CN102465265A - Target material and its application in recording layer material of magnetic recording media - Google Patents
Target material and its application in recording layer material of magnetic recording media Download PDFInfo
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- CN102465265A CN102465265A CN2010105378259A CN201010537825A CN102465265A CN 102465265 A CN102465265 A CN 102465265A CN 2010105378259 A CN2010105378259 A CN 2010105378259A CN 201010537825 A CN201010537825 A CN 201010537825A CN 102465265 A CN102465265 A CN 102465265A
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- oxide
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Abstract
The invention discloses a target material, which is formed by the main material of: CoPt-copper oxide-oxide or CoCrPt-copper oxide-oxide or CoCrPtB-copper oxide-oxide. The added copper oxide is the main technological characteristic. With the application of the target material in the sputtering process of a recording layer material of a magnetic recording media, the sputtering process is stable and the required thickness of an intergranular layer of magnetic particles in the recording layer can be reduced. In addition, thermal stability is high. Therefore, recording density of the recording layer of the magnetic recording media can be raised, and recording capacity of the whole storage media is enhanced.
Description
Technical field
The invention relates to a kind of Storage Media, especially a kind of target and be used in the recording layer material of magnetic record medium.
Background technology
The magnetic recording of hard disc is according to magnetized direction at present; Can be divided into horizontal recording (longitudinal magnetic recording) and two kinds of perpendicular recordings (perpendicular magnetic recording); The horizontal recording DOM is the surface of parallel video disc, and the perpendicular recording DOM then is vertical disc surface.The structure of rectilinear recording medium comprises substrate (glass or aluminium), adhesion layer, soft magnetosphere (soft underlayer), crystal seed layer (seed layer), middle layer (intermediate layer), recording layer (recording layer), tectum (covering layer) and lubricant film (lubricative layer); As shown in Figure 1, wherein most important gordian technique institute recording layer in sight.As shown in Figure 2; Reported literature IEEETrans.Magn. points out in 38 (2002) 1976, in the magnetic recording layer of very thin CoPt base, adds oxide compound; Can effectively make oxide compound be segregated in crystal boundary and do not destroy the crystalline structure (comprising HCP phase (Hexagonal close packed) and c-axis orientation) of cobalt-based magnetic crystal grain; And then crystal grain thinning (grain size＜10nm), promote the signal noise than (signal-to-noise ratio, purpose SNR) to reach.
As previously mentioned; By the microstructure that obtains particulate state magneticthin film (granular magnetic thin film); And good magnetic property (magnetic properties); The performance (recording performance) of thermostability (thermal stability) and readwrite tests makes that the development of the rectilinear recording medium of high-density no longer is out of reach.As shown in Figure 1; The recording layer of hard disc generally has the multiwalled structure now; Wherein be called Mag.1 near the first layer in middle layer, up be successively the second layer (Mag.2), the 3rd layer (Mag.3) ..., the membrane structure of Mag.1 is that ferromagnetic particle is uniformly distributed in the oxide compound; Come magnetic-particle is isolated by not having an oxide compound of magnetic, to reduce the noise of recording medium.
According to document Appl.Phys.Lett.95:102507 (2009); As shown in Figure 3; Only need to point out single atomic shell oxide compound can reach the isolated effect of good magnetic in it in the literary composition; But traditional magnetic recording layer needs thick in the oxide compound grain boundary layer more than the 1nm (grain boundary is called for short G.B.), could effectively completely cut off magnetic exchange coupling (magnetic exchange coupling); Should be that the oxide compound that completely cuts off can contain the partly Co-A-O compound of the weak magnetic of tool by inference, wherein A be for being selected from silicon (Si), titanium (Ti), tantalum (Ta), chromium (Cr), niobium (Nb), hafnium (Hf), zirconium (Zr), tungsten (W), yttrium elements such as (Y); Cause in the recording layer now oxide thickness still need >=1nm could the magnetic coupling between magnetic-particle (magnetic coupling) be reduced to and level off to zero, and have following point:
1. for reducing noise, it is isolated that the amount that needs to increase more oxide compound is reached good magnetic-particle; But oxide compound adds when too many, understands some oxide compound and runs in the degaussing property particle, causes noise to increase on the contrary.
2. in the sputter process,, influence the plated film quality, cause sedimentary film can't meet quality requirements if target exists more oxide compound then to be prone to make the regional area of target material surface to produce arc-over (arcing).
In the open case US2006286414A1 of the U.S., point out in addition; Use the target of major ingredient as CoPt-oxide compound (CoPt-oxide) or CoCrPt-oxide compound (CoCrPt-oxide) or CoCrPtB-oxide compound; Wherein add again and be insoluble to Co and reduction potential element greater than-0.03eV; Form the recording layer of hard disc in order to sputter, in the middle of the unit that meets have elements such as Cu, Ag, Au; This case only points out that the target major ingredient is to add the Cu element, but not CuO.Can reduce the magnetic coupling phenomenon and improve signal noise ratio though the technique means that is provided in the open case of the above-described document and the U.S. points out to add an amount of oxide compound; But still a kind of target can't be provided and be used in the recording layer material of magnetic record medium, the too much problem that produces of existing oxide compound can be directly improved in the sputter process and G.B. oxide thickness required in the recording layer can be reduced.
Summary of the invention
For solving the above problems; Being necessary to develop a new composition forms; Its contained oxide content of this target need not can obtain good signal noise ratio too much, and the present invention provides a kind of target and is used in the recording layer material of magnetic record medium, is the design axle center with the cupric oxide; Utilize and add cupric oxide in this target; Make and to utilize the recording layer film of the magnetic record medium that this target sputter forms to have the characteristic of good signal noise ratio, the recording density of the recording layer of this magnetic record medium can up promote, and improves the recording capacity of whole Storage Media.
Technique means provided by the present invention is to provide a kind of target, and it is formed by adding oxide composition in master's the material again with CoPt or CoCrPt or CoCrPtB; Wherein this oxide composition includes cupric oxide (CuO) and at least one group that is made up of following person that is selected from: titanium oxide (TiO
2), chromic oxide (Cr
2O
3), tantalum oxide (Ta
2O
5), niobium oxides (Nb
2O
5), yttrium oxide (Y
2O
3), zirconium white (ZrO
2), hafnia (HfO
2); This target is made via the method for making that may further comprise the steps:
Form prealloy: with the earlier synthetic prealloy of above-mentioned any target compound;
Make powder: prealloy is processed powder;
Mix powder: with this powder mix with oxide compound or again with the target elements composition in other elements or pre-alloyed powder mix with oxide compound; And
Sintering: mixed powder forms this target behind sintering.
Preferable, described target wherein further includes silicon oxide in this oxide composition.
Preferable, the present invention provides a kind of recording layer material of magnetic record medium, and it is to be formed by aforementioned target institute sputter.
Preferable, the recording layer material of described magnetic record medium, it is the recording layer material that is used for hard disc.
Target provided by the present invention and be used in the recording layer material of magnetic record medium, advantage that can obtain and effect are promoted to be had:
Contain the cupric oxide composition in this target; And this target is used in the sputter process of recording layer material of this magnetic record medium; Can reduce the required thickness of magnetic-particle grain boundary layer in this film in the film behind sputter; It is less to mean oxide content contained in this sputtered target material, can make sputter process comparatively stable; In case the thickness of this magnetic-particle grain boundary layer reduces, during then identical bit length, the volume of magnetic-particle is bigger, and this moment, thermostability was also preferable; If the size of magnetic-particle is the same, then the recording density of the recording layer of this magnetic record medium can up promote at this moment, improves the recording capacity of whole Storage Media.
Description of drawings
Fig. 1 is the structure of the rectilinear recording medium commonly used.
Fig. 2 is the microtexture (reported literature IEEE Trans.Magn., 38:1976 (2002)) of CoPtCr-oxide film under transmission electron microscope.
Fig. 3 is the recording layer structure synoptic diagram that the nothing commonly used is added cupric oxide.
Fig. 4 is the recording layer structure synoptic diagram that the present invention adds cupric oxide.
Embodiment
Being can detail knowledge technical characterictic of the present invention and practical effect, and can implement according to the content of specification sheets, existing further with as shown in graphic and specify as follows:
Target provided by the present invention and to be used in the recording layer material preferred embodiment of magnetic record medium as shown in Figure 4.
The present invention provides a kind of recording layer material of magnetic record medium, and it is formed by adding oxide composition in master's the material again with CoPt or CoCrPt or CoCrPtB; Wherein this oxide composition includes cupric oxide (CuO) and at least one group that is made up of following person that is selected from: titanium oxide (TiO
2), chromic oxide (Cr
2O
3), tantalum oxide (Ta
2O
5), niobium oxides (Nb
2O
5), yttrium oxide (Y
2O
3), zirconium white (ZrO
2), hafnia (HfO
2) with and etc. combination.
In other words; The present invention provides a kind of target; It is used to form the recording layer material of a magnetic record medium; This target becomes to be grouped into CoPt or CoCrPt or CoCrPtB and is formed by adding oxide compound in the master's material again, and oxide compound wherein is to be selected from the group that titanium oxide, chromic oxide, tantalum oxide, niobium oxides, yttrium oxide, zirconium white or hafnia are constituted more than one of them and with cupric oxide.
Above-mentioned target is made via the method for making that may further comprise the steps:
Form prealloy: with the earlier synthetic prealloy of above-mentioned any target compound;
Make powder: prealloy is processed powder;
Mix powder: with this powder mix with oxide compound or again with other these target elements compositions in other elements or pre-alloyed powder mix with oxide compound;
Sintering: mixed powder forms this target behind sintering.
Preferable, in the oxide composition in the aforementioned target, wherein further include silicon oxide.
The recording layer material of this magnetic record medium provided by the present invention, it is to use like this above-mentioned target sputter and forms.
By the recording layer material of above-mentioned magnetic record medium, it is the recording layer material that is used for hard disc.
The recording layer material of this magnetic record medium thus in the technical field known sputtering way accomplish, such as, be not limited to: ionic fluid sputtering method, electronics electricity slurry method etc.
In of the present invention one preferable concrete example system through obtained by the method that may further comprise the steps:
Prepare one and comprise each layers such as adhesion layer, soft magnetosphere, crystal seed layer, middle layer under having deposited the recording layer of perpendicular recording formula recording medium; That is be deposited into the substrate in middle layer; (Ar) is the sputter that working gas carries out aforementioned target with argon gas, on the middle layer, forms recording layer;
After will having the target sputter that contains cupric oxide and oxygen-free copper to form the recording layer film; Utilize vibrating example magnetizer (VSM; Vibrating sample magnetometer) measures the Coercive Force (Hc) and the nucleation field (Hn of its sputter rear film; And calculate normalization and go to exchange coupling ((Hc-Hn)/Hc), Normalized Exchange decouple) nucleation field); Can be known that by table one contain the film of the target institute sputter formation of cupric oxide, it is higher that its normalization goes to exchange the coupling value, this expression adds the decoupling effect that cupric oxide can be promoted the oxide compound grain boundary layer really.
Table one
By shown in the table one, contain the film of the target institute sputter formation of cupric oxide, wherein silicon oxide forms agent (glass former) as glass, and it is more level and smooth to make its film can form fine and close grain boundary layer and its surface; By other oxide compounds (like TiO
2Or Cr
2O
3) with cupric oxide than the trend of Yi Jianjie, the amount that makes its Co be present in the oxide compound grain boundary layer reduces, reaching has isolated effect on magnetic; Appeared by data results in the table one, under identical silicon oxide, titanium oxide and chromic oxide atomic percent, there have the normalization of the experimental group of cupric oxide to go to exchange the coupling value to be higher, and this expression cupric oxide has the decoupling effect of promoting the oxide compound grain boundary layer really.
Said by previous document, this magnetic recording layer needs thickly just can reach the effect of decoupling (decoupling) to the oxide compound grain boundary layer more than the 1nm, and with viewpoint what follows, the present invention provides a target to solve this above-mentioned restriction:
1. provide following element or and oxide compound: X, X-O, X-A-O; Aforementioned elements or and oxide compound all not solid solution in Co; Or be difficult for and Co formation compound; Central X is not for belonging to the element of Co, Pt, and wherein X is that Cu is preferable, and A is for being selected from titanium (Ti), chromium (Cr), tantalum (Ta), niobium (Nb), yttrium (Y), zirconium (Zr), hafnium elements such as (Hf).
2. the Ji Bushi free energy (Gibbs free energy) of central formation X-A-O oxide compound comes lowly than Co-A-O; So can form the X-A-O oxide compound of low free energy; And its X-A-O oxide compound can stable existence than the Co-A-O oxide compound, in order to carrying out follow-up process operations.
3. central X-A-O is paramagnetic (paramagnetic) or anti-magnetic (diamagnetic); Be that X-A-O is not to be ferromegnetism (ferromagnetic); So its grain boundary oxide of film behind the sputter will have preferable uncouple combination and segregation effect; Can effectively improve the signal noise ratio of this thin film layer, and must not use very many oxide compounds.
By shown in the table two; Each oxide compound forms the reactivity of new oxidising composition each other; Element Cu, Ag, Au solid solution are all very low in the amount of Co, wherein have only Cu-O to be prone to form compound with A-O, and remaining Ag-O and Au-O all are difficult for forming stable compound with A-O; So select for use Cu-O to make an addition in the original C oPt-oxide compound, in order to follow-up process operations; By A-O oxide compound and the cupric oxide trend than Yi Jianjie, the amount that makes its Co be present in the oxide compound grain boundary layer reduces, and reaching has isolated effect on magnetic.
Table two
The present invention is based on proposition; The Ji Bushi free energy of copper oxide compound: Cu-Ti-O, Cu-Ta-O, Cu-Cr-O, Cu-Nb-O, Cu-Y-O is lower than cobalt oxide compound Co-Ti-O, Co-Ta-O, Co-Cr-O, Co-Nb-O, Co-Y-O, and copper oxide compound: Cu-Ti-O, Cu-Ta-O, Cu-Cr-O, Cu-Nb-O, Cu-Y-O are paramagnetic or diamagnetism; So target of the present invention is design axle center: CoPt-CuO-TiO with the cupric oxide
2, CoPt-CuO-Ta
2O
5, CoPt-CuO-Nb
2O
5, CoPt-CuO-Cr
2O
3, CoPt-CuO-Y
2O
3Deng recording layer material as magnetic recording medium.
Shown in table two; Can add again in the above-mentioned CoPt-base and contain Cr or B atom; Meaning i.e. this target; Its moity system is to add oxide material again in the main magnetic pipe recording material by CoPt-base or CoCrPt-base or CoCrPtB-base; Form the main raw composition of this target: CoPt-oxide compound or CoCrPt-oxide compound or CoCrPtB-oxide compound, oxide compound wherein are titanium oxide, chromic oxide, tantalum oxide, niobium oxides, yttrium oxide, zirconium white, one of them person of hafnia or one of them above person, and with the formed oxide composition of cupric oxide.
As shown in Figure 4; Cu atom in the cupric oxide that is added in the above-mentioned various target can or let the Co atom be difficult for forming compound with A-O with Co atom refoulement magnetic-particle; So its grain boundary oxide of film behind the sputter will have preferable uncouple combination and segregation effect; Can effectively improve the signal noise ratio of the recording layer material of this magnetic recording medium, and must not use very many oxide compounds.
Blanket above-mentioned; The recording layer material of magnetic recording medium of the present invention uses the target that contains cupric oxide in the sputter process; The advantage that can obtain has: the required thickness of particle grain boundary layer that can deperm, and it is less to mean oxide content contained in the sputtered target material, can make sputter process comparatively stable; In case the thickness of magnetic-particle grain boundary layer reduces, during then identical bit length, the volume of magnetic-particle is bigger; This moment, thermostability was preferable; Meaning is the size of magnetic-particle when the same, and then the recording density of this recording layer can up promote, and can improve the recording capacity of whole Storage Media.
Claims (5)
1. a target is characterized in that, this target is formed by adding oxide composition in master's the material again with CoPt or CoCrPt or CoCrPtB; Wherein this oxide composition includes cupric oxide (CuO) and is selected from by at least one of the following group that constitutes: titanium oxide, chromic oxide, tantalum oxide, niobium oxides, yttrium oxide, zirconium white, hafnia with and etc. combination.
2. target as claimed in claim 1 is characterized in that, further includes silicon oxide in this oxide composition.
3. the recording layer material of a magnetic record medium is characterized in that, the recording layer material of this magnetic record medium is to be formed by claim 1 or 2 described target institute sputters.
4. the recording layer material of magnetic record medium as claimed in claim 3 is characterized in that, the recording layer material of this magnetic record medium is the recording layer material that is used for hard disc.
5. the recording layer material of magnetic record medium as claimed in claim 3 is characterized in that, the recording layer material of this magnetic record medium is to be used for rectilinear recording medium.
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|---|---|---|---|
| CN2010105378259A CN102465265A (en) | 2010-11-10 | 2010-11-10 | Target material and its application in recording layer material of magnetic recording media |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105378259A CN102465265A (en) | 2010-11-10 | 2010-11-10 | Target material and its application in recording layer material of magnetic recording media |
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| CN102465265A true CN102465265A (en) | 2012-05-23 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103774100A (en) * | 2012-10-22 | 2014-05-07 | 中环股份有限公司 | Sputtering target and recordable optical recording media |
| CN109819662A (en) * | 2017-09-21 | 2019-05-28 | Ｊｘ金属株式会社 | Sputter target, the manufacturing method of laminated film, laminated film and magnetic recording medium |
| CN111788332A (en) * | 2018-03-01 | 2020-10-16 | 三菱综合材料株式会社 | Cu-Ni alloy sputtering target |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0350806A (en) * | 1989-07-19 | 1991-03-05 | Tdk Corp | Perpendicular magnetic film |
| CN101372038A (en) * | 2007-08-20 | 2009-02-25 | 贺利氏有限公司 | Homogenous granulated metal based and metal-ceramic based powders |
-
2010
- 2010-11-10 CN CN2010105378259A patent/CN102465265A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0350806A (en) * | 1989-07-19 | 1991-03-05 | Tdk Corp | Perpendicular magnetic film |
| CN101372038A (en) * | 2007-08-20 | 2009-02-25 | 贺利氏有限公司 | Homogenous granulated metal based and metal-ceramic based powders |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103774100A (en) * | 2012-10-22 | 2014-05-07 | 中环股份有限公司 | Sputtering target and recordable optical recording media |
| CN109819662A (en) * | 2017-09-21 | 2019-05-28 | Ｊｘ金属株式会社 | Sputter target, the manufacturing method of laminated film, laminated film and magnetic recording medium |
| CN109819662B (en) * | 2017-09-21 | 2021-11-23 | Ｊｘ金属株式会社 | Sputtering target, method for producing laminated film, and magnetic recording medium |
| CN111788332A (en) * | 2018-03-01 | 2020-10-16 | 三菱综合材料株式会社 | Cu-Ni alloy sputtering target |
| CN111788332B (en) * | 2018-03-01 | 2021-08-06 | 三菱综合材料株式会社 | Cu-Ni alloy sputtering target |
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Application publication date: 20120523 |