the present invention also can superpose with the high-power pulse power, makes the rising edge of the high-power pulse power become steep; The pulse power voltage magnitude that the module of protective circuit described in above-described embodiment 4 is exported is the low pressure of several volts to several hectovolts; and high-power pulse power voltage magnitude is very high; for several thousand to several ten thousand volts, the pulse power that the module of protective circuit described in above-described embodiment 4 is exported can not be used for compensating the rising edge of the high-power pulse power.So, a kind of match circuit of exporting high amplitude pulse voltage is provided, this match circuit is exported the rising edge of the high amplitude pulse power compensation high-power pulse power, make the rising edge of the high-power pulse power become steep, specifically as shown in Figure 5, described protective circuit module 4 in described match circuit comprises step-up transformer 45 for boosting, for the 5th diode 46 of rectification with for the 4th diode 44 of afterflow, described step-up transformer 45 front ends have two inputs, and rear end has two outputs; A described input of described step-up transformer 45 is connected with the negative pole of described the 4th diode 44, as the input of described protective circuit module 4, jointly connects the output of described switch module 3; The plus earth of described the 4th diode 44; A described input end grounding of described step-up transformer 45; The positive pole of the 5th diode 46 described in a described output termination of described step-up transformer 45; Output head grounding described in another of described step-up transformer 45; The negative pole of described the 5th diode 46 is externally exported the pulse power as the output of described protective circuit module 4; The described input that described step-up transformer 45 connects described the 4th diode 44 negative poles is Same Name of Ends with the described output that described step-up transformer 45 is connected described the 5th diode 46 positive poles; Same above-described embodiment of other structure in described match circuit except protective circuit module 4 described in said structure; Possess the described match circuit of protective circuit module 4 described in said structure and export the high amplitude pulse power, after the pulse power stack of high-power pulse power output, output rising edge becomes the steep high-power pulse power.
Obviously, above-described embodiment is only for example is clearly described, and the not restriction to execution mode.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here without also giving exhaustive to all execution modes.And the apparent variation of being extended out thus or variation are still among protection scope of the present invention.
Claims (12)
1. a match circuit, is characterized in that, comprising:
Direct current supply module, comprises the galvanic output of external output;
Signal controlling module, comprises
Square-wave generator, comprises the output of the square-wave pulse signal of exporting preset frequency;
Comparing unit, there is two inputs and an output, a described input of described comparing unit is connected with the described output of described square-wave generator, described in another of described comparing unit, input termination the first reference voltage, the described output of described comparing unit is used for exporting control signal; When the level of described square-wave pulse signal is during higher than described the first reference voltage, the described control signal of described comparing unit output is high level; When the level of described square-wave pulse signal is during lower than described the first reference voltage, the described control signal of described comparing unit output is low level;
Isolation voltage changing module, front end has two inputs, and rear end has two outputs; The described output of comparing unit described in a described input termination of described isolation voltage changing module, input end grounding described in another of described isolation voltage changing module; Described isolation voltage changing module, for mating the magnitude of voltage of described control signal of described comparing unit output and the magnitude of voltage of the control signal of switch module input, is controlled described switch module and is operated in out or off status;
Switch module, front end has an input and a control end, and rear end has an output; The described input of described switch module is connected with the described output of described direct current supply module; The described control end of described switch module is connected with a described output of described isolation voltage changing module; Described in another of the described output of described switch module and described isolation voltage changing module, output is connected, and jointly connects the input of protective circuit module; In the time that the described control signal of the described control end input of described switch module is high level, described switch module conducting; In the time that the described control signal of the described control end input of described switch module is low level, described switch module cut-off;
Protective circuit module, not breakdown or burn out for the protection of described switch module, described protective circuit module comprises an input and an output, the described output of described protective circuit is externally exported the pulse power.
2. match circuit according to claim 1, is characterized in that, the magnitude of voltage of described the first reference voltage is the 10%-90% of described square-wave pulse signal high level.
3. match circuit according to claim 2, is characterized in that, described switch module comprises field-effect transistor, and described field-effect transistor comprises drain electrode, grid and source electrode; Wherein, described drain electrode is as the described input of described switch module, and described grid is as the described control end of described switch module, and described source electrode is as the described output of described switch module.
4. match circuit according to claim 3, is characterized in that, described comparing unit comprises the first operational amplifier, and described the first operational amplifier comprises in-phase input end, inverting input and output; The first reference voltage described in the described anti-phase input termination of described the first operational amplifier, the described in-phase input end of described the first operational amplifier connects the described output of described square-wave generator, and the described output of described the first operational amplifier is as the described output of described comparing unit; Between the described output of described square-wave generator and the described in-phase input end of described the first operational amplifier, be also connected with the first resistance, the second resistance, variable resistor, electric capacity and the 3rd diode; The described output of square-wave generator described in one termination of described electric capacity, one end of the first resistance described in another termination of described electric capacity, and be jointly connected with the positive pole of described the 3rd diode; The negative pole of described the 3rd diode is connected with one end of described the second resistance, and jointly connects the described in-phase input end of described the first operational amplifier; The other end ground connection of described the second resistance; The other end of described the first resistance is connected with described variable-resistance one end, described variable-resistance other end ground connection.
5. match circuit according to claim 4, it is characterized in that, described isolation voltage changing module comprises isolating transformer, described isolating transformer front end has two the described inputs of two inputs as described isolation voltage changing module, and described isolating transformer rear end has two the described outputs of two outputs as described isolation voltage changing module; A described output of described isolating transformer is connected with the described grid of described field-effect transistor by the 3rd resistance, exports the source electrode of field-effect transistor described in termination described in another of described isolating transformer; The described input that described isolating transformer connects described the first operational amplifier is connected described the 3rd resistance described output with described isolating transformer is Same Name of Ends.
6. match circuit according to claim 5, it is characterized in that, described protective circuit module comprises for the inductance of energy storage, for the first diode of one-way conduction with for the second diode of afterflow, one end of described inductance is connected with the negative pole of described the second diode, as the input of described protective circuit module; The plus earth of described the second diode; The positive pole of the first diode described in another termination of described inductance; The negative pole of described the first diode is as the output of described protective circuit module.
Use as arbitrary in claim 1-6 as described in the great power pulse power source of match circuit, comprising:
DC power supplier, comprises for exporting galvanic output;
Inversion module, comprises an input and an output, and described input is connected with the described output of described DC power supplier, and the described output of described inversion module is used for exporting high frequency pulse power supply;
High frequency voltage changing module, for described high frequency pulse power supply is carried out to transformation, rectification and filtering processing, described high frequency voltage changing module comprises an input and an output, described input is connected with the described output of described inversion module, the output output direct current of described high frequency voltage changing module;
Pulse switch module, front end has an input and a control end, rear end has an output, described input is connected with the described output of described high frequency voltage changing module, the described control end of described pulse switch module is connected with the described output of described square-wave generator, the described output of described pulse switch module is connected with load, the output pulse power; In the time that the described square-wave pulse signal of described square-wave generator output is high level, described pulse switch module, in conducting state, is exported described direct current; When described square-wave pulse signal is during in trailing edge, described pulse switch module turns to off state by conducting state; In the time that described square-wave pulse signal is low level, described pulse switch module, in off state, is not exported; When described square-wave pulse signal is during in rising edge, described pulse switch module turns to conducting state by off state;
It is characterized in that, also comprise match circuit, described match circuit comprises:
Direct current supply module, comprises the galvanic output of external output;
Signal controlling module, comprises
Square-wave generator, comprises the output of the square-wave pulse signal of exporting preset frequency;
Comparing unit, there is two inputs and an output, a described input of described comparing unit is connected with the described output of described square-wave generator, described in another of described comparing unit, input termination the first reference voltage, the described output of described comparing unit is used for exporting control signal; When the level of described square-wave pulse signal is during higher than described the first reference voltage, the described control signal of described comparing unit output is high level; When the level of described square-wave pulse signal is during lower than described the first reference voltage, the described control signal of described comparing unit output is low level;
Isolation voltage changing module, front end has two inputs, and rear end has two outputs; The described output of comparing unit described in a described input termination of described isolation voltage changing module, input end grounding described in another of described isolation voltage changing module; Described isolation voltage changing module, for mating the magnitude of voltage of described control signal of described comparing unit output and the magnitude of voltage of the control signal of switch module input, is controlled described switch module and is operated in out or off status;
Switch module, front end has an input and a control end, and rear end has an output; The described input of described switch module is connected with the described output of described direct current supply module; The described control end of described switch module is connected with a described output of described isolation voltage changing module; Described in another of the described output of described switch module and described isolation voltage changing module, output is connected, and jointly connects the input of protective circuit module; In the time that the described control signal of the described control end input of described switch module is high level, described switch module conducting; In the time that the described control signal of the described control end input of described switch module is low level, described switch module cut-off;
Protective circuit module; not breakdown or burn out for the protection of described switch module; described protective circuit module comprises an input and an output; the described output of described protective circuit module is connected between described pulse switch module and described load, with the backward described load supplying of pulse power stack of described pulse switch module output.
8. great power pulse power source according to claim 7, is characterized in that, the magnitude of voltage of described the first reference voltage is the 10%-90% of described square-wave pulse signal high level.
9. great power pulse power source according to claim 8, is characterized in that, described switch module comprises field-effect transistor, and described field-effect transistor comprises drain electrode, grid and source electrode; Wherein, described drain electrode is as the described input of described switch module, and described grid is as the described control end of described switch module, and described source electrode is as the described output of described switch module.
10. great power pulse power source according to claim 9, is characterized in that, described comparing unit comprises the first operational amplifier, and described the first operational amplifier comprises in-phase input end, inverting input and output; The first reference voltage described in the described anti-phase input termination of described the first operational amplifier, the described in-phase input end of described the first operational amplifier connects the described output of described square-wave generator, and the described output of described the first operational amplifier is as the described output of described comparing unit; Between the described output of described square-wave generator and the described in-phase input end of described the first operational amplifier, be also connected with the first resistance, the second resistance, variable resistor, electric capacity and the 3rd diode; The described output of square-wave generator described in one termination of described electric capacity, one end of the first resistance described in another termination of described electric capacity, and be jointly connected with the positive pole of described the 3rd diode; The negative pole of described the 3rd diode is connected with one end of described the second resistance, and jointly connects the described in-phase input end of described the first operational amplifier; The other end ground connection of described the second resistance; The other end of described the first resistance is connected with described variable-resistance one end, described variable-resistance other end ground connection.
11. great power pulse power sources according to claim 10, it is characterized in that, described isolation voltage changing module comprises isolating transformer, described isolating transformer front end has two the described inputs of two inputs as described isolation voltage changing module, and rear end has two the described outputs of two outputs as described isolation voltage changing module; A described output of described isolating transformer is connected with the described grid of described field-effect transistor by the 3rd resistance, exports the source electrode of field-effect transistor described in termination described in another of described isolating transformer; The described input that described isolating transformer connects described the first operational amplifier is connected described the 3rd resistance described output with described isolating transformer is Same Name of Ends.
12. great power pulse power sources according to claim 11, it is characterized in that, described protective circuit module comprises for the inductance of energy storage, for the first diode of one-way conduction with for the second diode of afterflow, one end of described inductance is connected with the negative pole of described the second diode, as the input of described protective circuit module; The plus earth of described the second diode; The positive pole of the first diode described in another termination of described inductance; The negative pole of described the first diode is as the output of described protective circuit module.
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| CN103441698B (en) * | 2013-08-20 | 2015-10-28 | 东莞市力与源电器设备有限公司 | A kind of control method of positive and negative commutating pulse power supply output waveform |
| CN105305868B (en) * | 2015-11-30 | 2019-01-11 | 深圳市皓文电子有限公司 | The device of isopulse electric current is provided for load |
| CN109067383A (en) * | 2018-07-12 | 2018-12-21 | 坎德拉（深圳）科技创新有限公司 | Pulse signal processing circuit and power supply circuit |
| CN108988830B (en) * | 2018-08-03 | 2022-05-03 | 中国电子科技集团公司第二十四研究所 | Pulse signal generating circuit capable of programming edge time |
| CN112511136B (en) * | 2020-11-27 | 2023-03-17 | 上海空间电源研究所 | High-voltage pulse magnetron modulation power supply |
| CN115726017B (en) * | 2022-11-24 | 2024-05-31 | 上海博取仪器有限公司 | Electroplating device of four-ring conductivity electrode |
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| CN101577480A (en) * | 2008-05-09 | 2009-11-11 | 通嘉科技股份有限公司 | Restricting signal generator, pulse wave width modulation control circuit and control method thereof |
| CN101667780A (en) * | 2009-10-26 | 2010-03-10 | 中冶连铸技术工程股份有限公司 | High frequency switching power supply applied to electroplating process |
| CN202444406U (en) * | 2012-02-23 | 2012-09-19 | 崔聪林 | Matching circuit and high-power pulse power supply using the same |
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| CN101577480A (en) * | 2008-05-09 | 2009-11-11 | 通嘉科技股份有限公司 | Restricting signal generator, pulse wave width modulation control circuit and control method thereof |
| CN101667780A (en) * | 2009-10-26 | 2010-03-10 | 中冶连铸技术工程股份有限公司 | High frequency switching power supply applied to electroplating process |
| CN202444406U (en) * | 2012-02-23 | 2012-09-19 | 崔聪林 | Matching circuit and high-power pulse power supply using the same |
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