CN102509749A - Texturing method for polycrystalline solar cell - Google Patents

Texturing method for polycrystalline solar cell Download PDF

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CN102509749A
CN102509749A CN2011104390563A CN201110439056A CN102509749A CN 102509749 A CN102509749 A CN 102509749A CN 2011104390563 A CN2011104390563 A CN 2011104390563A CN 201110439056 A CN201110439056 A CN 201110439056A CN 102509749 A CN102509749 A CN 102509749A
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suede
polycrystalline silicon
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silicon solar
aluminium chassis
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CN102509749B (en
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万珍平
卿剑波
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South China University of Technology SCUT
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Abstract

本发明公开了一种硅基太阳电池表面绒面制备方法,采用微细电火花电解复合加工多晶硅表面,在电火花放电制得绒面结构的同时采用电解作为辅助加工方法,以得到均匀的绒面结构。本发明微细电火花电极不但可以高速扫描多晶硅而且增大了扫描范围,明显提高制绒效率。所制得的多晶硅能形成均匀的微纳米尺度的绒面结构,增加对光的吸收,降低反射率,适合于工业化生产。本方法能显著减少化学方法对环境的污染,提高效率,降低绒面反射率。

Figure 201110439056

The invention discloses a method for preparing a suede surface on the surface of a silicon-based solar cell. Micro electric spark electrolysis is used to compositely process the polysilicon surface, and electrolysis is used as an auxiliary processing method while the suede structure is obtained by electric spark discharge to obtain a uniform suede surface. structure. The fine electric discharge electrode of the present invention can not only scan the polysilicon at high speed, but also enlarges the scanning range, and obviously improves the texturing efficiency. The prepared polysilicon can form a uniform micro-nano-scale suede structure, increase light absorption, reduce reflectivity, and is suitable for industrial production. The method can significantly reduce environmental pollution by chemical methods, improve efficiency and reduce the reflectivity of the suede surface.

Figure 201110439056

Description

一种多晶硅太阳电池绒面的制造方法A kind of manufacturing method of textured surface of polycrystalline silicon solar cell

技术领域 technical field

本发明涉及多晶硅太阳电池制备技术,特别涉及一种多晶硅太阳电池绒面的制造方法。The invention relates to the preparation technology of polycrystalline silicon solar cells, in particular to a method for manufacturing the textured surface of polycrystalline silicon solar cells.

背景技术 Background technique

太阳能是人类取之不尽用之不竭的可再生资源,也是可直接利用的清洁能源之一。随着社会的进步,人类面临的能源危机、环境污染问题日益严重,这些问题已成为制约全球经济发展的关键所在。开发使用可再生、清洁环保的新能源是未来社会发展的必然趋势,近些年来,太阳能电池引起了人们广泛的关注。太阳能电池具有许多显著优势,如无污染,能源随处可得,使用寿命长等优点。作为一种可以高效地将光能转化为电能的清洁、无污染的可再生资源,太阳能电池的应用已从军事领域、航天领域进入工业、农业、通信、家用电器、电力等部门。Solar energy is an inexhaustible renewable resource for human beings, and it is also one of the clean energy sources that can be directly utilized. With the progress of society, the energy crisis and environmental pollution problems faced by human beings are becoming more and more serious. These problems have become the key points restricting the development of the global economy. The development and use of renewable, clean and environmentally friendly new energy is an inevitable trend of future social development. In recent years, solar cells have attracted widespread attention. Solar cells have many significant advantages, such as no pollution, energy available everywhere, and long service life. As a clean and non-polluting renewable resource that can efficiently convert light energy into electrical energy, the application of solar cells has entered the industry, agriculture, communications, household appliances, electric power and other sectors from the military and aerospace fields.

但是就目前阶段来看,太阳能电池生产成本高,太阳能吸收率低限制了太阳能电池的进一步发展。因此对于如何降低生产成本,提高效率,降低反射率仍是目前太阳能电池研究的主要目标。均匀的表面绒面结构增加了光的吸收面积,使入射光在表面进行多次反射,从而大大提高太阳能吸收效率,降低了光的反射率。对于多晶硅,其材料制造简便,节约电耗,总的生产成本较低。且随着多晶硅的生产工艺不断取得进展,其成本也远低于单晶硅。因此利用合理的方法制得多晶硅均匀的绒面结构可以有效的降低生产成本,满足现有对太阳能电池的需求。But at the current stage, the high production cost of solar cells and the low solar absorption rate limit the further development of solar cells. Therefore, how to reduce production costs, improve efficiency, and reduce reflectivity is still the main goal of solar cell research. The uniform surface suede structure increases the light absorption area and makes the incident light reflect multiple times on the surface, thereby greatly improving the solar energy absorption efficiency and reducing the light reflectivity. For polysilicon, its material is easy to manufacture, saves power consumption, and the total production cost is low. And as the production process of polysilicon continues to progress, its cost is much lower than that of monocrystalline silicon. Therefore, using a reasonable method to prepare a uniform textured structure of polysilicon can effectively reduce production costs and meet the existing demand for solar cells.

现有的表面制绒方法有化学腐蚀、电化学腐蚀、机械刻槽、离子刻蚀等技术。机械刻槽技术,虽工艺简单,但效率低,所要求的硅片厚度不适合于太阳电池的制造。离子刻蚀,工艺复杂,制作时间长,设备复杂昂贵,不适合于工业化生产。化学腐蚀,是目前制造太阳电池硅片绒面结构较普遍的一种方法,虽生产效率高,但难以得到均匀的绒面结构,对太阳光减反射效率低,且产生的废液多,对环境污染大等缺点。Existing surface texturing methods include chemical corrosion, electrochemical corrosion, mechanical grooving, ion etching and other technologies. Mechanical grooving technology, although the process is simple, but the efficiency is low, and the thickness of the silicon wafer required is not suitable for the manufacture of solar cells. Ion etching has complicated process, long production time, complex and expensive equipment, and is not suitable for industrial production. Chemical etching is currently a common method for manufacturing the textured structure of silicon wafers for solar cells. Although the production efficiency is high, it is difficult to obtain a uniform textured structure. Disadvantages such as large environmental pollution.

发明内容 Contents of the invention

本发明目的在于克服现有技术存在的上述不足,提供一种多晶硅太阳电池绒面的制造方法,制备过程简单、方便、易于实现工业化生产,其扫描范围大、扫描均匀、易于控制、能够明显提高制绒效率,能得到微纳米尺度的绒面结构。The purpose of the present invention is to overcome the above-mentioned deficiencies existing in the prior art, and to provide a method for manufacturing the suede surface of polycrystalline silicon solar cells. The preparation process is simple and convenient, and it is easy to realize industrial production. Texture-making efficiency can obtain micro-nano-scale textured structure.

本发明目的通过下述方案实现:The object of the invention is achieved through the following schemes:

一种多晶硅太阳电池绒面的制造方法,采用微细电火花电解复合加工多晶硅表面,在电火花放电制得绒面结构的同时采用电解作为辅助加工方法,以得到均匀的绒面结构,包括下述步骤:A method for manufacturing the suede surface of a polycrystalline silicon solar cell, which uses micro-electric spark electrolysis to compositely process the polycrystalline silicon surface, and uses electrolysis as an auxiliary processing method to obtain a uniform suede structure when the electric spark discharge is used to obtain the suede structure, including the following step:

(1)准备多晶硅片、金属粉末,清洗多晶硅片;(1) Prepare polysilicon wafers and metal powder, and clean polysilicon wafers;

(2)准备一均匀布置有磁铁的铝框架,将电火花加工机床的电极轴连接到铝框架上;所述铝框架通过套筒与电火花加工机床的电极轴连接,所述铝框架为十字形、六边形、圆形或者环形。(2) Prepare an aluminum frame evenly arranged with magnets, connect the electrode shaft of the electric discharge machine tool to the aluminum frame; the aluminum frame is connected with the electrode shaft of the electric discharge machine tool through a sleeve, and the aluminum frame is ten Glyph, hexagon, circle or ring.

(3)将多晶硅片固定在接有电源的不锈钢板上,铝框架与多晶硅片平行放置,工作时,铝框架旋转并且平移扫描晶硅片,微小的金属粉末通过磁铁吸附在铝框架上,这些微小金属粉末在加工过程中作为微小电极,产生微细电火花,随着火花放电在铝框架和多晶硅片之间的发生,在复合工作液中产生高温电化学作用,从而实现多晶硅片电火花电解以制得均匀的微纳米尺度的绒面结构;(3) Fix the polysilicon wafer on a stainless steel plate connected to a power supply, and place the aluminum frame in parallel with the polysilicon wafer. When working, the aluminum frame rotates and translates to scan the crystal silicon wafer. Tiny metal powder is adsorbed on the aluminum frame by a magnet. These The tiny metal powder is used as a tiny electrode during the processing process to generate a tiny electric spark, and as the spark discharge occurs between the aluminum frame and the polysilicon wafer, a high-temperature electrochemical action is generated in the composite working fluid, thereby realizing the spark electrolysis of the polysilicon wafer. A uniform micro-nano-scale suede structure is obtained;

(4)完成多晶硅片绒面后,用去离子水洗净,烘干,制得多晶硅太阳电池绒面。(4) After finishing the textured surface of the polycrystalline silicon wafer, wash it with deionized water and dry it to prepare the textured surface of the polycrystalline silicon solar cell.

所述金属粉末为微纳米尺度的合金粉末,优选金合金粉末为铁基或镍基合金粉末。The metal powder is a micro-nano scale alloy powder, preferably the gold alloy powder is an iron-based or nickel-based alloy powder.

本发明相对于现有技术,具有如下的优点及效果:Compared with the prior art, the present invention has the following advantages and effects:

1本发明采用的微细电火花电解复合制绒,能直接得到理想的多晶硅绒面结构、简单、方便、易于实现工业化生产。1. The fine EDM electrolytic composite texturing used in the present invention can directly obtain an ideal polysilicon textured structure, which is simple, convenient, and easy to realize industrial production.

2本发明采用均匀布置磁铁的铝框架与电火花加工机床的电极轴连接配合使用,其扫描范围大,扫描速度快,扫描均匀,易于控制,能够明显提高制绒效率。2. The present invention adopts the aluminum frame with evenly arranged magnets to connect with the electrode shaft of the electric discharge machine tool. Its scanning range is large, the scanning speed is fast, the scanning is uniform, easy to control, and can obviously improve the texturing efficiency.

3本发明在工作时,微纳米级的金属粉末吸附在均匀布置磁铁的铝框架上,这些微纳金属粉末在加工过程中作为微小电极,产生微细电火花以制得均匀的绒面结构。金属粉末越细则构成的微小电极越多,制得的多晶硅绒面效果越好。3. When the present invention is working, micro-nano metal powders are adsorbed on the aluminum frame with evenly arranged magnets. These micro-nano metal powders are used as tiny electrodes in the processing process to generate micro electric sparks to obtain a uniform textured structure. The finer the metal powder is, the more tiny electrodes are formed, and the better the effect of the polysilicon textured surface is.

附图说明 Description of drawings

图1为本发明均匀布置磁铁的铝框架与多晶硅片相对位置示意图;Fig. 1 is the relative position schematic diagram of the aluminum frame of the present invention that evenly arranges magnet and polysilicon sheet;

图2为本发明多晶硅均匀绒面结构光路示意图;Fig. 2 is the schematic diagram of the light path of polysilicon uniform suede structure of the present invention;

具体实施方式 Detailed ways

下面结合实施例及附图对本发明作进一步详细说明,但本发明的实施方式不限于此。The present invention will be described in further detail below in conjunction with the embodiments and accompanying drawings, but the embodiments of the present invention are not limited thereto.

实施例Example

由图1所示,本发明多晶硅太阳电池绒面的制造方法,采用微细电火花电解复合加工多晶硅表面,在电火花放电制得绒面结构的同时采用电解作为辅助加工方法,以得到均匀的绒面结构,包括下述步骤:As shown in Fig. 1, the manufacturing method of polycrystalline silicon solar cell suede surface of the present invention, adopts micro electric spark electrolysis compound processing polysilicon surface, adopts electrolysis as auxiliary processing method when electric spark discharge makes suede structure, to obtain uniform suede Surface structure, including the following steps:

(1)准备多晶硅片3、金属粉末,清洗多晶硅片3;(1) Prepare polysilicon chip 3, metal powder, and clean polysilicon chip 3;

(2)准备一均匀布置有磁铁的铝框架2,将电火花加工机床的电极轴1连接到铝框架2上;所述铝框架2可通过套筒与电极轴1连接(图中未示出),所述铝框架2为十字形、六边形、圆形或者环形。(2) Prepare an aluminum frame 2 evenly arranged with magnets, connect the electrode shaft 1 of the electric discharge machine tool to the aluminum frame 2; the aluminum frame 2 can be connected with the electrode shaft 1 through a sleeve (not shown in the figure ), the aluminum frame 2 is cross-shaped, hexagonal, circular or annular.

(3)将多晶硅片3固定在接有电源的不锈钢板上(图中未示出),铝框架2与多晶硅片3平行放置,工作时,铝框架2旋转并且平移扫描晶硅片,微小的金属粉末通过磁铁吸附在铝框架2上,这些微小金属粉末在加工过程中作为微小电极,产生微细电火花,随着火花放电在铝框架2和多晶硅片3之间的发生,在复合工作液中产生高温电化学作用,从而实现多晶硅电片电火花电解以制得均匀的微纳米尺度的绒面结构;金属粉末越细则构成的微小电极越多,制得多晶硅片绒面效果越好。(3) Fix the polycrystalline silicon chip 3 on a stainless steel plate (not shown in the figure) connected to the power supply, and place the aluminum frame 2 in parallel with the polycrystalline silicon chip 3. During work, the aluminum frame 2 rotates and translates and scans the crystal silicon chip, and the tiny The metal powder is adsorbed on the aluminum frame 2 by a magnet. These tiny metal powders are used as tiny electrodes in the processing process to generate tiny electric sparks. As the spark discharge occurs between the aluminum frame 2 and the polysilicon wafer 3, in the composite working fluid High-temperature electrochemical action is generated, so as to realize electric spark electrolysis of polysilicon wafers to obtain uniform micro-nano-scale textured structures; the finer the metal powder, the more tiny electrodes formed, and the better the textured effect of polysilicon wafers.

(4)完成多晶硅片3的绒面后,用去离子水洗净,烘干,制得多晶硅太阳电池绒面。(4) After finishing the textured surface of the polysilicon wafer 3, wash it with deionized water and dry it to prepare the textured surface of the polycrystalline silicon solar cell.

所述金属粉末为微纳米尺度的合金粉末,该金合金粉末最好采用铁基或镍基合金粉末。The metal powder is micro-nano scale alloy powder, and the gold alloy powder is preferably iron-based or nickel-based alloy powder.

通过上述方法可得到具有绒面的多晶硅太阳电池。本发明所制得的多晶硅能形成均匀的微纳米尺度的绒面结构,增加对光的吸收,降低反射率,适合于工业化生产。本方法提供的表面制绒方法,能显著减少化学方法对环境的污染,提高效率,降低绒面反射率。A polycrystalline silicon solar cell with a textured surface can be obtained through the above method. The polysilicon prepared by the invention can form a uniform micro-nano-scale suede structure, increase light absorption, reduce reflectivity, and is suitable for industrial production. The surface texture method provided by the method can significantly reduce environmental pollution by chemical methods, improve efficiency, and reduce the reflectivity of the texture.

如上所述,便可较好地实现本发明。As described above, the present invention can be preferably carried out.

上述实施例仅为本发明较佳的实施方式,但本发明的实施方式并不受上述实施例的限制,其他任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。The above-mentioned embodiment is only a preferred embodiment of the present invention, but the embodiment of the present invention is not limited by the above-mentioned embodiment, and any other changes, modifications, substitutions, combinations, Simplifications should be equivalent replacement methods, and all are included in the protection scope of the present invention.

Claims (5)

1. the manufacturing approach of a polycrystalline silicon solar battery suede is characterized in that adopting fine electric spark electrolysis Compound Machining polysilicon surface, when spark discharge makes suede structure, adopts electrolysis as assistance processing method, to obtain uniform suede structure.
2. the manufacturing approach of polycrystalline silicon solar battery suede according to claim 1 is characterized in that comprising the steps:
(1) prepares polysilicon chip, metal dust, clean polysilicon chip;
(2) prepare one evenly be furnished with magnet aluminium chassis, the electrode axis of electric spark machine tool is connected on the aluminium chassis;
(3) polysilicon chip is fixed on the corrosion resistant plate that is connected to power supply; The parallel placement of aluminium chassis with polysilicon chip, during work, aluminium chassis rotation and translation scan crystal silicon sheet; Small metal dust is adsorbed on the aluminium chassis through magnet; These minute metallic powder as microelectrode, produce fine electric spark, along with the generation of sparkover between aluminium chassis and polysilicon chip in the course of processing; In compound working solution, produce the high-temperature electrochemistry effect, thereby realize that the polysilicon electric spark and electrolysis is to make the suede structure of uniform micro-nano-scale;
(4) behind the completion polysilicon chip matte, clean with deionized water, oven dry makes polycrystalline silicon solar battery suede.
2, the manufacturing approach of polycrystalline silicon solar battery suede according to claim 2 is characterized in that said metal dust is the alloy powder of micro-nano-scale.
3. the manufacturing approach of polycrystalline silicon solar battery suede according to claim 2 is characterized in that said billon powder is iron-based or Co-based alloy powder.
4. the manufacturing approach of polycrystalline silicon solar battery suede according to claim 2; It is characterized in that said aluminium chassis is connected with the electrode axis of electric spark machine tool through sleeve; Said aluminium chassis is cross, hexagon, circular or annular, and magnet is arranged on aluminium chassis inside uniformly.
5. according to the manufacturing approach of each described polycrystalline silicon solar battery suede in the claim 1~5, resulting polycrystalline silicon solar cell with matte.
CN2011104390563A 2011-12-22 2011-12-22 Texturing method for polycrystalline solar cell Expired - Fee Related CN102509749B (en)

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Publication number Priority date Publication date Assignee Title
CN106711247A (en) * 2016-11-30 2017-05-24 无锡中硅新材料股份有限公司 Apparatus and method for manufacturing pile face of silicon chip surface, and pile-face solar battery
CN106711247B (en) * 2016-11-30 2018-05-04 无锡中硅新材料股份有限公司 A kind of manufacture device of the matte of silicon chip surface, manufacture method and matte solar cell

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