CN102512002B - Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements - Google Patents
Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements Download PDFInfo
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- CN102512002B CN102512002B CN201110416916.1A CN201110416916A CN102512002B CN 102512002 B CN102512002 B CN 102512002B CN 201110416916 A CN201110416916 A CN 201110416916A CN 102512002 B CN102512002 B CN 102512002B
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Abstract
An ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements comprises an ultraviolet ozone generating module, an air-conditioning module, a gas managing module and an intelligent unit. The ultraviolet ozone generating module cleans the vacuum ultraviolet optical elements; the air-conditioning module controls the temperature and the humidity in the drying cabinet in a vacuum ultraviolet optical element cleaning/storing process; the gas managing module manages gas in the drying cabinet in the vacuum ultraviolet optical element cleaning and storing process; and the intelligent unit controls the total vacuum ultraviolet optical element cleaning/storing process. Hydrocarbon pollutants on the vacuum ultraviolet optical elements can be removed fast, adverse effects to optical performances of the vacuum ultraviolet optical elements due to water vapor are stopped, the problem that the performances of the vacuum ultraviolet optical elements are degraded due to an improper storage mode is effectively avoided, and the ultraviolet ozone drying cabinet is particularly applicable to cleaning and storing the vacuum ultraviolet optical elements.
Description
Technical field
The present invention relates to a kind of optical element sample cabinet, specifically a kind of ultraviolet ozone drying cabinet that cleans and deposit for VUV optics element.
Background technology
Along with the not only development of laser technology, the VUV LASER light source that excimer laser, free electron laser and all solid state vacuum ultraviolet laser be representative of take occurs in succession.These VUV LASER light sources have boundless application prospect in fields such as microelectronic component manufacture, micromachined, nano material processing and biomedical engineerings.The fast development of VUV LASER light source with and apply widely high performance VUV wave band optical element proposed to demand urgently.
Conventionally, adopt VUV wave band all-dielectric optically prepared by physical gas-phase deposition to learn film, the gather density of rete will be lower than bulk material (M.Bischoff, M.Sode, D.
et.al., Metal fluori de coatings prepared by ion-assisted deposition, SPIE, 7101,71010L-1 (2008)).When optical thin film is exposed in air, be subject to the pollutions such as steam and hydrocarbon radical compound, thereby affect performance and the stability (B.-C.Li thereof of VUV wave band dielectric optical thin film, D.-W.Lin, Y.-L.Han et al., Anti-Reflective Fluoride Coatings for Widely Tunable Deep-Ultraviolet Diode-Pumped Solid-State Laser Applications, CHIN.PHYS.LETT., 27,044201-1 (2010)).Aluminium is unique metal material that VUV wave band has high reflectance that is applicable to; but no matter be media protection type or medium reinforced aluminium film; along with the resting period is elongated; they all have aging phenomenon (M.Yang at the reflectivity of VUV wave band; A.Gatto; and N.Kaiser; Highly reflecting aluminum-propected optical coatings for the vacuum-ultraviolet spectral range; Appl.Opt.; 45 (1), 178 (2006)).The reflectivity of media protection type and medium reinforced aluminium film is aging is mainly that oxygen and steam in storage environment causes; but be not subject to nitrogen in storage environment and impact (the M.Fern á ndez-Perea of inert gas; J.A.Azn á rez and J.Calvo-Angos; Far ultraviolet reflectance variation of MgF2-Protected aluminum films under controlled exposure to the main components of the atmosphere; Thin Solid films; 497,249 (2006)).How eliminating VUV optics element and be subject to the pollution of steam and hydrocarbon radical compound and slow down optical element performance and degenerate, has been that VUV optics element clean/is deposited the problem that needs solution.
Be generally used for the drying cupboard of depositing optical element, although can effectively dehumidify, reduce the impact (Zhang Baoji that VUV optics element is subject to steam, Chinese invention patent " dry sample cabinet ", application number: 01219348.8, Granted publication number: CN 2472583Y, Granted publication day: on January 23rd, 2002), but can not avoid the pollution of hydrocarbon radical compound to VUV optics element, can not slow down the degeneration of VUV optics element function.As a rule VUV optics element function degeneration is irreversible process, once VUV optics element is contaminated, is difficult to return to initial performance.Therefore, for VUV optics element, reasonably cleaning and effectively storage no less important.Current, use more uviol lamp clean vacuum ultraviolet optics element, only utilized UV ozone cleaning function, although can effectively avoid the pollution of hydrocarbon radical compound to VUV optics element, but can not reduce or eliminate the impact that steam and temperature fluctuate widely on VUV optics element function, thereby be difficult to realize long-time stable the depositing of VUV optics element.In addition, during uviol lamp clean vacuum ultraviolet optics element, will produce ozone, ozone has extremely strong oxidability, suck micro-ozone (0.1-1ppm) and can make the symptoms such as people feels dizziness, order is puckery and have sore throat, therefore removing ozone is also the problem that needs consideration in uviol lamp cleaning course.
Summary of the invention
The technical problem to be solved in the present invention: overcome the deficiencies in the prior art, a kind of ultraviolet ozone drying cabinet that cleans and deposit for VUV optics element is provided, can remove fast hydrocarbon pollutant on VUV optics element, and stop the adverse effect of steam to VUV optics element optical property, effectively avoid the VUV optics element function causing because storage mode is improper to degenerate.
Technical solution of the present invention is, a kind of and ultraviolet ozone drying cabinet of depositing clean for VUV optics element, comprises UV ozone generation module, Climate Control Module, gas delivery module and intelligent cell, wherein:
UV ozone generation module is mainly comprised of ultraviolet source; Described ultraviolet source is the laser of mercury lamp, Excimer UV lamp or the ultraviolet wavelength of vitreous silica or other ultraviolet optical material (calcirm-fluoride, magnesium fluoride etc.) overcoat, and radiation wavelength is lower than 300nm; UV ozone generation module is controlled by intelligent cell, by intelligent cell, sets the ultraviolet light irradiation time, and starts UV ozone generation module and reach the cleaning to VUV optics element;
Climate Control Module, is comprised of air conditioner and temperature and moisture sensors; Described air conditioner has controls function to the temperature and humidity in ultraviolet ozone drying cabinet; Climate Control Module is controlled by intelligent cell, by intelligent cell, sets the temperature and humidity in ultraviolet ozone drying cabinet, and starts the control that Climate Control Module is realized temperature/humidity in ultraviolet ozone drying cabinet;
Gas delivery module, mainly contains gas control assembly and exhaust gas processing device; Described gas control assembly, for the flow velocity of control inputs or delivery outlet gas, is selected the different types of gas of input according to user's needs in work; Described exhaust gas processing device is for removing waste gas, the especially ozone producing in ultraviolet ozone drying cabinet; Gas delivery module is controlled by intelligent cell, by intelligent cell, set parameters such as inputing or outputing implication rate of flow of fluid and tail gas prolongation processing time, and start gas delivery module, complete VUV optics element and clean and deposit the interior gas I/O of drying cupboard and waste scavenging function in process;
Intelligent cell is the core of ultraviolet ozone drying cabinet, controls all processes that VUV optics element clean/is deposited.
When described ultraviolet ozone drying cabinet is placed on controlled temperature, lustration class greater than or equal to the clean-room environment of 10000 grades, can not configure temperature sensor in Climate Control Module (2) and relevant temperature control unit.
Described UV ozone generation module and Climate Control Module can be used alone or in combination, and realize respectively the UV ozone cleaning of VUV optics element, dry depositing are cleaned with UV ozone and dry depositing.
Described gas delivery module also can directly be connected with vacuum system, realizes VUV optics element cleaning and depositing under vacuum environment.
When described ultraviolet ozone drying cabinet is placed in non-enclosed experiment room environmental, can not configure the exhaust gas processing device in gas delivery module.
Principle of the present invention is: UV ozone cleaning is a kind of by UV-irradiation optical element, decompose and be adsorbed on hydrocarbon pollutant on VUV optics element, reduce the optical loss of VUV optics element, and improve the effective technical way of other performances of VUV optics element.This technology is to remove by photosensitized oxidation process the hydrocarbon pollutant being adsorbed on VUV optics element.When the hydrocarbon contaminant molecule being adsorbed on VUV optics element absorbs mercury lamp, the Excimer UV lamp by vitreous silica or other ultraviolet optical material (calcirm-fluoride, magnesium fluoride etc.) overcoat, or during the ultraviolet light that the laser of ultraviolet wavelength sends, contaminant molecule will be excited or dissociate.Meanwhile, oxygen molecule in VUV optics element storage environment is subject to mercury lamp, the Excimer UV lamp of vitreous silica or other ultraviolet optical material (calcirm-fluoride, magnesium fluoride etc.) overcoat, or the ultraviolet excitation that the laser of ultraviolet wavelength sends, will generate oxygen atom and ozone by the direction of equation (1).Finally, the hydrocarbon contaminant molecule that is excited or dissociates will react with oxygen atom simple, the volatile molecule of generation form, as carbon monoxide, carbon dioxide and steam etc.Thereby reach clean vacuum ultraviolet optics element, reduce the object of VUV optics element optical loss.
At VUV optics element internal, the impurity in substrate and/or rete and/or defect also can make the absorption loss of VUV optics element increase, and optical property declines.When adopting UV-irradiation, impurity in ultraviolet light and VUV optics element internal or rete and/or defect interact, can effectively reduce impurity and/or defect concentration in substrate and/or rete, the absorption loss of VUV optics element internal is reduced, and the optical property of VUV optics element improves.
In addition, in conjunction with air conditioner, control the temperature/humidity in drying cupboard, consider nitrogen and inert gas and vacuum environment on the performance of VUV optics element without impact, also can select to be filled with nitrogen or inert gas or in vacuum environment, deposit VUV optics element.Thus, ultraviolet ozone drying cabinet can be avoided steam and the adverse effect of hydrocarbon radical compound to VUV optics element function, can effectively avoid again the VUV optics element function causing because storage mode is improper to degenerate.In addition,, for avoiding the injury of ozone to human body, ultraviolet ozone drying cabinet can option and installment exhaust gas processing device.
Alternative device with deozonize function, mainly contains low pressure mercury lamp, deozonize sheet and the ozone-removing filtering net etc. of high quartzy overcoat.The principle of the mercury lamp deozonize of high quartzy overcoat is to utilize ultraviolet light that the low pressure mercury lamp of high quartzy overcoat sends according to by the direction of equation (2), ozone decomposed being generated to oxygen atom and oxygen, simultaneously because this lamp is used high quartzy overcoat, the ultraviolet light of the shorter wavelength that mercury lamp sends will be absorbed by the quartzy overcoat of height, thereby avoid the oxygen molecule in environment to continue to generate oxygen atom and ozone by the direction of equation (1).Deozonize sheet and ozone-removing filtering net are to utilize the mode of chemical reaction to remove ozone.
The present invention compared with prior art tool has the following advantages:
(1) the present invention can remove hydrocarbon pollutant on VUV optics element fast, and stop the adverse effect of steam to VUV optics element optical property, effectively avoid the VUV optics element function causing because storage mode is improper to degenerate, be particularly useful for clean/depositing of VUV optics element.
(2) the present invention uses Climate Control Module, for controlling the temperature/humidity in drying cupboard, thereby the impact that reduction or elimination steam and temperature fluctuate widely on optical element performance effectively, avoids the VUV optics element function causing because storage mode is improper to degenerate effectively.Meanwhile, the present invention also can do the environmental stability experiment use of VUV optics element function.
(3) the present invention deposits UV ozone cleaning function technology and is combined with dry, and both also can use separately, flexible.
Accompanying drawing explanation
Fig. 1 is theory diagram of the present invention;
Fig. 2 is Whole Work Flow figure of the present invention;
Fig. 3 is the workflow diagram of overall observing and controlling process of the present invention.
The specific embodiment
As shown in Figure 1, the present invention includes UV ozone generation module 1, Climate Control Module 2, gas delivery module 3 and intelligent cell 4, wherein: UV ozone generation module 1 is mainly comprised of ultraviolet source; Ultraviolet source is mercury lamp, Excimer UV lamp or the VUV/deep ultraviolet laser of vitreous silica or other ultraviolet optical materials (calcirm-fluoride, magnesium fluoride etc.) overcoat, and radiation wavelength is lower than 300nm; UV ozone generation module 1 is controlled by intelligent cell 4.Climate Control Module 2, is comprised of air conditioner and temperature/humidity sensor; Air conditioner has controls function to the temperature/humidity in ultraviolet ozone drying cabinet; Climate Control Module 2 is controlled by intelligent cell 4.Gas delivery module 3, mainly contains gas control assembly and exhaust gas processing device; Gas delivery module 3 is also controlled by intelligent cell 4.Intelligent cell 4 is cores of ultraviolet ozone drying cabinet, controls all processes that VUV optics element clean/is deposited.
While using ultraviolet ozone drying cabinet clean/to deposit VUV optics element, first VUV optics element is carried out to pre-clean processes.If VUV optics element surface is only attached with the pollutant of the easy-clears such as dust, adopt High Purity Nitrogen air gun hydro-peening VUV optics element surface; If VUV optics element surface still has other pollutant, with alcohol, rinse VUV optics element, and surperficial with the cotton mass cleaning element of alcohol-pickled mistake, finally with high pure nitrogen, dry up.Then, the VUV optics element after pre-clean processes is put into ultraviolet ozone drying cabinet, and select as required gas input port connect gaseous species or be connected with vacuum system, wait for the clean/deposit operation to VUV optics element.
Figure 2 shows that the Whole Work Flow of ultraviolet ozone drying cabinet.That intelligent cell 4 sends is clean/and deposit start-up mode, clean start-up mode and deposit three kinds of start-up mode requests of start-up mode.Intelligent cell 4 starts the operating system subsequently, after os starting completes, control is delivered to the overall measurement and control program on intelligent cell 4.Overall measurement and control program is realized the cleaning to VUV optics element for coordinating the modules of ultraviolet ozone drying cabinet, and the temperature/humidity of storage environment is controlled, and the function such as gas delivery.First overall measurement and control program obtains start-up mode from intelligent cell 4, clean/deposit start-up mode, clean start-up mode or deposit start-up mode, then according to start-up mode, carry out control command, to UV ozone generation module 1, Climate Control Module 2 and gas administration module 3, send startup command.When UV ozone generation module 1 starts, ultraviolet ozone drying cabinet, by the ultraviolet light irradiation time parameter of setting according to intelligent cell 4, is done regularly UV ozone cleaning to VUV optics element; When if Climate Control Module 2 starts, ultraviolet ozone drying cabinet, by temperature/humidity parameter in the cabinet of setting according to intelligent cell 4, is controlled the temperature/humidity in cabinet; When if gas delivery module 3 starts, the parameters such as the gas flow rate of the I/O port that ultraviolet ozone drying cabinet is set according to intelligent cell 4 and prolongation exhaust gas processing device shut-in time, complete VUV optics element and clean/deposit the interior gas delivery of drying cupboard in process.In addition, when ultraviolet ozone drying cabinet is placed on the clean-room environment of temperature/humidity-controlled, can not configure corresponding detection and control module in Climate Control Module 2.
As shown in Figure 3, after overall measurement and control program operation, carry out the initialization of each module, obtain the status information of each module, and analyze the start-up mode of ultraviolet ozone drying cabinet.When starting with clean/storage mode, open UV ozone module 1, Climate Control Module 2 and gas administration module 3, control the temperature/humidity in ultraviolet ozone drying cabinet, management gas, and start timing and carry out UV ozone cleaning, judged whether clean up task, the clean up task here comprises that according to the ultra violet lamp time of setting and vent gas treatment delay time parameter, completing UV ozone cleans and tail gas treating function, if do not complete clean up task, continues UV ozone clean; If complete clean up task, close uviol lamp, and further judge whether to finish the work, if do not finish the work, ultraviolet ozone drying cabinet will keep current state; If finish the work, quit a program, ultraviolet ozone drying cabinet is by standby.When starting with cleaning mode, open UV ozone module 1 and gas administration module 3, the gas in management ultraviolet ozone drying cabinet, start timing and carry out UV ozone cleaning, judge whether clean up task, if do not complete clean up task, continued UV ozone clean; If complete cleanly, close uviol lamp, and further judge whether to finish the work, if do not finish the work, ultraviolet ozone drying cabinet will keep current state; If finish the work, quit a program, ultraviolet ozone drying cabinet is by standby.When starting with storage mode, open Climate Control Module 2 and gas administration module 3, to control the temperature/humidity in ultraviolet ozone drying cabinet, and manage gas, under this pattern, exhaust gas processing device is not opened.Further judge whether to finish the work, if do not finish the work, ultraviolet ozone drying cabinet will keep current state; If finish the work, quit a program, ultraviolet ozone drying cabinet is by standby.
Claims (5)
1. a ultraviolet ozone drying cabinet that cleans and deposit for VUV optics element, is characterized in that: comprise UV ozone generation module (1), Climate Control Module (2), gas delivery module (3) and intelligent cell (4), wherein:
UV ozone generation module (1), mainly consists of ultraviolet source; Described ultraviolet source is the laser of mercury lamp, Excimer UV lamp or the ultraviolet wavelength of vitreous silica or other ultraviolet optical material overcoat, and radiation wavelength is lower than 300nm; Described UV ozone generation module (1) is controlled by intelligent cell (4), by intelligent cell (4), sets the ultraviolet light irradiation time, and starts UV ozone generation module (1) and reach the function to the cleaning of VUV optics element;
Climate Control Module (2), is comprised of air conditioner, temperature and moisture sensors; Described air conditioner has controls function to the temperature and humidity in ultraviolet ozone drying cabinet; Climate Control Module (2) is controlled by intelligent cell (4), by intelligent cell (4), sets the temperature and humidity parameter in ultraviolet ozone drying cabinet, and starts the control that Climate Control Module (2) is realized temperature and humidity in ultraviolet ozone drying cabinet;
Gas delivery module (3), mainly comprises gas control assembly and exhaust gas processing device; Described gas control assembly, for the flow velocity of control inputs or delivery outlet gas, is selected the different types of gas of input as required in work; Described exhaust gas processing device is for removing the waste gas ozone producing in ultraviolet ozone drying cabinet; Described gas delivery module (3) is controlled by intelligent cell (4), by intelligent cell (4), set and to input or output implication rate of flow of fluid and tail gas extends processing time parameter, and start Climate Control Module (3) and complete that VUV optics element is clean to be deposited in process gas in drying cupboard and input or output and waste scavenging;
Intelligent cell (4), controls all processes that VUV optics element is clean and deposit, and is implemented as follows;
That intelligent cell (4) sends is clean/and deposit start-up mode, clean start-up mode and deposit three kinds of start-up mode requests of start-up mode, intelligent cell (4) starts the operating system subsequently, after os starting completes, control is delivered to the overall measurement and control program on intelligent cell (4), overall measurement and control program is realized the cleaning to VUV optics element for coordinating the modules of ultraviolet ozone drying cabinet, the temperature/humidity of storage environment is controlled, and gas delivery function; First overall measurement and control program obtains start-up mode from intelligent cell (4), clean/deposit start-up mode, clean start-up mode or deposit start-up mode, then according to start-up mode, carry out control command, to UV ozone generation module (1), Climate Control Module (2) and gas administration module (3), send startup command; When UV ozone generation module (1) starts, the ultraviolet light irradiation time parameter that ultraviolet ozone drying cabinet will be set according to intelligent cell (4), does regularly UV ozone cleaning to VUV optics element; When if Climate Control Module (2) starts, temperature/humidity parameter in the cabinet that ultraviolet ozone drying cabinet will be set according to intelligent cell (4), controls the temperature/humidity in cabinet; When if gas delivery module (3) starts, the gas flow rate of the I/O port that ultraviolet ozone drying cabinet is set according to intelligent cell (4) and prolongation exhaust gas processing device shut-in time parameter, complete VUV optics element and clean/deposit the interior gas delivery of drying cupboard in process.
2. and the ultraviolet ozone drying cabinet deposited clean for VUV optics element according to claim 1, it is characterized in that: when described ultraviolet ozone drying cabinet is placed on controlled temperature, lustration class greater than or equal to the clean-room environment of 10000 grades, need not configure temperature sensor in Climate Control Module (2) and relevant temperature control unit.
3. and the ultraviolet ozone drying cabinet deposited clean for VUV optics element according to claim 1, it is characterized in that: described UV ozone generation module (1) and Climate Control Module (2) can be used alone or in combination, realize respectively function is cleaned and deposited to the UV ozone cleaning of VUV optics element, dry depositing with UV ozone.
4. and the ultraviolet ozone drying cabinet deposited clean for VUV optics element according to claim 1, it is characterized in that: described gas delivery module (3) also can directly be connected with vacuum system, realize VUV optics element cleaning and depositing under vacuum environment.
5. and the ultraviolet ozone drying cabinet deposited clean for VUV optics element according to claim 1, it is characterized in that: when described ultraviolet ozone drying cabinet is placed in non-enclosed experiment room environmental, need not configure the exhaust gas processing device in gas delivery module (3).
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| CN201110416916.1A CN102512002B (en) | 2011-12-13 | 2011-12-13 | Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements |
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| CN201110416916.1A CN102512002B (en) | 2011-12-13 | 2011-12-13 | Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements |
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| CN102512002B true CN102512002B (en) | 2014-05-07 |
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| CN104707816B (en) * | 2013-12-13 | 2017-01-25 | 中国科学院大连化学物理研究所 | On-line self-cleaning method for vacuum ultraviolet lamp |
| CN105836352B (en) * | 2016-05-22 | 2018-03-09 | 长沙永乐康仪器设备有限公司 | Mobile laboratory discarded object transferring system |
| CN106906583A (en) * | 2017-01-19 | 2017-06-30 | 武汉纺织大学 | A kind of ultraviolet light ozone habilimentation machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007236749A (en) * | 2006-03-10 | 2007-09-20 | Mitsubishi Electric Corp | Cabinet and photocatalyst device |
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|---|---|---|---|---|
| CN2411788Y (en) * | 1998-10-23 | 2000-12-27 | 冼新全 | Sterilizing case |
| CN2472583Y (en) * | 2001-04-12 | 2002-01-23 | 张宝吉 | Dry sample cabinet |
| CN2863848Y (en) * | 2005-09-08 | 2007-01-31 | 俞泉水 | Heat pump cabinet type sterilization and disinfection clothes drier |
| CN201271380Y (en) * | 2008-09-04 | 2009-07-15 | 广东康宝电器有限公司 | Disinfection cabinet with dehumidifying function |
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