CN102507361A - Micro solid mode resonance explosive detector - Google Patents
Micro solid mode resonance explosive detector Download PDFInfo
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- CN102507361A CN102507361A CN2011103145564A CN201110314556A CN102507361A CN 102507361 A CN102507361 A CN 102507361A CN 2011103145564 A CN2011103145564 A CN 2011103145564A CN 201110314556 A CN201110314556 A CN 201110314556A CN 102507361 A CN102507361 A CN 102507361A
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Abstract
The invention discloses a micro solid mode resonance explosive detector, which comprises a base, drive electrodes, reference electrodes, heating resistors, and explosive selective adsorption membranes. The base adopts a micro elastic solid structure, on the upper two sides and lower two sides of the base are symmetrically arranged the drive electrodes, the reference electrodes, the heating resistors, and the explosive selective adsorption membranes, a layer of heating electrodes are laid under each explosive selective adsorption membrane, and two drive electrodes and one reference electrode are arranged on each of the two sides of each explosive selective adsorption membrane. The detector employs piezoelectric effects to drive and excite a micro solid to move under a special vibration mode, and carries out tracking measurement of the resonant frequency on the reference electrodes. The resonant frequency of the micro elastic solid can reach up to tens of or even hundreds of megahertz, so that the inventive detector has high rigidity, good impact resistance and vibration resistance, and good high quality factor under normal pressure by use of special bulk acoustic resonance mode, requires no vacuum packaging, and can obtain high sensitivity.
Description
Technical field
the present invention relates to explosive detector, particularly a kind of micro-solid mode resonance explosive detection device that adopts the processing of MEMS technology.
Background technology
in recent years, the terrorist bombings attack frequently takes place in the scope of countries in the world, and is to occur in the places that the crowd is dense such as subway station, airport mostly, serious harm the people's safety of life and property.This makes the development of explosive detection device become urgent task of various countries' researcher; Yet because explosive is of a great variety; Packing is more and more exquisite, hidden, and the diversity of target is surveyed the very difficulty that becomes to explosive so accurately and timely.Traditional sniffer volume is big, cost an arm and a leg, further raising is also treated in portable bad, sensitivity, and the device that has adopts radiation or intervention property mechanism to survey, to can be produced destruction or injury to a certain degree by detected object.Present stage to low price, have high selectivity, non-intervention, highly sensitive explosive detection device active demand arranged, if such sensor can be realized miniaturization, just can utilize them to realize portable detection in different places.
got into after the nineties in last century, and microelectromechanical systems (MEMS) begins to have obtained comprehensive development.Because the MEMS device has that volume is little, light weight, low in energy consumption, cost is low, reliability is high, excellent performance, multi-functional integrated, characteristics such as can produce in batches; Along with reaching its maturity of MEMS technology; People also with the MEMS technical application in the research work of explosive detection device; And develop the various samples that are the basis with the MEMS technology, its simple and practical structure makes the explosive detection device realize that miniaturization, low cost, high precision become possibility.MEMS detection of explosives technology adopts the silicon beam as sensitive structure usually; The silicon beam directly contacts with the explosive sample; Through thermal excitation or light stimulus; Explosive is reacted, cause that the physical quantity such as temperature, displacement, stress, resonance frequency of silicon beam changes, and survey with optics or electrical method.According to the difference of the physical quantity of tested silicon beam, it is divided into four kinds of thermometry, displacement method, pressure drag method, resonance method.Existing MEMS explosive detection device all is to adopt micro cantilever structure, and cantilever beam structure exists some significantly not enough.As: the rigidity of semi-girder is low, and resonance frequency is difficult to further raising, and receives the impact or the vibrations interference of external environment easily; The quality of vibration factor of cantilever beam structure under condition of normal pressure is not high; Generally all be to be operated under the vacuum condition; And the explosive detection device must be communicated with the ambient atmos environmental facies; Can not carry out Vacuum Package, this has limited the raising of the measurement sensitivity of resonant mode semi-girder MEMS explosive detection device.
Summary of the invention
the present invention is directed to the deficiency that existing explosive detection technology exists, propose a kind of simple in structure, easy to process, be quick on the draw and micro-solid mode resonance explosive detection device that antijamming capability is strong.This detector makes full use of the kind that micro-elasticity solid change of resonance frequency is come detection of explosives, need not introduce complicated optical system from the outside, can realize the miniaturization of detection system.This micro-elasticity solid is operated under the special mode of oscillation, and its resonance frequency can reach tens even the hundreds of megahertz, has very high rigidity, and shock resistance, anti-shake performance are good.The micro-elasticity solid utilizes its special bulk acoustic wave resonance mode work, under normal pressure, has higher quality factor, does not therefore need Vacuum Package, can obtain higher sensitivity.
To achieve these goals, technical solution of the present invention is following:
micro-solid mode resonance explosive detection device of the present invention comprises matrix, drive electrode, reference electrode, heating resistor and explosive selective adsorption film.Matrix adopting micro-elasticity solid structure, matrix both sides are distributed with drive electrode and reference electrode, heating resistor and adsorption film, and both sides are symmetrical fully up and down at matrix for these parts.All arrange two drive electrodes and a reference electrode in the left and right sides of adsorption film, drive electrode is used to guide detector to begin vibration, and reference electrode is mainly used in the vibrational state that obtains detector, observes micro-elasticity solid change of resonance frequency situation.The effect of explosive selective adsorption film mainly is the explosive molecule in the absorption surrounding air; Like explosive compositions such as nitro-aromatic, superoxide, nitro ester classes, also can suppress simultaneously the non-specific adsorption of hydrone or oil molecule etc. in the surrounding air.Be covered with one deck heating resistor below the explosive selective adsorption film, effect is after accomplishing explosive detection, and explosive is heated, and makes its fusing and evaporation, for detection is next time prepared.
said matrix is a rectangular shape, and material is generally silicon, glass or metal.
said drive electrode and reference electrode adopt piezoelectric, mainly are to realize the conversion between mechanical signal and the electrical signal for the piezoelectric effect of utilizing piezoelectric.
Upper frequency and amplitude equate when on the drive electrode of adsorption film both sides, adding respectively
, during the two-way sinusoidal voltage of 180 ° of phasic differences mutually; Drive electrode produces on its polarised direction respectively and stretches and compression; Accordingly, little solid of adsorption film both sides also produce to stretch and compression movement thereupon, makes the stress that reference electrode is stretched and compresses like this; Thereby the generation electric charge reacts the motion conditions of little solid.Little solid is carried out frequency sweep,, can obtain the resonance frequency of little solid according to the change in voltage situation that produces on the reference electrode; It is relevant with factors such as the overall dimensions of material self character and material and quality; Therefore, when explosive dropped on the adsorption film, variation had taken place in the quality of detector; Then its resonance frequency also changes, and this can survey through the output of reference electrode.
existing MEMS explosive detection device all is to adopt micro cantilever structure, awaits further raising but interference performances such as cantilever beam structure rigidity is low, shock resistance or vibrations are poor, the quality of vibration factor under the condition of normal pressure is not high, measure sensitivity.Explosive detection device of the present invention is simple in structure, easy to process, and made full use of the kind that the elastic solid (Hookean body) change of resonance frequency is come detection of explosives; Because the elastic solid (Hookean body) resonance frequency generally can reach the hundreds of megahertz; Be higher than the isostructural resonance frequency of beam type far away, therefore than other explosive detection devices, like the beam type detector; Detector of the present invention has strong shock resistance and anti-vibration ability, has improved the reliability of detector system.In addition, the quality factor of elastic solid (Hookean body) are general also very high, so the response speed of this detector is fast, sensitivity is higher.
Description of drawings
Fig. 1 is one embodiment of the invention structural representation;
Fig. 2 is the selective adsorption schematic diagram of mechanism of one embodiment of the invention detector to the explosive molecule; Wherein: (a) for before the adsorption film absorption explosive, (b) for after the adsorption film absorption explosive;
Fig. 3 is one embodiment of the invention fundamental diagram.
Embodiment
elaborate in the face of embodiments of the invention down, and present embodiment is a prerequisite with technical scheme of the present invention, has provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
are as shown in Figure 1, and explosive detection device of the present invention is relatively simple for structure, and the material of matrix 13 is a silicon, also can select high-quality glass or metal, and it is shaped as rectangular parallelepiped, can select 4mm * 5mm * 0.2mm specification for use.The electrode material of both sides, surface is the PZT piezoelectric ceramics, in the process of detection of explosives, has utilized the piezoelectric effect of this material.The electrode one of both sides, surface has 12, comprises drive electrode and reference electrode, and wherein the 2,4,6,8,10,12,14, the 16th, drive electrode, 3,7,11,15 are reference electrode.The drive electrode of upper and lower surfaces and reference electrode all are symmetrical fully.Drive electrode is used for guiding detector to begin vibration, the drive electrode 2,4 when the matrix both sides; 6,8 and 10,12; 14; Add simultaneously between 16 that upper frequency and amplitude equate, during the two-way sinusoidal voltage of 180 ° of phasic differences mutually, according to the inverse piezoelectric effect of piezoelectric ceramics, matrix 13 left and right sides (seeing from Fig. 1) produce respectively and stretch and compress; The effect of reference electrode is the vibrational state that obtains the explosive detection device, so that extract resonance frequency.When matrix 13 left and right sides (seeing from Fig. 1) produced stretching and compression respectively, because piezoelectric effect will produce correspondent voltage on reference electrode, producing the maximum driving voltage frequency of magnitude of voltage promptly was the resonance frequency of detector.
are as shown in Figure 2; In the present embodiment; The surperficial middle body 9 of explosive detection device and 17 is an explosive selective adsorption film, can adopt the pressure drag silicon dioxide layer of two self-assembled films (SAM): 6-sulfydryl Nicotinicum Acidum (6-MNA) self-assembled film and 17 fluorine decyl trimethoxy silane (FAS-17) self-assembled films.As a specific inductive layer, 6-MNA self-assembled film (SAM) mainly is used for adsorbing the explosive molecule, shown among Fig. 2 18.This 6-MNA self-assembled film has level identification and contains-ability of NO2 group explosive, and main cause is to contain among the 6-MNA-the COOH group, in the middle of it and the explosive-have strong hydrogen bonding effect between the NO2 group; Yet unfortunately, the same possess hydrophilic property of silica surface has the non-specific adsorption ability to water or wet goods molecule in the wet environment on every side, will make the explosive detection result insincere like this.In order to address this problem, add last layer low-surface-energy and hydrophobic FAS-17 self-assembled film (SAM) at silica surface, so just solved the non-specific adsorption problem of silicon dioxide meter in the face of water or wet goods molecule.Detector is as shown in Figure 2 to the selective adsorption mechanism of explosive molecule.In addition, the material of explosive selective adsorption film also has some other selection, such as, polymkeric substance (like polysiloxane, organic polymer, Polycarbosilane), salt and silica gel etc.
Following one deck heating resistor 1 and 5 of being covered with respectively of
explosive selective adsorption film are used for explosive is heated.The effect of heating resistor is after the detection of the kind of carrying out explosive, and explosive is heated to a certain temperature, makes the explosive fusing or the oxygenolysis that are adsorbed on detector surface, so that carry out detection next time.
are as shown in Figure 3, and the principle of work of the above-mentioned explosive detection device of present embodiment is following: at the drive electrode 2,4 of detector; 6,8 and 10,12; Add between 14,16 that upper frequency and amplitude equate, the two-way sinusoidal voltage of 180 ° of phasic differences mutually, detector right ends (seeing from front view) will produce simultaneously owing to the piezoelectric effect of electrode and stretch and compression; As shown in Figure 3, the direction of arrow is represented the piezoelectrics travel direction.So just, can force reference electrode also to produce and stretch or compression movement, the reference electrode of right ends is because piezoelectric effect produces electric charge, so on reference electrode 3,7,11,15, can be observed the size of output voltage.Two-way sinusoidal voltage with such carries out frequency sweep to detector, can be observed the voltage swing situation of change of reference electrode 3,7,11,15, and corresponding driving voltage frequency was the resonance frequency of detector when wherein voltage was maximum.After being adsorbed with explosive on explosive selective adsorption film 1 and 9, because the increase of detector quality, resonance frequency will descend to some extent, and the voltage on the reference electrode 3,7,11,15 descends.According to the situation of change of voltage on the drift situation of resonance frequency and the reference electrode, can extrapolate the kind and the concentration of explosive.Be heated to a certain temperature a little more than fusing point through heating resistor 1 and 5 pairs of explosives at last, explosive just can melt and evaporate, for detection of explosives is next time prepared.
to sum up; The present invention proposes a kind of novel explosive detection device structure-little solid structure, utilize the peculiar high resonance frequency of this structure, the vibration to external world of explosive detection device has stronger antijamming capability; Simultaneously; The micro-elasticity solid utilizes its special bulk acoustic wave resonance mode work, under normal pressure, has higher quality factor, even be adsorbed with micro explosive on the detector; Also can cause the significant change of resonance frequency, so just increase detector sensitivity greatly.In addition, this panel detector structure is simple, processes more conveniently, greatly reduces manufacturing cost.
will be appreciated that above-mentioned description should not be considered to limitation of the present invention although content of the present invention has been done detailed introduction through above-mentioned preferred embodiment.After those skilled in the art have read foregoing, for multiple modification of the present invention with to substitute all will be conspicuous.Therefore, protection scope of the present invention should be limited appended claim.
Claims (7)
1. micro-solid mode resonance explosive detection device; It is characterized in that comprising matrix, drive electrode, reference electrode, heating resistor and explosive selective adsorption film; Said matrix adopting micro-elasticity solid structure; The matrix symmetria bilateralis is furnished with drive electrode, reference electrode, heating resistor and selective adsorption film, and these parts are complete symmetric arrangement in the both sides up and down of matrix; Be covered with one deck heating electrode below the said explosive selective adsorption film, two drive electrodes and a reference electrode are all arranged in both sides.
2. micro-solid mode resonance explosive detection device according to claim 1; It is characterized in that; Said drive electrode and reference electrode all adopt piezoelectric; Upper frequency and amplitude equate, the two-way sinusoidal voltage of 180 ° of phasic differences mutually between the drive electrode of matrix both sides, adding, and the detector right ends will produce simultaneously owing to the piezoelectric effect of drive electrode and stretch and compression, forces reference electrode also to produce and stretches or compression movement; The reference electrode of right ends is observed the change of resonance frequency situation because piezoelectric effect produces electric charge on the reference electrode of matrix both sides.
3. micro-solid mode resonance explosive detection device according to claim 1 is characterized in that, said explosive selective adsorption film adopts the pressure drag silicon dioxide layer of two SAM: 6-MNA self-assembled film and FAS-17 self-assembled film.
4. micro-solid mode resonance explosive detection device according to claim 1 is characterized in that, said explosive selective adsorption membrane material adopts polymkeric substance, salt or silica gel.
5. micro-solid mode resonance explosive detection device according to claim 4 is characterized in that said polymkeric substance is a polysiloxane, organic polymer, or Polycarbosilane.
6. micro-solid mode resonance explosive detection device according to claim 1 and 2 is characterized in that said matrix material is silicon, glass or metal.
7. micro-solid mode resonance explosive detection device according to claim 1 is characterized in that said matrix is a rectangular shape.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4373136A (en) * | 1980-01-17 | 1983-02-08 | Graviner Limited | Fire and explosion detection |
| JPH08220039A (en) * | 1995-02-15 | 1996-08-30 | Tech Res & Dev Inst Of Japan Def Agency | Method for testing stability of explosives |
| CN1474179A (en) * | 2003-07-19 | 2004-02-11 | 中国科学院合肥智能机械研究所 | Method for detecting solid explosive particles |
| CN1525162A (en) * | 2003-09-16 | 2004-09-01 | 中国科学院合肥智能机械研究所 | Explosive detector and manufacturing method |
| CN2938088Y (en) * | 2006-07-14 | 2007-08-22 | 中国科学院声学研究所 | Micro-mass sensor for minature mass measurement |
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- 2011-10-17 CN CN 201110314556 patent/CN102507361B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4373136A (en) * | 1980-01-17 | 1983-02-08 | Graviner Limited | Fire and explosion detection |
| JPH08220039A (en) * | 1995-02-15 | 1996-08-30 | Tech Res & Dev Inst Of Japan Def Agency | Method for testing stability of explosives |
| CN1474179A (en) * | 2003-07-19 | 2004-02-11 | 中国科学院合肥智能机械研究所 | Method for detecting solid explosive particles |
| CN1525162A (en) * | 2003-09-16 | 2004-09-01 | 中国科学院合肥智能机械研究所 | Explosive detector and manufacturing method |
| CN2938088Y (en) * | 2006-07-14 | 2007-08-22 | 中国科学院声学研究所 | Micro-mass sensor for minature mass measurement |
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