CN102507362B - Piezoelectric matrix micro solid mode resonant type explosive detector - Google Patents
Piezoelectric matrix micro solid mode resonant type explosive detector Download PDFInfo
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Abstract
The present invention discloses a piezoelectric matrix micro solid mode resonant type explosive detector. The left side and the right side of the top surface and the bottom surface of the piezoelectric matrix are provided with driving electrodes, reference electrodes, heating resistors, insulating layers and adsorption films, which are full symmetrical between the left side and the right side of the top surface and the bottom surface of the piezoelectric matrix; the left side and the right side of the adsorption film are provided with the driving electrodes and reference electrodes; and the surface of the adsorption film is provided with one layer of heating resistors, one layer of insulating layer is arranged between the heating resistors and the surface of the piezoelectric matrix with adsorption films. The explosive detector excites the micro piezoelectric solid move under a special vibration mode by utilizing piezoelectric actuator, and processes tracking measure for resonant frequency on the reference electrodes. The explosive detector requires low excitation voltage, and the resonant frequency can reach to a top of dozens even hundreds of megahertz; the explosive detector has high rigidity, good shock resistance and vibration resistance, and works by utilizing the special volume acoustic wave resonant mode; the explosive detector has higher quality factors under the atmospheric pressure, does not require vacuum packaging, and can obtain higher sensitivity.
Description
Technical field
The present invention relates to explosive detector, particularly a kind of piezoelectric base unit micro-solid mode resonant mode explosive detection device that adopts the processing of MEMS technology.
Background technology
In recent years, the terrorist bombings attack frequently takes place in the scope of countries in the world, and is to occur in the places that the crowd is dense such as subway station, airport mostly, serious harm the people's safety of life and property.This makes the development of explosive detection device become urgent task of various countries' researcher, yet because explosive is of a great variety, packing is more and more exquisite, hidden, and the diversity of target is surveyed accurately and timely explosive like this and become very difficult.Traditional sniffer volume is big, expensive, further raising is also treated in portable bad, sensitivity, and the device that has adopts radiation or intervention property mechanism to survey, and can produce to a certain degree destruction or injury to being detected object.Present stage to low price, have high selectivity, non-intervention, highly sensitive explosive detection device active demand arranged, if such sensor can be realized miniaturization, just can utilize them to realize portable detection in different places.
Enter after the nineties in last century, microelectromechanical systems (MEMS) begins to have obtained comprehensive development.Because the MEMS device has that volume is little, quality is light, low in energy consumption, cost is low, reliability is high, excellent performance, multi-functional integrated, characteristics such as can produce in batches, along with reaching its maturity of MEMS technology, people also are applied to the MEMS technology in the research work of explosive detection device, and develop various samples based on the MEMS technology, its simple and practical structure makes the explosive detection device realize that miniaturization, low cost, high precision become possibility.MEMS detection of explosives technology adopts the silicon beam as sensitive structure usually, the silicon beam directly contacts with the explosive sample, by thermal excitation or light stimulus, explosive is reacted, the physical quantity such as temperature, displacement, stress, resonance frequency that causes the silicon beam changes, and surveys with optics or electrical method.According to the difference of the physical quantity of tested silicon beam, it is divided into four kinds of thermometry, displacement method, pressure drag method, resonance method.Existing MEMS explosive detection device all is to adopt micro cantilever structure, and cantilever beam structure exists some significantly not enough.As: the rigidity of semi-girder is low, and resonance frequency is difficult to further raising, and is subjected to impact or the vibrations interference of external environment easily; The quality of vibration factor of cantilever beam structure under condition of normal pressure is not high, generally all be to be operated under the vacuum condition, and the explosive detection device must be communicated with the ambient atmos environmental facies, can not carry out Vacuum Package, this has limited the raising of the measurement sensitivity of resonant mode semi-girder MEMS explosive detection device.
Summary of the invention
The present invention is directed to the deficiency that existing explosive detection technology exists, propose a kind of simple in structure, easy to process, be quick on the draw and piezoelectric base unit micro-solid mode resonant mode explosive detection device that antijamming capability is strong, utilize Piezoelectric Driving excitation minute-pressure electricity solid under special mode of oscillation, to move, and on reference electrode, resonance frequency is carried out tracking measurement.
To achieve these goals, technical solution of the present invention is as follows:
Piezoelectric base unit micro-solid mode resonant mode explosive detection device of the present invention comprises piezoelectric base unit, drive electrode, reference electrode, heating resistor, insulation course and explosive selective adsorption film.Piezoelectric base unit adopts minute-pressure electricity solid structure, and the left and right sides of piezoelectric base unit upper and lower surface is distributed with drive electrode and reference electrode, heating resistor, insulation course and adsorption film, and these parts are symmetrical fully in the left and right sides of piezoelectric base unit upper and lower surface.Arrange a drive electrode, a reference electrode respectively in the left and right sides of adsorption film, drive electrode is used for the guiding detector and begins vibration, and reference electrode is mainly used in obtaining the vibrational state of detector, observes minute-pressure electricity solid change of resonance frequency situation.The effect of described explosive selective adsorption film mainly is the explosive molecule in the absorption surrounding air, surface of explosive selective adsorption film connects piezoelectric base unit, there is one deck heating resistor on this surface of described adsorption film, effect is after finishing explosive detection, explosive is heated, make its fusing or oxidation, for detection is next time prepared.Heating resistor and have between the piezoelectric base unit surface of adsorption film a layer insulating is arranged, its effect mainly is to avoid the distortion of piezoelectric base unit harmonic moving to the influence of explosive selective adsorption rete.
Described insulation course adopts polyimide, aluminium oxide or silicon dioxide etc.
Described piezoelectric base unit is rectangular shape, and material is piezoelectric, is generally PZT, quartz, lithium niobate.Mainly be to realize conversion between mechanics and the electrical signal for the piezoelectric effect of utilizing piezoelectric.
Described drive electrode and reference electrode adopt metal material, can select copper, platinum, silver slurry etc.
The effect of described explosive selective adsorption film mainly is the explosive molecule in the absorption surrounding air, as explosive compositions such as nitro-aromatic, superoxide, nitro ester classes, also can suppress simultaneously the non-specific adsorption of hydrone in the surrounding air or oil molecule etc.
Upper frequency equates with amplitude when adding respectively on the drive electrode of both sides up and down at piezoelectric base unit, during the two-way sinusoidal voltage of 180 ° of phasic differences mutually, drive electrode conducts to piezoelectric base unit with voltage, and the piezoelectric base unit part under the drive electrode is because piezoelectric activity produces stretching and compression movement in its polarised direction.Accordingly, the two ends, the left and right sides of little solid piezoelectric matrix also are subjected to stretching and the stress effect of compression movement thereupon, thereby produce electric charge, and the electric charge of generation can record by reference electrode, has reacted the motion conditions of little solid.Little solid is carried out frequency sweep, according to the change in voltage situation that produces on the reference electrode, can obtain the resonance frequency of little solid, it is relevant with factors such as the overall dimensions of material self character and material and quality, therefore, when explosive dropped on the adsorption film, variation had taken place in the quality of detector, then its resonance frequency also changes, and this can survey by the output of reference electrode.
Existing MEMS explosive detection device all is to adopt micro cantilever structure, awaits further raising but interference performances such as cantilever beam structure rigidity is low, shock resistance or vibrations are poor, the quality of vibration factor under the condition of normal pressure is not high, measure sensitivity.Detector of the present invention takes full advantage of the kind that minute-pressure electricity solid change of resonance frequency is come detection of explosives, does not need to introduce complicated optical system from the outside, can realize the miniaturization of detection system.This minute-pressure electricity solid is operated under the special mode of oscillation, and its resonance frequency can reach tens even the hundreds of megahertz, has very high rigidity, and shock resistance, anti-shake performance are good.Minute-pressure electricity solid utilizes its special bulk acoustic wave resonance mode work, has higher quality factor under normal pressure, does not therefore need Vacuum Package, can obtain higher sensitivity.
Description of drawings
Fig. 1 is one embodiment of the invention structural representation;
Fig. 2 is that one embodiment of the invention detector is to the selective adsorption schematic diagram of mechanism of explosive molecule; Wherein: (a) for before the adsorption film absorption explosive, (b) for after the adsorption film absorption explosive;
Fig. 3 is one embodiment of the invention fundamental diagram.
Embodiment
Below embodiments of the invention are elaborated, present embodiment is prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, explosive detection device of the present invention is relatively simple for structure, and the material of piezoelectric base unit 6 is PZT, in the process of detection of explosives, utilized the piezoelectric effect of this material, also can select quartz or lithium niobate, it is shaped as rectangular parallelepiped, can select 4mm * 5mm * 0.2mm specification for use.The electrode material of both sides, surface is copper, also can select platinum or silver slurry.The electrode one of both sides, surface has 8, comprises drive electrode and reference electrode, and wherein the 1,11,12, the 21st, drive electrode, 5,9,14,17 are reference electrode.Drive electrode about upper and lower surface and surface and reference electrode all are symmetrical fully.Drive electrode is used for guiding detector to begin vibration, drive electrode 1 when the piezoelectric base unit both sides, 11 and 12, add simultaneously between 21 that upper frequency and amplitude equate, during the two-way sinusoidal voltage of 180 ° of phasic differences mutually, according to the inverse piezoelectric effect of piezoelectric base unit, piezoelectric base unit 6 left and right sides (from Fig. 1) produce respectively and stretch and compression; The effect of reference electrode is the vibrational state that obtains the explosive detection device, in order to extract resonance frequency.When piezoelectric base unit 6 left and right sides (from Fig. 1) produced stretching and compression respectively, because piezoelectric effect will produce corresponding voltage at reference electrode, the driving voltage frequency that produces the magnitude of voltage maximum namely was the resonance frequency of detector.
As shown in Figure 2, in the present embodiment, explosive selective adsorption film is provided with 4 altogether, is respectively two adsorption films 10 that are positioned at piezoelectric base unit 6 upper surfaces, 13, be positioned at two adsorption films 2,20 of piezoelectric base unit 6 lower surfaces, these four adsorption films 2,10, a side of 13,20 is arranged a drive electrode, and opposite side is arranged a reference electrode.Wherein drive electrode is positioned at the centre of last two adsorption films in same surface, and reference electrode is positioned at the outside of last two adsorption films in same surface.
In the present embodiment, explosive selective adsorption film 2,10,13,20 can adopt the pressure drag silicon dioxide layer of two self-assembled films (SAM): 6-sulfydryl Nicotinicum Acidum (6-MNA) self-assembled film and 17 fluorine decyl trimethoxy silane (FAS-17) self-assembled films.As a specific inductive layer, 6-MNA self-assembled film (SAM) is mainly used to adsorb the explosive molecule, shown among Fig. 2 22.This 6-MNA self-assembled film has level identification and contains-ability of NO2 group explosive, and main cause is to contain among the 6-MNA-the COOH group, in the middle of it and the explosive-have strong hydrogen bonding effect between the NO2 group; Yet unfortunately, the same possess hydrophilic property of silica surface has the non-specific adsorption ability to water or wet goods molecule in the wet environment on every side, will make the explosive detection result insincere like this.In order to address this problem, add last layer low-surface-energy and hydrophobic FAS-17 self-assembled film (SAM) at silica surface, so just solved the non-specific adsorption problem of silicon dioxide meter in the face of water or wet goods molecule.Detector to the selective adsorption mechanism of explosive molecule as shown in Figure 2.In addition, the material of explosive selective adsorption film also has some other selection, such as, polymkeric substance (as polysiloxane, organic polymer, Polycarbosilane), salt and silica gel etc.
Surface of explosive selective adsorption film is on piezoelectric base unit 6, and there is one deck heating resistor 3,8,15,19 on this surface of described adsorption film, is used for explosive is heated.The effect of heating resistor is after the detection of the kind of carrying out explosive, and explosive is heated to a certain temperature, makes the explosive fusing or the oxygenolysis that are adsorbed on detector surface, in order to carry out detection next time.
Every layer of heating resistor and have between the piezoelectric base unit surface of adsorption film a layer insulating 4,7,16,18 is all arranged adopts polyimide, aluminium oxide or silicon dioxide etc.Effect is to avoid the harmonic moving distortion of minute-pressure electricity matrix to the influence of explosive selective adsorption rete.
As shown in Figure 3, the principle of work of the above-mentioned explosive detection device of present embodiment is as follows: at the drive electrode 1 of detector, 11 and 12, add between 21 that upper frequency and amplitude equate, the two-way sinusoidal voltage of 180 ° of phasic differences mutually, drive electrode conducts to piezoelectric base unit 6 with voltage, piezoelectric base unit part under the drive electrode is because the piezoelectric activity of piezoelectric base unit produces stretching and compression movement in its polarised direction, and as shown in Figure 3, the direction of arrow is represented the piezoelectrics travel direction.Accordingly, the two ends, the left and right sides of little solid piezoelectric matrix also are subjected to stretching and the stress effect of compression movement thereupon, the piezoelectric base unit left and right sides is because piezoelectric effect produces electric charge at reference electrode 5,9,14,17, so can be observed the size variation situation of output voltage at reference electrode.With such two-way sinusoidal voltage detector is carried out frequency sweep, can be observed reference electrode 5,9,14,17 voltage swing, the driving voltage frequency of correspondence was the resonance frequency of detector when wherein voltage was maximum.After being adsorbed with explosive 22 on the explosive selective adsorption film 2,10,13,20, because the increase of detector quality, resonance frequency will descend to some extent, and the voltage on the reference electrode 5,9,14,17 descends.According to the situation of change of voltage on the drift situation of resonance frequency and the reference electrode, can extrapolate kind and the concentration of explosive.Be heated to a certain temperature by 3,8,15,19 pairs of explosives of heating resistor at last, explosive just can evaporate because of fusing or oxidation, for detection of explosives is next time prepared.
The present invention proposes a kind of novel explosive detection device structure-little solid structure, utilize the peculiar high resonance frequency of this structure, the vibration to external world of explosive detection device has stronger antijamming capability, simultaneously, minute-pressure electricity solid utilizes its special bulk acoustic wave resonance mode work, has higher quality factor under normal pressure, even be adsorbed with micro explosive on the detector, also can cause the significant change of resonance frequency, so just increase detector sensitivity greatly.In addition, this panel detector structure is simple, processes more conveniently, greatly reduces manufacturing cost.
Although content of the present invention has been done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple modification of the present invention with to substitute all will be apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (6)
1. piezoelectric base unit micro-solid mode resonant mode explosive detection device, it is characterized in that comprising piezoelectric base unit, drive electrode, reference electrode, heating resistor, insulation course and explosive selective adsorption film, wherein: piezoelectric base unit adopts minute-pressure electricity solid structure, the left and right sides of piezoelectric base unit upper and lower surface is distributed with drive electrode and reference electrode, heating resistor, insulation course and explosive selective adsorption film, these parts are symmetrical fully in the left and right sides of piezoelectric base unit upper and lower surface, arrange a drive electrode respectively in the left and right sides of described adsorption film, a reference electrode, surface of described adsorption film connects piezoelectric base unit, this surface of described adsorption film is provided with one deck heating resistor, between this heating resistor and the described piezoelectric base unit surface layer insulating is arranged;
Described explosive selective adsorption film is respectively two adsorption films that are positioned at the piezoelectric base unit upper surface, be positioned at two adsorption films of piezoelectric base unit lower surface, the both sides of these four adsorption films are arranged a drive electrode, a reference electrode respectively, wherein drive electrode is positioned at the centre of last two adsorption films in same surface, and reference electrode is positioned at the outside of last two adsorption films in same surface;
Described drive electrode and reference electrode all adopt metal material, upper frequency equates with amplitude, the two-way sinusoidal voltage of 180 ° of phasic differences mutually adding between the drive electrode of piezoelectric base unit surface central authorities, two ends, the detector left and right sides will produce simultaneously because of the piezoelectric effect of drive electrode and stretch and compression, forcing reference electrode also to produce stretches or compression movement, the reference electrode at two ends, the left and right sides is observed the change of resonance frequency situation because piezoelectric effect produces electric charge at the reference electrode of piezoelectric base unit both sides.
2. piezoelectric base unit micro-solid mode resonant mode explosive detection device according to claim 1 is characterized in that, described explosive selective adsorption film adopts the pressure drag silicon dioxide layer of two SAM: 6-MNA self-assembled film and FAS-17 self-assembled film.
3. piezoelectric base unit micro-solid mode resonant mode explosive detection device according to claim 1 is characterized in that, described explosive selective adsorption membrane material adopts polymkeric substance, or salt.
4. piezoelectric base unit micro-solid mode resonant mode explosive detection device according to claim 3 is characterized in that described polymkeric substance is polysiloxane, or Polycarbosilane.
5. piezoelectric base unit micro-solid mode resonant mode explosive detection device according to claim 1 is characterized in that described piezoelectric base unit material is PZT, quartz, or lithium niobate.
6. piezoelectric base unit micro-solid mode resonant mode explosive detection device according to claim 1 is characterized in that described piezoelectric base unit is rectangular shape.
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| JP6863009B2 (en) * | 2017-03-31 | 2021-04-21 | Ｉ−Ｐｅｘ株式会社 | Substance detection element |
| CN108872063B (en) * | 2018-09-07 | 2023-11-07 | 吉林大学 | Trace substance detection device and method based on parameter excitation and synchronous resonance |
| WO2020066295A1 (en) * | 2018-09-27 | 2020-04-02 | 第一精工株式会社 | Substance detection element |
| CN109297840B (en) * | 2018-11-23 | 2021-09-17 | 辽宁工程技术大学 | Method and device for testing mechanical fatigue of pulse voltage induced thin film material |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4373136A (en) * | 1980-01-17 | 1983-02-08 | Graviner Limited | Fire and explosion detection |
| CN1474179A (en) * | 2003-07-19 | 2004-02-11 | 中国科学院合肥智能机械研究所 | Method for detecting solid explosive particles |
| CN1525162A (en) * | 2003-09-16 | 2004-09-01 | 中国科学院合肥智能机械研究所 | Explosive detector and manufacturing method |
| CN2938088Y (en) * | 2006-07-14 | 2007-08-22 | 中国科学院声学研究所 | Micro-mass sensor for minature mass measurement |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2613752B2 (en) * | 1995-02-15 | 1997-05-28 | 防衛庁技術研究本部長 | Test method for stability of explosives |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4373136A (en) * | 1980-01-17 | 1983-02-08 | Graviner Limited | Fire and explosion detection |
| CN1474179A (en) * | 2003-07-19 | 2004-02-11 | 中国科学院合肥智能机械研究所 | Method for detecting solid explosive particles |
| CN1525162A (en) * | 2003-09-16 | 2004-09-01 | 中国科学院合肥智能机械研究所 | Explosive detector and manufacturing method |
| CN2938088Y (en) * | 2006-07-14 | 2007-08-22 | 中国科学院声学研究所 | Micro-mass sensor for minature mass measurement |
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| JP特开平8－220039A 1996.08.30 |
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