CN102512002A - Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements - Google Patents
Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements Download PDFInfo
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- CN102512002A CN102512002A CN2011104169161A CN201110416916A CN102512002A CN 102512002 A CN102512002 A CN 102512002A CN 2011104169161 A CN2011104169161 A CN 2011104169161A CN 201110416916 A CN201110416916 A CN 201110416916A CN 102512002 A CN102512002 A CN 102512002A
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Abstract
An ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements comprises an ultraviolet ozone generating module, an air-conditioning module, a gas managing module and an intelligent unit. The ultraviolet ozone generating module cleans the vacuum ultraviolet optical elements; the air-conditioning module controls the temperature and the humidity in the drying cabinet in a vacuum ultraviolet optical element cleaning/storing process; the gas managing module manages gas in the drying cabinet in the vacuum ultraviolet optical element cleaning and storing process; and the intelligent unit controls the total vacuum ultraviolet optical element cleaning/storing process. Hydrocarbon pollutants on the vacuum ultraviolet optical elements can be removed fast, adverse effects to optical performances of the vacuum ultraviolet optical elements due to water vapor are stopped, the problem that the performances of the vacuum ultraviolet optical elements are degraded due to an improper storage mode is effectively avoided, and the ultraviolet ozone drying cabinet is particularly applicable to cleaning and storing the vacuum ultraviolet optical elements.
Description
Technical field
The present invention relates to a kind of optical element sample cabinet, specifically a kind of uv ozone drying cupboard that is used for VUV optics element cleaning and deposits.
Background technology
Along with the not only development of laser technology, be that the VUV LASER light source of representative occurs in succession with excimer laser, free electron laser and all solid state vacuum ultraviolet laser.These VUV LASER light sources all have boundless application prospect in fields such as microelectronic component manufacturing, micromachined, nano material processing and biomedical engineerings.The fast development of VUV LASER light source with and use widely high performance VUV wave band optical element proposed demand urgently.
Usually; Adopt the VUV wave band all-dielectric optically of physical gas-phase deposition preparation to learn film; The gather density of rete will be lower than bulk material (M.Bischoff, M.Sode, D.
et.al.; Metal fluori de coatings prepared by ion-assisted deposition; SPIE, 7101,71010L-1 (2008)).When optical thin film is exposed in the air, is subject to pollutions such as steam and hydrocarbon radical compound, thereby influences the performance and the stability (B.-C.Li thereof of VUV wave band dielectric optical thin film; D.-W.Lin; Y.-L.Han et al., Anti-Reflective Fluoride Coatings for Widely Tunable Deep-Ultraviolet Diode-Pumped Solid-State Laser Applications, CHIN.PHYS.LETT.; 27,044201-1 (2010)).Aluminium is that unique VUV wave band that is applicable to has the metal material of high reflectance, but no matter is media protection type or medium enhancement mode aluminium film, along with the resting period is elongated; They all have aging phenomenon (M.Yang, A.Gatto, and N.Kaiser at the reflectivity of VUV wave band; Highly reflecting aluminum-propected optical coatings for the vacuum-ultraviolet spectral range; Appl.Opt., 45 (1), 178 (2006)).The reflectivity of media protection type and medium enhancement mode aluminium film is aging mainly to be to be caused by oxygen in the storage environment and steam; But do not receive nitrogen and influence (the M.Fern á ndez-Perea of inert gas in the storage environment; J.A.Azn á rez and J.Calvo-Angos; Far ultraviolet reflectance variation of MgF2-Protected aluminum films under controlled exposure to the main components of the atmosphere; Thin Solid films, 497,249 (2006)).How eliminating VUV optics element and receive the pollution of steam and hydrocarbon radical compound and slow down optical element performance and degenerate, has been that VUV optics element cleans/deposits and needs the problem that solves.
Generally be used to deposit the drying cupboard of optical element,, reduce the influence (Zhang Baoji that VUV optics element receives steam though can effectively dehumidify; Chinese invention patent " drying sample cabinet "; Application number: 01219348.8, Granted publication number: CN 2472583Y, Granted publication day: on January 23rd, 2002); But can not avoid of the pollution of hydrocarbon radical compound, can not slow down the degeneration of VUV optics element function VUV optics element.VUV optics element function degeneration as a rule is irreversible process, in case VUV optics element is contaminated, is difficult to return to initial performance.Therefore, against vacuum ultraviolet optics element, reasonably clean is with effectively storage same is important.Current; Use more uviol lamp clean vacuum ultraviolet optics element; Only utilized the uv ozone cleaning function; Though can avoid of the pollution of hydrocarbon radical compound effectively, can not reduce or eliminate steam and temperature fluctuates widely to the influence of VUV optics element function, thereby be difficult to realize long-time stable the depositing of VUV optics element VUV optics element.In addition; To produce ozone during uviol lamp clean vacuum ultraviolet optics element; Ozone has extremely strong oxidability, and the ozone (0.1-1ppm) that sucks trace can make symptoms such as the people feels dizziness, order is puckery and have sore throat, and therefore removing ozone also is the problem that need consider in the uviol lamp cleaning course.
Summary of the invention
The technical problem that the present invention will solve: the deficiency that overcomes prior art; A kind of uv ozone drying cupboard that is used for VUV optics element cleaning and deposits is provided; Can remove hydrocarbon pollutant on the VUV optics element fast; And stop the adverse effect of steam to VUV optics element optical property, avoid effectively because the improper VUV optics element function that causes of storage mode is degenerated.
Technical solution of the present invention is, a kind of uv ozone drying cupboard that is used for VUV optics element cleaning and deposits comprises uv ozone generating module, Climate Control Module, gas delivery module and intelligent cell, wherein:
The uv ozone generating module mainly is made up of ultraviolet source; Described ultraviolet source is the laser of mercury lamp, Excimer UV lamp or the ultraviolet wavelength of vitreous silica or other ultraviolet optical material (calcirm-fluoride, magnesium fluoride etc.) overcoat, and radiation wavelength is lower than 300nm; The uv ozone generating module is set the ultraviolet light irradiation time through intelligent cell control by intelligent cell, and startup uv ozone generating module reaches the clean to VUV optics element;
Climate Control Module is made up of air conditioner and temperature and humidity sensor; Described air conditioner has the temperature and humidity control function in the uv ozone drying cupboard; Climate Control Module is set the temperature and humidity in the uv ozone drying cupboard through intelligent cell control by intelligent cell, and starts the control that Climate Control Module is realized temperature/humidity in the uv ozone drying cupboard;
The gas delivery module mainly contains gas control assembly and exhaust gas processing device; Described gas control assembly is used to control the flow velocity that inputs or outputs gas, selects the different types of gas of input according to user's needs in the work; Described exhaust gas processing device is used to remove waste gas, the especially ozone that produces in the uv ozone drying cupboard; The gas delivery module is through intelligent cell control; Set parameters such as inputing or outputing gas flow velocity and tail gas prolongation processing time by intelligent cell; And start the gas delivery module, accomplish VUV optics element cleaning and deposit interior gas I/O of drying cupboard and waste scavenging function in the process;
Intelligent cell is the core of uv ozone drying cupboard, all processes that control VUV optics element cleans/deposits.
Described uv ozone drying cupboard is placed on controlled temperature, lustration class when being greater than or equal to 10000 grades clean-room environment, can not dispose temperature sensor and relevant temperature control unit in the Climate Control Module (2).
Described uv ozone generating module and Climate Control Module can be used alone or in combination, and realize respectively uv ozone clean, the drying of VUV optics element deposited with uv ozone cleaning and drying and deposit.
Described gas delivery module also can directly be connected with vacuum system, realize VUV optics element under vacuum environment cleaning and deposit.
When described uv ozone drying cupboard is placed in the non-enclosed experiment room environmental, can not dispose the exhaust gas processing device in the gas delivery module.
Principle of the present invention is: the uv ozone clean is a kind of through the UV-irradiation optical element; Decompose and be adsorbed on hydrocarbon pollutant on the VUV optics element; Reduce the optical loss of VUV optics element, and improve the effective technical way of other performances of VUV optics element.This technology is to remove the hydrocarbon pollutant that is adsorbed on the VUV optics element through the photosensitized oxidation process.When the hydrocarbon contaminant molecule that is adsorbed on the VUV optics element absorbs mercury lamp, Excimer UV lamp by vitreous silica or other ultraviolet optical material (calcirm-fluoride, magnesium fluoride etc.) overcoat; Perhaps the laser of ultraviolet wavelength send ultraviolet light the time, contaminant molecule will be excited or dissociate.Meanwhile; Oxygen molecule in the VUV optics element storage environment receives mercury lamp, the Excimer UV lamp of vitreous silica or other ultraviolet optical material (calcirm-fluoride, magnesium fluoride etc.) overcoat; Perhaps the ultraviolet excitation that sends of the laser of ultraviolet wavelength will generate oxygen atom and ozone by the direction of equation (1).At last, the hydrocarbon contaminant molecule that is excited or dissociates will react simple, the volatile molecule of generation form with oxygen atom, like carbon monoxide, carbon dioxide and steam etc.Thereby reach clean vacuum ultraviolet optics element, reduce the purpose of VUV optics element optical loss.
At VUV optics element internal, the absorption loss that impurity in substrate and/or the rete and/or defective also can make VUV optics element increases, and optical property descends.When adopting UV-irradiation; Impurity in ultraviolet light and VUV optics element internal or the rete and/or defective interact; Can effectively reduce impurity and/or defect concentration in substrate and/or the rete; The absorption loss of VUV optics element internal is reduced, and the optical property of VUV optics element improves.
In addition; In conjunction with the temperature/humidity in the air conditioner control drying cupboard; Consider that nitrogen and inert gas and vacuum environment do not have influence to the performance of VUV optics element, also can select to charge into nitrogen or inert gas or in vacuum environment, deposit VUV optics element.Thus, the uv ozone drying cupboard can avoid steam and hydrocarbon radical compound to the adverse effect of VUV optics element function, can avoid effectively again because the improper VUV optics element function that causes of storage mode is degenerated.In addition, for avoiding the injury of ozone to human body, the uv ozone drying cupboard can select to dispose exhaust gas processing device.
Alternative device with deozonize function mainly contains low pressure mercury lamp, deozonize sheet and the ozone-removing filtering net etc. of high quartzy overcoat.The principle of the mercury lamp deozonize of high quartzy overcoat is that the ultraviolet light that utilizes the low pressure mercury lamp of high quartzy overcoat to send generates oxygen atom and oxygen according to by the direction of equation (2) ozone being decomposed; Simultaneously because this lamp uses high quartzy overcoat; The ultraviolet light of the shorter wavelength that mercury lamp sends will be absorbed by the quartzy overcoat of height, thereby avoid the oxygen molecule in the environment to continue to generate oxygen atom and ozone by the direction of equation (1).Deozonize sheet and ozone-removing filtering net then are to utilize the mode of chemical reaction to remove ozone.
The present invention compared with prior art has following advantage:
(1) the present invention can remove hydrocarbon pollutant on the VUV optics element fast; And prevention steam is to the adverse effect of VUV optics element optical property; Avoid effectively because the improper VUV optics element function that causes of storage mode is degenerated, be particularly useful for the cleaning of VUV optics element/deposit.
(2) the present invention uses Climate Control Module; Be used to control the temperature/humidity in the drying cupboard; Thereby reduction or elimination steam and temperature fluctuate widely to the influence of optical element performance effectively, avoid effectively because the improper VUV optics element function that causes of storage mode is degenerated.Simultaneously, the present invention also can do the environmental stability experiment usefulness of VUV optics element function.
(3) the present invention deposits technological the combination with uv ozone cleaning function and drying, and both also can use separately, and are flexible.
Description of drawings
Fig. 1 is a theory diagram of the present invention;
Fig. 2 is an overall work flow chart of the present invention;
Fig. 3 is the workflow diagram of overall observing and controlling process of the present invention.
The specific embodiment
As shown in Figure 1, the present invention includes uv ozone generating module 1, Climate Control Module 2, gas delivery module 3 and intelligent cell 4, wherein: uv ozone generating module 1 mainly is made up of ultraviolet source; Ultraviolet source is mercury lamp, Excimer UV lamp or the VUV/deep ultraviolet laser of vitreous silica or other ultraviolet optical materials (calcirm-fluoride, magnesium fluoride etc.) overcoat, and radiation wavelength is lower than 300nm; Uv ozone generating module 1 is through intelligent cell 4 controls.Climate Control Module 2 is made up of air conditioner and temperature/humidity sensor; Air conditioner has the temperature/humidity control function in the uv ozone drying cupboard; Climate Control Module 2 is by intelligent cell 4 controls.Gas delivery module 3 mainly contains gas control assembly and exhaust gas processing device; Gas delivery module 3 is also through intelligent cell 4 controls.Intelligent cell 4 is cores of uv ozone drying cupboard, all processes that control VUV optics element cleans/deposits.
When using the uv ozone drying cupboard to clean/deposit VUV optics element, at first VUV optics element is carried out pre-clean processes.If VUV optics element surface only is attached with the pollutant of easy-clear such as dust, then adopt high pure nitrogen rifle hydro-peening VUV optics element surface; If VUV optics element surface still has other pollutant, then with alcohol flushing VUV optics element, and surperficial with the cotton mass cleaning element of alcohol-pickled mistake, dry up with high pure nitrogen at last.Then, the VUV optics element after the pre-clean processes is put into the uv ozone drying cupboard, and select gas input port connection gaseous species perhaps to link to each other as required, wait for cleaning/deposit operation VUV optics element with vacuum system.
Shown in Figure 2 is the overall work flow process of uv ozone drying cupboard.Intelligent cell 4 sends and cleans/deposits start-up mode, cleans start-up mode and deposit three kinds of start-up mode requests of start-up mode.Intelligent cell 4 starts the operating system subsequently, and os starting is delivered the overall measurement and control program on intelligent cell 4 with control after accomplishing.Each module that overall measurement and control program is used to coordinate the uv ozone drying cupboard realizes the clean to VUV optics element, the temperature/humidity control of storage environment, and function such as gas delivery.Overall measurement and control program at first obtains start-up mode from intelligent cell 4; Promptly clean/deposit start-up mode, clean start-up mode or deposit start-up mode; Carry out control command according to start-up mode then, send startup command to uv ozone generating module 1, Climate Control Module 2 and gas administration module 3.When uv ozone generating module 1 starts, the uv ozone drying cupboard will be done regularly uv ozone clean to VUV optics element according to the ultraviolet light irradiation time parameter of intelligent cell 4 settings; When if Climate Control Module 2 starts, the uv ozone drying cupboard will be according to the interior temperature/humidity parameter of the cabinet that intelligent cell 4 is set, the temperature/humidity in the control cabinet; When if gas delivery module 3 starts; The gas flow rate of the I/O port that the uv ozone drying cupboard is set according to intelligent cell 4 with prolong parameter such as exhaust gas processing device shut-in time, accomplish VUV optics element and clean/deposit in the process gas delivery in the drying cupboard.In addition, when the uv ozone drying cupboard is placed on the clean-room environment of temperature/humidity-controlled, can not dispose respective detection and control module in the Climate Control Module 2.
As shown in Figure 3, carry out the initialization of each module after the overall measurement and control program operation, obtain the status information of each module, and analyze the start-up mode of uv ozone drying cupboard.When starting, open uv ozone module 1, Climate Control Module 2 and gas administration module 3 with cleaning/storage mode; Temperature/humidity in the control uv ozone drying cupboard, management gas, and pick up counting and carry out the uv ozone clean; Judge whether to accomplish clean up task; The clean up task here comprises according to ultra violet lamp time of setting and vent gas treatment delay time parameter accomplishes uv ozone cleaning and tail gas treating function, if do not accomplish clean up task, then continues the uv ozone cleaning; If accomplish clean up task, then close uviol lamp, and further judge whether to finish the work, if do not finish the work, then the uv ozone drying cupboard will keep current state; Then quit a program if finish the work, the uv ozone drying cupboard is with standby.When starting, open uv ozone module 1 and gas administration module 3, the gas in the management uv ozone drying cupboard with cleaning mode; Pick up counting and carry out the uv ozone clean; Judge whether to accomplish clean up task,, then continue the uv ozone cleaning if do not accomplish clean up task; If the cleaning of completion is then closed uviol lamp, and further judged whether to finish the work, if do not finish the work, then the uv ozone drying cupboard will keep current state; Then quit a program if finish the work, the uv ozone drying cupboard is with standby.When starting with storage mode, open Climate Control Module 2 and gas administration module 3, the temperature/humidity in the control uv ozone drying cupboard, and management gas, exhaust gas processing device is not opened under this pattern.Further judge whether to finish the work, if do not finish the work, then the uv ozone drying cupboard will keep current state; Then quit a program if finish the work, the uv ozone drying cupboard is with standby.
Claims (5)
1. one kind is used for the uv ozone drying cupboard that VUV optics element cleans and deposits, and it is characterized in that: comprise uv ozone generating module (1), Climate Control Module (2), gas delivery module (3) and intelligent cell (4), wherein:
Uv ozone generating module (1) mainly is made up of ultraviolet source; Described ultraviolet source is the laser of mercury lamp, Excimer UV lamp or the ultraviolet wavelength of vitreous silica or other ultraviolet optical material overcoat, and radiation wavelength is lower than 300nm; Said uv ozone generating module (1) is set the ultraviolet light irradiation time through intelligent cell (4) control by intelligent cell (4), and startup uv ozone generating module (1) reaches the function to the clean of VUV optics element;
Climate Control Module (2) is made up of air conditioner, temperature and humidity sensor; Described air conditioner has the temperature and humidity control function in the uv ozone drying cupboard; Climate Control Module (2) is set the temperature and humidity parameter in the uv ozone drying cupboard through intelligent cell (4) control by intelligent cell (4), and starts the control that Climate Control Module (2) is realized temperature and humidity in the uv ozone drying cupboard;
Gas delivery module (3) mainly comprises gas control assembly and exhaust gas processing device; Said gas control assembly is used to control the flow velocity that inputs or outputs gas, selects the different types of gas of input in the work as required; Described exhaust gas processing device is used to remove waste gas, the especially ozone that produces in the uv ozone drying cupboard; Said gas delivery module (3) is through intelligent cell (4) control; Input or output gas flow velocity and tail gas prolongation processing time parameter by intelligent cell (4) setting, and startup Climate Control Module (3) completion VUV optics element cleaning is deposited, and the interior gas of drying cupboard inputs or outputs and waste scavenging in the process;
Intelligent cell (4), control VUV optics element cleaning and all processes of depositing.
2. the uv ozone drying cupboard that is used for VUV optics element cleaning and deposits according to claim 1; It is characterized in that: described uv ozone drying cupboard is placed on controlled temperature, lustration class when being greater than or equal to 10000 grades clean-room environment, can not dispose temperature sensor and relevant temperature control unit in the Climate Control Module (2).
3. the uv ozone drying cupboard that is used for VUV optics element cleaning and deposits according to claim 1; It is characterized in that: described uv ozone generating module (1) and Climate Control Module (2) can be used alone or in combination, and realize respectively uv ozone clean, the drying of VUV optics element are deposited with uv ozone cleaning and deposited function.
4. the uv ozone drying cupboard that is used for VUV optics element cleaning and deposits according to claim 1; It is characterized in that: described gas delivery module (3) also can directly be connected with vacuum system, realize VUV optics element under vacuum environment cleaning and deposit.
5. the uv ozone drying cupboard that is used for VUV optics element cleaning and deposits according to claim 1; It is characterized in that: when described uv ozone drying cupboard is placed in the non-enclosed experiment room environmental, can not dispose the exhaust gas processing device in the gas delivery module (3).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110416916.1A CN102512002B (en) | 2011-12-13 | 2011-12-13 | Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110416916.1A CN102512002B (en) | 2011-12-13 | 2011-12-13 | Ultraviolet ozone drying cabinet for cleaning and storing vacuum ultraviolet optical elements |
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| CN102512002A true CN102512002A (en) | 2012-06-27 |
| CN102512002B CN102512002B (en) | 2014-05-07 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104707816A (en) * | 2013-12-13 | 2015-06-17 | 中国科学院大连化学物理研究所 | On-line self-cleaning method for vacuum ultraviolet lamp |
| CN105836352A (en) * | 2016-05-22 | 2016-08-10 | 长沙永乐康仪器设备有限公司 | Movable type laboratory waste transit system |
| CN106906583A (en) * | 2017-01-19 | 2017-06-30 | 武汉纺织大学 | A kind of ultraviolet light ozone habilimentation machine |
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| CN2411788Y (en) * | 1998-10-23 | 2000-12-27 | 冼新全 | Sterilizing case |
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| CN104707816B (en) * | 2013-12-13 | 2017-01-25 | 中国科学院大连化学物理研究所 | On-line self-cleaning method for vacuum ultraviolet lamp |
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| CN106906583A (en) * | 2017-01-19 | 2017-06-30 | 武汉纺织大学 | A kind of ultraviolet light ozone habilimentation machine |
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| CN102512002B (en) | 2014-05-07 |
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Granted publication date: 20140507 Termination date: 20211213 |