CN102492982A - Guide protector for high-temperature melt leak of singe crystal furnace - Google Patents
Guide protector for high-temperature melt leak of singe crystal furnace Download PDFInfo
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- CN102492982A CN102492982A CN2011104140981A CN201110414098A CN102492982A CN 102492982 A CN102492982 A CN 102492982A CN 2011104140981 A CN2011104140981 A CN 2011104140981A CN 201110414098 A CN201110414098 A CN 201110414098A CN 102492982 A CN102492982 A CN 102492982A
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- temperature melt
- crucible
- high temperature
- leak
- annulus
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Abstract
The invention discloses a guide protector for high-temperature melt leak of a single crystal furnace, which comprises a graphite crucible and a crucible support disposed at the bottom of the graphite crucible. The guide protector is characterized in that an annular projection is arranged on the lower surface of the crucible support. The guide protector in the structural design is capable of leading high-temperature melt leak to flow to the crucible support through a slit of the graphite crucible, the high-temperature melt cannot flow to a corrugated pipe along a link shaft but drop to a guard board at the bottom of the furnace along an annular outer wall when meeting the annular projection at the lower end of a crucible base, and accordingly, damage of the corrugated pipe by the leak can be prevented, and safety of a thermal system is guaranteed.
Description
Technical field
The present invention relates to single crystal growing furnace high temperature melt escape protection device field, particularly a kind of high temperature melt leaks the guiding protector.
Background technology
In the change material and crystal pulling process of pulling of crystals preparation; Because impurity problem in quartz crucible quality problems or the polycrystal; Can cause the liquid melt (like molten silicon) under the high temperature to penetrate quartz crucible from the accident of three lobe plumbago crucible slit flow to furnace bottom; For preventing furnace bottom and furnace bottom top electrode, crucible shaft damage or burning, adopt furnace bottom to stack ways such as furnace bottom backplate, furnace bottom carbon felt, electrode quartz sheath, electrode graphite sheath, connecting rod graphite sheath at present, obtain certain effect; But for preventing that the high temperature melt from flowing to the damage that is caused in the crucible shaft enclosed housing of furnace bottom, but do not see any counter-measure.This damage is very serious, flows in the crucible shaft enclosed housing of furnace bottom along pitman shaft from three lobe plumbago crucible slit effusive high temperature melt parts, makes the intravital corrugated tube in chamber burn because of the too high melt of contact temperature.And then cause in the stove suck-back to go into a large amount of air, and making the graphite piece severe oxidation under the high temperature, this has not only damaged the work-ing life that corrugated tube has also shortened hot system greatly.
In sum, to the defective of prior art, need a kind of single crystal growing furnace high temperature melt to leak the guiding protector especially, with the problem of mentioning more than solving.
Summary of the invention
The object of the present invention is to provide a kind of single crystal growing furnace high temperature melt to leak the guiding protector,, thereby realize the object of the invention through the structure design that adopts.
The technical problem that the present invention solved can adopt following technical scheme to realize:
A kind of single crystal growing furnace high temperature melt leaks the guiding protector, comprises at the bottom of plumbago crucible and the crucible tray that is arranged at the plumbago crucible bottom, it is characterized in that the lower surface at the bottom of the said crucible tray is provided with the annulus convexity.
In one embodiment of the invention, said annulus projection diameter scope is the 150-180 millimeter, and altitude range is the 10-40 millimeter, and thickness range is the 4-8 millimeter.
In a preferred embodiment of the invention, the protruding optimum diameter of said annulus is 175 millimeters, and optimum height is 30 millimeters, and optimum thickness is 5 millimeters.
In one embodiment of the invention, said annulus convexity is cylindricality or top and is the cylindricality bottom and is trapezoidal.
Beneficial effect of the present invention is: be mainly used in Lou material guiding; Make liquid high-temperature fusant can not flow to corrugated tube along pitman shaft; Leak the loss that the material accident causes thereby very alleviate effectively; Decapacitation is saved outside the corrugated tube, more can protect the hot system high temperature under, prevents the interior and hot system of severe oxidation of air admission stove.
Description of drawings
Fig. 1 is the synoptic diagram that a kind of single crystal growing furnace high temperature melt of the present invention leaks the guiding protector.
Embodiment
For technique means, creation characteristic that the present invention is realized, reach purpose and effect and be easy to understand and understand, below in conjunction with embodiment, further set forth the present invention.
As shown in Figure 1, a kind of single crystal growing furnace high temperature melt of the present invention leaks the guiding protector, comprises at the bottom of plumbago crucible 1 and the crucible tray that is arranged at plumbago crucible 1 bottom 2, and 2 lower surface is provided with annulus protruding 3 at the bottom of the said crucible tray.
Said annulus projection diameter scope is the 150-180 millimeter, and altitude range is the 10-40 millimeter, and thickness range is the 4-8 millimeter, the confirming with the crucible position that annulus does not contact with the furnace bottom backplate when minimum and be as the criterion of the protruding maximum height of annulus in this device.The internal radius minimum size should be greater than furnace bottom crucible shaft graphite guard ring external diameter, and is column type or top and is the column type bottom and is ladder type, and annulus external diameter overall dimension to be being as the criterion for 3 centimetres apart from the electrode graphite guard ring, and is column type.
In a preferred embodiment of the invention, the protruding optimum diameter of said annulus is 175 millimeters, and optimum height is 30 millimeters, and optimum thickness is 5 millimeters.
This structure design can let take place to leak the slit of material back high temperature melt through plumbago crucible and flows at the bottom of the crucible tray; The high temperature melt can run into the annulus convexity at the stool lower end then; Thereby can drip to the furnace bottom backplate along the annulus outer wall; Rather than flow to corrugated tube along pitman shaft, and cause when can prevent the leak-stopping material the ripple pipe fracture, more ensured the security of hot system.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand; The present invention is not restricted to the described embodiments; That describes in the foregoing description and the specification sheets just explains principle of the present invention; Under the prerequisite that does not break away from spirit and scope of the invention, the present invention also has various changes and modifications, and these variations and improvement all fall in the scope of the invention that requires protection.The present invention requires protection domain to be defined by appending claims and equivalent thereof.
Claims (4)
1. a single crystal growing furnace high temperature melt leaks the guiding protector, comprises at the bottom of plumbago crucible and the crucible tray that is arranged at the plumbago crucible bottom, it is characterized in that the lower surface at the bottom of the said crucible tray is provided with the annulus convexity.
2. a kind of single crystal growing furnace high temperature melt according to claim 1 leaks the guiding protector, it is characterized in that said annulus projection diameter scope is the 150-180 millimeter, and altitude range is the 10-40 millimeter, and thickness range is the 4-8 millimeter.
3. a kind of single crystal growing furnace high temperature melt according to claim 1 leaks the guiding protector, it is characterized in that, the protruding optimum diameter of said annulus is 175 millimeters, and optimum height is 30 millimeters, and optimum thickness is 5 millimeters.
4. a kind of single crystal growing furnace high temperature melt according to claim 1 leaks the guiding protector, it is characterized in that, said annulus convexity is cylindricality or top and is the cylindricality bottom and is trapezoidal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104140981A CN102492982A (en) | 2011-12-13 | 2011-12-13 | Guide protector for high-temperature melt leak of singe crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104140981A CN102492982A (en) | 2011-12-13 | 2011-12-13 | Guide protector for high-temperature melt leak of singe crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102492982A true CN102492982A (en) | 2012-06-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011104140981A Pending CN102492982A (en) | 2011-12-13 | 2011-12-13 | Guide protector for high-temperature melt leak of singe crystal furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN102492982A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090175767A1 (en) * | 2008-01-03 | 2009-07-09 | Green Energy Technology Inc. | Crystal-growing furnace having slurry drainage duct structure |
| CN201351184Y (en) * | 2008-12-29 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Anti-burnout graphite unit for single-crystal furnace |
| CN201801643U (en) * | 2010-09-28 | 2011-04-20 | 青岛华世洁环保科技有限公司 | Air distribution structure of drying oven for production of high-strength high-modulus polyethylene fibers |
| CN102220630A (en) * | 2011-06-03 | 2011-10-19 | 奥特斯维能源（太仓）有限公司 | Mono-crystal furnace capable of protecting against silicon leakage |
-
2011
- 2011-12-13 CN CN2011104140981A patent/CN102492982A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090175767A1 (en) * | 2008-01-03 | 2009-07-09 | Green Energy Technology Inc. | Crystal-growing furnace having slurry drainage duct structure |
| CN201351184Y (en) * | 2008-12-29 | 2009-11-25 | 嘉兴嘉晶电子有限公司 | Anti-burnout graphite unit for single-crystal furnace |
| CN201801643U (en) * | 2010-09-28 | 2011-04-20 | 青岛华世洁环保科技有限公司 | Air distribution structure of drying oven for production of high-strength high-modulus polyethylene fibers |
| CN102220630A (en) * | 2011-06-03 | 2011-10-19 | 奥特斯维能源（太仓）有限公司 | Mono-crystal furnace capable of protecting against silicon leakage |
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Application publication date: 20120613 |